Heating pipe for vacuum environment

Abstract

The utility model discloses a heating pipe for a vacuum environment. Comprising a heating tube body with one open end and one closed end, a ceramic feed-through connector hermetically arranged at the end part of the heating tube body, a heating wire arranged in the heating tube body, a positive wire and a negative wire which are electrically connected with the heating wire and the ceramic feed-through connector, and a lead electrically connected with the positive wire and the negative wire, a sealing connecting pipe in sealing connection with the ceramic feed-through connector is further arranged, the sealing connecting pipe is filled with insulating ceramic powder, the end of the sealing connecting pipe is in sealing connection with a sealing cover, a wire pipe channel for a lead to penetrate through is formed in the sealing cover, and the lead is in sealing connection with the ceramic feed-through device and the sealing cover. A unique multi-layer sealing design is adopted, the air tightness in the pipe is enhanced, and the pipe can be stably heated to 600 DEG C or above to work in a vacuum environment; the arcing phenomenon between the leads in the vacuum environment is further isolated by sealing the connecting pipe; and the sealing connecting piece is connected with the sealing cover, so that later-stage replacement and maintenance of components in the heating area are facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of electric heating, and particularly relates to a heating tube for a vacuum environment. Background Art

[0002] A heating tube is a device that consumes electrical energy and converts it into heat energy to heat the material to be heated. The electric heating element is enclosed in a protective sleeve. After being energized and heated, the heat is indirectly radiated to the furnace lining and the workpiece to be heated through the sleeve. In some semiconductor manufacturing processes, the unstable temperature of the gas in the heating environment will seriously affect the characteristics of the product, resulting in a decrease in the reliability and performance of the product, and the production efficiency will also be affected. Therefore, it is necessary to make the heating in a vacuum environment to reduce the influence of the gas temperature on the product.

[0003] The heating tube in a vacuum environment is different from an ordinary heating tube. In order to isolate the air pressure between the inside of the heating tube and the vacuum environment and isolate the arcing phenomenon between the positive and negative wires inside the heating tube, the heating tube needs to be sealed. Summary of the Invention

[0004] In view of this, the purpose of the utility model is to provide a heating tube for a vacuum environment.

[0005] In order to solve the above technical problems, the technical solution of the utility model is: a heating tube for a vacuum environment, comprising a heating tube body with one end open and one end closed, a ceramic feedthrough connector sealed at the end of the heating tube body, a heating wire arranged in the heating tube body, a positive wire and a negative wire electrically connected to the heating wire and the ceramic feedthrough connector, and a lead wire electrically connected to the positive wire and the negative wire, characterized in that: a sealed connecting pipe sealedly connected to the ceramic feedthrough connector is further provided, the sealed connecting pipe is filled with insulating ceramic powder, a sealed cover is sealedly connected to the end of the sealed connecting pipe, a wire pipe channel for inserting the lead wire is formed on the sealed cover, and the lead wire is sealedly connected to the ceramic feedthrough and the sealed cover.

[0006] Preferably, an extension tube connected to the sealed cover is further included, and the lead wire is inserted into the extension tube.

[0007] Further, a sealing connection member is further provided between the extension tube and the sealed cover, one end of the sealing connection member is connected to the extension tube, and the other end is bolted to the sealed cover.

[0008] Further, a through hole is formed in the middle of the sealing connection member, and the lead wire is inserted through the through hole; outer grooves not communicating with the through hole are formed on both sides of the sealing connection member, and the sealing connection member and the sealed cover are bolted through the outer grooves.

[0009] Further, an elbow and a handle tube connected to the elbow are arranged at the rear of the extension tube, and the lead wire sequentially passes through the extension tube, the elbow and the handle tube.

[0010] Further, a connecting wire is arranged at the outlet of the handle tube, the connecting wire is electrically connected to the lead wire, and a wire sleeve made of PTFE and a corrugated tube made of stainless steel are arranged outside the connecting wire.

[0011] Preferably, the open end of the heating tube body is hermetically filled with a glass material, and a 4j29 kovar alloy material is used at the sealing part of the ceramic feedthrough connector.

[0012] The technical effects of the present utility model are mainly reflected in the following aspects: adopting a unique multi-layer sealing design to enhance the airtightness inside the tube, and it can be stably heated to above 600 °C for operation in a vacuum environment (≤0.013 Pa); further isolating the arcing phenomenon between the lead wires in the vacuum environment through the sealed connecting pipe; the connection between the sealed connecting piece and the sealed cover facilitates the replacement and maintenance of the components in the heating area in the later stage. Description of the Drawings

[0013] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0014] Figure 2 is a schematic diagram of the overall exploded structure of the present utility model;

[0015] Figure 3 is a schematic diagram of the overall sectional structure of the present utility model;

[0016] Figure 4 is a schematic diagram of the overall sectional exploded structure of the present utility model;

[0017] Figure 5 is a schematic diagram of the end face structure of the sealed cover of the present utility model;

[0018] Figure 6 is a schematic diagram of the sealed connecting piece structure of the present utility model.

[0019] 1 - heating tube body; 2 - ceramic feedthrough connector; 3 - lead wire; 3a - positive wire 3a; 3b - negative wire; 4 - sealed connecting pipe; 5 - sealed cover; 51 - pipeline channel; 52 - outer slot hole; 6 - extension tube; 7 - sealed connecting piece; 71 - through hole; 72 - outer groove; 73 - screw hole; 8 - elbow; 9 - handle tube; 10 - connecting wire. Detailed Embodiments

[0020] The following further details the specific embodiments of the present utility model in conjunction with the drawings, so that the technical solutions of the present utility model are easier to understand and master. Embodiment

[0021] According to Figure 1-2 As shown, a heating tube for a vacuum environment includes a heating tube body 1 with one end open and one end closed, a ceramic feedthrough connector 2 hermetically arranged at the end of the heating tube body 1, a heating wire arranged in the heating tube body 1, a positive wire 3a and a negative wire 3b electrically connected to the heating wire and the ceramic feedthrough connector 2, and a lead 3 electrically connected to the positive wire 3a and the negative wire 3b. The lead 3 is an armored wire.

[0022] The first layer of sealing: after the heating wire in the heating tube body 1 is wound, the positive wire 3a and the negative wire 3b can be electrically connected to the lead 3. After processes such as moisture removal and drying, a high-temperature liquid glass material is used to perform the first layer of sealing at the open end of the heating tube body 1 to achieve a preliminary sealing effect. The lead 3 extends out from the first layer of sealing.

[0023] The second layer of sealing: the heating tube body 1 is laser welded to the ceramic feedthrough connector 2 made of 4j29 kovar alloy at the opening. Since the high-temperature expansion coefficient of the 4j29 kovar alloy material is close to that of glass, the sealing performance between the heating tube body 1 and the ceramic feedthrough connector 2 can be ensured during high-temperature operation. The lead 3 passes through the hole of the ceramic feedthrough 2 and is laser welded and sealed with it.

[0024] The third layer of sealing: a sealing connecting pipe 4 laser welded to the ceramic feedthrough connector 2 is also provided. The sealing connecting pipe 4 is filled with insulating ceramic powder. The end of the sealing connecting pipe 4 is laser welded to the sealing cover 5. A wire pipe channel 51 through which the lead 3 is inserted is formed on the sealing cover 5. After the lead 3 passes through the wire pipe channel 51, it is laser welded and sealed with it. The sealing connecting pipe 4 can further isolate the arcing phenomenon between the leads 3 in a vacuum environment.

[0025] The above is the heating area part of the heating tube. The non-heating area part further includes an extension tube 6 connected to the sealing cover 5. The lead 3 is inserted in the extension tube 6. The extension tube 6 is used to isolate the heating area from the equipment that is not resistant to high temperatures in the non-heating area.

[0026] A sealing connector 7 is also provided between the extension tube 6 and the sealing cover 5. One end of the sealing connector 7 is fixedly welded to the extension tube 6, and the other end is bolted to the sealing cover 5. Specifically, a through hole 71 is formed in the middle of the sealing connector 7, a lead wire 3 is inserted through the through hole 71, outer grooves 72 that are not communicated with the through hole 71 are formed on both sides of the sealing connector 7, screw holes 73 for bolts to pass through are formed on the side walls of the outer grooves 72, an outer slot hole 52 for bolt connection with the sealing connector 7 is formed on the outer side of the end of the sealing cover 5, and after the bolt passes through the screw hole in the outer groove 72, it is fixed in the outer slot hole 52 of the sealing cover 5, so that the sealing connector 7 and the sealing cover 5 are bolted together. The bolt connection between the sealing connector 7 and the sealing cover 5 facilitates the replacement and maintenance of the components in the heating area in the later stage. During replacement, the heating tube body 1, the ceramic feedthrough 2, the sealed connecting pipe 4, the sealing cover 5 and the lead wire 3 can be directly removed and replaced together.

[0027] A bend 8 and a handle tube 9 connected to the bend 8 are provided at the rear of the extension tube 6, and the lead wire 3 passes through the extension tube 6, the bend 8 and the handle tube 9 in sequence.

[0028] A connecting wire is provided at the outlet of the handle tube, the connecting wire is electrically connected to the lead wire 3, and a wire sleeve made of PTFE and a corrugated pipe made of stainless steel are provided outside the connecting wire.

[0029] The above-mentioned sealing process is carried out in a vacuum environment. By adopting a unique three-layer sealing design, the airtightness inside the tube is enhanced, and it can be stably heated to above 600°C under a vacuum environment (≤0.013 Pa) for operation.

[0030] After testing, the heating tube in this application can achieve a service life of more than 35,000 hours in a vacuum environment; it meets all electrical performance requirements after 48 hours of moisture environment testing; it can pass the high-pressure RGA test in the vacuum chamber, and the stable rare gas volume in the vacuum meets the technical specifications; after heating to 600°C in the atmospheric environment and maintaining it stably for 24 hours, and removing the oxide layer after completion, the electrical performance still meets the requirements.

Claims

1. A heating tube for use in a vacuum environment, comprising a heating tube body with one end open and the other end closed, a ceramic feedthrough connector sealed at the end of the heating tube body, a heating wire arranged in the heating tube body, a positive wire and a negative wire electrically connected to the heating wire and the ceramic feedthrough connector, and a lead wire electrically connected to the positive wire and the negative wire, characterized in that: A sealing docking tube is also provided which is sealed and connected to the ceramic feed-through connector. The sealing docking tube is filled with insulating ceramic powder. The end of the sealing docking tube is sealed and connected to a sealing cover. A wire tube channel for inserting the lead is formed on the sealing cover. The lead is sealed and connected to the ceramic feed-through and the sealing cover.

2. A heating tube for use in a vacuum environment according to claim 1, characterized in that: It also includes an extension tube connected to the sealing cover, and the lead wire is inserted into the extension tube.

3. A heating tube for use in a vacuum environment according to claim 2, characterized in that: A sealing connector is also provided between the extension tube and the sealing cover, one end of the sealing connector is connected to the extension tube, and the other end is connected to the sealing cover bolt.

4. A heating tube for use in a vacuum environment according to claim 3, characterized in that: A through hole is formed in the middle of the sealing connector, and a lead is inserted into the through hole; external grooves that are not connected to the through hole are formed on both sides of the sealing connector, and the sealing connector and the sealing cover are connected by bolts in the external grooves.

5. A heating tube for use in a vacuum environment according to any one of claims 2 to 4, characterized in that: A handle tube connected to an elbow and the elbow is arranged at the rear of the extension tube, and the lead wire passes through the extension tube, the elbow and the handle tube in sequence.

6. A heating tube for use in a vacuum environment according to claim 5, characterized in that: A connecting wire is arranged at the outlet of the handle tube, the connecting wire is electrically connected to the lead wire, and a wire sleeve made of PTFE and a corkscrew tube made of stainless steel are arranged outside the connecting wire.

7. The heating tube for use in a vacuum environment according to claim 1, characterized in that: The open end of the heating tube body is sealed and filled with glass material, and the sealing end of the ceramic feed-through connector is made of 4j29 Kovar alloy material.

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