Sheet quality inspection equipment and sheet production line

Abstract

The utility model discloses slice quality inspection equipment and a slice production line. The slice quality inspection equipment comprises a controller, an image collector and a light source. The image collector is electrically connected with the controller, and the light source is used for emitting light to the thin sheet. Wherein the sheet quality inspection equipment is configured in a manner that after the light source emits light to the sheet, the image collector collects an image of the surface of the sheet and transmits the image to the controller, and the controller processes data and performs quality inspection on the sheet. The sheet is detected by arranging the image collector and the controller, and the light source is arranged to emit light to the sheet to be detected, so that the brightness is improved, the influence of the surrounding environment reflected on the sheet on the collected image is reduced, the accuracy of the collected image is improved, the detection precision is improved, and the yield and the detection efficiency of the sheet are improved.

Description

Technical Field

[0001] The present application relates to the field of glass detection technology, and in particular to a thin film quality inspection device and a thin film production line. Background Art

[0002] In the production process, cracked or chipped crystal slices often appear, and the possibility of breakage is high. If the crystal slice is broken in the equipment, its fragments will contaminate and damage the adjacent crystal slices. At the same time, if the crystal slice is broken during the process, its fragments will pollute the process environment.

[0003] CN112269257A discloses a thin film transistor quality inspection device, which structure includes an eyepiece, a connecting plate, a support seat, an operating table, and an objective lens. The eyepiece is embedded in the upper end position of the support seat, the connecting plate is movably engaged with the support seat, the operating table and the support seat are welded, and the objective lens is installed at the bottom position of the connecting plate. The thin film transistor on the operating table generates a reverse thrust on the tube body, which can make the telescopic frame shrink upward along the upper connecting frame, so that the telescopic frame can buffer the force of the objective lens directly pressing the thin film transistor, and through the continued downward pressure of the objective lens, the outer swing plate can swing outward along the connecting ring, so that the outer swing plate can protect the thin film transistor while flattening the thin film transistor on the operating table, and the suction plate can be squeezed by the inner wall of the outer ring and the pressure on the suction plate by the gravity ball, so that the suction plate can generate adsorption force on the inner side of the outer ring, thereby greatly slowing down the swing reset speed of the outer swing plate.

[0004] Therefore, how to detect damaged crystal slices through slice quality inspection equipment has become an urgent problem to be solved. Utility Model Content

[0005] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a thin film quality inspection device and a thin film production line, which improves the yield rate and inspection efficiency of the thin films.

[0006] In a first aspect, an embodiment of the present application provides a thin film quality inspection device, comprising a controller, an image collector and a light source. The image collector is electrically connected to the controller, and the light source is used to emit light to the thin film. The thin film quality inspection device is configured such that after the light source emits light to the thin film, the image collector collects an image of the surface of the thin film and transmits it to the controller, and the controller processes the data and performs quality inspection on the thin film.

[0007] The thin sheet is inspected by setting an image collector and a controller, and a light source is set to emit light to the thin sheet to be inspected, so as to increase the brightness and reduce the influence of the surrounding environment reflection on the thin sheet on the collected image, thereby improving the accuracy of the collected image and the accuracy of the detection, thereby improving the yield rate and detection efficiency of the thin sheet.

[0008] In some embodiments, the light source is provided with a gear switch for adjusting the intensity of light emitted by the light source.

[0009] In some embodiments, the thin film quality inspection equipment also includes a cover body, a bottom wall, a side wall and a top wall, the number of the side walls is multiple, one end of the multiple side walls is arranged around the bottom wall, and the other end of the multiple side walls is arranged around the top wall, the bottom wall, the side wall and the top wall jointly define a accommodating cavity for accommodating the thin film, the bottom wall is used to place the thin film, and the light source and the image collector are both arranged in the accommodating cavity.

[0010] In some embodiments, there is a first distance L between the image collector and the bottom wall, which satisfies the condition: 400mm≤L≤800mm.

[0011] In some embodiments, in the direction of gravity, the image collector coincides with a center line of the bottom wall.

[0012] In some embodiments, the cover is made of metal alloy.

[0013] In some embodiments, the inner wall surface of the cover body is a frosted surface.

[0014] In some embodiments, the sheet quality inspection device further includes an air filter, and the air filter is disposed in the containing cavity to absorb impurities in the containing cavity.

[0015] In some embodiments, the sheet quality inspection device further includes a display, which is electrically connected to the controller and is used to display the image transmitted by the image collector.

[0016] In a second aspect, an embodiment of the present application provides a thin film production line, comprising any of the thin film quality inspection devices described above.

[0017] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0019] Figure 1 It is a schematic diagram of the thin film quality inspection equipment;

[0020] Figure 2 for Figure 1 Schematic diagram of the light source.

[0021] Reference numerals: thin sheet quality inspection device 1; thin sheet 2;

[0022] Controller 10 , image collector 20 , light source 30 , gear switch 31 , cover body 40 , bottom wall 41 , side wall 42 , top wall 43 , air filter 50 , display 60 , gravity direction Y. DETAILED DESCRIPTION

[0023] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0024] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0025] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0026] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0027] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0028] Please refer to Figure 1 , Figure 1 Schematic diagram of thin film quality inspection equipment.

[0029] The embodiment of the present application provides a sheet quality inspection device 1, which includes a controller 10, an image collector 20 and a light source 30. The image collector 20 is electrically connected to the controller 10, and the light source 30 is used to emit light to the sheet 2. The sheet quality inspection device 1 is configured such that after the light source 30 emits light to the sheet 2, the image collector 20 collects an image of the surface of the sheet 2 and transmits it to the controller 10, and the controller 10 processes the data and performs quality inspection on the sheet 2.

[0030] In some embodiments, the image collector 20 may be a CCD camera, a lens, or the like.

[0031] In some embodiments, the controller 10 may be a computer or other computing device equipped with CCD software. The controller 10 may also be a CCD image sensor to convert light images into digital signals.

[0032] In some embodiments, the image collector 20 is electrically connected to the controller 10 , that is, signal-connected, so that the image signal collected by the image collector 20 can be transmitted to the controller 10 .

[0033] In some embodiments, the connection may be via a cable connection.

[0034] In some embodiments, the sheet quality inspection device 1 can detect the flatness of the surface to be inspected of the sheet 2 through the controller 10 by using a CCD camera.

[0035] In some embodiments, the thin slice 2 may be a semiconductor thin slice 2 , a crystal thin slice 2 , a pattern wafer, etc.

[0036] In some embodiments, when inspecting the semiconductor wafer 2, the wafer quality inspection device 1 can extract the circular edge and the circular internal crack contour in the image, so as to detect the damage and cracks at the edge of the wafer 2. Figure 1 This is a detection image of the semiconductor wafer 2.

[0037] In some embodiments, when inspecting patterned chips, the thin film quality inspection equipment 1 can evenly illuminate the surface pattern of the patterned product, divide it into multiple small pattern blocks according to the different characteristics of the surface pattern, establish a model for qualified products, and then judge whether the inspected product is qualified by comparing the similarity between each small pattern block and the model of the qualified product.

[0038] The surface of the sheet 2 can reflect light, and the surrounding environment is reflected on the surface of the sheet 2. When the detection device is used for detection, the image reflected on the surface of the sheet 2 will affect the detection effect. Therefore, a light source 30 is provided to emit light to the surface to be detected of the sheet 2, thereby reducing the influence of the surrounding environment on the detection of the sheet 2.

[0039] In some embodiments, the light source 30 may be an incandescent lamp capable of emitting uniform light.

[0040] The image collector 20 and the controller 10 are provided to detect the sheet 2, and the light source 30 is provided to emit light to the sheet 2 to be detected, so as to increase the brightness, reduce the influence of the surrounding environment reflected on the sheet 2 on the collected image, improve the accuracy of the collected image, and improve the accuracy of the detection, thereby improving the yield rate and detection efficiency of the sheet 2.

[0041] Please refer to Figure 1 and Figure 2 , Figure 2 for Figure 1 In some embodiments, the light source 30 is provided with a gear switch 31 for adjusting the intensity of the light emitted by the light source 30 .

[0042] In some embodiments, the gear switch 31 may be provided with four gears, and the adjustment of the gears may control the light intensity by changing the number of working lamp tubes of the light source 30 .

[0043] By setting the gear switch 31, the intensity of the light is adjusted so that the light source 30 emits more suitable light, thereby improving the accuracy of detection.

[0044] Please refer to Figure 1 In some embodiments, the thin film quality inspection device 1 also includes a cover body 40, the cover body 40 includes a bottom wall 41, a side wall 42 and a top wall 43, the number of the side walls 42 is multiple, one end of the multiple side walls 42 is arranged around the bottom wall 41, and the other end of the multiple side walls 42 is arranged around the top wall 43. The bottom wall 41, the side wall 42 and the top wall 43 jointly define a accommodating cavity for accommodating the thin film 2, the bottom wall 41 is used to place the thin film 2, and the light source 30 and the image collector 20 are both arranged in the accommodating cavity.

[0045] In some embodiments, the cover body 40 can be integrally formed.

[0046] In some embodiments, the bottom wall 41 , the side wall 42 and the top wall 43 can be formed separately and then connected by welding.

[0047] In some embodiments, the cover body 40 may be a cube or a cuboid, wherein the side lengths of the bottom wall 41 and the top wall 43 may be the same as the diameter of the sheet 2 or slightly larger than the diameter of the sheet 2 .

[0048] In some embodiments, the cover body 40 may be a cylinder, and the diameters of the bottom wall 41 and the top wall 43 may be the same as or slightly larger than the diameter of the sheet 2 .

[0049] In some embodiments, the sheet 2 to be inspected may be disposed on the bottom wall 41 , and the sheet 2 may be limited by the side wall 42 .

[0050] In some embodiments, the sheet 2 to be detected may be disposed on the bottom wall 41 , and a limiting groove may be disposed on the bottom wall 41 to limit the sheet 2 .

[0051] Figure 1 In some embodiments, the thin sheet 2 has diffuse reflection characteristics. After the thin sheet 2 is arranged on the bottom wall 41, the light source 30 emits light to the thin sheet 2, and the thin sheet 2 reflects the light. The reflected light forms a reflection area in the accommodating cavity. In order to reduce the influence of light reflection on the light irradiated by the light source 30, the light source 30 can be arranged in a non-reflection area in the accommodating cavity.

[0052] By providing the cover body 40 to cover the sheet 2, the influence of the surrounding environment on the detection of the sheet 2 is further reduced, and the accuracy of the detection is improved.

[0053] Please refer to Figure 1 In some embodiments, there is a first distance L between the image collector 20 and the bottom wall 41, which satisfies the condition: 400 mm ≤ L ≤ 800 mm.

[0054] In some embodiments, the thickness of the sheet 2 is relatively small, and the distance between the image collector 20 and the bottom wall 41 is also the distance between the image collector 20 and the sheet 2 to be detected.

[0055] In some embodiments, the diameter of the sheet 2 may be 300 mm. In order to enable the image collector 20 to more comprehensively collect the image of the sheet 2 , a certain distance is provided between the image collector 20 and the sheet 2 .

[0056] In some embodiments, the first distance L may be 400 mm, 500 mm, 600 mm, 700 mm, 800 mm, etc.

[0057] In some embodiments, the first distance L may be 400 mm.

[0058] By setting the image collector 20 at a certain distance from the bottom wall 41 , the comprehensiveness and accuracy of the image collected by the image collector 20 are improved, and the accuracy of the sheet 2 detection is improved.

[0059] Please refer to Figure 1 In some embodiments, in the gravity direction Y, the image collector 20 coincides with the center line of the bottom wall 41 .

[0060] In some embodiments, the direction of gravity can be represented by the direction indicated by the letter Y in the figure.

[0061] In some embodiments, the sheet 2 is disposed on the bottom wall 41 , and the sheet 2 is limited by the bottom wall 41 , and the center line of the bottom wall 41 is also the center line of the sheet 2 .

[0062] By arranging the image collector 20 on the center line of the bottom wall 41 , the comprehensiveness and accuracy of the image collected by the image collector 20 are improved, and the accuracy of the sheet 2 detection is improved.

[0063] In some embodiments, the cover body 40 is made of metal alloy.

[0064] In some embodiments, the cover body 40 may be made of aluminum alloy.

[0065] By setting the material of the cover body 40 to be aluminum alloy, on the one hand, the reflection of the external environment on the surface of the thin sheet 2 to be detected is reduced, reducing the impact of detecting the thin sheet 2; on the other hand, the cover body 40 has a certain strength, reducing the risk of external damage to the thin sheet 2.

[0066] In some embodiments, the inner wall surface of the cover body 40 is a frosted surface.

[0067] By setting the inner wall surface of the cover body 40 to be a frosted surface, the risk of the light of the light source 30 being reflected by the cover body 40 is reduced, thereby improving the accuracy of detection.

[0068] Please refer to Figure 1 In some embodiments, the sheet quality inspection device 1 further includes an air filter 50, and the air filter 50 is disposed in the accommodating chamber to absorb impurities in the accommodating chamber.

[0069] In some embodiments, the air filter 50 may be disposed on the side wall 42 or the top wall 43 .

[0070] By providing the air filter 50 , the risk of impurities adhering to the surface of the sheet 2 and affecting the detection of the sheet 2 is reduced, thereby improving the accuracy of the detection of the sheet 2 .

[0071] Please refer to Figure 1 In some embodiments, the sheet quality inspection device 1 further includes a display 60 , which is electrically connected to the controller 10 and is used to display the image transmitted by the image collector 20 .

[0072] In some embodiments, the display 60 may be connected to the controller 10 via a cable.

[0073] The image transmitted by the image collector 20 is displayed on the display 60, which makes it easier for operators to observe the detected image and improves the accuracy of the detection.

[0074] The embodiment of the present application further provides a thin film 2 production line, comprising the thin film quality inspection device 1 of any of the above embodiments.

[0075] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A thin film quality inspection device, characterized in that: It includes a controller, an image collector and a light source, wherein the image collector is electrically connected to the controller, and the light source is used to emit light to the sheet; Wherein, the sheet quality inspection device is configured such that after the light source emits light to the sheet, the image collector collects an image of the sheet surface and transmits it to the controller, and the controller processes the data and performs quality inspection on the sheet.

2. The sheet quality inspection device according to claim 1, characterized in that: The light source is provided with a gear switch for adjusting the intensity of the light emitted by the light source.

3. The sheet quality inspection device according to claim 1, characterized in that: The thin film quality inspection equipment also includes a cover body, a bottom wall, a side wall and a top wall of the cover body, the number of the side walls is multiple, one end of the multiple side walls is arranged around the bottom wall, and the other end of the multiple side walls is arranged around the top wall, the bottom wall, the side wall and the top wall jointly define a accommodating cavity for accommodating the thin film, the bottom wall is used to place the thin film, and the light source and the image collector are both arranged in the accommodating cavity.

4. The sheet quality inspection device according to claim 3, characterized in that: There is a first distance L between the image collector and the bottom wall, which satisfies the condition: 400mm≤L≤800mm.

5. The sheet quality inspection device according to claim 4, characterized in that: In the direction of gravity, the image collector coincides with a center line of the bottom wall.

6. The sheet quality inspection device according to claim 3, characterized in that: The cover body is made of metal alloy.

7. The sheet quality inspection device according to claim 3, characterized in that: The inner wall surface of the cover body is a frosted surface.

8. The sheet quality inspection device according to claim 3, characterized in that: The sheet quality inspection device further includes an air filter, which is arranged in the accommodating chamber to absorb impurities in the accommodating chamber.

9. The sheet quality inspection device according to claim 1, characterized in that: The sheet quality inspection device further comprises a display, which is electrically connected to the controller and is used to display the image transmitted by the image collector.

10. A sheet production line, characterized in that: It comprises the thin film quality inspection device as described in any one of claims 1 to 9.

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