Test head quick-change docking mechanism for semiconductor test equipment

Abstract

The utility model relates to a test head quick-change docking mechanism for semiconductor test equipment. The device comprises a rotary driving platform, a mounting plate arranged on the rotary driving platform, two sets of telescopic air cylinder assemblies arranged on the mounting plate, two long strip blocks arranged at the bottom of the mounting plate, sliding grooves formed in the two long strip blocks, a fixing block sliding between the two long strip blocks, an open groove formed in the top face of the fixing block and two sets of plug pin assemblies arranged on the top face of the mounting plate. The quick fixing assembly is arranged in the fixing block; the two sets of telescopic air cylinder assemblies can drive the two sets of plug pin assemblies and the rapid fixing assemblies correspondingly. The driving end of the rapid fixing assembly is movably arranged at the driving end of the telescopic air cylinder assembly in a sleeving mode. The telescopic air cylinder assembly can drive the plug pin assembly to limit the fixing block and drive the rapid fixing assembly to fix the suction head light source upper cover at the same time, installation efficiency is improved, the fixing block and the suction head light source upper cover can be taken down completely or taken down independently, and the suction head light source upper cover can be replaced flexibly.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip testing, and particularly refers to a quick-change docking mechanism for a test head of a semiconductor testing device. Background Art

[0002] A semiconductor chip refers to a semiconductor device that can achieve a certain function by etching and wiring on a semiconductor sheet. With the development of technology, semiconductor chips have been widely used in various electronic products. After a large number of semiconductor chips are completed, it is necessary to test the quality of the chips to screen qualified chips. Therefore, semiconductors are needed. The existing chip handling and testing mechanism mainly includes two parts, one is the positioning seat lower cover mechanism, and the other is the suction head light source upper cover mechanism. However, the installation method of the suction head light source upper cover mechanism on the existing equipment is fixed by screw tightening, which is a dead positioning without floating and adjustment, making the position adjustment difficult, and the guiding mechanism wears out quickly. Moreover, the existing suction head light source upper cover mechanism of the equipment does not have a quick-change function and a centering function, resulting in poor equipment compatibility and large installation and positioning difficulty, which not only reduces the utilization rate of the equipment, but also requires a high precision for the processed parts, increasing the input cost.

[0003] The prior art 202122534989.2 discloses a quick-change docking mechanism for a test head of a semiconductor. Although it solves the above problems, it still needs to be manually inserted and pulled out, and the suction head light source upper cover and the fixed block are still fixed by bolts, which is rather troublesome to disassemble and assemble. Moreover, when replacing the suction head light source upper cover of the same size, it can only be replaced together with the fixed block, and the suction head light source upper cover cannot be replaced alone. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a quick-change docking mechanism for a test head of a semiconductor testing device to overcome the deficiencies of the prior art.

[0005] To achieve the above object, the technical solution adopted by the utility model is as follows: A quick-change docking mechanism for a test head of a semiconductor testing device, comprising a rotary drive platform, a mounting plate arranged on the drive end of the rotary drive platform, two sets of telescopic cylinder assemblies arranged on the top surfaces at both ends of the mounting plate in the length direction on both sides of the rotary drive platform and with the output ends penetrating through the mounting plate, two long strips arranged on both sides of the bottom of the mounting plate in the length direction, two chutes respectively arranged on the mutually facing surfaces of the two long strips, a fixed block sliding on the top surface between the two long strips, a slot arranged in the middle of the top surface of the fixed block along the length direction of the fixed block and with one end sealed and the other end open for avoiding the output ends of the two sets of telescopic cylinder assemblies, two sets of pin assemblies arranged on the top surface of the mounting plate respectively between the two sets of telescopic cylinder assemblies and the rotary drive platform and with the drive ends respectively connected to the output ends of the two sets of telescopic cylinder assemblies for limiting the fixed block, a quick-fixing assembly arranged in the fixed block and with the drive end and the output end respectively located in the slot and at both ends of the fixed block, a suction head light source upper cover with both ends arranged on the output end of the quick-fixing assembly, and a positioning seat lower cover arranged directly below the suction head light source upper cover; the two sets of telescopic cylinder assemblies are such that the output ends can respectively drive the two sets of pin assemblies and the quick-fixing assembly; the drive end of the quick-fixing assembly is movably sleeved on the output ends of the two sets of pin assemblies.

[0006] Preferably, each of the two sets of telescopic cylinder assemblies includes a drive cylinder arranged on the mounting plate and with the output end penetrating through the mounting plate, and a clamping block arranged on the output end of the drive cylinder.

[0007] Preferably, each of the two sets of pin assemblies includes a connecting piece arranged on a section of the output end of the drive cylinder between the two long strips, a first drive rod with one end arranged on the connecting piece and the other end penetrating through the mounting plate to the top, a long strip plate arranged on the end of the first drive rod at the top of the mounting plate along the width direction of the mounting plate, two guide rods arranged on the mounting plate, a first drive plate with both ends respectively sleeved on the two guide rods and arranged along the width direction of the mounting plate, two connecting plates arranged at both ends of the long strip plate and the first drive plate and with both ends respectively hinged to the end faces of both ends of the long strip plate and the first drive plate, two support plates with one end arranged between the long strip plate and the first drive plate on the top of the mounting plate and the other end respectively hinged to the two connecting plates, and a plurality of first pin rods with one end arranged on the surface of the first drive plate facing the mounting plate and the other end penetrating through the mounting plate for inserting into the fixed block.

[0008] Preferably, the quick-fixing component includes an inner cavity disposed within the fixing block and penetrating through both end faces of the fixing block, two extension blocks disposed at the bottoms of both ends of the fixing block, a second driving plate disposed in the inner cavity in a lifting manner and having both ends extending to the top surfaces of the two extension blocks, two second driving rods having one ends respectively disposed on the top surfaces of both ends of the second driving plate and the other ends penetrating through the inner bottom of the slot, a butt joint plate having a hollow top with an avoidance opening for the output end of the avoidance driving cylinder and used for inserting a clamping block and disposed at one end of each of the two second driving rods located within the slot, two limiting plates respectively disposed in a telescopic manner on the end faces of both ends of the two extension blocks and having tops respectively connected to the side faces of both ends of the second driving plate to form a U shape, and a plurality of second insertion rods disposed on one side of the horizontal ends of the two limiting plates facing the bottom surface of the fixing block and used for inserting into the fixing holes at both ends of the upper cover of the suction head light source.

[0009] Preferably, a plurality of the second insertion rods are threadedly connected to one end penetrating through the horizontal ends of the two limiting plates.

[0010] Due to the application of the above technical solution, the present utility model has the following advantages compared with the prior art:

[0011] The utility model can simultaneously drive the pin component to limit the fixing block and drive the quick-fixing component to fix the upper cover of the suction head light source through the telescopic cylinder component, improving the installation efficiency, and the fixing block and the upper cover of the suction head light source can be completely removed, or the upper cover of the suction head light source can be removed alone, and can be flexibly replaced. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The technical solution of the present utility model will be further described below with reference to the drawings:

[0013] FIG Figure 1 is a schematic diagram of the overall structure of the test head quick-change docking mechanism for a semiconductor testing device according to the present utility model;

[0014] FIG Figure 2 is a schematic diagram of the side sectional structure of the test head quick-change docking mechanism for a semiconductor testing device according to the present utility model;

[0015] FIG Figure 3 is a schematic diagram of the partial sectional structure of the end face of the fixing block of the test head quick-change docking mechanism for a semiconductor testing device according to the present utility model.

[0016] Wherein: 1. Rotary drive platform; 2. Telescopic cylinder assembly; 21. Driving cylinder; 22. Block; 3. Long strip; 4. Slide groove; 5. Fixed block; 6. Groove; 7. Pin assembly; 71. Connecting piece; 72. First driving rod; 73. Long strip board; 74. First driving board; 75. Connecting board; 76. Support board; 77. First pin rod; 8. Quick fixing assembly; 81. Inner cavity; 82. Extension block; 83. Second driving board; 84. Second driving rod; 85. Docking board; 86. Limiting board; 87. Second pin rod; 9. Suction head light source upper cover; 10. Positioning seat lower cover; 11. Mounting plate. Detailed implementation mode

[0017] The present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0018] Appendix Figures 1-3 The quick-change docking mechanism of the test head for semiconductor testing equipment described in the present utility model includes a rotary drive platform 1, a mounting plate 11 arranged at the driving end of the rotary drive platform 1, two sets of telescopic cylinder assemblies 2 arranged on the top surfaces at both ends in the length direction of the mounting plate 11 on both sides of the rotary drive platform 1 and with the output ends penetrating through the mounting plate 11, two long strips 3 arranged on both sides of the bottom of the mounting plate 11 in the length direction, two slide grooves 4 respectively arranged on the mutually facing surfaces of the two long strips 3, a fixed block 5 with the top surface sliding between the two long strips 3, a groove 6 arranged in the middle of the top surface of the fixed block 5 along the length direction of the fixed block 5 and with one end sealed and the other end open for avoiding the output ends of the two sets of telescopic cylinder assemblies 2, two sets of pin assemblies 7 arranged on the top surface of the mounting plate 11 respectively between the two sets of telescopic cylinder assemblies 2 and the rotary drive platform 1 and with the driving ends respectively connected to the output ends of the two sets of telescopic cylinder assemblies 2 for limiting the fixed block 5, a quick fixing assembly 8 arranged in the fixed block 5 and with the driving end and the output end respectively located in the groove 6 and at both ends of the fixed block 5, a suction head light source upper cover 9 with both ends arranged on the output end of the quick fixing assembly 8, and a positioning seat lower cover 10 arranged directly below the suction head light source upper cover 9; the two sets of telescopic cylinder assemblies 2 are such that the output ends can respectively drive the two sets of pin assemblies 7 and the quick fixing assembly 8; the driving end of the quick fixing assembly 8 is movably sleeved on the output ends of the two sets of pin assemblies 7; both sets of telescopic cylinder assemblies 2 include a driving cylinder 21 arranged on the mounting plate 11 and with the output end penetrating through the mounting plate 11, and a block 22 arranged on the output end of the driving cylinder 21.

[0019] Preferably, each of the two sets of the plug components 7 includes a connecting member 71 disposed on a section of the output end of the driving cylinder 21 between the two long strips 3, a first driving rod 72 having one end disposed on the connecting member 71 and the other end passing through the mounting plate 11 to the top, a long strip plate 73 placed along the width direction of the mounting plate 11 at one end of the first driving rod 72 located at the top of the mounting plate 11, two guide rods disposed on the mounting plate 11, a first driving plate 74 sleeved at both ends on the two guide rods and placed along the width direction of the mounting plate 11, two connecting plates 75 disposed at both ends of the long strip plate 73 and the first driving plate 74 and having both ends hinged to the end faces of both ends of the long strip plate 73 and the first driving plate 74 respectively, two support plates 76 having one end disposed between the long strip plate 73 and the first driving plate 74 at the top of the mounting plate 11 and the other end hinged to the two connecting plates 75 respectively, and a plurality of first plug rods 77 having one end disposed on the surface of the first driving plate 74 facing the mounting plate 11 and the other end passing through the mounting plate 11 for inserting into the fixing block 5; the quick fixing component 8 includes a cavity 81 disposed in the fixing block 5 and passing through both end faces of the fixing block 5, two extension blocks 82 disposed at the bottoms of both ends of the fixing block 5, a second driving plate 83 liftably disposed in the cavity 81 and having both ends extending to the top surfaces of the two extension blocks 82, two second driving rods 84 having one end respectively disposed on the top surfaces of both ends of the second driving plate 83 and the other end passing through the inner bottom of the slot 6, a butt plate 85 disposed on one end of each of the two second driving rods 84 located in the slot 6 for the clamping block 22 to insert into and having a hollow top with an avoidance opening for avoiding the output end of the driving cylinder 21, two limiting plates 86 telescopically disposed on the end faces of both ends of the two extension blocks 82 and having their tops connected to the side faces of both ends of the second driving plate 83 to form a U shape, and a plurality of second plug rods 87 disposed on the surface of the horizontal end of each of the two limiting plates 86 facing the bottom surface of the fixing block 5 for inserting into the fixing holes at both ends of the suction head light source upper cover 9.

[0020] Further, the plurality of second plug rods 87 are threadedly connected to one end passing through the horizontal ends of the two limiting plates 86, which is convenient for adjusting the length to prevent jamming of the suction head light source upper cover 9.

[0021] During use: The upper cover 9 of the suction head light source is installed and docked with an external device by rotating the driving platform 1. According to the angle of the whole component, the position and direction of the upper cover 9 of the suction head light source are finely adjusted by the rotating driving platform 1 to align the direction before work. During testing, the device drives the upper cover 9 of the suction head light source to move downward so that the upper cover 9 of the suction head light source is docked with the lower cover 10 of the positioning seat. When replacing the upper cover 9 of the suction head light source of the same size, the driving cylinder 21 is controlled by an external controller. The driving cylinder 21 drives the clamping block 22 to move towards the fixed block 5, and the connecting piece 71 and the docking plate 85 move towards the fixed block 5. Then the connecting piece 71 drives the first driving rod 72 to move towards the fixed block 5. The first driving rod 72 drives the long strip plate 73 to move towards the mounting plate 11. The long strip plate 73 drives one end of the connecting plate 75 to move towards the mounting plate 11. Since the middle part of the support plate 76 is hinged to the connecting plate 75, the other part of the connecting plate 75 tilts up due to the principle of the lever and drives the first driving plate 74 to rise. The first driving plate 74 drives the first pin rod 77 to disengage from the fixed block 5. Immediately, the fixed block 5 is no longer limited. At the same time, the docking plate 85 drives the second driving rod 84 to move towards the inner cavity 81. The second driving rod 84 drives the second driving plate 83 to move towards the bottom of the inner cavity 81. The second driving plate 83 drives the horizontal movement of the limiting plate 86 away from the fixed block 5. Immediately, the upper cover 9 of the suction head light source is loosened. Then the upper cover 9 of the suction head light source is removed, and the upper cover 9 of the suction head light source of the same size is replaced. Then the reset cylinder limits and fixes the upper cover 9 of the suction head light source again. When it is necessary to replace the upper cover 9 of the suction head light source of different sizes, the fixed block 5 is slid out of the chute 4. Immediately, the docking plate 85 also slides out of the clamping block 22. Then the open end of the slot 6 of the new fixed block 5 is aligned with the output end of the driving cylinder 21. Then the fixed block 5 is slid into the chute 4. The docking plate 85 slides along while sliding. When the fixed block 5 slides in place, the docking plate 85 just fits over the clamping block 22. Then the driving cylinder 21 is reset to fix the fixed block 5 and the upper cover 9 of the suction head light source.

[0022] The above is only a specific application example of the present invention, which does not constitute any limitation to the protection scope of the present invention. Any technical solutions formed by equivalent transformation or equivalent substitution fall within the scope of the protection of the rights of the present invention.

Claims

1. A test head quick-change docking mechanism for semiconductor testing equipment, characterized in that: The invention comprises a rotating driving platform, a mounting plate arranged on the driving end of the rotating driving platform, two groups of telescopic cylinder assemblies arranged at the top surfaces of the two ends of the mounting plate in the length direction and located on both sides of the rotating driving platform and whose output ends penetrate the mounting plate, two long strips arranged on both sides of the bottom of the mounting plate in the length direction, two slide grooves respectively arranged on the opposite sides of the two long strips, a fixed block whose top surface slides between the two long strips, a slot arranged in the middle of the top surface of the fixed block and placed along the length direction of the fixed block with one end sealed and the other end open for avoiding the output ends of the two groups of telescopic cylinder assemblies, and two slots respectively arranged on the top surface of the mounting plate at the two ends. There are two groups of pin assemblies for limiting the fixed block between the two telescopic cylinder assemblies and the rotating drive platform, and the driving ends are respectively connected to the output ends of the two telescopic cylinder assemblies, a quick fixing assembly is arranged in the fixed block, and the driving end and the output end are respectively located in the slot and at both ends of the fixed block, a suction head light source upper cover with both ends arranged on the output end of the quick fixing assembly, and a positioning seat lower cover is arranged directly below the suction head light source upper cover; the output ends of the two groups of telescopic cylinder assemblies can respectively drive the two groups of pin assemblies and the quick fixing assembly; the driving end of the quick fixing assembly is movably sleeved on the output ends of the two groups of pin assemblies.

2. The test head quick-change docking mechanism for semiconductor testing equipment according to claim 1, characterized in that: Both sets of telescopic cylinder assemblies include a driving cylinder arranged on a mounting plate and having an output end passing through the mounting plate, and a clamping block arranged on the output end of the driving cylinder.

3. The test head quick-change docking mechanism for semiconductor testing equipment according to claim 1, characterized in that: The two groups of latch assemblies include a connecting piece arranged at a section between the two long strips at the output end of the driving cylinder, a first driving rod with one end arranged on the connecting piece and the other end passing through the mounting plate to the top, a long strip plate arranged on one end of the first driving rod located at the top of the mounting plate and placed along the width direction of the mounting plate, two guide rods arranged on the mounting plate, a first driving plate with both ends respectively sleeved on the two guide rods and placed along the width direction of the mounting plate, two connecting plates arranged at both ends of the long strip plate and the first driving plate and with both ends hinged to the end surfaces of the long strip plate and the first driving plate respectively, two supporting plates with one end arranged on the top of the mounting plate between the long strip plate and the first driving plate and with the other ends respectively hinged to the two connecting plates, and a plurality of first latch rods with one end arranged on a side of the first driving plate facing the mounting plate and the other end passing through the mounting plate for being inserted into the fixed block.

4. The test head quick-change docking mechanism for semiconductor testing equipment according to claim 1, characterized in that: The quick fixing component includes an inner cavity arranged in the fixing block and passing through the end surfaces of both ends of the fixing block, two extension blocks arranged at the bottom of both ends of the fixing block, a second driving plate which is lifted and arranged in the inner cavity and whose two ends extend to the top surfaces of the two extension blocks, two second driving rods whose one ends are respectively arranged on the top surfaces of both ends of the second driving plate and the other ends pass through the bottom of the slot, a docking plate which is respectively arranged on one end of the two second driving rods located in the slot and is used for inserting the card block and has a hollow top with an avoidance port for avoiding the output end of the driving cylinder, two limiting plates which are respectively telescopically arranged on the end surfaces of both ends of the two extension blocks and the tops are respectively connected to the side surfaces of both ends of the second driving plate in a U shape, and a plurality of second latch rods which are arranged on one side of the horizontal end of the two limiting plates facing the bottom surface of the fixing block and are used to be inserted into the fixing holes at both ends of the upper cover of the suction head light source.

5. The test head quick-change docking mechanism for semiconductor testing equipment according to claim 4, characterized in that: A plurality of the second latch rods are threadedly connected at one end to the horizontal ends of the two limit plates.

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