Clamp for embedded sample EBSD (electron back scattered diffraction) analysis
By designing an EBSD analysis fixture for inlaid samples, the problem of sample scratches and contamination during the inlay removal process in the vibration polishing method is solved, and efficient EBSD analysis and accurate results are achieved.
Patent Information
- Application Number
- CN202421994363.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-16
- Publication Date
- 2025-06-27
- Estimated Expiration
- 2034-08-16
AI Technical Summary
The preparation of EBSD samples by vibration polishing may scratch or contaminate the surface of the sample during the removal of the inlay, affecting the EBSD analysis effect.
A clamp for EBSD analysis of inlay samples is designed, including an adjustment ring, a positioning screw, a clamp base and a sample column. The position of the inlay sample is adjusted by the adjustment ring so that the surface to be analyzed is protruded, avoiding the step of removing the inlay material.
No need to remove the inlay, reduce sample scratches and contamination, and improve the resolution rate of EBSD analysis and the accuracy of results.
Smart Images
Figure CN223029493U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of EBSD analysis instruments, and particularly relates to a fixture for inlaying samples for EBSD analysis. Background Art
[0002] The EBSD (Electron Backscattered Diffraction) technology, namely the backscattered electron diffraction technology, is to analyze the diffraction Kikuchi bands excited and formed by irradiating the inclined sample surface with an electron beam, so as to obtain and determine information such as the crystal structure, crystal orientation, phase distribution and identification, grain boundary, and calibration rate analysis of the sample. EBSD requires that the sample surface has no stress layer, no oxide layer, no continuous corrosion pits, is flat, and has a high degree of smoothness and no pollution.
[0003] At present, for the preparation of conventional EBSD samples, methods such as electrolytic polishing, vibratory polishing, and ion polishing are selected, and the analyzed specimens are required to be flat and stress-free. For the vibratory polishing method, the sample needs to use an embedding material to embed one or more samples into a vibratory polishing sample with a size of φ20mm or φ30mm. However, when using EBSD analysis, the embedding material needs to be removed and then placed on the EBSD sample stage for observation and photography. During the process of removing the embedding material, the sample surface may be scratched or contaminated, affecting the EBSD analysis effect of the sample. Therefore, there are some limitations in using the vibratory polishing method to prepare EBSD specimens for EBSD analysis. Summary of the Utility Model
[0004] The purpose of the utility model is to provide a fixture for inlaying samples for EBSD analysis, which solves the problem that when using the vibratory polishing method to prepare EBSD samples, the sample surface may be scratched or contaminated during the process of removing the embedding material, affecting the EBSD analysis effect of the sample.
[0005] The technical solution of the utility model is as follows:
[0006] A fixture for inlaying samples for EBSD analysis, the fixture includes: an adjusting ring, a positioning screw, a fixture base, and a sample column. The specific structure is as follows:
[0007] The inner surface of the semi-circular adjusting ring corresponds to the semi-cylindrical groove of the fixture base up and down to form an inner cavity. The cylindrical inlaid sample is arranged in the inner cavity and matches the shape of the inner cavity. The two ends of the semi-circular adjusting ring are vertically provided with positioning platforms. The two positioning platforms respectively correspond to the upper end faces on both sides of the semi-cylindrical groove of the fixture base and are connected by positioning screws to fix the adjusting ring on the fixture base. The inlaid sample is fixed by the positioning screw. The lower end of the fixture base is provided with a sample column.
[0008] The fixture for EBSD analysis of inlaid samples, the bottom surface of the fixture base is a right-angled structure composed of a front inclined surface and a rear inclined surface. The angle between the front inclined surface and the corresponding horizontal plane or the center line of the inlaid sample is 70°, and the angle between the rear inclined surface and the corresponding horizontal plane or the center line of the inlaid sample is 20°.
[0009] The fixture for EBSD analysis of inlaid samples, the sample column is vertically arranged on the rear inclined surface, so that the angle between the sample column and the horizontal plane or the center line of the inlaid sample is 70°.
[0010] The fixture for EBSD analysis of inlaid samples, the adjusting ring adjusts the position of clamping the inlaid sample, so that the surface to be analyzed of the inlaid sample protrudes from the adjusting ring.
[0011] The fixture for EBSD analysis of inlaid samples, the diameter of the sample column is 3 mm, and the fixture is inserted into the EBSD sample stage of the scanning electron microscope through the sample column.
[0012] The fixture for EBSD analysis of inlaid samples, the EBSD sample stage is a common sample stage for EBSD analysis of inlaid samples.
[0013] The fixture for EBSD analysis of inlaid samples, conductive inlay powder is arranged on the inlaid sample. The diameter of the inlaid sample is smaller than the inner cavity diameter of the fixture, so that there is a gap of 1 - 29 mm between the inlaid sample and the inner cavity, and this gap is filled with inlay powder.
[0014] The advantages and beneficial effects of the present utility model are:
[0015] 1. In order to solve the problem of low resolution rate existing in the traditional method of preparing EBSD samples by vibration polishing, the present utility model designs a fixture for EBSD analysis of inlaid samples, which has the advantages of simple method, strong operability, high sample reproducibility, and can analyze multiple samples on a single inlaid sample.
[0016] 2. The EBSD samples of the present utility model do not need to remove the inlay material, reducing the scratching and contamination of the samples, improving the resolution rate during the test, and improving the accuracy of the test results. Description of the Drawings
[0017] Figure 1 It is the front view schematic diagram of the fixture of the present utility model;
[0018] Figure 2 It is the side view schematic diagram of the fixture of the present utility model;
[0019] Figure 3 It is the top view schematic diagram of the fixture of the present utility model;
[0020] Icon: 1 - Inner cavity; 2 - Adjusting ring (21 - Positioning platform); 3 - Positioning screw; 4 - Fixture base; 5 - Sample column; 6 - Front inclined plane; 7 - Rear inclined plane. Detailed implementation
[0021] As Figure 1 - Figure 2 shown, the present utility model proposes a fixture for inlaying sample EBSD analysis, mainly including: adjusting ring 2, positioning screw 3, fixture base 4, sample column 5, etc. The specific structure is as follows:
[0022] The inner surface of the semi - circular adjusting ring 2 corresponds to the semi - cylindrical groove of the fixture base 4 up and down to form the inner cavity 1. The cylindrical inlay sample (EBSD sample) is arranged in the inner cavity 1 and matches the shape of the inner cavity 1. The two ends of the semi - circular adjusting ring 2 are vertically provided with positioning platforms 21. The two positioning platforms 21 respectively correspond to the upper end faces on both sides of the semi - cylindrical groove of the fixture base 4 and are connected by positioning screws 3 to fix the adjusting ring 2 on the fixture base 4. The positioning screws 3 are used to fix the inlay sample to prevent the inlay sample from slipping out of the inner cavity 1. The position and height of the inlay sample are adjusted by the adjusting ring 2 so that the surface to be analyzed of the inlay sample protrudes from the adjusting ring 2. The lower end of the fixture base 4 is provided with a sample column 5 with a diameter of 3 mm, which is used to insert into the EBSD sample stage of the scanning electron microscope. The EBSD sample stage is a commonly used sample stage for inlay sample EBSD analysis.
[0023] In addition, the bottom surface of the fixture base 4 is a right - angled structure composed of a front inclined plane 6 and a rear inclined plane 7. The angle between the front inclined plane 6 and the corresponding horizontal plane (or the center line of the inlay sample) is 70°, and the angle between the rear inclined plane 7 and the corresponding horizontal plane (or the center line of the inlay sample) is 20°. The sample column 5 is vertically arranged on the rear inclined plane 7, so that the angle between the sample column 5 and the horizontal plane (or the center line of the inlay sample) is 70°, avoiding the problem of image drift during the EBSD detection of the inlay sample.
[0024] When making the inlay sample, a conductive inlay powder is set on the inlay sample. The diameter of the inlay sample is smaller than the diameter of the inner cavity 1 of the fixture, leaving a gap of 1 - 29 mm between the inlay sample and the inner cavity 1. This gap is used to fill the inlay powder.
Claims
1. A fixture for EBSD analysis of mounted samples, characterized in that: The fixture includes: an adjustment ring, a positioning screw, a fixture base, and a sample column. The specific structure is as follows: The inner surface of the semicircular ring-shaped adjustment ring corresponds to the semi-cylindrical groove of the fixture base up and down to form an inner cavity. The cylindrical embedded sample is arranged in the inner cavity and matches the shape of the inner cavity. Positioning platforms are vertically provided at both ends of the semicircular ring-shaped adjustment ring. The two positioning platforms respectively correspond to the upper end surfaces on both sides of the semi-cylindrical groove of the fixture base and are connected by positioning screws to fix the adjustment ring on the fixture base. The embedded sample is fixed by the positioning screws, and a sample column is provided at the lower end of the fixture base.
2. The fixture for EBSD analysis of mounted samples according to claim 1, characterized in that: The bottom surface of the fixture base is a right-angle structure consisting of a front bevel and a rear bevel. The angle between the front bevel and the corresponding horizontal plane or the center line of the mounted sample is 70°, and the angle between the rear bevel and the corresponding horizontal plane or the center line of the mounted sample is 20°.
3. The fixture for EBSD analysis of mounted samples according to claim 2, characterized in that: The sample column is vertically arranged on the rear inclined plane, so that the angle between the sample column and the horizontal plane or the center line of the mounted sample is 70°.
4. The fixture for EBSD analysis of mounted samples according to claim 1, characterized in that: The adjusting ring adjusts the position of the clamped mounted sample so that the surface to be analyzed of the mounted sample protrudes from the adjusting ring.
5. The fixture for EBSD analysis of mounted samples according to claim 1, characterized in that: The sample column has a diameter of 3 mm, and the fixture is inserted into the EBSD sample stage of the scanning electron microscope through the sample column.
6. The fixture for EBSD analysis of mounted samples according to claim 1, characterized in that: The EBSD sample stage is a commonly used sample stage for EBSD analysis of mounted samples.
7. The fixture for EBSD analysis of mounted samples according to claim 1, characterized in that: Conductive inlay powder is arranged on the inlay sample, the diameter of the inlay sample is smaller than the diameter of the inner cavity of the fixture, so that a gap of 1 to 29 mm is left between the inlay sample and the inner cavity, and the gap is filled with the inlay powder.