Cold cathode flat plate X-ray module

Through integrated heat dissipation components and a roundabout flow channel for cooling medium flow, the problem of poor heat dissipation of cold cathode X-ray source after long-term operation is solved, achieving temperature stability and service life.

CN223066112UActive Publication Date: 2025-07-04FUDAN UNIV YIWU RES INST
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202422010751.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-19
Publication Date
2025-07-04
Estimated Expiration
2034-08-19

AI Technical Summary

Technical Problem

The existing cold cathode X-ray source dissipates poor heat after long-term operation, resulting in an increase in the temperature of the device, affecting the working stability and life of the device.

Method used

An integrated heat dissipation assembly, including a first thermal conductor and a roundabout flow channel, is adopted to conduct heat export in conjunction with the flow of cooling medium, and integrates power and heat dissipation components to optimize equipment convenience and heat dissipation effect.

Benefits of technology

Through effective heat dissipation, the working environment temperature of the cold cathode X-ray source is maintained stable, extending its service life and improving working efficiency.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223066112U_ABST
    Figure CN223066112U_ABST
Patent Text Reader

Abstract

The embodiment of the utility model discloses a cold cathode flat plate X-ray module, the cold cathode flat plate X-ray module comprises a cold cathode X-ray source and a power supply, the cold cathode X-ray source at least comprises a cathode side and an anode side, and the power supply is used for supplying power to the cold cathode X-ray source; the heat dissipation assembly comprises a first heat conduction part arranged to be close to or attached to the cathode side or the anode side of the cold cathode X-ray source, the first heat conduction part conducts out heat in the mode that the circuitous flow channel is matched with the cooling medium to flow, and a flow channel inlet and a flow channel outlet of the circuitous flow channel are arranged on the same side face of the first heat conduction part. According to the cold cathode X-ray source, the heat dissipation assembly is arranged near the heating position of the cold cathode X-ray source, dynamic heat export is achieved through cooperation of the flow channel and the medium, long-time work of the cold cathode X-ray source is facilitated, the stability of the cold cathode X-ray source is improved, and the service life of the cold cathode X-ray source is prolonged.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This application relates to the technical field of radiation equipment, and particularly to a cold cathode flat panel X-ray module. Background Art

[0002] X-rays have strong penetrability and are widely used in multiple fields such as non-destructive industrial flaw detection, medical treatment, food, and security inspection. For different application scenarios, X-ray devices for imaging, radiotherapy, disinfection, electrostatic elimination, etc. have been developed, and the X-ray source is the part used to generate X-rays in such devices. Traditional X-ray sources are all hot cathode X-ray sources. In this kind of X-ray source, electrons are generated by a cathode filament, and after being focused by a focusing electrode and accelerated by an accelerating device, they bombard the anode target to generate X-rays. Its principle is to heat the filament to generate thermionic emission. Therefore, hot cathode X-ray sources have disadvantages such as high working temperature, slow response speed, short lifespan, large volume, and high energy consumption. Currently, a cold cathode X-ray source based on a field emission cathode as an electron source can correspondingly solve the above problems of hot cathode X-ray sources.

[0003] Although the cold cathode X-ray source can significantly improve the disadvantages of the hot cathode X-ray source, when the device based on the cold cathode X-ray source works under conditions such as long time, large current, and high voltage, the temperature of the anode substrate will still continue to increase. The accumulation of temperature causes the working environment temperature of the cold cathode X-ray source to rise, thereby affecting the stability and lifespan of the device. Therefore, necessarily, the cold cathode X-ray source also requires a certain heat dissipation function to further extend the service life of the cold cathode X-ray source device and improve its working efficiency. Summary of the Utility Model

[0004] The main purpose of this application is to provide a cold cathode flat panel X-ray module, aiming to solve the technical problem that the existing cold cathode X-ray device has poor heat dissipation after long-term operation, which is not conducive to the use of the device.

[0005] To achieve the above purpose, this application proposes a cold cathode flat panel X-ray module, which includes: a cold cathode X-ray source and a power supply. The cold cathode X-ray source includes at least a cathode side and an anode side, and the power supply is used to supply power to the cold cathode X-ray source; and

[0006] a heat dissipation component, the heat dissipation component includes a first heat conduction part configured to be close to or attached to the cathode side or the anode side of the cold cathode X-ray source, and the first heat conduction part conducts heat in the form of a tortuous flow channel for the flow of a cooling medium, and the flow channel inlet and the flow channel outlet of the tortuous flow channel are arranged on the same side of the first heat conduction part.

[0007] For example, in the cold cathode flat-panel X-ray module provided in at least one embodiment of the present application, the heat dissipation assembly further includes a second heat conducting portion, and the first heat conducting portion contacts the cathode side or the anode side of the cold cathode X-ray source through the second heat conducting portion.

[0008] For example, in the cold cathode flat-panel X-ray module provided in at least one embodiment of the present application, the form of the circuitous flow channel includes a one-way return circuitous flow channel or a two-way return circuitous flow channel.

[0009] For example, in the cold cathode flat-panel X-ray module provided in at least one embodiment of the present application, the diameter of the circuitous flow channel ranges from 1 μm to 1000 μm.

[0010] For example, in the cold cathode flat panel X-ray module provided in at least one embodiment of the present application, the cold cathode flat panel X-ray module also includes a circulation storage box, and the circulation storage box is configured with a liquid outlet pump, and the pump outlet of the liquid outlet pump is connected to the flow channel inlet.

[0011] For example, in the cold cathode flat panel X-ray module provided in at least one embodiment of the present application, the cold cathode flat panel X-ray module further includes a shell, and the shell is configured with an X-ray emission window that matches the position of the cold cathode X-ray source.

[0012] For example, in the cold cathode flat-panel X-ray module provided in at least one embodiment of the present application, the shell is divided into a first space and a second space by an isolation member, the first space is at least used to accommodate the cold cathode X-ray source and the heat dissipation assembly and maintain a sealed state, and the second space is at least used to accommodate the power supply and the circulation storage box.

[0013] For example, in the cold cathode flat panel X-ray module provided in at least one embodiment of the present application, a ventilation hole is provided on the side wall of the second space of the shell.

[0014] For example, in the cold cathode flat-panel X-ray module provided in at least one embodiment of the present application, the first space is filled with an insulating medium.

[0015] For example, in the cold cathode flat panel X-ray module provided in at least one embodiment of the present application, the shell is provided with an external power interface and a control interface for controlling the cold cathode X-ray source.

[0016] Compared with the prior art, the cold cathode X-ray module of the present utility model has at least the following beneficial effects: By using a cold cathode X-ray source as the X-ray emitting part of the device, many drawbacks of the hot cathode X-ray source can be improved. On this basis, considering the heat accumulation that may occur when the cold cathode X-ray source works under high voltage and large current for a long time, a flow-channel type first heat conducting part is used as a heat dissipation component, and the heat accumulated inside the X-ray source is exported in the form of the flow of a cooling medium, so as to maintain the internal temperature balance of the X-ray source, ensure its normal working conditions and extend its service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the structures shown in these drawings.

[0018] Figure 1 It is a structural schematic diagram of an embodiment of the cold cathode flat X-ray module of the present application;

[0019] Figure 2 It is a structural schematic diagram of an embodiment of the cold cathode X-ray source of the present application;

[0020] Figure 3 It is a configuration relationship diagram of an embodiment of the heat dissipation component and the cold cathode X-ray source of the present application;

[0021] Figure 4 For Figure 3 The structural logic diagram of the illustrated embodiment;

[0022] Figure 5 It is a configuration relationship diagram of another embodiment of the heat dissipation component and the cold cathode X-ray source of the present application;

[0023] Figure 6 For Figure 5 The structural logic diagram of the illustrated embodiment;

[0024] Figure 7 It is a structural schematic diagram of an embodiment of the first heat conducting part in the cold cathode flat X-ray module of the present application;

[0025] Figure 8 It is a structural diagram of another embodiment of the cold cathode flat X-ray module of the present application.

[0026] Reference numerals: 10, cold cathode X-ray source; 11, cathode substrate; 12, anode substrate; 13, metal film; 14, nanowire array; 15, exhaust pipe; 20, power supply; 30, heat dissipation component; 31, first heat conduction part; 311, tortuous flow channel; 312, flow channel inlet; 313, flow channel outlet; 32, second heat conduction part; 40, circulating storage tank; 50, housing; 51, X-ray emission window; 52, outer housing; 53, sealing cover plate; 54, sealing structure; 55, first space; 56, second space; 57, ventilation opening; 58, power supply external interface; 59, control interface.

[0027] The realization of the purpose, functional features and advantages of this application will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0029] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present utility model are only used to explain the relative position relationship and movement conditions between components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0030] In the present utility model, unless otherwise clearly defined and limited, terms such as "connection" and "fixation" shall be understood in a broad sense. For example, "fixation" may be a fixed connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0031] In addition, if the descriptions such as "first" and "second" are involved in the embodiments of the present utility model, these descriptions of "first", "second", etc. are only for descriptive purposes and should not be construed as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and / or" appearing throughout the text includes three parallel scenarios. Taking "A and / or B" as an example, it includes scenario A, scenario B, or the scenario where both A and B are satisfied simultaneously. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present utility model.

[0032] Cold cathode X-ray sources have successively developed into single-focus, multi-focus, and flat-panel X-ray sources. The cold cathode flat-panel X-ray source is easy to prepare, has uniform emission, is suitable for large-area preparation, and the area size is easy to control. For different application scenarios, such as medical imaging, radiotherapy, object surface disinfection, industrial static elimination, etc., cold cathode flat-panel X-ray sources of corresponding sizes can be designed and manufactured to adapt to different usage requirements. After the cold cathode X-ray source works under conditions of long time, high current, and high voltage, the temperature of the anode substrate will continue to increase, resulting in an increase in the working environment temperature of the cold cathode X-ray source, affecting the stability and lifespan of the device. Therefore, whether it has heat dissipation ability and whether the heat dissipation is good are important performance indicators of cold cathode X-ray source-related equipment, and the heat dissipation performance will also directly affect the service life of the cold cathode X-ray source.

[0033] On the other hand, the existing X-ray source and the power supply controller are generally separated, which will result in a relatively large volume of the X-ray device and inconvenient use.

[0034] Therefore, the present utility model proposes an integrated cold cathode flat-panel X-ray module with a power supply and a heat dissipation component, including a cold cathode X-ray source, a power supply, and a heat dissipation component. The cold cathode X-ray source includes at least a cathode side and an anode side, and the power supply is used to supply power to the cold cathode X-ray source. The heat dissipation component includes a first heat conduction part configured to be close to or in contact with the cathode side or the anode side of the cold cathode X-ray source. The first heat conduction part conducts heat in the form of a tortuous flow channel for the flow of a cooling medium, and the flow channel inlet and the flow channel outlet of the tortuous flow channel are arranged on the same side of the first heat conduction part.

[0035] By integrating a cold cathode X-ray source with a power supply and a heat dissipation component, the overall volume of the cold cathode flat panel X-ray module is well controlled while optimizing the convenience of the device, and it is no longer limited to the conventional usage places determined by the power supply. In addition, through the use of the heat dissipation component, the heat generated by the cold cathode X-ray source can be transferred in time, and the working environment temperature remains stable and is not easily affected, thus reducing the service life.

[0036] The cold cathode flat panel X-ray module provided by the present utility model will be described below through several specific embodiments.

[0037] At least one embodiment of the present application provides a cold cathode flat panel X-ray module. Figure 1 The simplest structure of the cold cathode flat panel X-ray module is shown. As Figure 1 shown, the cold cathode flat panel X-ray module includes a cold cathode X-ray source 10, a power supply 20, and a heat dissipation component 30. Among them, the cold cathode X-ray at least includes a cathode side and an anode side. The two poles of the power supply 20 are respectively connected to the cathode side and the anode side of the cold cathode X-ray source 10 for supplying power to the cold cathode X-ray source 10 (or exciting electrons). The heat dissipation component 30 can be configured as a first heat conduction part 31 close to or attached to the cathode side or the anode side of the cold cathode X-ray source 10. "Close" means separated from the cathode side or the anode side of the cold cathode X-ray source 10 by a certain distance and not in direct contact, and "attached" means in direct contact. The first heat conduction part 31 conducts heat in the form of a tortuous flow channel 311 for the flow of a cooling medium. The flow channel inlet 312 and the flow channel outlet 313 of the tortuous flow channel 311 are arranged on the same side of the first heat conduction part 31.

[0038] It should be noted that the cold cathode X-ray source 10 involved in any embodiment of the present application can be understood as the prior art. For example, the cold cathode X-ray source 10 includes an anode substrate 12 coated with a metal film 13 as Figure 2 shown, a cathode substrate 11 with a nanowire array 14 grown thereon, a glass frame isolator, an exhaust pipe 15 for evacuating, and an evaporable getter for maintaining the internal vacuum of the device. After the cathode substrate 11 and the anode substrate 12 are correspondingly connected to the two poles of the power supply 20 and the required voltage is applied, electrons are emitted from the cathode substrate 11 with the nanowire array 14 to the metal film 13 of the anode substrate 12, and high-energy electrons strike the anode material to generate X-rays (this process is also the main heat source generation process). Optionally, the X-rays generated by the anode substrate 12 (material) have transmitted light and reflected light. In addition, the metal film 13 can be a metal composite thin film made of Al, Mo, W, Cu, Cr, and possible combinations. The cathode substrate 11 (material) can be made of carbon nanotubes, ZnO nanowires, WO3 nanowires, etc., and the nanowire array 14 is a dot matrix structure.

[0039] The power supply 20 involved in any embodiment of the present application for the cold cathode flat panel X-ray module should be understood in a broad sense. Based on its function of supplying power to the cold cathode X-ray source 10, this power supply can be an independent power supply device, such as a mobile rechargeable battery, which can greatly improve the integration and convenience of the cold cathode flat panel X-ray module; under certain conditions, such as requiring long-term stable power supply drive or as an alternative way of power connection, it can also be connected to an external power supply for power supply in the form of a power interface.

[0040] The heat dissipation component 30 is used in the embodiments of the present application as a heat transfer medium. It includes a first heat conduction part 31, which is arranged close to or attached to the cathode side (cathode substrate 11) or anode side (anode substrate 12) of the cold cathode X-ray source 10. The first heat conduction part 31 increases the heat conduction area in the form of a tortuous flow channel 311. At the same time, in cooperation with the flow of the cooling medium in the tortuous flow channel 311, the absorbed heat is exported from the module to achieve the heat dissipation function. It should be noted that in this embodiment, taking the first heat conduction part 31 as a cuboid as an example, the flow channel inlet 312 and the flow channel outlet 313 of the tortuous flow channel 311 are located on the same side of the first heat conduction part 31, which can ensure the high integration of the cold cathode flat panel X-ray module. For details, see the following embodiments.

[0041] It should be explained that the selectivity of the heat dissipation component 30 assembled on the cathode side or the anode side is realized according to different X-ray emission forms. For example, when the emitted X-ray of the X-ray module is the transmitted light on the anode side (anode substrate 12), the configuration relationship and structural principle of the heat dissipation component 30 are as Figure 3 and Figure 4 shown. At this time, the heat dissipation component 30 is installed on the side close to the cathode substrate 11 or attached to the cathode substrate 11. After applying voltage, the cathode side (cathode substrate 11) emits electrons to the anode side (anode substrate 12), and the high-energy electrons strike the anode material to generate X-rays. The transmitted X-ray in the same direction as the electron movement direction is selected as the working X-ray; for another example, when the emitted X-ray of the X-ray module is the reflected light on the anode side (anode substrate 12), the configuration relationship and structural principle of the heat dissipation component 30 are as Figure 5 and Figure 6 shown. At this time, the heat dissipation component 30 is installed on the side close to the anode substrate 12 or attached to the anode substrate 12. After applying voltage, the cathode side (cathode substrate 11) emits electrons to the anode side (anode substrate 12), and the high-energy electrons strike the anode material to generate X-rays. The reflected X-ray in the opposite direction to the electron movement direction is selected as the working X-ray. By selecting different working X-rays and adaptively adjusting the configuration position of the heat dissipation component 30, the influence on the X-ray emission can be avoided and the heat dissipation can also be achieved.

[0042] It should be noted that although different embodiments are formed according to the different configured positions of the heat dissipation component 30 based on the selection of the working X-ray, in view of the fact that the interval distance between the cathode side and the anode side in the actual cold cathode X-ray source 10 is very small - between a few millimeters, this extremely small position difference can be completely ignored during the heat conduction process. Therefore, whether the heat dissipation component 30 is configured on the cathode side or the anode side, there will be no special difference in the effect, and both can complete the heat export.

[0043] Preferably, in the above embodiment, the cooling medium can be heat dissipation oil or cooling water.

[0044] Preferably, in the above embodiment, the diameter range of the meandering flow channel 311 is 1 μm to 1000 μm.

[0045] Preferably, in the above embodiment, the form of the meandering flow channel 311 includes a one-way folded-back meandering flow channel 311 or a two-way folded-back meandering flow channel 311. Among them, the one-way folded-back meandering flow channel 311 is as shown in Figure 7 As shown, the two-way folded-back meandering flow channel 311 can be set as two parallel folded-back flow channels, and the flow direction of the cooling medium in the two meandering flow channels 311 is opposite, which can further increase the heat conduction area and accelerate the heat export while keeping the temperature at the cold cathode X-ray source 10 stable.

[0046] Based on the foregoing embodiments, the present application also provides more embodiments to achieve better and more perfect effects, so that the cold cathode X-ray module of the present application is convenient to use.

[0047] For example, in the cold cathode flat X-ray module provided by at least one embodiment of the present application, referring to Figure 3 or Figure 5 , the heat dissipation component 30 further includes a second heat conduction part 32, and the first heat conduction part 31 is in contact with the cathode side of the cold cathode X-ray source 10 through the second heat conduction part 32. The second heat conduction part 32 can be configured in the form of a heat sink. Its main function is to improve the heat transfer efficiency between the cathode side (or anode side) and the first heat conduction part 31 as an intermediate heat conduction medium. For example, the second heat conduction part 32 in the form of a heat sink is attached to the cathode substrate 11 of the cold cathode X-ray source 10 and is attached to one side of the first heat conduction part 31. For example, the first heat conduction part 31 is the aforementioned cuboid structure. Preferably, the second heat conduction part 32 is a metal sheet, silicon carbide or diamond.

[0048] For example, in the cold cathode flat X-ray module provided by at least one embodiment of the present application, referring to Figure 1, the cold cathode flat panel X-ray module further includes a storage tank 40. The storage tank 40 is connected to the flow channel inlet 312 and the flow channel outlet 313 of the bypass flow channel 311 for storing and flowing the cooling medium to form a complete loop. A liquid outlet pump is configured in the storage tank 40, and the pump outlet of the liquid outlet pump is connected to the flow channel inlet 312 as the power output for the flow of the cooling medium in the loop. During the heat dissipation process, the cooling medium continuously flows in the bypass flow channel 311, taking out the heat conducted and received by the first heat conduction part 31 to the storage tank 40, where it is cooled and enters the next cycle. This process can be achieved continuously, so that the heat dissipation effect remains stable, meeting the heat dissipation requirements for the long-term operation of the cold cathode X-ray module.

[0049] For example, in the cold cathode flat panel X-ray module provided by at least one embodiment of the present application, refer to Figure 8 The cold cathode flat panel X-ray module further includes a housing 50. The housing 50 is configured with an X-ray emission window 51 that matches the anode side position of the cold cathode X-ray source 10. In this embodiment, the integration of the cold cathode flat panel X-ray module is reflected in appearance through the housing 50. More importantly, as the assembly carrier of the components of the module, the housing 50 also has the advantages of partition protection and function extension.

[0050] The structural form of the housing 50 can be an assembled type as shown in Figure 8 , including an outer housing 52 and a sealing cover plate 53 below. The sealing cover plate 53 and the outer housing 52 form an internal accommodation space of the module. A sealing structure 54 is also provided between the sealing cover plate 53 and the outer housing 52. The sealing structure 54 is selected from one or more of the following structures: sealing rings, sealing gaskets, and sealing adhesives.

[0051] For example, in the above embodiment, refer to Figure 8 , the housing 50 is divided into a first space 55 and a second space 56 by a separator. The first space 55 is at least used to accommodate the cold cathode X-ray source 10 and the heat dissipation component 30 and maintain a sealed state, and the second space 56 is at least used to accommodate the power supply 20 and the storage tank 40.

[0052] Preferably, an insulating medium is also filled in the first space 55, which can not only prevent discharge caused by the high voltage of the device but also be beneficial to the heat dissipation of the X-ray source. For example, the insulating medium is a high-voltage-resistant epoxy resin, and the resin can solidify to form a stable internal insulating structure after being injected into the housing 50 for a period of time.

[0053] The first space 55 and the second space 56 are isolated within a complete housing 50, and different components can be arranged separately as needed. For example, components such as the cold cathode X-ray source 10 have relatively high requirements for the working environment or safety. Therefore, it is spatially separated from the power supply 20. Without affecting safety, the module integration degree is also ensured. The storage tank 40 and the power supply 20 can be arranged in the second space 56. Since both the flow channel inlet 312 and the outlet of the bypass flow channel 311 are on one side (in the same direction) of the first heat conducting part 31, the storage tank 40 can be arranged on one side of the cold cathode X-ray source 10 and in the same space as the power supply 20. This reduces the space occupied by component installation and makes the cold cathode flat X-ray module highly integrated.

[0054] Preferably, a ventilation opening 57 is provided on the side wall of the second space 56 of the housing 50. The ventilation opening 57 is provided to accelerate the temperature drop of the cooling medium in the storage tank 40 and maintain a suitable temperature for circulation. For example, the ventilation opening 57 can be opened on two adjacent sides of the housing 50 as shown in Figure 8 This is beneficial to the air flow and temperature adjustment inside the housing 50. Possibly, a cooling fan or the like can also be configured according to the corresponding structure to improve the ventilation and cooling efficiency.

[0055] For example, in the cold cathode flat X-ray module provided by at least one embodiment of the present application, referring to Figure 8 , a power supply external interface 58 and a control interface 59 for controlling the cold cathode X-ray source 10 are configured on the housing 50. The power supply external interface 58 can be directly connected to an external power supply for use, and an external circuit can control the X-ray emission of the module through the control interface 59, including the emission intensity, emission time, etc.

[0056] The above are only optional embodiments of the present application, and do not limit the patent scope of the present application. All equivalent structural transformations made under the inventive concept of the present application using the content of the specification and drawings of the present application, or direct / indirect applications in other related technical fields are included in the patent protection scope of the present application.

Claims

1. A cold cathode flat panel X-ray module, characterized in that, The cold cathode flat panel X-ray module includes: a cold cathode X-ray source and a power supply. The cold cathode X-ray source includes at least a cathode side and an anode side, and the power supply is used to supply power to the cold cathode X-ray source; and a heat dissipation component. The heat dissipation component includes a first heat conduction part configured to be close to or attached to the cathode side or the anode side of the cold cathode X-ray source. The first heat conduction part conducts heat in a form of a tortuous flow channel for the flow of a cooling medium, and the flow channel inlet and the flow channel outlet of the tortuous flow channel are arranged on the same side of the first heat conduction part.

2. The cold cathode flat panel X-ray module according to claim 1, wherein The heat dissipation component further includes a second heat conduction part, and the first heat conduction part contacts the cathode side or the anode side of the cold cathode X-ray source through the second heat conduction part.

3. The cold cathode flat panel X-ray module according to claim 1, characterized in that, The form of the tortuous flow channel includes a unidirectional folded-back tortuous flow channel or a bidirectional folded-back tortuous flow channel.

4. The cold cathode flat panel X-ray module according to claim 1, characterized in that, The diameter range of the tortuous flow channel is 1 μm to 1000 μm.

5. The cold cathode flat panel X-ray module according to claim 1, characterized in that The cold cathode flat panel X-ray module further includes a circulating storage tank, and the circulating storage tank is configured with a liquid outlet pump, and the pump outlet of the liquid outlet pump is connected to the flow channel inlet.

6. The cold cathode flat panel X-ray module according to claim 5, wherein, The cold cathode flat panel X-ray module further includes a housing, and the housing is configured with an X-ray emission window that matches the position of the cold cathode X-ray source.

7. The cold cathode flat panel X-ray module according to claim 6, characterized in that, The housing is divided into a first space and a second space by a separator. The first space is at least used to accommodate the cold cathode X-ray source and the heat dissipation component and maintain a sealed state, and the second space is at least used to accommodate the power supply and the circulating storage tank.

8. The cold cathode flat panel X-ray module according to claim 7, characterized in that, A ventilation opening is provided on the side wall of the second space of the housing.

9. The cold cathode flat panel X-ray module according to claim 7, characterized in that, The first space is filled with an insulating medium.

10. The cold cathode flat panel X-ray module according to claim 6, characterized in that, The housing is configured with a power external interface and a control interface for controlling the cold cathode X-ray source.