Cleaning pipeline for quartz tube

Abstract

The utility model discloses a cleaning pipeline for a quartz tube, the quartz tube is placed in a cleaning cavity, and a spraying system is arranged in the cleaning cavity; comprising a water washing pipeline connected with a water source and a spraying system, a pickling pipeline connected with a liquid storage tank and the spraying system, and a gas supply pipeline connected with a gas source and the spraying system, the spraying system comprises an upper spraying head, a side spraying head, an inclined spraying head, a side end spraying head and a lower spraying head; and a washing solution or a cleaning agent or a drying gas is output from the washing pipeline or the pickling pipeline or the gas supply pipeline to the upper spraying head and / or the side spraying head, and / or the inclined spraying head, and / or the side end spraying head, and / or the lower spraying head, so that all-directional cleaning and drying of the inner surface, the outer surface and included angles of the quartz tube are realized. The quartz tube cleaning device has the advantages that the spraying heads are arranged on the inner side, the outer side and the peripheral dead corners of the quartz tube, the quartz tube cleaning device can be suitable for all-directional automatic cleaning of various types of quartz tubes, and the cleaning adaptability, the cleaning efficiency and the cleanliness are all effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of pipeline design, and particularly relates to a cleaning pipeline for quartz tubes. Background Art

[0002] Quartz tubes are semiconductor equipment consumables commonly used in semiconductor device manufacturing equipment (such as chemical vapor deposition (CVD), physical vapor deposition (PVD), diffusion equipment (Diff), or film forming equipment (T / F), etc.). After being used in the aforementioned semiconductor equipment for a period of time, a large amount of dirt, metal impurities, or solid particles will remain on the inner wall surface of the quartz tube. However, the quartz tube is expensive, so it needs to be reused after being thoroughly cleaned to reduce the manufacturing cost of semiconductor devices.

[0003] The operation of the traditional manual cleaning of quartz tubes is cumbersome and cannot achieve an integrated full-automatic cleaning function. Its cleaning liquid is generally prepared and manually added by humans. The cleaning liquid is generally prepared by mixing strong acids and strong alkalis in a certain proportion and then used. Therefore, manual operation will cause harm to human health, and there are many uncontrollable factors in manual operation. The fatigue level of the human body, the observation angle, and the sense of responsibility of the personnel will all affect whether the ratio of the cleaning liquid reaches the standard.

[0004] The applicant applied for a patent CN213103610U, "Quartz Tube Unpowered Cleaning Device" before; and the existing patent CN113500070B, "Quartz Tube Cleaning Device and Cleaning Method" proposed technical solutions to solve the above problems. However, the automated cleaning equipment proposed in the existing technologies including the above patents can only clean common cylindrical quartz tubes. Since the quartz tubes have a wide range of applications, their shapes need to be adjusted according to the usage requirements. However, the common cleaning equipment cannot comprehensively clean the quartz tubes such as Figure 1 As shown. Specifically, because there is an angle between the quartz tube body and its branches, and dirt is likely to accumulate at the angle. The cleaning methods including the above patents can only clean the large surfaces of the quartz tubes, and the cleaning of such local or dead angles as the angle is not in place, so there are certain cleaning limitations.

[0005] Therefore, designing a cleaning pipeline for quartz tubes applicable to various shapes is an important technical problem that needs to be solved by those skilled in the art at present. Summary of the Utility Model

[0006] The purpose of the present utility model is to solve the above problems existing in the prior art and provide a cleaning pipeline for quartz tubes.

[0007] The purpose of the present utility model is achieved through the following technical solutions:

[0008] A cleaning pipeline for a quartz tube, wherein the quartz tube is placed in a cleaning chamber, wherein a spray system is arranged in the cleaning chamber; the cleaning pipeline comprises a water washing pipeline connecting a water source and the spray system, a pickling pipeline connecting a liquid storage tank and the spray system, and an air supply pipeline connecting an air source and the spray system; the spray system comprises an upper spray head arranged at the top of the quartz tube, a side spray head arranged at the outer periphery of the quartz tube, an oblique spray head and a side end spray head, and a lower spray head arranged at the inner bottom end of the quartz tube; washing liquid or cleaning agent or drying gas is respectively output from the water washing pipeline or the pickling pipeline or the air supply pipeline to the upper spray head and / or the side spray head, and / or the oblique spray head, and / or the side end spray head, and / or the side spray head, so as to realize all-round cleaning and drying of the inner and outer surfaces and angles of the quartz tube.

[0009] Preferably, a water control main valve A01 is arranged between the input end of the water washing pipe and the water source output end, and a pneumatic ball valve A1 and a pneumatic valve A211 are arranged in parallel at the output end of the water control main valve A01; the output end of the pneumatic ball valve A1 is connected to the pipelines between the upper spray head, the side spray head, the inclined spray head, the side end spray head and the lower spray head, and water is supplied to them; the output end of the pneumatic valve A211 is connected to the liquid inlet of the liquid storage tank by a pipeline.

[0010] Preferably, a pneumatic valve A11 is provided on the pipe connected to the upper sprinkler head at the output end of the pneumatic ball valve A1; a pneumatic valve A12 is provided on the pipe connected to the side sprinkler head; a pneumatic valve A13 is provided on the pipe connected to the oblique sprinkler head; a pneumatic valve A14 is provided on the pipe connected to the side end sprinkler head; and a pneumatic valve A15 is provided on the pipe connected to the lower sprinkler head.

[0011] Preferably, the input ends of the pneumatic valve A12, the pneumatic valve A14 and the pneumatic valve A15 are arranged in parallel at the output end of the air valve A2; the air valve A2 is arranged in parallel with the pneumatic valve A13, the pneumatic valve A11 and the air valve A16 at the output end of the pneumatic ball valve A1.

[0012] Preferably, the pickling pipeline includes a water pipe, a hydrogen fluoride pipe and a nitric acid pipe connected to the delivery storage tank; the input ends of the above three pipes are respectively provided with a manual ball valve A01, a manual valve A02 and a manual valve A03, a pneumatic valve A211 is provided between the output end of the water pipe and the storage tank, an air valve A221 is provided between the output end of the hydrogen fluoride pipe and the storage tank, and an air valve A231 is provided between the output end of the nitric acid pipe and the storage tank.

[0013] Preferably, a liquid level sensor group for monitoring the capacity of the injected washing liquid, hydrogen fluoride, and nitric acid solvent and the full liquid capacity is arranged on the inner side wall of the tank.

[0014] Preferably, an air valve A2 is provided on the output pipeline of the liquid storage tank, and the output end of the air valve A2 is arranged in parallel with the output end of the air valve A16 at the input end of the filter assembly; the output end of the filter assembly is provided with an air valve A20, an air valve A21, a manual valve A22 and an air valve 23 in parallel; the output end of the air valve A20 is provided with the pneumatic valve A12, the pneumatic valve A14 and the pneumatic valve A15 in parallel; the output end of the air valve A21 is connected to the concentrated acid output pipe; the output end of the manual valve 203 is arranged in parallel with the output end of the pneumatic valve A13 to supply liquid to the inclined spray head; the output end of the air valve 23 is connected to the return pipe on the liquid storage tank, and when the air valve 23 is opened, the cleaning agent can be recycled.

[0015] Preferably, a waste liquid discharge pipe is further provided on the liquid storage tank, and a circulation pipeline communicated with the air valve A1 and a waste discharge pipe communicated with the dilute acid output pipe are arranged in parallel on the waste liquid discharge pipe, and an air valve 200 is arranged between the waste discharge pipe and the dilute acid output pipe.

[0016] Preferably, a needle valve A3 and a pressure detector 1 are provided at the input end of the air supply pipeline, and the output end of the pressure detector 1 is provided with a pipeline air drying pressure detector and a suppression air drying pressure detector in parallel; the output end of the air drying pressure detector is connected in series with an air valve A31 and a check valve, and the output end of the check valve is arranged in parallel with the output end of the pneumatic ball valve A1 to supply air to the pneumatic valve A11, the pneumatic valve A13, the air valve A2 and the air valve A16, so as to realize air shearing drying of the pipeline and the quartz tube; the suppression air drying pressure detector supplies air to external electrical appliances.

[0017] Preferably, a liquid level sensor group is provided on the side wall of the cleaning chamber, and a waste water output pipe and a waste liquid pipeline are connected to its bottom; the output end of the waste liquid pipeline is provided with an air valve A5, an air valve A51 and an air valve A52 in parallel; the output end of the air valve A5 is arranged in parallel with the output end of the air valve A2; the output end of the air valve A51 is communicated with the waste water output pipeline; the output end of the air valve A52 is arranged in parallel with the output end of the air valve A21 on the concentrated acid output pipe.

[0018] The advantages of the technical solution of the present utility model are mainly reflected in:

[0019] By arranging spray heads on the inner and outer sides and the peripheral dead corners of the quartz tube, it can be applicable to the all-round automatic cleaning of various types of quartz tubes, and its cleaning adaptability, cleaning efficiency and cleanliness are all effectively improved;

[0020] Control the on / off of the corresponding spray head of the spray system through the valve body. During use, the corresponding valve body and spray head can be enabled according to the location of the dirt, and the quartz tube can be cleaned specifically; effectively reduce the unnecessary waste of detergent to save water resources;

[0021] By setting a sensor group on the liquid storage tank, the mixing sequence and mixing ratio of the chemical agent can be limited to effectively clean the dirt on the inner and outer surfaces of the quartz tube to the greatest extent, and at the same time improve the use safety of the chemical agent. Brief Description of the Drawings

[0022] Figure 1 : Structure diagram of the quartz tube in the background technology;

[0023] Figure 2 : Pipeline diagram of the cleaning or air-drying part of the preferred embodiment of the present invention;

[0024] Figure 3 : The present invention Figure 2 Enlarged view of part A in;

[0025] Figure 4 : Pipeline diagram of the liquid supply or gas supply part of the preferred embodiment of the present invention. Detailed Description of the Preferred Embodiment

[0026] The purpose, advantages and features of the present invention will be illustrated and explained through the non-restrictive description of the following preferred embodiments. These embodiments are only typical examples of applying the technical solution of the present invention, and any technical solutions formed by equivalent replacement or equivalent transformation fall within the scope of protection required by the present invention.

[0027] In the description of the solution, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of description and simplification of the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. And in the description of the solution, with the operator as the reference, the direction close to the operator is the proximal end, and the direction away from the operator is the distal end.

[0028] Such as Figure 2As shown, the cleaning pipeline for the quartz tube has the quartz tube placed inside the cleaning chamber 5. A liquid level sensor group is provided on the side wall of the cleaning chamber 5. Specifically, a liquid collection tank 50 is formed at the bottom of the cleaning chamber 5, and the liquid level sensor group is provided on the side wall of the liquid collection tank 50. The liquid level sensors are, from top to bottom in sequence, a full liquid sensor, a high liquid level sensor, a low liquid level sensor, and an empty liquid level sensor. The liquid capacity in the liquid collection tank 50 is detected by the liquid level sensor group, and corresponding prompts are given at the corresponding positions to remind adding or discharging liquid, thus improving the use safety.

[0029] As Figures 2 to 4 As shown, the cleaning pipeline for the quartz tube includes a cleaning or air-drying partial pipeline and a liquid supply or gas supply partial pipeline. Specifically, it includes a water washing pipeline 1 connecting the water source and the spraying system 4, a pickling pipeline 2 connecting the liquid storage tank 20 and the spraying system 4, and an air supply pipeline 3 connecting the gas source and the spraying system 4. The spraying system 4 is located inside the cleaning chamber 5 and includes an upper spray head 41 arranged at the top end of the quartz tube, side spray heads 42 arranged on the outer periphery of the quartz tube, an inclined spray head 43, side end spray heads 44, and a lower spray head 45 arranged at the inner bottom end of the quartz tube. By arranging spray heads on the outer periphery of the quartz tube and at the dead corners, the all-round automatic cleaning of various types of quartz tubes is realized, and both the cleaning efficiency and the cleanliness are effectively improved.

[0030] Furthermore, in this embodiment, the cleaning steps for the quartz tube are preferably pre-cleaning with a detergent, pickling with a chemical agent, cleaning with a detergent, and then air-cut drying. The washing liquid or cleaning agent or drying gas is respectively output from the water washing pipeline 1 or the pickling pipeline 2 or the air supply pipeline 3 to the upper spray head 41 and / or the side spray heads 42, and / or the inclined spray head 43, and / or the side end spray heads 44, and / or the side spray heads 42, so as to realize the all-round cleaning and drying of the inner and outer surfaces and the included angles of the quartz tube.

[0031] In this embodiment, both the pre-cleaning with a detergent and the cleaning with a detergent steps are realized by the water washing pipeline 1 for the delivery of the detergent. Combining Figure 2 and Figure 4As shown, the liquid inlet of the water washing pipe 1 is DIW IN, its input end is the water pipe 21, and a total water control valve A01 is arranged between the input end and the water source output end. The output end of the total water control valve A01 is provided with a pneumatic ball valve A1. The output end of the pneumatic ball valve A1 is connected to the upper spray head 41, the side spray head 42, the inclined spray head 43, the side-end spray head 44 and the lower spray head 45 through pipes and supplies water to them. Specifically, a pneumatic valve A11 is arranged on the pipe connecting the output end of the pneumatic ball valve A1 and the upper spray head 41; a pneumatic valve A12 is arranged on the pipe connecting the output end of the pneumatic ball valve A1 and the side spray head 42; a pneumatic valve A13 is arranged on the pipe connecting the output end of the pneumatic ball valve A1 and the inclined spray head 43; a pneumatic valve A14 is arranged on the pipe connecting the output end of the pneumatic ball valve A1 and the side-end spray head 44; a pneumatic valve A15 is arranged on the pipe connecting the output end of the pneumatic ball valve A1 and the lower spray head 45. Thus, when using the water washing pipe 1 for detergent cleaning, the above valves can be controlled to open in sequence through the PLC, so that the detergent can reach the inner and outer surfaces of the quartz tube smoothly for cleaning. In addition, the above valves can also be selectively opened, and the specific valves to be opened can be determined according to the structure of the quartz tube. Therefore, this embodiment is applicable to quartz tubes of various shapes, with high cleaning adaptability. When there is dirt or cleaning dead corners in a local area of the quartz tube, the corresponding valves and spray heads can be enabled according to the location of the dirt, and the quartz tube can be cleaned targeted; effectively reducing unnecessary waste of detergent and saving water resources.

[0032] The input ends of the pneumatic valve A12, the pneumatic valve A14 and the pneumatic valve A15 are arranged in parallel at the output end of the air valve A10; the air valve A10 is arranged in parallel with the pneumatic valve A13, the pneumatic valve A11 and the air valve A16 at the output end of the pneumatic ball valve A1. By controlling the opening and closing of the air valve A10, the water supply to the pneumatic valve A12, the pneumatic valve A14 and the pneumatic valve A15 and their corresponding side spray head 42, side-end spray head 44 and lower spray head 45 can be realized. This is because dirt is more likely to accumulate on the inner wall and corners of the quartz tube. Therefore, the spray heads corresponding to these local small positions are separated from the spray heads corresponding to other large areas, so as to independently control the cleaning of these places.

[0033] A water control main valve A01 is connected to the liquid storage tank 20 through a water pipe 21, and a pneumatic valve A211 is arranged on the water pipe 21; that is, the pneumatic valve A211 is also arranged at the output end of the water control main valve A01, and is arranged in parallel with the pneumatic ball valve A1. The output end of the pneumatic valve A211 is connected to the liquid inlet of the liquid storage tank 20 through a pipeline. The outflow of the detergent to the liquid storage tank 20 is controlled by controlling the opening and closing of the pneumatic valve A211. The detergent in this embodiment may be clean water, deionized water DIW, or other cleaning liquids for cleaning the palace lanterns that can be thought of by those skilled in the art with rich experience, and is not limited herein.

[0034] When performing the chemical agent pickling step, the chemical agent will enter the liquid storage tank 20 through the pickling pipeline 2. Specifically, the pickling channel 2 includes the water pipe 21, the hydrogen fluoride pipe 22, and the nitric acid pipe 23 connected to the liquid storage tank 20 for transportation. Among them, hydrogen fluoride solvent, hereinafter referred to as HF solvent, is injected into the hydrogen fluoride pipe 22, and its liquid inlet is HF IN; nitric acid solvent, hereinafter referred to as HNO3 solvent, is injected into the nitric acid pipe 23, and its liquid inlet is HNO3IN. Of course, those skilled in the art can also replace the above two solvents with other chemical solvents, which is not limited herein.

[0035] When DIW, HF, and HNO3 enter the liquid storage tank 20, in order to accurately control the proportioning of chemical agents, in this embodiment, it is preferably to set a liquid level sensor group on the inner side wall of the liquid storage tank 20 as shown in Figure 4 to monitor the capacity of the injected washing liquid, hydrogen fluoride, and nitric acid solvents and the full liquid capacity. Further, the sensor group includes an empty liquid sensor EMPTY, a low liquid level sensor LOW LIMIT, a deionized water sensor DIW, a nitric acid sensor HNO3, a high liquid level sensor HIGH LIMIT, a hydrogen fluoride sensor HF, and a full liquid sensor FULL from bottom to top in sequence; among them, the empty liquid sensor EMPTY, the low liquid level sensor LOWLIMIT, and the full liquid sensor FULL can be used to prompt the current liquid storage volume in the liquid storage tank 20, and prompt to add liquid or stop adding liquid according to the signals sent by the corresponding sensors. The deionized water sensor DIW, the nitric acid sensor HNO3, the high liquid level sensor HIGHLIMIT, and the hydrogen fluoride sensor HF can be used to limit the addition order and weight ratio of chemical agents, that is, the addition order of chemical agents is DIW solvent, HNO3 solvent, and HF solvent in sequence. The addition amount of the DIW solvent does not exceed the position of the nitric acid sensor HNO3 at most, the addition amount of the HNO3 solvent does not exceed the position of the hydrogen fluoride sensor HF at most, and the addition amount of the HF solvent does not exceed the position of the full liquid sensor FULL at most; the chemical agent formulated according to the above order and ratio can effectively clean the dirt on the inner and outer surfaces of the quartz tube to the greatest extent, and improve the use safety of the chemical agent at the same time.

[0036] Manual ball valves A01, manual valve A02, and manual valve A03 are respectively provided at the input ends of the water pipe 21, hydrogen fluoride pipe 22, and nitric acid pipe 23. An air-operated valve A211 is provided between the output end of the water pipe 21 and the liquid storage tank 20, an air valve A221 is provided between the output end of the hydrogen fluoride pipe 22 and the liquid storage tank 20, and an air valve A231 is provided between the output end of the nitric acid pipe 23 and the liquid storage tank 20. By providing corresponding valve bodies at both the input and output ends of the water pipe 21, hydrogen fluoride pipe 22, and nitric acid pipe 23, the effectiveness of injecting the solvent is ensured, and at the same time, the safety of the injection process of the chemical solvent and the operator is improved.

[0037] As Figure 2 As shown, an air valve A2 is provided on the output pipeline of the liquid storage tank 20, and the output end of the air valve A2 is connected in parallel with the output end of the air valve A16 at the input end of the filter assembly 24. By controlling the opening of the air valve A2 shown, the chemical agent in the liquid storage tank 20 is transported to the quartz tube, and the quartz tube is pickled, effectively and quickly cleaning the dirt on the inner and outer surfaces of the quartz tube.

[0038] A waste liquid discharge pipe 200 as Figure 4 shown is also provided on the liquid storage tank 20. A circulation pipeline communicating with the air valve A2 and a waste discharge pipe communicating with the dilute acid output pipe 203 are connected in parallel on the waste liquid discharge pipe 200, and an air valve 200 is provided between the waste discharge pipe and the dilute acid output pipe 203. Thus, after the chemical agent in the liquid storage tank 20 is discharged, it can enter the air valve A2 through the circulation pipeline, and then be transported to the spray system 4 and output from the spray system 4, realizing the recycling of the chemical agent and saving resources; it can also flow through the waste discharge pipeline to the dilute acid output pipe 203 and be discharged from the dilute acid output pipe 203.

[0039] The chemical agent output through the air valve A2 needs to be filtered by the filter assembly 24 before reaching the spray system 4, thereby realizing the effective recycling of the chemical agent. The output end of the filter assembly 24 is connected in parallel with an air valve A20, an air valve A21, a manual valve A22, and an air valve 23. Among them, the output end of the air valve A20 is connected in parallel with the air-operated valve A12, the air-operated valve A14, and the air-operated valve A15. The output end of the air valve A21 is connected to the concentrated acid output pipe 202; the output end of the manual valve 203 is connected in parallel with the output end of the air-operated valve A13 to supply liquid to the inclined spray head. The output end of the air valve 23 is connected to the return pipe on the liquid storage tank 20, and when the air valve 23 is opened, the cleaning agent is recycled.

[0040] Furthermore, asFigure 2 As shown, the filter assembly 24 includes a pump filter disposed at the output end of the air valve A2 or the air valve A16. A pump is provided at the output end of the pump filter. A chemical filter is provided at the output end of the pump. The chemical filter has at least two output ports. The air valves A20, A21, manual valve A22 and air valve 23 are respectively provided on the pipelines of the output ports. Among them, the air valves A20, manual valve A22 and air valve A23 are connected in parallel to the output port of one of the chemical filters. Thus, after the chemical agent passes through the circulation pipeline and the air valve A2, it will be filtered once through the pump filter in sequence, and then the filtered chemical agent will be transported into the chemical filter by the pump for secondary filtration. The two filtration processes can ensure the cleanliness and effectiveness of the chemical agent finally transported into the spraying system 4, and avoid unnecessary waste to the greatest extent.

[0041] The present utility model preferably is provided with two liquid storage tanks 20, and the two liquid storage tanks 20 can supply liquid to the cleaning chamber 5 simultaneously or relatively independently. Specifically, each of the two liquid storage tanks 20 is provided with a corresponding set of the circulation pipelines. The circulation pipelines further include a circulation input pipeline A or a circulation input pipeline B output to the filter assembly 24, and a circulation output pipeline A or a circulation output pipeline B output to the liquid storage tank 20. The circulation input pipeline A and the circulation output pipeline A are communicated with one of the liquid storage tanks 20; the circulation input pipeline B and the circulation output pipeline B are communicated with the other liquid storage tank 20. The air valve A2 or the air valve A20 is provided on the circulation input pipeline A; the air valves A23 and A230 are provided on the circulation output pipeline B.

[0042] As Figure 2 and Figure 4 shown, after the detergent pre-cleaning, chemical agent pickling and detergent cleaning are completed, the air knife drying operation is performed through the air supply pipeline 3. Specifically, the air inlet of the air supply pipeline 3 is N2 IN. A needle valve A3 and a pressure detector 31 are provided at the input end of the air supply pipeline 3. The output end of the pressure detector 31 is connected in parallel with a pipeline air drying pressure detector 311 and a suppression air drying pressure detector 312. The output end of the air drying pressure detector 311 is connected in series with an air valve A31 and a check valve. The output end of the check valve is connected in parallel with the output end of the pneumatic ball valve A1, and supplies air to the pneumatic valve A11, the pneumatic valve A13, the air valve A10 and the air valve A16, so as to realize the air knife drying of the pipeline and the quartz tube. The check valve ensures the unidirectional and effective transportation of the air drying gas in the pipeline. The suppression air drying pressure detector 312 supplies air to an external electrical appliance. The gas transported in the air supply pipeline 3 can be a gas disclosed in the prior art including nitrogen.

[0043] As Figure 2 shown, a waste water output pipe 201 and a waste liquid pipe 52 are connected to the bottom of the liquid collecting tank 50 of the cleaning chamber 5. The output ends of the waste liquid pipe 52 are provided with an air valve A5, an air valve A51 and an air valve A52 in parallel. Among them, the output end of the air valve A5 is in parallel with the output end of the air valve A2 and / or the air valve A20; the output end of the air valve A51 is communicated with the waste water output pipe 201; the output end of the air valve A52 is in parallel with the output end of the air valve A21 and is arranged on the concentrated acid output pipe 202.

[0044] The spraying system 4 further includes an external spray head arranged outside the cleaning chamber 5. The external spray head is connected to the output end of the pneumatic valve A11 through a manual ball valve. The detergent output by the external spray head flows out through a drain pipe after entering the liquid collecting tank 50, and the drain pipe is communicated with the waste water output pipe 201.

[0045] There are still many implementation manners of the present utility model. All technical solutions formed by adopting equivalent transformation or equivalent change fall within the protection scope of the present utility model.

Claims

1. Cleaning pipeline for quartz tube, the quartz tube is placed in a cleaning chamber (5), and a spraying system (4) is arranged in the cleaning chamber (5); characterized in that: It includes a water washing pipeline (1) connecting a water source and the spraying system (4), a pickling pipeline (2) connecting a liquid storage tank (20) and the spraying system (4), and an air supply pipeline (3) connecting an air source and the spraying system (4); the spraying system (4) includes an upper spray head (41) arranged at the top end of the quartz tube, a side spray head (42) arranged on the outer periphery of the quartz tube, an inclined spray head (43) and a side-end spray head (44), and a lower spray head (45) arranged at the inner bottom end of the quartz tube; the washing liquid or cleaning agent or drying gas is respectively output from the water washing pipeline (1) or the pickling pipeline (2) or the air supply pipeline (3) to the upper spray head (41) and / or the side spray head (42), and / or the inclined spray head (43), and / or the side-end spray head (44), and / or the side spray head (42) to achieve all-round cleaning and drying of the inner and outer surfaces and included angles of the quartz tube.

2. The cleaning pipeline for quartz tubes according to claim 1, wherein: A water control main valve A01 is arranged between the input end of the water washing pipeline (1) and the output end of the water source, and a pneumatic ball valve A1 and a pneumatic valve A211 are arranged in parallel at the output end of the water control main valve A01; the output end of the pneumatic ball valve A1 is connected to the upper spray head (41), the side spray head (42), the inclined spray head (43), the side-end spray head (44) and the lower spray head (45) through pipelines and supplies water to them; the output end of the pneumatic valve A211 is connected to the liquid inlet of the liquid storage tank (20) through a pipeline.

3. The cleaning pipeline for quartz tubes according to claim 2, characterized in that: A pneumatic valve A11 is arranged on the pipeline connecting the output end of the pneumatic ball valve A1 and the upper spray head (41); a pneumatic valve A12 is arranged on the pipeline connecting the side spray head (42); a pneumatic valve A13 is arranged on the pipeline connecting the inclined spray head (43); a pneumatic valve A14 is arranged on the pipeline connecting the side-end spray head (44); a pneumatic valve A15 is arranged on the pipeline connecting the lower spray head (45).

4. The cleaning pipeline for quartz tubes according to claim 3, characterized in that: The input ends of the pneumatic valve A12, the pneumatic valve A14 and the pneumatic valve A15 are arranged in parallel at the output end of an air valve A10; the air valve A10, the pneumatic valve A13, the pneumatic valve A11 and the air valve A16 are arranged in parallel at the output end of the pneumatic ball valve A1.

5. The cleaning pipeline for quartz tubes according to claim 4, characterized in that: The pickling pipeline (2) includes a water pipe (21), a hydrogen fluoride pipe (22) and a nitric acid pipe (23) connected to a conveying liquid storage tank (20); manual ball valves A01, manual valves A02 and manual valves A03 are respectively arranged at the input ends of the above three pipelines, a pneumatic valve A211 is arranged between the output end of the water pipe (21) and the liquid storage tank (20), an air valve A221 is arranged between the output end of the hydrogen fluoride pipe (22) and the liquid storage tank (20), and an air valve A231 is arranged between the output end of the nitric acid pipe (23) and the liquid storage tank (20).

6. The cleaning pipeline for a quartz tube according to claim 5, wherein: A liquid level sensor group for monitoring the capacity of the injected washing liquid, hydrogen fluoride, nitric acid solvent and the full liquid capacity is arranged on the inner side wall of the tank (20).

7. The cleaning pipeline for quartz tubes according to claim 6, wherein: An air valve A2 is provided on the output pipeline of the liquid storage tank (20), and the output end of the air valve A2 is arranged in parallel with the output end of the air valve A16 at the input end of the filter assembly (24); the output end of the filter assembly (24) is provided with an air valve A20, an air valve A21, a manual valve A22 and an air valve 23 in parallel; the output end of the air valve A20 is provided with the pneumatic valve A12, the pneumatic valve A14 and the pneumatic valve A15 in parallel; the output end of the air valve A21 is connected to the concentrated acid output pipe (202); the output end of the manual valve 203 is arranged in parallel with the output end of the pneumatic valve A13 to supply liquid to the inclined spray head; the output end of the air valve 23 is connected to the reflux pipe on the liquid storage tank (20), and when the air valve 23 is opened, the cleaning agent can be recycled.

8. The cleaning pipeline for quartz tubes according to claim 7, characterized in that: A waste liquid discharge pipe (200) is further provided on the liquid storage tank (20). A circulation pipeline communicated with the air valve A1 and a waste discharge pipe communicated with the dilute acid output pipe (203) are arranged in parallel on the waste liquid discharge pipe (200), and an air valve 200 is arranged between the waste discharge pipe and the dilute acid output pipe (203).

9. The cleaning pipeline for quartz tubes according to claim 8, characterized in that: A needle-shaped stop valve A3 and a pressure detector I (31) are provided at the input end of the air supply pipeline (3). The output end of the pressure detector I (31) is provided with a pipeline air drying pressure detector (311) and a repression air drying pressure detector (312) in parallel; an air valve A31 and a check valve are connected in series at the output end of the air drying pressure detector (311). The output end of the check valve is arranged in parallel with the output end of the pneumatic ball valve A1 to supply air to the pneumatic valve A11, the pneumatic valve A13, the air valve A10 and the air valve A16, so as to realize air shearing drying of the pipeline and the quartz tube; the repression air drying pressure detector (312) supplies air to external electrical appliances.

10. The cleaning pipeline for quartz tubes according to claim 9, characterized in that: A liquid level sensor group is provided on the side wall of the cleaning chamber (5), and a waste water output pipe (201) and a waste liquid pipeline (52) are connected to its bottom; the output end of the waste liquid pipeline (52) is provided with an air valve A5, an air valve A51 and an air valve A52 in parallel; the output end of the air valve A5 is arranged in parallel with the output end of the air valve A2; the output end of the air valve A51 is communicated with the waste water output pipeline (201); the output end of the air valve A52 is arranged in parallel with the output end of the air valve A21 on the concentrated acid output pipe (202).

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