Dust removal and sterilization device for high-efficiency air filter in dust-free room of chip plant

Abstract

The utility model discloses a chip plant dust-free room high-efficiency air filter dedusting and sterilizing device which comprises a pressure difference alarm unit, a sterilizing unit, an exhaust unit and a control box, the control box is connected with the sterilizing unit and the exhaust unit, the pressure difference alarm unit monitors the pressure difference of the air inlet side and the air outlet side of the air filter, and the sterilizing unit is connected with the exhaust unit. The sterilization unit is arranged on the air inlet side of the air filter, and after sterilization is completed, the sterilization unit is connected with an external process exhaust GEX system through the exhaust unit to complete exhaust. The device is used for removing dust on the surface of the FFU filter, the speed is high, operation is convenient, and manpower is saved; the service life of the filter is greatly prolonged, the factory operation cost is reduced, the operation static pressure of the FFU is reduced, and the energy-saving effect is obvious; and the ultraviolet germicidal lamp is adopted for sterilization, so that the surfaces of the filter and the FFU are not corroded.

Description

Technical Field

[0001] The utility model belongs to the technical field of the installation of ultra-clean workshops for integrated circuit chip manufacturing, and particularly relates to a dust removal and sterilization device for high-efficiency air filters in a chip workshop clean room. Background Art

[0002] A fan filter unit (FFU) is a self-powered air supply and filtering device, and also a modular terminal air supply device with filtering effect. In a large-scale integrated circuit chip manufacturing ultra-clean workshop, the cleanliness level is high, the FFU circulating air volume is very large, and the number of filters is very large. The filters in the FFU generally operate for about 2 years. Once the service time exceeds the limit, the filter dust will be severely blocked. In the past, during the normal production period of chip factories, the FFU filters were generally not dusted and cleaned. When the filter was blocked until the air volume could not meet the air change rate requirement of the clean room, it was replaced. There are the following disadvantages: 1. The filter life is short, and the plant operation cost is high; 2. The pressure loss is large, resulting in a decrease in the air supply volume, lower than the design air change rate requirement; 3. The static pressure of the filter fan operation is large, the power consumption is large, and the operation energy consumption is high; 4. There is no filter sterilization, the microbial reproduction is fast, and the filter is easily blocked; 5. The replacement cost is high. Content of the Utility Model

[0003] In view of this, the purpose of the utility model is to provide a dust removal and sterilization device for high-efficiency air filters in a chip workshop clean room to solve the deficiencies in the prior art.

[0004] To achieve the above purpose, the utility model is realized through the following technical solutions:

[0005] Provide a dust removal and sterilization device for high-efficiency air filters in a chip workshop clean room, which includes a differential pressure alarm unit, a sterilization unit, an exhaust unit and a control box. The control box is connected to the sterilization unit and the exhaust unit. The differential pressure alarm unit monitors the differential pressure between the inlet and outlet sides of the air filter. The sterilization unit is arranged on the inlet side of the air filter. After the sterilization unit finishes sterilization, it is connected to the external process exhaust GEX system through the exhaust unit to complete exhaust.

[0006] As the dust removal and sterilization device for high-efficiency air filters in the chip workshop clean room, the differential pressure alarm unit includes a differential pressure sensor and a differential pressure alarm display connected to each other.

[0007] As the dust removal and sterilization device for high-efficiency air filters in the chip workshop clean room, the sterilization unit includes ultraviolet germicidal lamps.

[0008] As described in the dust removal and sterilization device for high-efficiency air filters in the cleanroom of the chip factory building, wherein the exhaust unit includes a connecting pipe, an exhaust air duct, a wind pressure transmitter, a manual regulating valve, and an electric regulating valve. The air filter, the connecting pipe, and the exhaust air duct are connected in sequence. The wind pressure transmitter monitors the negative pressure value in the exhaust air duct. The manual regulating valve and the electric regulating valve are arranged on the exhaust air duct. The control box is connected to the electric regulating valve and the wind pressure transmitter.

[0009] As described in the dust removal and sterilization device for high-efficiency air filters in the cleanroom of the chip factory building, wherein the connecting pipe is an aluminum telescopic hose, and the exhaust air duct is a galvanized steel round pipe.

[0010] The beneficial effects of the technical solution of the present utility model are as follows:

[0011] Using this device to remove dust on the surface of the FFU filter is fast, convenient to operate, and saves manpower; the dust removal frequency is high, which greatly extends the service life of the filter, reduces the operation cost of the factory facilities, the static pressure of the FFU operation is reduced, and the energy-saving effect is obvious; using ultraviolet germicidal lamps for sterilization has no corrosion on the surface of the filter and the FFU. Description of the Drawings

[0012] To further illustrate the above-mentioned objects, structural features, and effects of the present utility model, the present utility model will be described in detail below with reference to the drawings.

[0013] Figure 1 It is a schematic structural diagram of a preferred embodiment of the present utility model;

[0014] In the figure: 1. Control box; 2. Air filter; 3. Differential pressure sensor; 4. Differential pressure alarm display; 5. Ultraviolet germicidal lamp; 6. Connecting pipe; 7. Exhaust air duct; 8. Wind pressure transmitter; 9. Manual regulating valve; 10. Electric regulating valve; 11. On-site display negative pressure gauge. Detailed Embodiments

[0015] The term "utility model" and "the present utility model" used in this specification are intended to broadly refer to all the subject matters of this specification and any subsequent patent claims. Statements containing these terms should not be construed as limiting the subject matter described herein or the meaning or scope of any subsequent patent claims. In addition, this specification does not attempt to describe or limit the subject matter covered by any specific component, paragraph, statement, or claim of this application. The subject matter should be understood with reference to the entire specification, all the drawings, and any subsequent claims. The present utility model may have other embodiments and be practiced or implemented in other ways. Moreover, it should be understood that the wording and terms used herein are for illustrative purposes and should not be considered limiting.

[0016] Details of the present utility model will now be discussed with reference to the drawings which illustrate the present utility model by way of example only. In the drawings, like features or components may be labeled with the same reference numerals.

[0017] As used herein, the use of "comprising", "having", "including" and their variants means including the items listed hereinafter, their equivalents and additional items. Although directions such as above, below, upward, downward, backward, bottom, top, front, back, etc. may be referred to in the description of the drawings, for convenience, reference is made to the drawings. These directions are not intended to be literally accepted or limit the present utility model in any way. In addition, terms such as "first", "second", "third", etc. are used herein for illustrative purposes and are not intended to indicate or imply importance or significance.

[0018] Referring to Figure 1 As shown, in the preferred embodiment, the dust removal and sterilization device for the high-efficiency air filter in the chip factory clean room of the present utility model includes a differential pressure alarm unit, a sterilization unit, an exhaust unit and a control box 1. The control box 1 is connected to the sterilization unit and the exhaust unit. The differential pressure alarm unit monitors the differential pressure between the inlet and outlet sides of the air filter 2 (with an FFU box). The sterilization unit is arranged on the inlet side of the air filter 2. After the sterilization unit finishes sterilization, it is connected to the external process exhaust GEX system through the exhaust unit to complete the exhaust.

[0019] Further, the differential pressure alarm unit includes a differential pressure sensor 3 and a differential pressure alarm display 4 which are connected to each other. The differential pressure sensor 3 adopts QBM2130-1U, and its high and low pressure interfaces are correctly connected to the FFU reserved interfaces. The differential pressure alarm display 4 adopts Siemens QD-HTP818 / 823 / 830 / 840A / B, and the dust-free workshop differential pressure gauge display alarm differential pressure board QD-P818A ordinary model 350×120×50mm. Generally, for every 300 - 400m 2 of the clean area FFU filter, one differential pressure sensor 3 and differential pressure alarm display 4 are provided. The differential pressure alarm display 4 is centrally installed on the control room board. If the differential pressure of 1 FFU filter exceeds the standard, the FFU filters in the surrounding 300 - 400m 2 area need to remove dust.

[0020] The sterilization unit includes an ultraviolet germicidal lamp 5. The ultraviolet germicidal lamp 5 is composed of an ultraviolet germicidal lamp tube, a lamp holder, a driver, etc., with a power of 30W and a length of 92cm, and is used for sterilizing the 1200×1200mm and 1200×600mm FFU filters. The control box 1 can control the on and off of the ultraviolet germicidal lamp 5, and uses RVV 2×1.5 control wires to control the ultraviolet germicidal lamp 5.

[0021] The exhaust unit includes a connecting pipe 6, an exhaust air duct 7, a wind pressure transmitter 8, a manual regulating valve 9, and an electric regulating valve 10. The air filter 2, the connecting pipe 6, and the exhaust air duct 7 are connected in sequence. The wind pressure transmitter 8 monitors the negative pressure value in the exhaust air duct 7. The manual regulating valve 9 and the electric regulating valve 10 are arranged on the exhaust air duct 7. The control box 1 is connected to the electric regulating valve 10 and the wind pressure transmitter 8. The manual regulating valve 9 has a size of φ300mm and is made of galvanized steel, and is connected to the discharge (Take Off) point of the exhaust system. The electric regulating valve 10 has a size of φ300mm and is made of galvanized steel. The electric regulating valve 10 is provided with a reserved wiring socket for quick connection to the control box 1 before dust removal. The connecting pipe 6 uses a φ300mm aluminum telescopic hose, and is fixed to the air inlet of the FFU box body by a nylon cloth soft connection with a connecting flange, for quickly connecting the aluminum telescopic hose. The length of the aluminum telescopic hose is 20m, which is convenient for one exhaust system discharge point to dust 30 - 40 FFU filters. The exhaust pipe, valve parts, etc. are connected by flange bolts and nuts. The exhaust air duct 7 is a galvanized steel round pipe, specifically a φ300mm galvanized steel round pipe with a length of 1m.

[0022] The control box 1 includes electrical components such as a PLC controller, input and output modules, a stainless steel automatic control box body, and an alarm speaker. The power supply of the control box 1 is connected to the maintenance power supply near the FFU. The actuator of the electric regulating valve 10 uses Siemens GDB GLB161.1E341.1E, and the electric air valve actuator switch is an analog adjustment type of 5NM GDB341.9E. The wind pressure transmitter 8 uses Siemens QBM2030 - 30, and transmits the wind pressure of the exhaust air duct in real time. If the wind pressure exceeds the limit, the controller in the control box 1 automatically adjusts the opening degree of the electric regulating valve 10 to control the wind pressure within the set value range. A on - site display negative pressure gauge 11 is also connected to the exhaust air duct 7. The on - site display negative pressure gauge 11 uses a range of - 500Pa to 500Pa, which is convenient for on - site operators to monitor the wind pressure of the exhaust air 7. If it exceeds the rated wind pressure of the filter, manually close the manual regulating valve 9 emergently. The signal line uses RVV 2×1.0 to transmit the wind pressure and filter differential pressure signals of the exhaust pipe 7, and the control line uses RVV 2×1.5 to control the power supply of the electric regulating valve 10.

[0023] The working process and principle of this device are as follows:

[0024] a. When the FFU filter is blocked, the differential pressure between the inlet and outlet sides continuously increases and reaches the dust removal set boundary value. The differential pressure sensor 3 sends a signal to the differential pressure alarm display 4, and the differential pressure alarm display 4 issues an alarm for the filter differential pressure exceeding the limit, reminding that dust removal and cleaning are required;

[0025] b. When the monitoring personnel see the differential pressure alarm, they notify the operator that there is an FFU filter that needs dust removal;

[0026] c. The operator closes the FFU that needs dust removal through the control system;

[0027] d. Place the ultraviolet germicidal lamp 5 on the air inlet side of the FFU filter to be dust-removed, connect the control wire, turn on the germicidal switch on the controller, and sterilize the surface of the filter;

[0028] e. After the ultraviolet germicidal lamp 5 has been turned on for 15 minutes, turn off the germicidal switch and remove the germicidal lamp from the FFU;

[0029] f. Move the reserved aluminum telescopic hose nearby to the upper part of the FFU to be dust-removed, and make a sealed connection with the nylon cloth flexible connection reserved on the FFU;

[0030] g. Manually open the manual regulating valve 9 on the exhaust pipe, turn on the control switch of the controller to open the electric regulating valve 10, and the exhaust system starts to exhaust through the FFU filter and the aluminum telescopic hose, entraining the dust on the filter surface and discharging it to the outside through the exhaust system; After exhausting for 15 minutes, the dust on the filter surface is basically cleared, and turn off the manual regulating valve 9 and the electric regulating valve 10;

[0031] h. Remove the nylon cloth flexible connection and the aluminum telescopic hose on the FFU. Move the aluminum telescopic hose to the next FFU, and use the same operation process to remove the dust from the filter;

[0032] i. When the FFU filter is exhausting and dust-removing, if the negative pressure in the exhaust air duct exceeds the limit value, the wind pressure transmitter 8 will send a signal to the controller, and the alarm device of the controller will be turned on. At the same time, the opening degree of the electric regulating valve 10 will be automatically adjusted smaller; If the negative pressure in the air duct exceeds the limit value and the controller fails to act, the operator will manually adjust the manual regulating valve 9 according to the reading of the displayed negative pressure gauge to control the wind pressure within the set value range.

[0033] To maintain the overall air volume balance in the clean area, the automatic control system of the clean area air conditioner automatically increases the fresh air volume to make up for the exhaust air volume of dust removal; To maintain the pressure difference stability in the clean area, generally only 1 FFU filter is dust-removed at the same time.

[0034] Using this device to remove the dust on the surface of the FFU filter is fast, convenient to operate, labor-saving, has a high dust removal frequency, has a germicidal and disinfection function, the service life of the FFU filter is long, and the cost is greatly reduced. The static pressure of the FFU operation is reduced, and the energy-saving effect is good.

[0035] The above is only a preferred embodiment of the present utility model, and it does not limit the implementation manner and protection scope of the present utility model. For those skilled in the art, it should be able to realize that all equivalent replacements and obvious changes made by using the content of the specification and drawings of the present utility model should be included in the protection scope of the present utility model.

Claims

1. An efficient air filter dust removal and sterilization device for a chip factory clean room, characterized in that, It includes a differential pressure alarm unit, a sterilization unit, an exhaust unit and a control box. The control box is connected to the sterilization unit and the exhaust unit. The differential pressure alarm unit monitors the differential pressure between the inlet and outlet sides of the air filter. The sterilization unit is arranged on the inlet side of the air filter. After the sterilization unit finishes sterilization, it is connected to the external process exhaust GEX system through the exhaust unit to complete exhaust.

2. The dust removal and sterilization device for high-efficiency air filters in the clean room of the chip factory as described in claim 1, wherein, The differential pressure alarm unit includes a differential pressure sensor and a differential pressure alarm display that are connected to each other.

3. The dust removal and sterilization device for the high-efficiency air filter in the clean room of the chip factory as described in claim 1, wherein The sterilization unit includes ultraviolet germicidal lamps.

4. The high-efficiency air filter dust removal and sterilization device for the clean room of the chip factory according to claim 1, characterized in that, The exhaust unit includes a connecting pipe, an exhaust air duct, a wind pressure transmitter, a manual regulating valve and an electric regulating valve. The air filter, the connecting pipe and the exhaust air duct are connected in sequence. The wind pressure transmitter monitors the negative pressure value in the exhaust air duct. The manual regulating valve and the electric regulating valve are arranged on the exhaust air duct. The control box is connected to the electric regulating valve and the wind pressure transmitter.

5. The dust removal and sterilization device for the high-efficiency air filter in the clean room of the chip factory according to claim 4, characterized in that, The connecting pipe is an aluminum telescopic hose, and the exhaust air duct is a galvanized steel round pipe.

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