Liquid atomization device

Abstract

The utility model provides a liquid atomizing device, which comprises a liquid source, a liquid atomizing device and a liquid atomizing device, one end of the first pipeline is communicated with a liquid source; the atomization module is arranged in the first pipeline and is used for carrying out atomization treatment on the liquid; the atomization detection module is arranged in the first pipeline, is positioned behind the atomization module and is used for detecting the atomization degree of the liquid; the controlled three-way valve is provided with an inlet, a first outlet and a second outlet, the inlet is communicated with the other end of the first pipeline, and the first outlet is communicated with the reaction chamber; one end of the second pipeline is communicated with the second outlet, and the other end of the second pipeline is coupled in the first pipeline and located in front of the atomization module or in the atomization module; the controller is connected with the atomization detection module and the controlled three-way valve and used for opening the first opening and closing the second opening according to the atomization degree of the liquid larger than or equal to a preset value and opening the second opening and closing the first opening according to the atomization degree of the liquid smaller than the preset value. According to the utility model, the defects of the film layer caused by atomization can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a liquid atomization device. Background Art

[0002] In the semiconductor integrated circuit manufacturing process, it is necessary to atomize various liquids into tiny droplets for deposition processes or to form intermediate products.

[0003] For example, due to the good step coverage and low cost of tetraethyl orthosilicate (TEOS), TEOS can be used for depositing silicon dioxide; or triethyl phosphate (TEPO) can be used to generate phosphosilicate glass or borophosphosilicate glass, which can be used to form an interlayer dielectric layer. Taking the atomization process of tetraethyl orthosilicate as an example, after tetraethyl orthosilicate is mixed with a carrier gas through an injection valve, it is atomized by a heating belt composed of multiple heating blocks (the heating temperature is, for example, 140°C to 155°C), and then enters the reaction chamber.

[0004] However, the film layers deposited by the process gas input through the above atomization process often have defects (such as Bump defect, bulge defect). Summary of the Invention

[0005] The purpose of the utility model is to provide a liquid atomization device to reduce the defects of the film layer caused by atomization.

[0006] To solve the above technical problems, the liquid atomization device provided by the present invention includes:

[0007] A liquid source for providing liquid;

[0008] A first pipeline, one end of which is communicated with the liquid source;

[0009] An atomization module disposed in the first pipeline for atomizing the liquid;

[0010] An atomization detection module disposed in the first pipeline and behind the atomization module for detecting the atomization degree of the liquid;

[0011] A controlled three-way valve having an inlet, a first outlet and a second outlet, the inlet being communicated with the other end of the first pipeline, and the first outlet being communicated with the reaction chamber;

[0012] A second pipeline, one end of which is communicated with the second outlet, and the other end is coupled to the first pipeline and in front of or in the atomization module;

[0013] A controller, connected to the atomization detection module and the controlled three-way valve, is configured to open the first outlet and close the second outlet according to the atomization degree of the liquid being greater than or equal to a preset value, and open the second outlet and close the first outlet according to the atomization degree of the liquid being less than the preset value.

[0014] Optionally, the atomization module includes a heating atomization unit and an ultrasonic atomization unit.

[0015] Optionally, the ultrasonic atomization unit is located in the first pipeline before the heating atomization unit.

[0016] Optionally, it further includes an injection valve and a carrier gas input pipeline. The injection valve is arranged on the first pipeline near the liquid source, and the carrier gas input pipeline is connected to the injection valve for inputting carrier gas.

[0017] Optionally, the second pipeline is coupled to the first pipeline before the atomization module.

[0018] Optionally, the second pipeline is coupled to the first pipeline before the injection valve.

[0019] Optionally, a pumping and exhausting unit is further arranged on the second pipeline. The pumping and exhausting unit is connected to the controller and is configured to convey the liquid at the second outlet to the first pipeline when the second outlet is opened.

[0020] Optionally, the controlled three-way valve includes a three-way solenoid valve.

[0021] Optionally, the atomization detection module includes a spray particle size analyzer.

[0022] Optionally, the atomization module is further connected to the controller and is configured to control the power of the atomization module according to the atomization degree of the liquid.

[0023] In summary, the present invention provides a liquid atomization device, which arranges an atomization detection module, a controlled three-way valve, a second pipeline and a controller in the pipeline after the atomization module. The inlet of the controlled three-way valve is connected after the atomization detection module. One outlet of the controlled three-way valve is connected to the reaction chamber, and the other outlet is connected to the pipeline in or before the atomization module through the second pipeline. The atomization detection module detects the atomization degree of the liquid after the atomization module. The controller controls the controlled three-way valve according to whether the atomization degree of the liquid meets the requirements, and decides to input the liquid into the reaction chamber or re-atomize it through the second pipeline, thereby preventing uncompletely atomized liquid from being input into the reaction chamber to cause defects, and at the same time ensuring the full utilization of the liquid (material utilization rate). Description of the Drawings

[0024] Those of ordinary skill in the art should understand that the provided drawings are used to better understand the present utility model without imposing any limitation on the present utility model. Among them:

[0025] Figure 1 is a schematic structural diagram of a liquid atomization device provided by an embodiment of the present utility model.

[0026] In the drawings: 10 - liquid source; 11 - liquid transmission pipeline; 20 - first pipeline; 201 - first end; 202 - second end; 21 - injection valve; 22 - carrier gas transmission pipeline; 23 - atomization module; 23a - ultrasonic atomization unit; 23b - heating atomization unit; 24 - atomization detection module; 25 - controlled three-way valve; 251 - inlet; 252 - first outlet; 253 - second outlet; 30 - second pipeline; 31 - exhaust unit; 40 - reaction chamber; 41 - gas transmission pipeline; 50 - controller. Detailed implementation manners

[0027] As described in the background art, after analyzing the defects in the film layer, it is found that the defects are caused by incomplete atomization (insufficient atomization) of some of the input liquid, resulting in its inability to fully participate in the reaction and remaining in the film layer. For this reason, the present utility model provides a liquid atomization device, which is provided with an atomization detection module, a controlled three-way valve, a second pipeline and a controller in the pipeline after the atomization module. The inlet of the controlled three-way valve is connected after the atomization detection module. One outlet of the controlled three-way valve is connected to the reaction chamber, and the other outlet is connected to the pipeline in or before the atomization module through the second pipeline. The atomization detection module detects the atomization degree of the liquid after the atomization module. The controller controls the controlled three-way valve according to whether the atomization degree of the liquid meets the requirements, and decides to input the liquid into the reaction chamber or re-atomize it through the second pipeline, so as to prevent the incompletely atomized liquid from being input into the reaction chamber to cause defects, and at the same time ensure the full utilization of the liquid (material utilization rate).

[0028] To make the objectives, advantages and features of the present utility model clearer, the present utility model will be further described in detail below with reference to the drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and not drawn to scale, and are only used to conveniently and clearly assist in explaining the objectives of the embodiments of the present utility model. In addition, the structures shown in the drawings are often part of the actual structures. In particular, the emphasis to be shown in each drawing is different, and sometimes different scales are used.

[0029] It should be understood that when an element or layer is referred to as "on", "connected to" another element or layer, it can be directly on the other element or layer, connected to the other element or layer, or there may be intervening elements or layers. In contrast, when an element is referred to as "directly on", "directly connected to" another element or layer, there are no intervening elements or layers. Although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Thus, without departing from the teachings of the present utility model, the first element, component, region, layer or part discussed below may be referred to as the second element, component, region, layer or part. Spatial relationship terms such as "under", "below", "lower", "on", "above", "upper", etc. may be used herein for convenience of description to describe the relationship of one element or feature shown in the figure to other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relationship terms are intended to also include different orientations of the device during use and operation. For example, if the device in the drawing is flipped, then the element or feature described as "under", "below", "lower" will be oriented "on" the other elements or features. The device may be otherwise oriented (rotated 90 degrees or other orientations) and the spatial descriptors used herein are to be interpreted accordingly. The purpose of the terms used herein is only to describe specific embodiments and is not a limitation of the present utility model. When used herein, the singular forms of "a", "an" and "the" are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "comprising" is used to identify the presence of features, steps, operations, elements and / or components, but does not preclude the presence or addition of one or more other features, steps, operations, elements, components and / or groups. When used herein, the term "and / or" includes any and all combinations of the associated listed items.

[0030] This embodiment provides a liquid atomization device.

[0031] Figure 1 It is a schematic structural diagram of the liquid atomization device provided by this embodiment.

[0032] As Figure 1 shown, the liquid atomization device provided by this embodiment includes a liquid source 10, a first pipeline 20, an atomization module 23, an atomization detection module 24, a controlled three-way valve 25, a second pipeline 30 and a controller 50.

[0033] Among them, the liquid source 10 is used to provide the liquid to be atomized. The first pipeline 20 may include a first end 201 close to the liquid source 10 and a second end 202 close to the reaction chamber 40. The first end 201 of the first pipeline 20 and the liquid source 10 may be connected through a liquid transmission pipeline 11. A filtration module and / or a flow control module, etc. may be provided on the liquid transmission pipeline 11. Of course, in some examples, the liquid transmission pipeline 11 may also be regarded as a part of the first pipeline 20.

[0034] Please continue to refer to Figure 1 , a spray valve 21 and an atomization module 23 are successively provided on the first pipeline 20. The spray valve 21 is arranged close to the liquid source 10 (liquid transmission pipeline 11), or connected to the first end 201 of the first pipeline 20. The carrier gas input pipeline is communicated with the spray valve 21 to input carrier gas to the spray valve 21, and the preliminary atomization of the liquid is realized by mixing with the carrier gas and spraying. The carrier gas may include helium, argon or other gases for atomization. The atomization module 23 is arranged in the first pipeline 20 after the spray valve 21, and is used for atomizing the liquid and forming atomized liquid (gas).

[0035] In this embodiment, the atomization module 23 preferably includes a heating atomization unit 23b and an ultrasonic atomization unit 23a, and atomizes the liquid by both heating and ultrasonic methods to ensure the atomization effect of the liquid. Among them, the heating atomization unit 23b may include multiple (at least two) heating blocks, and / or the ultrasonic atomization unit 23a may include multiple (at least two) ultrasonic atomizers, so that when some heating blocks and / or some ultrasonic atomizers work abnormally, the atomization degree (atomization degree) of the atomized liquid can still be ensured.

[0036] Furthermore, when setting the heating atomization unit 23b and the ultrasonic atomization unit 23a, the ultrasonic atomization unit 23a is preferably arranged before (the front section of) the heating atomization unit 23b to facilitate improving the atomization effect.

[0037] Please continue to refer to Figure 1 , an atomization detection module 24 is further provided after the atomization module 23 in the first pipeline 20, and is used for detecting the atomization degree of the atomized liquid and outputting the atomization degree of the current liquid. The atomization detection module 24 is preferably arranged close to the second end 202, that is, close to the reaction chamber 40, to ensure the atomization degree of the liquid input into the reaction chamber 40. In one example, the atomization detection module 24 may include a spray particle size analyzer (or other spray detectors), and the atomization degree is reflected by detecting the particle size (size) of the atomized liquid.

[0038] Please continue to refer to Figure 1, a controlled three-way valve 25 is provided at the second end 202 of the first pipeline 20. The controlled three-way valve 25 has an inlet 251 and two outlets, namely a first outlet 252 and a second outlet 253. The inlet 251 can communicate with the second end 202 of the first pipeline 20. The first outlet 252 is communicated with the reaction chamber 40 through a gas delivery pipeline for inputting the atomized liquid into the reaction chamber 40. The second outlet 253 is connected to one end of the second pipeline 30 for discharging the unqualified atomized liquid. During normal operation, the two outlet parts of the controlled three-way valve 25 are opened or closed simultaneously, that is, only one of the outlets is in the open state, while the other outlet is in the closed state. In one example, the controlled three-way valve 25 can be a three-way solenoid valve or a structure with a similar function, such as two two-way solenoid valves connected in parallel.

[0039] Please continue to refer to Figure 1 , one end of the second pipeline 30 is communicated with the second outlet 253, and the other end is coupled in the first pipeline 20 and is in front of or in the atomization module 23, for guiding the unqualified atomized liquid back to the first pipeline 20 for re-atomization, so as to improve the material utilization rate and prevent pollution. In one example, the second pipeline 30 can guide the unqualified atomized liquid back to the first pipeline 20 before the atomization module 23, that is, the second pipeline 30 is coupled to the first pipeline 20 before the atomization module 23, such as the first pipeline 20 before the injection valve 21 or the liquid transmission pipeline 11, or the first pipeline 20 between the injection valve 21 and the atomization module 23. In specific implementation, the second pipeline 30 can be preferably arranged in the first pipeline 20 or the liquid transmission pipeline 11 before the injection valve 21 and is arranged close to the injection valve 21. In addition, a pumping and discharging unit 31 can also be provided on the second pipeline 30 for quickly conveying the liquid at the second outlet 253 to the first pipeline 20 when the second outlet 253 is opened and preventing the liquid in the first pipeline 20 from entering the second pipeline 30 from the coupling part with the second pipeline 30.

[0040] Please continue to refer to Figure 1, the controller 50 is signal - connected to the atomization detection module 24 and the controlled three - way valve 25. The controller 50 is used to receive the atomization degree information of the liquid output by the atomization detection module 24 and compare it with the preset value stored. If the atomization degree of the liquid is greater than or equal to the preset value, it emits a first signal; if the atomization degree of the liquid is less than the preset value, it emits a second signal. The controlled three - way valve 25, in response to (receiving) the first signal, performs the operation of opening the first outlet 252 and closing the second outlet 253; in response to the second signal, it performs the operation of opening the second outlet 253 and closing the first outlet 252. In one example, a pumping and exhausting unit 31 is provided in the second pipeline 30. The pumping and exhausting unit 31 can be signal - connected to the controller 50 and is in a closed state in response to the first signal and in an open state in response to the second signal. In another example, the atomization module 23 or some atomization units in the atomization module 23 can be signal - connected to the controller 50 and slightly increase their atomization power in response to the second signal and keep their atomization power unchanged in response to the first signal. Specifically, the controller 50 may include a preset value setting unit, an atomization degree receiving unit, an atomization degree comparison unit, and a signal generating unit. The preset value setting unit is used to set the minimum atomization degree (the first preset value) for qualified liquid atomization. The atomization degree receiving unit is used to receive the atomization degree detected by the atomization detection module 24. The atomization degree comparison unit is used to compare the detected atomization degree with the preset value. The signal generating unit is used to emit corresponding signals. Of course, at least one second preset value greater than the first preset value can also be set in the preset value setting unit. When the atomization degree comparison unit determines that the detected atomization degree is between the first preset value and the second preset value, the signal generating unit emits an audible and visual alarm signal to remind the engineer, achieving a warning effect.

[0041] It can be understood that the liquid atomization device provided in this embodiment ensures the qualified atomization degree of the liquid entering the reaction chamber 40 through real - time monitoring, which can not only solve the problem that it is difficult to detect and automatically solve the abnormality of the atomization module 23 in a timely manner, but also solve the problem that the atomization degree of some liquids is unqualified when the liquid atomization device is just turned on (starting to work).

[0042] In summary, the present utility model provides a liquid atomization device, which sets an atomization detection module, a controlled three - way valve, a second pipeline, and a controller in the pipeline after the atomization module. The inlet of the controlled three - way valve is connected after the atomization detection module. One outlet of the controlled three - way valve is connected to the reaction chamber, and the other outlet is connected to the pipeline in or before the atomization module through the second pipeline. The atomization detection module detects the atomization degree of the liquid after the atomization module. The controller controls the controlled three - way valve according to whether the atomization degree of the liquid meets the requirements, determining whether to input the liquid into the reaction chamber or re - atomize it through the second pipeline, thereby preventing un - fully atomized liquid from being input into the reaction chamber and causing defects, and at the same time ensuring the full utilization of the liquid (material utilization rate).

[0043] The above description is only a description of the preferred embodiments of the present utility model, and does not impose any limitation on the scope of the present utility model. Any changes and modifications made by those of ordinary skill in the art of the present utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A liquid atomization device, characterized in that, Comprising: A liquid source for providing liquid; A first pipeline, one end of which is communicated with the liquid source; An atomization module disposed in the first pipeline for atomizing the liquid; An atomization detection module disposed in the first pipeline and behind the atomization module for detecting the atomization degree of the liquid; A controlled three-way valve having an inlet, a first outlet and a second outlet, the inlet being communicated with the other end of the first pipeline, and the first outlet being communicated with a reaction chamber; A second pipeline, one end of which is communicated with the second outlet, and the other end of which is coupled to the first pipeline in front of or in the atomization module; A controller connected to the atomization detection module and the controlled three-way valve for opening the first outlet and closing the second outlet according to the atomization degree of the liquid being greater than or equal to a preset value, and opening the second outlet and closing the first outlet according to the atomization degree of the liquid being less than the preset value.

2. The liquid atomizing device according to claim 1, characterized in that, The atomization module includes a heating atomization unit and an ultrasonic atomization unit.

3. The liquid atomization device according to claim 2, wherein The ultrasonic atomization unit is located in the first pipeline before the heating atomization unit.

4. The liquid atomization device according to claim 1, wherein It further includes an injection valve and a carrier gas input pipeline, the injection valve is disposed on the first pipeline near the liquid source, and the carrier gas input pipeline is communicated with the injection valve for inputting carrier gas.

5. The liquid atomization device according to claim 4, characterized in that, The second pipeline is coupled to the first pipeline before the atomization module.

6. The liquid atomizing device according to claim 5, characterized in that, The second pipeline is coupled to the first pipeline before the injection valve.

7. The liquid atomization device according to claim 1, characterized in that A pumping and exhausting unit is further disposed on the second pipeline, and the pumping and exhausting unit is connected to the controller for conveying the liquid at the second outlet to the first pipeline when the second outlet is opened.

8. The liquid atomization device according to claim 1, wherein, The controlled three-way valve includes a three-way solenoid valve.

9. The liquid atomizing device according to claim 1, wherein The atomization detection module includes a spray particle size analyzer.

10. The liquid atomization device according to claim 1, characterized in that, The atomization module is further connected to the controller for controlling the power of the atomization module according to the atomization degree of the liquid.

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