Hanging tool and mechanical arm

Abstract

The utility model relates to the technical field of transportation hanging tools, in particular to a hanging tool and a mechanical arm. The hanger is used for hanging a carrier of a silicon wafer, and the carrier is provided with a hanging structure. The hanger comprises a hanger body and a detection assembly. The hanger main body is configured to be matched with a hanging structure so as to hang a carrier, the hanger main body is provided with a mounting concave part and a gas channel which are communicated with each other, and the gas channel is configured to be connected to a gas source so as to blow flowing gas into the mounting concave part. The detection assembly is arranged in the mounting concave part and is positioned in an area where the hanger main body is matched with the hanging structure; the detection assembly is configured to detect the hanging state of the hanging structure so as to determine the hanging state of the carrier. In order to prevent excessive crystals from influencing the sensitivity of the detection assembly, the hanger blows out flowing gas into the mounting concave part through the gas channel, so that the crystals in the mounting concave part are reduced, and the crystals in the mounting concave part are less, thereby being beneficial to improving the sensitivity of the detection assembly.

Description

Technical Field

[0001] This application relates to the technical field of transportation fixtures, and particularly to a fixture and a robotic arm. Background Art

[0002] During the production process of solar cells, fixtures are mainly used to hang carriers for wafers, and the above carriers are, for example, flower baskets. In order to determine whether a carrier is hung on a fixture, a detection device is provided on the fixture. When the fixture is loaded with a carrier, the detection device is triggered to identify the carrier. However, during the transportation process, the fixture inevitably comes into contact with the chemicals used in the processing of solar cells, and the chemicals crystallize on the fixture, thereby affecting the sensitivity of the detection device on the fixture and causing abnormal detection. Summary of the Utility Model

[0003] Embodiments of this application disclose a fixture and a robotic arm, which can improve the accuracy and reliability of the detection component.

[0004] To achieve the above object, in a first aspect, embodiments of this application disclose a fixture for hanging a carrier for wafers, and the carrier has a hanging structure; the fixture includes:

[0005] A fixture main body configured to cooperate with the hanging structure to hang the carrier. An installation recess and a gas channel are provided on the fixture main body and are in communication with each other. The gas channel is configured to be connected to a gas source to blow flowing gas into the installation recess; and

[0006] A detection component provided in the installation recess and located in the area where the fixture main body cooperates with the hanging structure; the detection component is configured to detect the hanging state of the hanging structure to determine the hanging state of the carrier.

[0007] In a possible implementation manner of the first aspect, the detection component includes a corresponding movable member and a plurality of detection elements. The plurality of detection elements and the movable member are both provided in the installation recess. The movable member protrudes from the installation recess and is located in the area where the fixture main body cooperates with the hanging structure; the movable member is configured to be pressed by the hanging structure to approach the detection element when the fixture main body cooperates with the hanging structure.

[0008] In a possible implementation manner of the first aspect, the installation recess has an inner sidewall, and the side surface of the movable member is in clearance fit with the inner sidewall, and the air outlet end of the gas channel is located on the inner sidewall.

[0009] In a possible implementation of the first aspect, the detection element is a weight detection element, the movable member is carried on a plurality of the weight detection elements, the movable member is configured to carry the hanging structure, and the weight detection element is configured to detect the weight carried on the movable member.

[0010] In a possible implementation of the first aspect, the detection assembly further includes a plurality of elastic members. One end of each elastic member is connected to the movable member, and the other end of each elastic member away from the movable member is respectively connected to each detection element. The movable member is carried on a plurality of the detection elements through a plurality of the elastic members. The elastic member is configured to be compressed when the movable member is pressed, and the elastic member is further configured to drive the movable member to reset when it rebounds.

[0011] In a possible implementation of the first aspect, the hanger further includes a blocking member, and the blocking member is movably arranged on the hanger body and has a blocking position and an avoidance position;

[0012] When the blocking member is in the blocking position, it protrudes from the side of the hanger body that cooperates with the hanging structure to block the hanging structure from detaching from the hanger body;

[0013] The blocking member is further configured to avoid the side of the hanger body that cooperates with the hanging structure when in the avoidance position, so that the hanger body cooperates with the hanging structure.

[0014] In a possible implementation of the first aspect, the hanger further includes:

[0015] A motor, the motor is arranged on the hanger body, the blocking member is drivingly connected to the motor, and the motor is configured to drive the blocking member to rotate; and

[0016] An induction element, the induction element is arranged in the installation recess, a part of the detection assembly is movably arranged in the installation recess, and the detection assembly is further configured to, when the hanger body cooperates with the hanging structure, a part of the detection assembly is pressed into the installation recess to trigger the induction element. The induction element is configured to control the motor to drive the blocking member to rotate to the blocking position when triggered, and to control the motor to drive the blocking member to rotate to the avoidance position when not triggered.

[0017] In a possible implementation of the first aspect, the hanger body has a free end and a fixed end arranged opposite to each other. The fixed end is configured to fix the hanger body, the free end is configured to be inserted into the hanging structure, and the upper side of the hanger body is configured to cooperate with the hanging structure;

[0018] The motor is arranged on the free end. The blocking member has a connecting end and a protruding end which are oppositely arranged. The connecting end is drivingly connected to the motor, and the protruding end rotates around the connecting end. When the blocking member is in the blocking position, the protruding end protrudes relative to the upper side of the hanger body. When the blocking member is in the avoiding position, the protruding end is located below the upper side of the hanger body.

[0019] In a possible implementation manner of the first aspect, the hanger body is a cylinder, the carrier is a flower basket, the hanging structure is a hanging ear arranged on the flower basket, and the cylinder is configured to cooperate with the hanging ear to hang the flower basket.

[0020] And / or, the installation recess is an installation groove.

[0021] And / or, the gas channel penetrates through the hanger body and extends to the installation recess.

[0022] And / or, the air inlet end of the gas channel is exposed at the fixed end of the hanger body, and the fixed end is configured to fix the hanger body.

[0023] In a second aspect, an embodiment of the present application discloses a robotic arm, including a robotic arm main body and the hanger as described in the first aspect, and the hanger is arranged on the robotic arm main body. The robotic arm main body includes a connecting member and two oppositely arranged brackets, and two ends of the connecting member are respectively fixedly connected to the two brackets.

[0024] Each of the brackets has a bifurcated structure. Each bifurcated structure includes a plurality of branches, and through holes are provided on each branch. The fixed ends of each hanger body respectively pass through the through holes and are exposed outside the brackets.

[0025] Compared with the prior art, the beneficial effect of the present application is that the hanger body of the hanger cooperates with the hanging structure to hang the carrier. In order to accurately determine the hanging state of the carrier, a detection component is arranged in the area where the hanger body and the hanging structure cooperate, but the setting area of the detection component frequently contacts the hanging structure and is prone to sticking crystals.

[0026] In order to avoid excessive crystallization from affecting the sensitivity of the detection component, the hanger blows flowing gas into the installation recess through the gas channel. The flowing gas can maintain a positive pressure in the installation recess, making it difficult for foreign substances to enter the installation recess, thereby reducing crystal formation. The detection component is arranged in the installation recess, and less crystallization in the installation recess is beneficial to improving the sensitivity of the detection component, and further improving the accuracy and reliability of the detection component. Description of the Drawings

[0027] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the accompanying drawings required in the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0028] Figure 1 Structural schematic diagram of a fixture disclosed in an embodiment of the present application;

[0029] Figure 2 For Figure 1 Cross-sectional view of the A-A section shown in;

[0030] Figure 3 For Figure 2 Schematic diagram of the connection between the gas channel and the gas source in;

[0031] Figure 4 For Figure 2 Schematic diagram of the cooperation between the fixture main body and the hanging structure in;

[0032] Figure 5 For Figure 2 Schematic diagram of the moving part approaching the detection element in;

[0033] Figure 6 Stereogram of a robotic arm disclosed in an embodiment of the present application;

[0034] Figure 7 Front view of a robotic arm disclosed in an embodiment of the present application;

[0035] Figure 8 For Figure 7 Schematic diagram of the robotic arm hanging carrier in;

[0036] Figure 9 Top view of a robotic arm disclosed in an embodiment of the present application;

[0037] Figure 10 For Figure 9 Cross-sectional view of the B-B section shown in.

[0038] Explanation of reference numerals:

[0039] 100. Fixture; 110. Fixture body; 111. Installation recess; 112. Gas passage; 1121. Intake end; 1122. Outlet end; 113. Fixed end; 114. Inner wall; 115. Free end; 120. Detection assembly; 121. Movable part; 122. Detection element; 123. Elastic part; 130. Blocking part; 131. Connection end; 132. Protruding end; 140. Motor; 150. Inductive element; 200. Carrier; 210. Hanging structure; 300. Gas source; 400. Manipulator body; 410. Connector; 420. Bracket; 430. Forked structure; 431. Branch; 432. Through hole. Detailed implementation manners

[0040] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0041] In the present application, the orientation or positional relationship indicated by terms such as "upper", "lower", "top", "bottom", "inner", "outer", etc. is the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit that the indicated device, element or component must have a specific orientation, or be constructed and operated in a specific orientation.

[0042] Moreover, in addition to being able to represent the orientation or positional relationship, some of the above terms may also be used to represent other meanings. For example, the term "upper" may also be used to represent a certain attachment relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in the present application can be understood according to specific circumstances.

[0043] In addition, the terms "installation", "setting", "provided with", "connection", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or there is an internal connection between two devices, elements or components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0044] In addition, terms such as "first", "second", etc. are mainly used to distinguish different devices, components or parts (specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, components or parts. Unless otherwise specified, the meaning of "a plurality" is two or more.

[0045] The technical solution of the present utility model will be described below in conjunction with embodiments and drawings.

[0046] In a first aspect, an embodiment of the present application discloses a hanger for hanging a carrier of silicon wafers. The carrier has a hanging structure, and the hanging structure can be a hanging ear, a hanging hole or a hanging buckle. The above-mentioned silicon wafers can be unprocessed silicon wafer raw materials or processed silicon wafers, such as silicon wafers after cleaning and etching, or silicon wafers after diffusion, or silicon wafers after coating.

[0047] As Figures 1 to 4 shown, the hanger 100 includes a hanger body 110 and a detection component 120. The hanger body 110 is configured to cooperate with the hanging structure 210 to hang the carrier 200. For example, the hanger body 110 hooks the hanging structure 210 to hang the carrier 200. An installation recess 111 and a gas channel 112 that communicate with each other are provided on the hanger body 110. Referring to Figure 3 , the gas channel 112 is configured to be connected to a gas source 300 to blow flowing gas into the installation recess 111. Exemplarily, the gas channel 112 can be a gas injection hole or a gas pipeline. The function of the gas source 300 is to output gas, and the gas source 300 is, for example, an air compressor or a gas tank. The installation recess 111 can be an installation groove, an installation hole or an installation cavity.

[0048] The detection component 120 is disposed in the installation recess 111 and in the area where the hanger body 110 cooperates with the hanging structure 210. The detection component 120 is configured to detect the hanging state of the hanging structure 210 to determine the hanging state of the carrier 200. The term "hanging state" refers to whether the carrier 200 is hung on the hanger body 110. One hanging state is that the carrier 200 is hung on the hanger body 110, and the other hanging state is that the carrier 200 is not hung on the hanger body 110.

[0049] The hanger body 110 of the hanger 100 cooperates with the hanging structure 210 to hang the carrier 200. In order to accurately determine the hanging state of the carrier 200, the hanger 100 is provided with a detection component 120 in the area where the hanger body 110 cooperates with the hanging structure 210, but the setting area of the detection component 120 frequently contacts the hanging structure 210 and is prone to sticking crystals.

[0050] To avoid excessive crystallization from affecting the sensitivity of the detection component 120, the fixture 100 blows flowing gas into the installation recess 111 through the gas channel 112. The gas channel 112 outputs gas to maintain a positive pressure in the installation recess 111, making it difficult for foreign substances to enter the installation recess 111, thereby reducing crystal formation. The detection component 120 is arranged in the installation recess 111. Less crystallization in the installation recess 111 is beneficial to improving the sensitivity of the detection component 120, and thus improving the accuracy and reliability of the detection component 120.

[0051] Optionally, the fixture body 110 is a column, such as a cylinder, a prism, or an elliptical cylinder. The carrier 200 is a flower basket, and the hanging structure 210 is a hanging ear arranged on the flower basket. The column is configured to cooperate with the hanging ear to hang the flower basket. For example, the column hooks the hanging ear to hang the flower basket.

[0052] In some embodiments, as Figures 2 to 5 shown, the detection component 120 includes a corresponding movable member 121 and a plurality of detection elements 122. The number of detection elements 122 can be one, two, or three. The movable member 121 is, for example, a movable button or a movable block. The plurality of detection elements 122 and the movable member 121 are both arranged in the installation recess 111. The movable member 121 protrudes from the installation recess 111 and is located in the area where the fixture body 110 cooperates with the hanging structure 210. Specifically, the movable member 121 protrudes from the mouth of the installation recess 111. The movable member 121 is configured to be pressed by the hanging structure 210 to approach the detection element 122 when the fixture body 110 cooperates with the hanging structure 210. The detection element 122 switches its working state according to the movement state of the movable member 121. For example, when the movable member 121 is pressed by the hanging structure 210 to approach the detection element 122, the detection element 122 switches to the triggered state. When the movable member 121 moves away from the detection element 122, the detection element 122 switches to the to-be-triggered state. When the movable member 121 moves, it can also carry away the crystals around the installation recess 111, further reducing crystal formation and improving the sensitivity of the detection component 120.

[0053] Furthermore, referring back to Figure 2 , the installation recess 111 has an inner sidewall 114. The side surface of the movable member 121 has a clearance fit with the inner sidewall 114, and the gas outlet end 1122 of the gas channel 112 is located on the inner sidewall 114. Gas is input from the gas outlet end 1122 of the gas channel 112 into the installation recess 111 and discharged from the gap between the side surface of the movable member 121 and the inner sidewall 114 of the installation recess 111, which not only enables the gas to flow in the installation recess 111 but also makes it difficult for relatively large foreign substances to enter the installation recess 111 through the relatively narrow gap, which is beneficial to maintaining the sensitivity of the detection element 122.

[0054] Optionally, asFigure 2 As shown, the intake end 1121 of the gas passage 112 is exposed at the fixed end 113 of the hanger body 110, and the fixed end 113 is configured to fix the hanger body 110. Further, the gas passage 112 extends through the hanger body 110 to the mounting recess 111.

[0055] Optionally, the detection element 122 is a weight detection element 122. The movable member 121 is carried on a plurality of weight detection elements 122. The movable member 121 is configured to carry the hanging structure 210, and the weight detection element 122 is configured to detect the weight carried on the movable member 121. The weight detection element 122 is, for example, a weight sensor.

[0056] In the related art, although a gravity detection device is used to judge the hanging state of the carrier, due to a large amount of crystallization on the hanger, the gravity detection device is not arranged on the hanger, but above the robotic arm. The robotic arm itself is heavy, which affects the sensitivity of the gravity detection device. Furthermore, it cannot sensitively detect the weight change of the carrier, and cannot judge whether there are abnormalities such as wafer floating, basket floating or wafer breakage on the carrier.

[0057] After solving the crystallization problem of the hanger body 110 in this application, the detection assembly 120 is arranged in the area where the hanger body 110 cooperates with the hanging structure 210. The movable member 121 in the detection assembly 120 carries the hanging structure 210, and the movable member 121 is carried on a plurality of weight detection elements 122. The weight detection element 122 can accurately detect the weight of the carrier 200, and realize the detection of abnormalities such as basket floating, wafer floating and wafer breakage. For example, a range can be set for the total weight of the carrier 200. When the weight detected by the weight detection element 122 exceeds the above range, an alarm is given, so that the abnormal weight loss or overweight of the wafer on the carrier 200 can be noticed in time, and the abnormality can be checked in time to reduce losses.

[0058] Further, referring to Figures 2 to 5 , the detection assembly 120 further includes a plurality of elastic members 123. The elastic member 123 can be a spring, and the number of the elastic members 123 can be one, two or three. One end of each elastic member 123 is connected to the movable member 121, and the other end of each elastic member 123 away from the movable member 121 is respectively connected to each detection element 122. The movable member 121 is carried on a plurality of detection elements 122 through a plurality of elastic members 123. The elastic member 123 is configured to compress when the movable member 121 is pressed, and the elastic member 123 is further configured to drive the movable member 121 to reset when it rebounds. When the hanging structure 210 presses the movable member 121, the elastic member 123 also plays a buffering role to prevent the weight detection element 122 from being damaged.

[0059] In some embodiments, referring to Figure 2 and Figure 5, the fixture 100 further includes a blocking member 130, and the blocking member 130 is, for example, a blocking rod, a blocking block, a blocking plate or a blocking strip. The blocking member 130 is movably arranged on the fixture main body 110 and has a blocking position and an avoidance position. The setting manner of the blocking member 130 is, for example, that the blocking member 130 is rotatably arranged on the fixture main body 110, or the blocking member 130 is detachably arranged on the fixture main body 110, or the blocking member 130 is slidably arranged on the fixture main body 110.

[0060] Referring to Figure 2 , when the blocking member 130 is configured to be in the avoidance position, it avoids the side of the fixture main body 110 that cooperates with the hanging structure 210, so that the fixture main body 110 cooperates with the hanging structure.

[0061] Referring to Figure 4 , when the blocking member 130 is in the blocking position, it protrudes from the side of the fixture main body 110 that cooperates with the hanging structure 210 to block the hanging structure 210 from detaching from the fixture main body 110.

[0062] If the blocking member 130 is fixedly arranged, that is, the blocking member 130 is fixed in the blocking position, the blocking member 130 will prevent the hanging structure 210 from being hung on the fixture main body 110. Therefore, the blocking member 130 of the present application also has an avoidance position. When the vehicle 200 is about to be hung on the fixture main body 110, the blocking member 130 switches to the avoidance position so that the hanging structure 210 can be hung on the fixture main body 110. When the vehicle 200 has been hung on the fixture main body 110, the blocking member 130 switches to the blocking position to prevent the vehicle 200 from detaching from the hanging structure 210.

[0063] Further, referring to Figures 2 to 5 , the fixture 100 further includes a motor 140 and a sensing element 150. The sensing manner of the sensing element 150 can be proximity sensing or force sensing, such as an infrared proximity sensor or a pressure sensor.

[0064] The motor 140 is arranged on the fixture main body 110, the blocking member 130 is drivingly connected to the motor 140, and the motor 140 is configured to drive the blocking member 130 to rotate. The sensing element 150 is arranged in the installation recess 111, a part of the detection component 120 is movably arranged in the installation recess 111, and the detection component 120 is further configured to, when the fixture main body 110 cooperates with the hanging structure 210, a part of the detection component 120 is pressed into the installation recess 111 to trigger the sensing element 150. The sensing element 150 is configured to control the motor 140 to drive the blocking member 130 to rotate to the blocking position when being triggered, and to control the motor 140 to drive the blocking member 130 to rotate to the avoidance position when not being triggered.

[0065] More specifically, the movable part of the detection assembly 120 is the movable member 121 . When the hanger body 110 is matched with the hanging structure 210 , the movable member 121 is pressed into the installation recess 111 to trigger the sensing element 150 .

[0066] The induction switch can accurately feedback a signal to the motor 140 according to the pressing state of the movable part 121, and the pressing state of the movable part 121 can accurately reflect the hanging state of the hanging structure 210, and then the induction switch can accurately control the motor 140 to drive the blocking part 130 to rotate and switch to the blocking position or the avoidance position according to the above hanging state.

[0067] Further, refer to Figures 2 to 5 The hanger body 110 has a free end 115 and a fixed end 113 which are arranged opposite to each other. The fixed end 113 is configured to fix the hanger body 110, and the free end 115 is configured to be inserted into the hanging structure 210. Figure 2 and Figure 4 In the Z0-Z1 direction shown in FIG, the upper side of the hanger body 110 is configured to cooperate with the hanging structure 210. Specifically, when the hanger body 110 is hooked on the hanging structure 210, the upper side of the hanger body 110 abuts against the hanging structure 210.

[0068] The motor 140 is disposed on the free end 115, and the blocking member 130 has a connecting end 131 and a protruding end 132 disposed opposite to each other. The connecting end 131 drives the connecting motor 140. The protruding end 132 rotates around the connecting end 131. Figure 2 When the blocking member 130 is located at the avoidance position, the protruding end 132 is located below the upper side of the hanger body 110. Figure 4 When the blocking member 130 is located at the blocking position, the protruding end 132 protrudes relative to the upper side of the hanger body 110 .

[0069] For example, the hanger body 110 is a cylinder, the blocking member 130 is a blocking rod, and the length direction of the blocking rod is as follows: Figure 2 In the Z0-Z1 direction shown, the two ends of the blocking rod in the length direction are respectively a connecting end 131 and a protruding end 132, and the length of the blocking rod is greater than the radius of the cylindrical hanger body 110, the output shaft of the motor 140 is located in the axial direction of the hanger body 110, and the connecting end 131 is connected to the output shaft of the motor 140, and the protruding end 132 protrudes from the periphery of the hanger body 110. When the blocking member 130 is located in the blocking position, the protruding end 132 protrudes from the top of the periphery of the hanger body 110. When the motor 140 drives the blocking member 130 to rotate 180°, the blocking member 130 switches to the avoidance position, and at this time, the protruding end 132 protrudes from the bottom of the periphery of the hanger body 110.

[0070] When the fixture body 110 cooperates with the hanging structure 210, the free end 115 of the fixture body 110 first cooperates with the hanging structure 210, and then the hanging structure 210 moves in the direction close to the fixed end 113 and is hung on the fixture body 110. Similarly, if the hanging structure 210 detaches from the fixture body 110, the free end 115 will be the last position where the fixture body 110 and the hanging structure 210 cooperate. The motor 140 is located at the free end 115. Correspondingly, the blocking member 130 is also located at the free end 115 to block the hanging structure 210 at the last position where the fixture body 110 and the hanging structure 210 cooperate.

[0071] In a second aspect, referring to Figure 6 , an embodiment of the present application discloses a robotic arm, including a robotic arm main body 400 and a fixture 100 as in the first aspect, and the fixture 100 is arranged on the robotic arm main body 400.

[0072] In some embodiments, referring to Figures 6 to 10 , the robotic arm main body 400 includes a connecting member 410 and two oppositely arranged brackets 420, and two ends of the connecting member 410 are respectively fixedly connected to the two brackets 420. The bracket 420 can be a plate-like structure or a frame structure. The connecting member 410 can be a connecting rod, a connecting bracket, a connecting plate or a connecting seat.

[0073] Each bracket 420 has a bifurcated structure 430, and each bifurcated structure 430 includes a plurality of branch portions 431. Through holes 432 are respectively arranged on each branch portion 431, and the fixed ends 113 of each fixture body 110 respectively pass through the through holes 432 and are exposed outside the bracket 420. The length direction of the carrier 200 is the X0-X1 direction as Figure 8 shown, and the fixtures 100 on the two brackets 420 respectively cooperate with the hanging structures 210 at both ends of the length direction of the carrier 200. The plurality of fixtures 100 on the same bifurcated structure 430 respectively cooperate with a plurality of positions in the width direction of the carrier 200, so that the robotic arm can stably hang the carrier 200.

[0074] Furthermore, referring to Figure 10 , the fixture body 110 has the advantage of simple disassembly and assembly from the through hole 432, and the air inlet end 1121 of the air passage 112 is exposed at the fixed end 113 of the fixture body 110, so that the air inlet end 1121 of the air passage can be connected to a gas source.

[0075] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A fixture for hanging a carrier for silicon wafers, the carrier having a hanging structure thereon; characterized in that, The hanger comprises: A hanger body, the hanger body being configured to cooperate with the hanging structure to hang the carrier, the hanger body being provided with a connecting mounting recess and a gas channel, the gas channel being configured to be connected to a gas source to blow flowing gas into the mounting recess; and A detection component is arranged in the installation recess and is located in the area where the hanger body and the hanging structure cooperate; the detection component is configured to detect the hanging state of the hanging structure to determine the hanging state of the carrier.

2. The fixture according to claim 1, characterized in that, The detection component includes corresponding movable parts and a plurality of detection elements, wherein the plurality of detection elements and the movable parts are all arranged in the mounting recess, and the movable parts protrude from the mounting recess and are located in the area where the hanger body cooperates with the hanging structure; the movable parts are configured so that when the hanger body cooperates with the hanging structure, the movable parts are pressed by the hanging structure and approach the detection elements.

3. The jig according to claim 2, characterized in that, The mounting recess has an inner side wall, the side surface of the movable part is in clearance fit with the inner side wall, and the gas outlet end of the gas channel is located on the inner side wall.

4. The fixture according to claim 2, characterized in that, The detection element is a weight detection element. The movable part is carried on a plurality of the weight detection elements. The movable part is configured to carry the hanging structure. The weight detection element is configured to detect the weight carried on the movable part.

5. The fixture according to any one of claims 2 to 4, characterized in that The detection assembly also includes a plurality of elastic members, one end of each of the elastic members is connected to the movable member, and one end of each of the elastic members away from the movable member is respectively connected to each of the detection elements, the movable member is supported on the detection elements through the plurality of elastic members, the elastic members are configured to be compressed when the movable member is pressed, and the elastic members are also configured to drive the movable member to reset when rebounding.

6. The fixture according to any one of claims 1 to 4, characterized in that The hanger further comprises a blocking member, which is movably arranged on the hanger body and has a blocking position and an avoidance position; When the blocking member is in the blocking position, the blocking member protrudes from the side of the hanger body that matches the hanging structure, so as to prevent the hanging structure from being separated from the hanger body; The blocking member is further configured to avoid a side of the hanger body that cooperates with the hanging structure when in the avoiding position, so that the hanger body cooperates with the hanging structure.

7. The fixture according to claim 6, characterized in that, The hanger also includes: a motor, the motor being disposed on the hanger body, the blocking member being drivingly connected to the motor, and the motor being configured to drive the blocking member to rotate; and The sensing element is arranged in the installation recess, and part of the detection component is movably arranged in the installation recess. The detection component is also configured to, when the hanger body cooperates with the hanging structure, part of the detection component is pressed into the installation recess to trigger the sensing element. The sensing element is configured to control the motor to drive the blocking member to rotate to the blocking position when triggered, and control the motor to drive the blocking member to rotate to the avoidance position when not triggered.

8. The fixture according to claim 7, wherein The hanger body has a free end and a fixed end that are arranged opposite to each other, the fixed end is configured to fix the hanger body, the free end is configured to be inserted into the hanging structure, and the upper side of the hanger body is configured to cooperate with the hanging structure; The motor is arranged on the free end, and the blocking member has a connecting end and a protruding end which are arranged opposite to each other, the connecting end is driven to connect to the motor, and the protruding end rotates around the connecting end; when the blocking member is located at the blocking position, the protruding end protrudes relative to the upper side of the hanger body; when the blocking member is located at the avoidance position, the protruding end is located below the upper side of the hanger body.

9. The fixture according to any one of claims 1 to 4, characterized in that, The hanger body is a column, the carrier is a flower basket, the hanging structure is a hanging ear arranged on the flower basket, and the column is configured to cooperate with the hanging ear to hang the flower basket; And / or, the mounting recess is a mounting groove; And / or, the gas passage passes through the hanger body and extends to the mounting recess; And / or, the air inlet end of the gas channel is exposed at the fixed end of the hanger body, and the fixed end is configured to fix the hanger body.

10. A robotic arm, characterized in that, It comprises a mechanical arm body and a hanger as claimed in any one of claims 1 to 9, wherein the hanger is arranged on the mechanical arm body; The mechanical arm body comprises a connecting piece and two brackets arranged opposite to each other, and two ends of the connecting piece are respectively fixedly connected to the two brackets; Each of the brackets has a bifurcated structure, each of the bifurcated structures includes a plurality of branch parts, each of the branch parts is provided with a through hole, and the fixed ends of each of the hanger bodies are respectively penetrated by each of the through holes and exposed on the outside of the bracket.

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