Semiconductor wastewater regeneration and reuse system

Abstract

The utility model discloses a semiconductor wastewater regeneration and reuse system, which relates to the technical field of wastewater regeneration and reuse and comprises a physicochemical reaction tank and a backwashing device, and the physicochemical reaction tank, a sodium hypochlorite reaction tank, a clarification tank, a sand filter tank, an activated carbon tank, ultrafiltration equipment and a reverse osmosis device are sequentially connected. Automatic dosing devices and medicine storage boxes are arranged on the two sides of the physicochemical reaction tank and the sodium hypochlorite reaction tank, and the backwashing devices are arranged on the tops of the two sides of the physicochemical reaction tank, the sodium hypochlorite reaction tank, the clarification tank, the sand filter tank and the activated carbon tank respectively. According to the semiconductor wastewater regeneration and reuse system, through combined use of the physicochemical reaction tank, the sodium hypochlorite reaction tank, the clarification tank, the sand filter tank and the activated carbon tank, pollutants such as fluorine ions, ammonia nitrogen, organic matters and heavy metals in semiconductor wastewater can be removed, and internal precipitates can also be removed; by using the ultrafiltration equipment and the reverse osmosis device, the water body can be further filtered and purified, so that the water quality is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of wastewater regeneration and reuse, and specifically relates to a semiconductor wastewater regeneration and reuse system. Background Technique

[0002] The sources of electronic semiconductor wastewater are the wastewater generated during the semiconductor grinding process, such as acid-base wastewater, semiconductor grinding sewage, semiconductor fluoride-containing wastewater, semiconductor phosphorus-containing wastewater, semiconductor ammonia-nitrogen wastewater, semiconductor organic wastewater, etc. In addition, it also comes from the etching wastewater, plating tank wastewater, cleaning wastewater, etc. of semiconductor integrated circuits.

[0003] Among them, the treatment of electronic semiconductor wastewater mainly focuses on membrane-based advanced treatment and recycling. The previous reclaimed water reuse process generally adopts the processes of coagulation, sedimentation, biochemical treatment, and filtration, which are not applicable to the wastewater in the semiconductor industry. Based on this, the utility model will improve the previous conventional process to a certain extent according to the process characteristics, wastewater characteristics, reuse standards, etc. of semiconductors.

[0004] Therefore, in view of this, research and improvement are carried out on the existing structure and deficiencies, and a semiconductor wastewater regeneration and reuse system is proposed. Content of the Utility Model

[0005] The purpose of the utility model is to provide a semiconductor wastewater regeneration and reuse system to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: A semiconductor wastewater regeneration and reuse system includes a physical and chemical reaction tank and a backwashing device. The physical and chemical reaction tank, sodium hypochlorite reaction tank, clarifying tank, sand filter tank, activated carbon tank, ultrafiltration equipment, and reverse osmosis device are connected in sequence. Automatic dosing devices and medicine storage tanks are arranged on both sides of the physical and chemical reaction tank and the sodium hypochlorite reaction tank. The backwashing device is respectively arranged on the top of both sides of the physical and chemical reaction tank, sodium hypochlorite reaction tank, clarifying tank, sand filter tank, and activated carbon tank. The ultrafiltration equipment and the reverse osmosis device are both equipped with chemical cleaning devices for regular cleaning and maintenance of the membrane equipment, and the ultrafiltration equipment and the reverse osmosis device are both connected to an online device for real-time monitoring of data. The backwashing device includes a plunger pump, a pipe rack, a swing rack, and a spray head. The left and right sides of the plunger pump are communicated with the pipe rack, and one end of the pipe rack away from the plunger pump is connected to the swing rack, and a spray head is connected in the middle of the swing rack.

[0007] Further, water delivery pipes are connected to the bottoms of both sides of the physical and chemical reaction tank, and the sodium hypochlorite reaction tank, clarifying tank, sand filter tank, and activated carbon tank are connected to each other through water delivery pipes.

[0008] Furthermore, the automatic chemical dosing device is connected to the chemical storage tank, and the output ends of the automatic chemical dosing device are respectively arranged at the bottom sides of the physicochemical reaction tank and the sodium hypochlorite reaction tank. Moreover, stirring devices are provided at the bottoms of the physicochemical reaction tank and the sodium hypochlorite reaction tank to ensure full mixing of the chemicals and the influent water.

[0009] Furthermore, on the one hand, the physicochemical reaction tank plays a role in equalizing the water quality. Additionally, appropriate coagulants or other chemicals can be selected according to the nature of the influent water in the physicochemical reaction tank to remove substances such as organic matter, heavy metals, and fluorine in the water.

[0010] Furthermore, the clarifier is connected to the sodium hypochlorite reaction tank and can remove colloids and organic and inorganic pollutants in a micro-suspended state, has a good removal effect on BOD and COD, and can also reduce the content of bacteria and viruses in the effluent. A sludge scraper is provided at the bottom of the clarifier, and a sludge discharge dry centrifugal pump is arranged on one side of the clarifier for discharging sludge. The sludge scraper includes a scraper, a lead screw, and a servo motor. The left and right sides of the scraper are both threadedly connected to the lead screw, and one end of the lead screw is installed with a servo motor through a coupling.

[0011] Furthermore, the sand filter is connected to the clarifier and can further remove flocs and colloidal substances in the sewage, greatly reducing the suspended solids and turbidity of the effluent, making the effluent transparent. The sand filter can also remove some heavy metals, bacteria, and virus pollutants, and a backwashing device is provided at the bottom of the sand filter.

[0012] Furthermore, the activated carbon tank is connected to the sand filter and can remove residual colloidal particles, microorganisms, residual chlorine, trace heavy metals, surfactants, trace organic matter, etc. in the water, and can also be used for decolorization and deodorization.

[0013] Furthermore, the ultrafiltration device is connected to the reverse osmosis device, which can effectively remove macromolecular substances in the water, further purify the water quality, and extend the service life of the reverse osmosis membrane. The ultrafiltration device and the reverse osmosis device can remove small molecular organic matter in the water and reduce the water conductivity to obtain high-quality recycled water.

[0014] The present utility model provides a semiconductor wastewater regeneration and reuse system, which has the following beneficial effects:

[0015] 1. In this utility model, according to the characteristics of semiconductor wastewater, a physical and chemical reaction tank and a sodium hypochlorite reaction tank are specifically set up to remove main pollutants such as fluoride ions, ammonia nitrogen, organic matters, and heavy metals in the water. At the same time, a clarifying tank and a sand filter tank are utilized, and their structures are used to remove the precipitates in the water. The connected activated carbon tank downstream further adsorbs impurities in the water. The operation of the ultrafiltration equipment and the reverse osmosis device can fully remove impurities in the water and effectively extend the service life of the internal reverse osmosis membrane. The reverse osmosis membrane inside the reverse osmosis device can effectively remove salts in the water and further purify the water quality. The whole process has the characteristics of simple operation, stable operation, and high quality of recycled water.

[0016] 2. In this utility model, automatic dosing devices and medicine storage tanks are set on both sides of the physical and chemical reaction tank and the sodium hypochlorite reaction tank. Under the operation of the automatic dosing devices, the medicines pre-stored in the medicine storage tanks can be automatically injected into the physical and chemical reaction tank and the sodium hypochlorite reaction tank to purify the water body. In addition, a clarifying tank, a sand filter tank, and an activated carbon tank are sequentially connected downstream of the sodium hypochlorite reaction tank, so as to further realize the refined management of the water treatment process. At the same time, reverse flushing devices are provided on both sides of the tops of the clarifying tank, the sand filter tank, and the activated carbon tank. Under the connection and transportation of the plunger pump, the externally supplied water body will be injected into the pipe rack and sprayed out at high speed from the nozzles. With the structural mobility of the swing frame, the nozzles can be adjusted to rotate up and down within a certain range to ensure that the inner surfaces of the clarifying tank, the sand filter tank, and the activated carbon tank are regularly cleaned comprehensively, making the whole water treatment process more efficient and stable.

[0017] 3. In this utility model, as a deep treatment device, the ultrafiltration equipment and the reverse osmosis device can further purify the water quality to the greatest extent. With the connected on-line device, the operation situation can be viewed on-line, and the effluent indexes can be monitored in real time to ensure the effluent water quality. In addition, since the clarifying tank is used to sediment the water body to remove the sediments in the water, with the increase of the operation time, sludge and other substances will gradually accumulate on the bottom side inside it. Through the operation of the sludge scraper, under the operation of the servo motor, the lead screw connected to its power output end will rotate axially in the horizontal direction, thereby driving the connected scraper to translate along the bottom surface of the clarifying tank and scrape the sludge, and then drive the sludge to move towards one side of the sludge discharge dry centrifugal pump. Finally, the sludge is discharged by using the sludge discharge dry centrifugal pump, thus playing a good self-cleaning role. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is the front side view structure schematic diagram of the body of a semiconductor wastewater regeneration and reuse system of this utility model;

[0019] Figure 2 is the rear side view structure schematic diagram of the body of a semiconductor wastewater regeneration and reuse system of this utility model;

[0020] Figure 3It is a top-down three-dimensional structural schematic diagram of the physical and chemical reaction tank of a semiconductor wastewater regeneration and reuse system of the present utility model;

[0021] Figure 4 It is a three-dimensional structural schematic diagram of the backwashing device of a semiconductor wastewater regeneration and reuse system of the present utility model;

[0022] Figure 5 It is a three-dimensional structural schematic diagram of the sludge scraper of a semiconductor wastewater regeneration and reuse system of the present utility model.

[0023] In the figure: 1. Physical and chemical reaction tank; 2. Sodium hypochlorite reaction tank; 3. Clarification tank; 4. Sand filter tank; 5. Activated carbon tank; 6. Ultrafiltration equipment; 7. Reverse osmosis device; 8. Automatic dosing device; 9. Chemical storage tank; 10. Backwashing device; 1001. Plunger pump; 1002. Pipe rack; 1003. Swing rack; 1004. Sprayer; 11. Chemical cleaning device; 12. Online device; 13. Water delivery pipe; 14. Stirring device; 15. Sludge scraper; 1501. Scraper; 1502. Lead screw; 1503. Servo motor; 16. Dry sludge discharge centrifugal pump. Specific implementation manners

[0024] The following further describes in detail the implementation manners of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0025] As Figures 1 to 5As shown in the figure, a semiconductor wastewater regeneration and reuse system includes a physicochemical reaction tank 1 and a backwashing device 10. The physicochemical reaction tank 1, the sodium hypochlorite reaction tank 2, the clarifying tank 3, the sand filter tank 4, the activated carbon tank 5, the ultrafiltration device 6, and the reverse osmosis device 7 are connected in sequence. Automatic dosing devices 8 and medicine storage tanks 9 are arranged on both sides of the physicochemical reaction tank 1 and the sodium hypochlorite reaction tank 2. The backwashing device 10 is respectively arranged on the top of both sides of the physicochemical reaction tank 1, the sodium hypochlorite reaction tank 2, the clarifying tank 3, the sand filter tank 4, and the activated carbon tank 5. Chemical cleaning devices 11 are provided for both the ultrafiltration device 6 and the reverse osmosis device 7 for regular cleaning and maintenance of the membrane equipment. Both the ultrafiltration device 6 and the reverse osmosis device 7 are connected to an on-line device 12 for real-time monitoring of data. The backwashing device 10 includes a plunger pump 1001, a pipe rack 1002, a swing rack 1003, and a spray head 1004. The left and right sides of the plunger pump 1001 are communicated with the pipe rack 1002. One end of the pipe rack 1002 away from the plunger pump 1001 is connected to the swing rack 1003, and the spray head 1004 is connected in the middle of the swing rack 1003. Water delivery pipes 13 are connected to the bottom of both sides of the physicochemical reaction tank 1. The sodium hypochlorite reaction tank 2, the clarifying tank 3, the sand filter tank 4, and the activated carbon tank 5 are connected to each other through the water delivery pipes 13. The automatic dosing device 8 and the medicine storage tank 9 are connected to each other. The output ends of the automatic dosing device 8 are respectively arranged at the bottom of the sides of the physicochemical reaction tank 1 and the sodium hypochlorite reaction tank 2. Stirring devices 14 are provided at the bottoms of both the physicochemical reaction tank 1 and the sodium hypochlorite reaction tank 2 to achieve full mixing of the medicine and the incoming water. By arranging the automatic dosing devices 8 and the medicine storage tanks 9 on both sides of the physicochemical reaction tank 1 and the sodium hypochlorite reaction tank 2, under the operation of the automatic dosing device 8, the medicine pre-stored in the medicine storage tank 9 can be automatically injected into the physicochemical reaction tank 1 and the sodium hypochlorite reaction tank 2 to purify the water body. Under the connection and transportation of the plunger pump 1001, the externally supplied water body will be injected into the pipe rack 1002 and sprayed out at a high speed from the spray head 1004. With the structural mobility of the swing rack 1003, the spray head 1004 can be adjusted to rotate up and down within a certain range to ensure regular cleaning of the inner surfaces of the clarifying tank 3, the sand filter tank 4, and the activated carbon tank 5 in an all-round manner.

[0026] As Figures 1 to 5As shown, the physicochemical reaction tank 1 serves to equalize the water quality. Additionally, the physicochemical reaction tank 1 can select appropriate coagulants or other chemicals according to the nature of the incoming water to remove organic substances, heavy metals, fluorine, etc. in the water. The clarifier 3 is connected to the sodium hypochlorite reaction tank 2 and is used to remove colloidal and micro-suspended organic and inorganic pollutants, with good removal effects on BOD and COD, and can also reduce the content of bacteria and viruses in the effluent. A sludge scraper 15 is provided at the bottom of the clarifier 3, and a dry-type sludge discharge centrifugal pump 16 is provided on one side of the clarifier 3 for discharging sludge. The sludge scraper 15 includes a scraper plate 1501, a lead screw 1502, and a servo motor 1503. Threaded connections are provided on both the left and right sides of the scraper plate 1501 with the lead screw 1502, and one end of the lead screw 1502 is installed with a servo motor 1503 through a coupling. The sand filter 4 is connected to the clarifier 3 and can further remove flocs and colloidal substances in the sewage, significantly reducing the suspended solids and turbidity of the effluent, making the effluent transparent. The sand filter 4 can also remove some heavy metals, bacteria, and virus pollutants. Moreover, a backwashing device 10 is provided at the bottom of the sand filter 4. Through the operation of the sludge scraper 15, under the operation of the servo motor 1503, the lead screw 1502 connected to its power output end will rotate axially in the horizontal direction, thereby driving the connected scraper plate 1501 to translate along the bottom surface of the clarifier 3 and scrape the sludge, and then drive the sludge to move towards one side of the dry-type sludge discharge centrifugal pump 16, and finally use the dry-type sludge discharge centrifugal pump 16 to discharge the sludge.

[0027] As Figures 1 to 5 shown, the activated carbon tank 5 is connected to the sand filter 4 and can remove residual colloidal particles, microorganisms, residual chlorine, trace heavy metals, surfactants, trace organic substances, etc. in the water, and can also be used for decolorization and deodorization. The ultrafiltration device 6 is connected to the reverse osmosis device 7 and can effectively remove macromolecular substances in the water, further purify the water quality, and can extend the use of the reverse osmosis membrane. Moreover, the ultrafiltration device 6 and the reverse osmosis device 7 can remove small molecular organic substances in the water and reduce the water conductivity to obtain high-quality recycled water. The physicochemical reaction tank 1 and the sodium hypochlorite reaction tank 2 are used to remove main pollutants such as fluoride ions, ammonia nitrogen, organic substances, and heavy metals in the water. At the same time, the provided clarifier 3 and sand filter 4 are used to remove precipitates in the water by their structures, and the downstream-connected activated carbon tank 5 further adsorbs impurities in the water. The operation of the ultrafiltration device 6 and the reverse osmosis device 7 can fully remove impurities in the water and effectively extend the use of the internal reverse osmosis membrane, and the reverse osmosis membrane inside the reverse osmosis device 7 can effectively remove salts in the water and further purify the water quality.

[0028] In summary, as Figures 1 to 4As shown, when the semiconductor wastewater regeneration and reuse system is in use, first, the oiling equipment will inject the semiconductor wastewater to be treated into the internal of the physical and chemical reaction tank 1 through the water delivery pipe 13. At this time, according to the treatment requirements of the physical and chemical reaction tank 1, the automatic dosing devices 8 located on both sides of it will select appropriate coagulants or other agents from the medicine storage tanks 9 connected to them according to the nature of the incoming water to remove substances such as organic matter, heavy metals, and fluorine in the water, so as to achieve the effect of preliminary purification;

[0029] After that, the water body will enter the internal of the sodium hypochlorite reaction tank 2 under the transportation of the water delivery pipe 13. And under the operation of the automatic dosing device 8, the agent pre-stored in the internal of the medicine storage tank 9 will be automatically injected into the internal of the sodium hypochlorite reaction tank 2 to react with the water body, so as to remove ammonia nitrogen in the water and achieve a certain disinfection effect. During the process of the physical and chemical reaction tank 1 and the sodium hypochlorite reaction tank 2 treating the water body, the stirring device 14 installed on the bottom side of their internal will operate synchronously. By using the rotational property of the structure, the agent and the incoming water are fully mixed, so as to ensure the treatment effect of the water body;

[0030] Then the treated water body will successively enter the internal of the clarifying tank 3, the sand filter tank 4 and the activated carbon tank 5 to remove colloids and organic and inorganic pollutants in the form of fine suspensions, which has a good removal effect on BOD and COD, can reduce the content of bacteria and viruses in the effluent, and at the same time can also remove flocs and colloidal substances in the sewage, greatly reducing the suspended solids and turbidity of the effluent, making the effluent become transparent, and can also remove some heavy metal, bacteria and virus pollutants;

[0031] Since the top sides of both sides of the physical and chemical reaction tank 1, the sodium hypochlorite reaction tank 2, the clarifying tank 3, the sand filter tank 4 and the activated carbon tank 5 are provided with backwashing devices 10, the external water supply device is connected to the plunger pump 1001 through a pipeline. Under the operation of the plunger pump 1001, the externally supplied water body will be injected into the pipe rack 1002 and sprayed out at a high speed from the nozzle 1004. With the structural mobility of the swing frame 1003, the nozzle 1004 can be adjusted to rotate up and down within a certain range, so as to effectively treat the residues on the inner wall surfaces of the physical and chemical reaction tank 1, the sodium hypochlorite reaction tank 2, the clarifying tank 3, the sand filter tank 4 and the activated carbon tank 5. At the same time, the sludge scraper 15 in the clarifying tank 3 will also operate synchronously. Under the operation of the servo motor 1503, the lead screw 1502 connected to its power output end will rotate axially in the horizontal direction, so as to drive the connected scraper 1501 to translate along the bottom surface of the clarifying tank 3 and scrape the sludge, and then drive the sludge to move towards one side of the sludge discharge dry centrifugal pump 16. Finally, the sludge discharge dry centrifugal pump 16 is used to discharge the sludge;

[0032] When the water body removes residual colloidal particles, microorganisms, residual chlorine, trace heavy metals, surfactants, trace organic matters, etc. in the activated carbon tank 5 and undergoes decolorization and deodorization purification treatment, it will be transported to the inside of the ultrafiltration device 6 and the reverse osmosis device 7. Using the reverse osmosis membrane and ultrafiltration membrane inside, the macromolecular substances in the water body will be removed, and at the same time, the small molecular organic matters in the water will be removed and the water conductivity will be reduced to obtain high-quality recycled water, and finally the water body meeting the pretreatment standard will be discharged to the sewage treatment plant.

[0033] The embodiments of the present invention are given for purposes of illustration and description, and are not exhaustive or limit the present invention to the disclosed form. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are chosen and described in order to better explain the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention so as to design various embodiments with various modifications suitable for specific purposes.

Claims

1. A semiconductor wastewater regeneration and reuse system, comprising a physical and chemical reaction tank (1) and a backwashing device (10), characterized in that: The physicochemical reaction tank (1), sodium hypochlorite reaction tank (2), clarifier (3), sand filter (4), activated carbon tank (5), ultrafiltration equipment (6) and reverse osmosis device (7) are connected in sequence. Automatic dosing devices (8) and chemical storage tanks (9) are arranged on both sides of the physicochemical reaction tank (1) and the sodium hypochlorite reaction tank (2). The backwashing device (10) is respectively arranged on the top of both sides of the physicochemical reaction tank (1), the sodium hypochlorite reaction tank (2), the clarifier (3), the sand filter (4) and the activated carbon tank (5). The ultrafiltration equipment (6) and the reverse osmosis device (7) are both equipped with chemical cleaning devices (11) for regular cleaning and maintenance of the membrane equipment. The ultrafiltration equipment (6) and the reverse osmosis device (7) are both connected to an on-line device (12) for real-time monitoring of data. The backwashing device (10) includes a plunger pump (1001), a pipe rack (1002), a swing rack (1003) and a spray head (1004). The left and right sides of the plunger pump (1001) are communicated with the pipe rack (1002). One end of the pipe rack (1002) far away from the plunger pump (1001) is connected to the swing rack (1003). The middle of the swing rack (1003) is connected with the spray head (1004).

2. The semiconductor wastewater regeneration and reuse system according to claim 1, wherein Water delivery pipes (13) are connected to the bottoms of both sides of the physicochemical reaction tank (1). The sodium hypochlorite reaction tank (2), the clarifier (3), the sand filter (4) and the activated carbon tank (5) are connected to each other through the water delivery pipes (13).

3. A semiconductor wastewater regeneration and reuse system according to claim 1, wherein, The automatic dosing device (8) and the chemical storage tank (9) are connected to each other. The output ends of the automatic dosing device (8) are respectively arranged at the bottoms of the sides of the physicochemical reaction tank (1) and the sodium hypochlorite reaction tank (2). Stirring devices (14) are arranged at the bottoms of the physicochemical reaction tank (1) and the sodium hypochlorite reaction tank (2) to achieve full mixing of the chemical agents and the incoming water.

4. A semiconductor wastewater regeneration and reuse system according to claim 1, characterized in that, The clarifier (3) is connected to the sodium hypochlorite reaction tank (2) and is used to remove colloids and organic and inorganic pollutants in a fine suspended state, has a removal effect on BOD and COD, and can also reduce the content of bacteria and viruses in the effluent. A sludge scraper (15) is arranged at the bottom of the clarifier (3). A sludge discharge dry centrifugal pump (16) is arranged on one side of the clarifier (3) for discharging sludge. The sludge scraper (15) includes a scraper plate (1501), a lead screw (1502) and a servo motor (1503). The left and right sides of the scraper plate (1501) are both threadedly connected to the lead screw (1502). One end of the lead screw (1502) is installed with a servo motor (1503) through a coupling.

5. A semiconductor wastewater regeneration and reuse system according to claim 1, characterized in that, The sand filter (4) is connected to the clarifier (3).

6. A semiconductor wastewater regeneration and reuse system according to claim 1, characterized in that, The activated carbon tank (5) is connected to the sand filter (4).

7. A semiconductor wastewater regeneration and reuse system according to claim 1, characterized in that, The ultrafiltration equipment (6) is connected to the reverse osmosis device (7).

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