Gas circulating device used in vacuum coating chamber

Abstract

The utility model relates to the field of gas circulation devices, in particular to a gas circulation device used in a vacuum coating chamber, which comprises a purification component, an air inlet pipeline, an absorption component, an air inlet fan, a recovery box component, an air outlet pipeline, an air outlet fan, a first closing valve and a second closing valve. The second closed box is arranged in the first closed box, the left air pipe and the right air pipe of the second closed box are respectively provided with a sealing valve, a double-layer closed box and two sealing valves, the sealing performance of the equipment can be effectively guaranteed, the problem of gas leakage is prevented, the activated carbon plate is arranged in the box body in a sliding mode, the activated carbon plate can be replaced in time, and the service life of the equipment is prolonged. The water tank and the water pump are arranged, so that redundant reaction liquid can be recycled, resource waste is avoided, and the reaction efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the field of gas circulation devices, and particularly relates to a gas circulation device for a vacuum coating chamber. Background Art

[0002] Gas circulation devices are widely used in multiple fields such as homes, offices, commercial buildings, and industrial production. In a home environment, it can provide a healthy and comfortable living environment for residents; in offices and commercial buildings, it can improve indoor air quality and enhance the work efficiency of employees and customer satisfaction; in the field of industrial production, it can ensure the normal operation of production equipment and the stability of product quality.

[0003] The gas circulation devices in the prior art generally purify gas through air filters, with low purification efficiency and inconspicuous purification effect. Some gas circulation devices also have poor sealing performance, resulting in gas leakage, which may not only cause waste of resources, but also cause environmental pollution or pose a threat to human health.

[0004] Therefore, a gas circulation device for a vacuum coating chamber is proposed, which has multiple purification channels, can improve the purification efficiency of gas, can reduce waste of resources under certain circumstances, and also has a double-sealed box to prevent gas leakage problems. Summary of the Utility Model

[0005] In order to overcome the problems of the existing gas circulation devices lacking multiple purification channels, improving the purification efficiency of gas, avoiding waste of resources, and preventing gas leakage.

[0006] The technical solution of the utility model is: a gas circulation device for a vacuum coating chamber, which includes a purification component, and also includes an air inlet pipe, an absorption component, an air inlet fan, a recovery box component, an air outlet pipe, an air outlet fan, a first shut-off valve, and a second shut-off valve; the left side of the purification component is fixedly connected with the air inlet fan, the air inlet end of the air inlet fan is fixedly connected with the air inlet pipe, the left side of the air inlet pipe is fixedly connected with the absorption component, the right side of the purification component is fixedly connected with the air outlet fan, the air outlet end of the air outlet fan is fixedly connected with the air outlet pipe, and the lower end of the purification component is provided with the recovery box component.

[0007] Preferably, the purification component includes a first sealed box, a second sealed box, a first spray head, a second spray head, a first water inlet pipe, a second water inlet pipe, a first shut-off valve and a second shut-off valve; a second sealed box is arranged inside the first sealed box, the upper wall of the second sealed box is penetrated with the first water inlet pipe and the second water inlet pipe, the lower ends of the first water inlet pipe and the second water inlet pipe are fixedly connected with the first spray head and the second spray head respectively, the left end of the second sealed box is fixedly connected with an air inlet pipe, the upper end of the air inlet pipe is fixedly connected with the first shut-off valve, the right end of the second sealed box is fixedly connected with an air outlet pipe, the upper end of the air outlet pipe is fixedly connected with the second shut-off valve. When it is detected that gas enters the second sealed box, the second shut-off valve is closed to accumulate the gas in the second sealed box, and the two spray heads evenly spray out a misty reaction liquid, which is fully mixed with the gas to increase the reaction efficiency.

[0008] Preferably, the absorption component includes a first box body, a first tank body, a first fixing plate, a handle and an activated carbon plate; the left end of the air inlet pipe is fixedly connected with the first box body, the front wall surface of the first box body is penetrated from front to back with the first tank body, the activated carbon plate is slidably arranged on the inner wall of the first tank body, the front end of the activated carbon plate is fixedly connected with the first fixing plate, the front end of the first fixing plate is fixedly connected with the handle, and the activated carbon plate can be pulled out through the handle, which is convenient for replacing the activated carbon plate to prevent pollutants from blocking.

[0009] Preferably, the air inlet fan includes a second box body, a second fixing plate, a motor, an output shaft, a fixing block and a fan blade; the left end of the first sealed box is fixedly connected with the second box body, the inner wall of the second box body is fixedly connected with the second fixing plate, the other end of the second fixing plate is fixedly connected with, the output shaft of is fixedly connected with the fixing block, and the edge of the fixing block is fixedly connected with the fan blade.

[0010] Preferably, the recycling box component includes a water tank, a first water pump, a second water pump, a first U-shaped pipe, a second U-shaped pipe and a recycling pipe; the water tank is arranged at the lower end of the first sealed box, the first water pump and the second water pump are respectively arranged at the rear end of the water tank, the tops of the first water pump and the second water pump are respectively fixedly connected with and, the output ends of the first water pump and the second water pump are respectively fixedly connected with the first U-shaped pipe and the second U-shaped pipe, the upper end of the water tank is fixedly connected with the recycling pipe, the water inlet end of the recycling pipe is fixedly connected with the second sealed box, the recycling pipe penetrates through the first sealed box, and the water outlet ends of the first U-shaped pipe and the second U-shaped pipe are respectively fixedly connected with the first water inlet pipe and the second water inlet pipe. Through the recycling pipe, the reaction liquid accumulated in the second sealed box can be recycled into the water tank, and then re-transported to the second sealed box through the water pump and the U-shaped pipe for recycling, which can avoid the waste of the reaction liquid.

[0011] The beneficial effects of the present utility model:

[0012] 1. By arranging a second sealed box inside the first sealed box, and installing sealing valves on the left and right air ducts of the second sealed box, the double-layer sealed box and the two sealing valves can effectively ensure the airtightness of the equipment and prevent gas leakage. By starting the fan, the indoor gas is sucked into the air duct. After detecting that the gas enters the second sealed box, the second closing valve is closed to accumulate the gas in the second sealed box. The two spray heads evenly spray the misty reaction liquid, which is fully mixed with the gas to increase the reaction efficiency;

[0013] 2. Before the gas enters the sealed box, it will first pass through the activated carbon plate for filtration to isolate some large particles in the gas. The activated carbon plate has a certain adsorption effect on harmful gases in the air, such as common harmful gases like formaldehyde, benzene, and ammonia. However, the adsorption capacity of the activated carbon is not infinite. When the adsorption amount reaches saturation, its adsorption effect will be significantly reduced. The activated carbon plate can be taken out through the handle and replaced in time to maintain the adsorption capacity of the activated carbon;

[0014] 3. During use, the excess reaction liquid returns to the water tank through the recovery pipe at the lower end of the second sealed box and is then pumped into the second sealed box by the water pump to avoid waste of resources. When it is detected that the gas in the second sealed box meets the emission standard, the second sealing valve is opened, and the gas is discharged through the air outlet fan. Description of the Drawings

[0015] Figure 1 Shown is a three-dimensional structural schematic diagram of the gas circulation device for a vacuum coating chamber of the present utility model;

[0016] Figure 2 Shown is a three-dimensional structural schematic diagram of the purification component of the gas circulation device for a vacuum coating chamber of the present utility model;

[0017] Figure 3 Shown is a three-dimensional structural schematic diagram of the absorption component of the gas circulation device for a vacuum coating chamber of the present utility model;

[0018] Figure 4 Shown is a three-dimensional structural schematic diagram of the fan component of the gas circulation device for a vacuum coating chamber of the present utility model;

[0019] Figure 5 Shown is a three-dimensional structural schematic diagram of the recovery component of the gas circulation device for a vacuum coating chamber of the present utility model.

[0020] The reference signs in the drawings are: 1, purification component; 2, air inlet duct; 3, absorption component; 4, air inlet fan; 5, recovery tank component; 6, air outlet duct; 7, air outlet fan; 8, first shut-off valve; 9, second shut-off valve; 101, first airtight box; 102, second airtight box; 103, first spray head; 104, first water inlet pipe; 105, second water inlet pipe; 106, second spray head; 301, first box body; 302, first fixing plate; 303, handle; 304, activated carbon plate; 305, first tank; 401, second box body; 402, second fixing plate; 403, motor; 404, output shaft; 405, fixing block; 406, fan blade; 505, water tank; 501, first water pump; 503, second water pump; 506, first U-shaped pipe; 507, second U-shaped pipe; 508, recovery pipe. Detailed implementation manners

[0021] The present utility model will be further described below in conjunction with the drawings and embodiments.

[0022] Please refer to Figures 1 - 5 , the present utility model provides an embodiment: a gas circulation device for a vacuum coating chamber, including a purification component 1, an air inlet duct 2, an absorption component 3, an air inlet fan 4, a recovery tank component 5, an air outlet duct 6, an air outlet fan 7, a first shut-off valve 8 and a second shut-off valve 9; the left side of the purification component 1 is fixedly connected with the air inlet fan 4, the air inlet end of the air inlet fan 4 is fixedly connected with the air inlet duct 2, the left side of the air inlet duct 2 is fixedly connected with the absorption component 3, the right side of the purification component 1 is fixedly connected with the air outlet fan 7, the air outlet end of the air outlet fan 7 is fixedly connected with the air outlet duct 6, and the lower end of the purification component 1 is provided with the recovery tank component 5.

[0023] Please refer to Figure 2 , the purification component 1 includes a first airtight box 101, a second airtight box 102, a first spray head 103, a second spray head 106, a first water inlet pipe 104, a second water inlet pipe 105, a first shut-off valve 8 and a second shut-off valve 9; a second airtight box 102 is arranged inside the first airtight box 101, the upper wall of the second airtight box 102 is penetrated with the first water inlet pipe 104 and the second water inlet pipe 105, the lower ends of the first water inlet pipe 104 and the second water inlet pipe 105 are respectively fixedly connected with the first spray head 103 and the second spray head 106, the left end of the second airtight box 102 is fixedly connected with the air inlet duct 2, the upper end of the air inlet duct 2 is fixedly connected with the first shut-off valve 8, the right end of the second airtight box 102 is fixedly connected with the air outlet duct 6, and the upper end of the air outlet duct 6 is fixedly connected with the second shut-off valve 9.

[0024] Please refer to Figure 3, the absorption component 3 includes a first box body 301, a first groove body 305, a first fixing plate 302, a handle 303 and an activated carbon plate 304; the left end of the air inlet pipe 2 is fixedly connected to the first box body 301, the front wall surface of the first box body 301 is penetrated from front to back to form a first groove body 305, an activated carbon plate 304 is slidably arranged on the inner wall of the first groove body 305, the front end of the activated carbon plate 304 is fixedly connected to the first fixing plate 302, and the front end of the first fixing plate 302 is fixedly connected to the handle 303.

[0025] Please refer to Figure 4 , the air inlet fan 4 includes a second box body 401, a second fixing plate 402, a motor 403, an output shaft 404, a fixing block 405 and a fan blade 406; the left end of the first sealed box 101 is fixedly connected to the second box body 401, the second fixing plate 402 is fixedly connected to the inner wall of the second box body 401, the other end of the second fixing plate 402 is fixedly connected to 403, the output shaft 404 of 403 is fixedly connected to the fixing block 405, and the fan blade 406 is fixedly connected to the edge of the fixing block 405.

[0026] Please refer to Figure 5 , the recycling box component 5 includes a water tank 505, a first water pump 501, a second water pump 503, a first U-shaped pipe 506, a second U-shaped pipe 507 and a recycling pipe 508; the water tank 505 is arranged at the lower end of the first sealed box 101, the first water pump 501 and the second water pump 503 are respectively arranged at the rear end of the water tank 505, the water inlet ends of the first water pump 501 and the second water pump 503 are arranged inside the water tank 505, the output ends of the first water pump 501 and the second water pump 503 are respectively fixedly connected to the first U-shaped pipe 506 and the second U-shaped pipe 507, the recycling pipe 508 is fixedly connected to the upper end of the water tank 505, the water inlet end of the recycling pipe 508 is fixedly connected to the second sealed box 102, the recycling pipe 508 penetrates through the first sealed box 101, and the water outlet ends of the first U-shaped pipe 506 and the second U-shaped pipe 507 are respectively fixedly connected to the first water inlet pipe 104 and the second water inlet pipe 105.

[0027] Working principle: When working, start the intake fan 4 to make the indoor gas enter the intake air duct 2. First, it passes through the activated carbon plate 304 to isolate some large particles in the gas. The activated carbon plate 304 has a certain adsorption effect on harmful gases in the air, such as common harmful gases like formaldehyde, benzene, ammonia, etc. Since the activated carbon plate 304 is slidably arranged in the first tank 305, it is convenient to replace the activated carbon plate 305. Then, the intake fan 4 brings the gas into the second sealed box 102. When the concentration in the second sealed box 102 is detected to be too high, close the intake fan 4 and the first sealing valve 8 to make the second sealed box 102 completely sealed, which can prevent the problem of gas leakage. After that, start the first spray head 103 and the second spray head 106 to turn the reaction liquid into a water mist and fully mix and react with the gas. After a period of time, when the gas in the second sealed box 102 is detected to meet the emission standard, open the second sealing valve 9 and the outlet fan 7 to discharge the treated gas.

[0028] In addition, a water tank 505 is provided at the lower end of the first sealed box 101. The second sealed box 102 is connected to the water tank 505 through a recovery pipe 508. The reaction liquid accumulated in the second sealed box 102 returns to the water tank 505 through the recovery pipe 508, and then returns to the second sealed box 102 again through the first water pump 501, the second water pump 503, the first U-shaped pipe 506 and the second U-shaped pipe 507, avoiding waste of resources.

[0029] The above has described the embodiments of the present invention in detail with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the purpose of the present invention.

Claims

1. A gas circulation device for a vacuum coating chamber, comprising a purification component (1); characterized in that: It further includes an air inlet duct (2), an absorption component (3), an air inlet fan (4), a recovery box component (5), an air outlet duct (6), an air outlet fan (7), a first shut-off valve (8) and a second shut-off valve (9); the left side of the purification component (1) is fixedly connected with the air inlet fan (4), the air inlet end of the air inlet fan (4) is fixedly connected with the air inlet duct (2), the left side of the air inlet duct (2) is fixedly connected with the absorption component (3), the right side of the purification component (1) is fixedly connected with the air outlet fan (7), the air outlet end of the air outlet fan (7) is fixedly connected with the air outlet duct (6), and the lower end of the purification component (1) is provided with the recovery box component (5).

2. The gas circulation device for a vacuum coating chamber according to claim 1, characterized in that; The purification component (1) includes a first sealed box (101), a second sealed box (102), a first spray head (103), a second spray head (106), a first water inlet pipe (104), a second water inlet pipe (105), a first shut-off valve (8) and a second shut-off valve (9); the second sealed box (102) is arranged inside the first sealed box (101), the upper wall of the second sealed box (102) is penetrated and provided with the first water inlet pipe (104) and the second water inlet pipe (105), and the lower ends of the first water inlet pipe (104) and the second water inlet pipe (105) are respectively fixedly connected with the first spray head (103) and the second spray head (106).

3. The gas circulation device for a vacuum coating chamber according to claim 2, wherein: The left end of the second sealed box (102) is fixedly connected with the air inlet duct (2), the upper end of the air inlet duct (2) is fixedly connected with the first shut-off valve (8), the right end of the second sealed box (102) is fixedly connected with the air outlet duct (6), and the upper end of the air outlet duct (6) is fixedly connected with the second shut-off valve (9).

4. The gas circulation device for a vacuum coating chamber according to claim 1, characterized in that: The absorption component (3) includes a first box body (301), a first tank body (305), a first fixing plate (302), a handle (303) and an activated carbon plate (304); the left end of the air inlet duct (2) is fixedly connected with the first box body (301), the front wall surface of the first box body (301) is penetrated from front to back to form a first tank body (305), the activated carbon plate (304) is slidably arranged on the inner wall of the first tank body (305), the front end of the activated carbon plate (304) is fixedly connected with the first fixing plate (302), and the front end of the first fixing plate (302) is fixedly connected with the handle (303).

5. The gas circulation device for a vacuum coating chamber according to claim 1, characterized in that: The air inlet fan (4) includes a second box body (401), a second fixing plate (402), a motor (403), an output shaft (404), a fixing block (405) and a fan blade (406); the left end of the first sealed box (101) is fixedly connected with the second box body (401), the inner wall of the second box body (401) is fixedly connected with the second fixing plate (402), the other end of the second fixing plate (402) is fixedly connected with the motor (403), the output shaft (404) of the motor (403) is fixedly connected with the fixing block (405), and the fan blade (406) is fixedly connected to the edge of the fixing block (405).

6. The gas circulation device for a vacuum coating chamber according to claim 1, characterized in that: The recycling bin assembly (5) includes a water tank (505), a first water pump (501), a second water pump (503), a first U-shaped pipe (506), a second U-shaped pipe (507) and a recycling pipe (508); a water tank (505) is provided at the lower end of the first sealed box (101), a first water pump (501) and a second water pump (503) are respectively provided at the rear end of the water tank (505), the water inlet ends of the first water pump (501) and the second water pump (503) are arranged inside the water tank (505), and the water outlet ends of the first water pump (501) and the second water pump (503) are respectively fixedly connected with a first U-shaped pipe (506) and a second U-shaped pipe (507).

7. The gas circulation device for a vacuum coating chamber according to claim 6, characterized in that: A recycling pipe (508) is fixedly connected to the upper end of the water tank (505), the water inlet end of the recycling pipe (508) is fixedly connected to the second sealed box (102), the recycling pipe (508) penetrates through the first sealed box (101), and the water outlet ends of the first U-shaped pipe (506) and the second U-shaped pipe (507) are respectively fixedly connected with a first water inlet pipe (104) and a second water inlet pipe (105).

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