Wafer carrying mechanical arm

Abstract

The utility model discloses a wafer carrying mechanical arm which comprises a supporting table, a waterproof disc fixedly installed on the top of the supporting table, a mechanical arm body installed on the waterproof disc, a rotating assembly fixedly connected to the top of one end of the mechanical arm body, a rotating rod rotationally connected to one end of the rotating assembly, and a U-shaped support fixedly connected to the top of one end of the rotating rod. The middle of the top end of the support is fixedly connected with a motor, the output end of the motor is fixedly connected with a transmission rod, the rod wall of the transmission rod is fixedly connected with a connecting rod, the bottom of the connecting rod is fixedly connected with a sponge strip, and the inner wall of one side of the support is fixedly connected with a hydraulic assembly. The lower end of the inner wall of the other side of the support is fixedly connected with a second clamping block, a plurality of water outlets distributed in an array mode around the circle center are formed in the circular surface of the support in a penetrating mode, liquid on the surface of a wafer can be adsorbed through rotation of the sponge strip, and therefore the cleaning effect on the surface of the wafer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer transportation, and specifically relates to a wafer handling robotic arm. Background Technique

[0002] A wafer refers to a silicon wafer used for manufacturing silicon semiconductor integrated circuits. Since its shape is circular, it is called a wafer. A wafer is the carrier for manufacturing integrated circuits. Generally, a wafer is mainly composed of silicon (Si).

[0003] A robotic arm for handling wafers with the publication (announcement) number CN218385170U discloses a robotic arm for handling wafers. By adding a rotation action after picking up the wafer, it achieves the function of pouring water, and realizes the purpose of conveniently and efficiently removing the liquid on the wafer surface, avoiding the influence of the liquid medicine on the process and the damage to the equipment. However, it is difficult to fully adsorb and clean the liquid on the wafer surface only by a rotation action after picking up the wafer, resulting in poor cleaning effect. Therefore, we propose a wafer handling robotic arm. Content of the Utility Model

[0004] The purpose of the utility model is to provide a wafer handling robotic arm to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A wafer handling robotic arm, including a support table, a waterproof tray is fixedly installed on the top of the support table, a robotic arm is installed on the waterproof tray, a rotation assembly is fixedly connected to the top of one end of the robotic arm, a rotating rod is rotatably connected to one end of the rotation assembly, a bracket arranged in a U shape is fixedly connected to the top of one end of the rotating rod, a motor is fixedly connected to the middle of the top of the bracket, an output end of the motor is fixedly connected to a transmission rod, a connecting rod is fixedly connected to the rod wall of the transmission rod, a sponge strip is fixedly connected to the bottom of the connecting rod, a hydraulic assembly is fixedly connected to the inner wall of one side of the bracket, an output end of the hydraulic assembly is fixedly connected to a first clamping block, and a second clamping block is fixedly connected to the lower end of the inner wall of the other side of the bracket.

[0006] Preferably, a plurality of water outlets distributed in an array centered on the center of the circle are penetrated through the circular surface of the bracket.

[0007] Preferably, the length of the connecting rod is consistent with the radius of the circular surface of the bracket.

[0008] Preferably, the inner surfaces of the first clamping block and the second clamping block are both arranged in an arc shape.

[0009] Preferably, the waterproof tray is located below the bracket.

[0010] Compared with the prior art, the beneficial effects of the present utility model are as follows: By starting the rotating assembly, the bracket can be rotated, so that the wafer can be tilted or rotated during handling, and the liquid on the surface of the wafer can be preliminarily cleaned. Then, when the wafer rotates, by starting the motor to drive the transmission rod and the connecting rod to rotate, the sponge strip rotates to adsorb the liquid on the surface of the wafer, thereby improving the cleaning effect on the surface of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is a schematic structural diagram of the present utility model;

[0012] Figure 2 is a schematic structural diagram of the robotic arm of the present utility model;

[0013] Figure 3 is a schematic bottom-up view of the bracket of the present utility model;

[0014] Figure 4 is a schematic structural diagram of the connecting rod of the present utility model.

[0015] In the figure: 1, support platform; 11, waterproof tray; 2, robotic arm; 21, rotating assembly; 22, rotating rod; 3, bracket; 301, water outlet; 31, motor; 32, transmission rod; 33, connecting rod; 34, sponge strip; 4, hydraulic assembly; 41, first clamping block; 42, second clamping block. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0017] Please refer to Figures 1-4 , the present utility model provides a technical solution: A wafer handling robotic arm, including a support platform 1, a waterproof tray 11 is fixedly installed on the top of the support platform 1, a robotic arm 2 is installed on the waterproof tray 11, a rotating assembly 21 is fixedly connected to the top of one end of the robotic arm 2, a rotating rod 22 is rotatably connected to one end of the rotating assembly 21, a bracket 3 arranged in a U-shaped shape is fixedly connected to the top of one end of the rotating rod 22, a motor 31 is fixedly connected to the middle of the top end of the bracket 3, the output end of the motor 31 is fixedly connected to a transmission rod 32, a connecting rod 33 is fixedly connected to the rod wall of the transmission rod 32, a sponge strip 34 is fixedly connected to the bottom of the connecting rod 33, a hydraulic assembly 4 is fixedly connected to the inner wall of one side of the bracket 3, the output end of the hydraulic assembly 4 is fixedly connected to a first clamping block 41, and a second clamping block 42 is fixedly connected to the lower end of the inner wall of the other side of the bracket 3.

[0018] Furthermore, a number of water outlets 301 are formed through the circular surface of the bracket 3 and are distributed in an array centered on the center of the circle. Through the arranged water outlets 301, when the wafer is flipped, the liquid can slide out from the water outlets 301.

[0019] Furthermore, the length of the connecting rod 33 is consistent with the radius of the circular surface of the bracket 3, and the connecting rod 33 can rotate along the bottom of the bracket 3 with the circular surface.

[0020] Furthermore, the inner surfaces of the first clamping block 41 and the second clamping block 42 are both arranged in an arc shape, and the first clamping block 41 and the second clamping block 42 arranged in an arc shape are adapted to the wafer material.

[0021] Furthermore, the waterproof tray 11 is located at the lower end of the bracket 3, and the waterproof tray 11 can block the falling liquid.

[0022] Specifically, when using the present utility model, first, the hydraulic component 4 is started to drive the first clamping block 41. Immediately after the first clamping block 41 moves to a suitable position, the wafer can be clamped by cooperating with the second clamping block 42. Then, the manipulator 2 can be started to convey the rotating component 21. At this time, the rotating component 21 can be started to rotate the entire bracket 3. When the bracket 3 rotates and tilts, the liquid attached to the surface of the wafer will flow out through a number of water outlets 301. Then, the motor 31 is started to drive the transmission rod 32 to rotate, and the transmission rod 32 will drive the connecting rod 33 to rotate, so that the sponge strip 34 can adsorb and clean the liquid on the surface of the wafer, improving the cleaning effect on the surface of the wafer.

[0023] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A wafer handling robotic arm, comprising a support table (1), characterized in that: A waterproof tray (11) is fixedly installed at the top of the support platform (1). A robotic arm (2) is installed on the waterproof tray (11). A rotating assembly (21) is fixedly connected to the top of one end of the robotic arm (2). A rotating rod (22) is rotatably connected to one end of the rotating assembly (21). A bracket (3) arranged in a U shape is fixedly connected to the top of one end of the rotating rod (22). A motor (31) is fixedly connected to the middle of the top end of the bracket (3). A transmission rod (32) is fixedly connected to the output end of the motor (31). A connecting rod (33) is fixedly connected to the rod wall of the transmission rod (32). A sponge strip (34) is fixedly connected to the bottom of the connecting rod (33). A hydraulic assembly (4) is fixedly connected to one side inner wall of the bracket (3). The output end of the hydraulic assembly (4) is fixedly connected to a first clamping block (41). A second clamping block (42) is fixedly connected to the lower end of the other side inner wall of the bracket (3).

2. The wafer handling robotic arm according to claim 1, characterized in that: A plurality of water outlets (301) distributed in an array centered on the center of the circle are formed through the circular surface of the bracket (3).

3. A wafer handling robotic arm according to claim 1, wherein: The length of the connecting rod (33) is consistent with the radius of the circular surface of the bracket (3).

4. A wafer handling robotic arm according to claim 1, wherein: The inner surfaces of the first clamping block (41) and the second clamping block (42) are both arranged in an arc shape.

5. A wafer handling robotic arm according to claim 1, characterized in that: The waterproof tray (11) is located below the bracket (3).

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