Perovskite solar cell processing equipment

Abstract

The utility model discloses processing equipment of a perovskite solar cell, and belongs to the technical field of solar cell preparation. The processing equipment of the perovskite solar cell comprises a coating device which comprises a first shell defining a coating chamber and a coating machine for installing the coating chamber, and the coating machine is used for coating a perovskite precursor medium on the surface of a base material; the crystallization device comprises a second shell defining a crystallization cavity and a temperature control assembly installed in the crystallization cavity, and the temperature control assembly is used for cooling the perovskite precursor medium at a low temperature to form a perovskite thin film; and the conveying mechanism is communicated with the coating chamber and the crystallization chamber and is used for conveying the base material treated by the coating device to the crystallization device. By using the structure, a perovskite precursor solution is crystallized under a low-temperature condition, a high-quality perovskite thin film is obtained, the formation of defects and pinholes is reduced, the harm of an anti-solvent to the natural environment is eliminated, the automation and continuous operation of a coating-crystallization project are realized, and the production and processing efficiency is improved.

Description

Technical Field

[0001] This application belongs to the technical field of solar cell preparation, and particularly relates to a processing device for perovskite solar cells. Background Art

[0002] Organic metal halide perovskite hybrid materials have the advantages of high absorption coefficient, adjustable band gap, long carrier diffusion length, high carrier mobility, low exciton binding energy, etc., and are widely used in the photovoltaic field. A perovskite solar cell is a solar cell that uses a perovskite-type organic metal halide semiconductor as a light-absorbing material.

[0003] Currently, in industrial production, perovskite thin films are mainly prepared by the solvent method, that is, an anti-solvent is added during the spin coating process, and then after high-temperature annealing, a perovskite thin film is obtained. However, the crystallization method of thermal annealing will lead to the formation of defects and pinholes, thus having a negative impact on the efficiency of perovskite solar cells. Secondly, although the addition of the anti-solvent can improve the stability of the preparation process, due to its special chemical properties, the use of the anti-solvent also causes great harm to the natural environment. In addition, the coating process and the crystallization process are usually separated operations, and the processing equipment is discrete, resulting in the production efficiency not meeting the expectations. Utility Model Content

[0004] This application aims to solve at least one of the technical problems existing in the prior art. For this reason, this application proposes a processing device for perovskite solar cells, enabling the perovskite precursor solution to crystallize under low-temperature conditions, obtaining a high-quality perovskite thin film, reducing the formation of defects and pinholes, improving the photoelectric conversion efficiency and stability of perovskite solar cells, eliminating the harm caused by the anti-solvent to the natural environment, realizing the automation of the coating-crystallization process, and improving the production and processing efficiency.

[0005] In a first aspect, this application provides a processing device for perovskite solar cells, including:

[0006] A coating device, the coating device includes a first housing defining a coating chamber and a coater installed in the coating chamber, and the coater is used to coat a perovskite precursor medium on the surface of a substrate;

[0007] A crystallization device, the crystallization device includes a second housing defining a crystallization chamber and a temperature control component installed in the crystallization chamber, and the temperature control component is used to cool the perovskite precursor medium at a low temperature to form a perovskite thin film;

[0008] A conveying mechanism, the conveying mechanism is connected to the coating chamber and the crystallization chamber, and is used to transport the substrate processed by the coating device to the crystallization device.

[0009] According to the processing equipment of the perovskite solar cell of the present application, through the arrangement of the above-mentioned coating device, crystallization device and conveying mechanism, the chemical reaction in the cast precursor can be suppressed, so that the perovskite precursor solution can be crystallized under low temperature conditions, which is conducive to the decoupling of the nucleation phase and the crystallization phase, and ultimately a high-quality perovskite film is obtained, thereby reducing the formation of defects and pinholes, and thus effectively improving the photoelectric conversion efficiency and stability of the perovskite solar cell. At the same time, there is no need to use an anti-solvent, eliminating the harm caused by the anti-solvent to the natural environment, and utilizing the integrated design of the crystallization device and the coating device to realize the automation of the coating-crystallization process and the continuous operation of the processing equipment, thereby improving the production and processing efficiency of the perovskite solar cell.

[0010] According to one embodiment of the present application, the temperature control component includes:

[0011] a liquid accumulator, the liquid accumulator being mounted on the second shell and being used for storing refrigerant;

[0012] A spraying mechanism, which can be selectively connected to the outlet of the liquid reservoir, is used to spray refrigerant onto the perovskite precursor medium on the surface of the substrate.

[0013] According to one embodiment of the present application, the temperature control component further includes:

[0014] The air blowing mechanism is separated from the liquid reservoir and the spraying mechanism and is arranged on a side of the spraying mechanism away from the coating device, and is used for blowing air toward the perovskite precursor medium on the surface of the substrate.

[0015] According to one embodiment of the present application, the temperature control component further includes:

[0016] A mounting bracket is mounted on the second shell and is connected to the blowing mechanism and the spraying mechanism.

[0017] According to one embodiment of the present application, the spraying port of the spraying mechanism is higher than the air outlet of the blowing mechanism.

[0018] According to one embodiment of the present application, the crystallization device further includes:

[0019] A valve is installed at the inlet of the liquid reservoir and is used to selectively block the inlet of the liquid reservoir.

[0020] According to one embodiment of the present application, the processing equipment of the perovskite solar cell further includes:

[0021] A baffle assembly, which is movably connected to the first housing and the second housing, and is used to selectively block the feed inlet of the coating device, the discharge outlet of the coating device, the feed inlet of the crystallization device, and the discharge outlet of the crystallization device.

[0022] According to an embodiment of the present application, the baffle assembly includes:

[0023] A first baffle, which is movably installed on the first housing and is used to selectively block the feed inlet of the coating device;

[0024] A second baffle, which is movably installed on the first housing and / or the second housing and is located between the discharge outlet of the coating device and the feed inlet of the crystallization device, and is used to selectively block the discharge outlet of the coating device and the feed inlet of the crystallization device;

[0025] A third baffle, which is movably installed on the second housing and is used to selectively block the discharge outlet of the crystallization device.

[0026] According to an embodiment of the present application, the first housing has a first air inlet and a second air inlet. The first air inlet is used to supply air to the coating chamber, and the second air inlet is used to suck air from the coating chamber. The second housing has a third air inlet, and the third air inlet is used to supply air to the crystallization chamber.

[0027] According to an embodiment of the present application, the coating machine includes:

[0028] A frame;

[0029] A coating die head, which is slidably installed on the frame.

[0030] Additional aspects and advantages of the present application will be given in part in the following description, will become apparent in part from the following description, or will be understood through the practice of the present application. Description of the Drawings

[0031] The above and / or additional aspects and advantages of the present application will become apparent and easy to understand from the description of the embodiments in conjunction with the following drawings, wherein:

[0032] Figure 1 is a schematic structural diagram of the processing equipment and the substrate of the perovskite solar cell provided by the embodiment of the present application.

[0033] Reference Signs:

[0034] Processing equipment 10 of the perovskite solar cell;

[0035] Coating device 11, first housing 111, coating chamber 1111, first air outlet 1112, second air outlet 1113, coater 112, frame 1121, coating die head 1122;

[0036] Crystallization device 12, second housing 121, crystallization chamber 1211, third air outlet 1212, temperature control component 122, liquid storage device 1221, spraying mechanism 1222, air blowing mechanism 1223, mounting bracket 1224, valve 123;

[0037] Transport mechanism 13;

[0038] First baffle 141, second baffle 142, third baffle 143;

[0039] Substrate 20. Detailed implementation manners

[0040] The embodiments of the present application will be described in detail below. The examples of the embodiments are shown in the drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present application, and should not be construed as a limitation to the present application.

[0041] The present application discloses a processing device 10 for perovskite solar cells.

[0042] Below, refer to Figure 1 Describe the processing device 10 for perovskite solar cells according to the embodiments of the present application.

[0043] In some embodiments, as Figure 1 shown, the processing device 10 for perovskite solar cells includes: a coating device 11, a crystallization device 12, and a transport mechanism 13.

[0044] The coating device 11 includes a first housing 111 that defines a coating chamber 1111 and a coater 112 installed in the coating chamber 1111. The coater 112 is used to coat a perovskite precursor medium on the surface of the substrate 20. The crystallization device 12 includes a second housing 121 that defines a crystallization chamber 1211 and a temperature control component 122 installed in the crystallization chamber 1211. The temperature control component 122 is used to cool the perovskite precursor medium at a low temperature to form a perovskite thin film. The transport mechanism 13 is connected to the coating chamber 1111 and the crystallization chamber 1211, and the transport mechanism 13 is used to transport the substrate 20 processed by the coating device 11 to the crystallization device 12.

[0045] The cooling method of the perovskite precursor medium may include but is not limited to cold plate liquid cooling, liquid nitrogen freezing, water bath cooling, or refrigeration cycle cooling, etc., and is not limited here.

[0046] For example, in some embodiments, the perovskite precursor medium is cooled by liquid nitrogen freezing.

[0047] The conveying mechanism 13 may include, but is not limited to, a belt conveyor, a chain conveyor, an automated guided vehicle, etc., and is not limited here.

[0048] For example, in some embodiments, as Figure 1 shown, the conveying mechanism 13 is a belt conveyor.

[0049] In actual execution, as Figure 1 shown, the substrate 20 is directionally transported by the conveying mechanism 13. When the substrate 20 is transported to the coating chamber 1111, the perovskite precursor solution is uniformly coated on the surface of the substrate 20 to form a perovskite precursor solution coating. The coater 112 can precisely control the thickness and uniformity of the coating. After the coating process is completed, the conveying mechanism 13 transports the substrate 20 away from the coating chamber 1111. When the substrate 20 is transported to the crystallization chamber 1211, the temperature control component 122 performs a low-temperature freezing treatment on the substrate 20 with the solution coating, so that a large number of crystal nuclei are first formed in the solution coating under low-temperature conditions, and then the crystal nuclei slowly grow at a lower temperature. In this way, more and evenly distributed crystals can be obtained, and then a more dense, uniform and less defective perovskite thin film can be formed. After the crystallization process is completed, the conveying mechanism 13 transports the substrate 20 away from the crystallization chamber 1211.

[0050] The processing equipment 10 for perovskite solar cells provided by the embodiments of the present application, through the settings of the above-mentioned coating device 11, crystallization device 12 and conveying mechanism 13, can inhibit the chemical reaction in the as-cast precursor, make the perovskite precursor solution crystallize under low-temperature conditions, contribute to the decoupling of the nucleation phase and the crystallization phase, and finally obtain a high-quality perovskite thin film, thereby reducing the formation of defects and pinholes, and further effectively improving the photoelectric conversion efficiency and stability of the perovskite solar cell. At the same time, there is no need to use an antisolvent, eliminating the harm caused by the antisolvent to the natural environment, and using the integrated design of the crystallization device 12 and the coating device 11 to realize the automation of the coating-crystallization process and the continuous operation of the processing equipment 10, thereby improving the production and processing efficiency of the perovskite solar cell.

[0051] In some embodiments, as Figure 1 shown, the temperature control component 122 may include: a liquid storage tank 1221 and a spraying mechanism 1222.

[0052] The liquid storage tank 1221 can be installed on the second housing 121. The liquid storage tank 1221 can be used to store the refrigerant; the spraying mechanism 1222 can be selectively connected to the outlet of the liquid storage tank 1221, and the spraying mechanism 1222 can be used to spray the refrigerant onto the perovskite precursor medium on the surface of the substrate 20.

[0053] In this embodiment, if Figure 1 As shown, based on the extremely low temperature of liquid nitrogen and the characteristics of absorbing a large amount of heat during evaporation, the refrigerant can be liquid nitrogen. When the conveying mechanism 13 transports the coated substrate 20 to the bottom of the spraying mechanism 1222, the spraying mechanism 1222 is controlled to be connected to the outlet of the liquid reservoir 1221. The liquid nitrogen can flow from the liquid reservoir 1221 into the spraying mechanism 1222, and then can be directly sprayed onto the surface of the substrate 20 from the spray port of the spraying mechanism 1222. The perovskite precursor solution coating on the surface of the substrate 20 is in direct contact with the liquid nitrogen, and the liquid nitrogen quickly absorbs the heat of the solution coating and evaporates, causing the temperature of the solution coating on the surface of the substrate 20 to drop suddenly in a short time.

[0054] It should be noted that a control valve can be set between the inlet of the spraying mechanism 1222 and the outlet of the liquid reservoir 1221 to enable the spraying mechanism 1222 to be selectively connected to the outlet of the liquid reservoir 1221. Specifically, when the substrate 20 has not yet reached the bottom of the spraying mechanism 1222, the control valve is closed; when the substrate 20 reaches the bottom of the spraying mechanism 1222, the control valve is opened.

[0055] In other embodiments, the temperature control component 122 may include a cold plate, and the coated substrate 20 is placed on the cold plate. The perovskite precursor medium on the surface of the substrate 20 exchanges heat with the cold plate through indirect contact, thereby achieving cooling.

[0056] The perovskite solar cell processing equipment 10 provided in the embodiment of the present application, through the above-mentioned design of directly spraying refrigerant on the surface of the substrate 20, quickly absorbs the heat of the perovskite precursor medium on the surface of the substrate 20 in the form of direct contact compared to the common cold plate liquid cooling, can quickly reduce the temperature of the perovskite precursor medium on the surface of the substrate 20 in a short time, improve the cooling efficiency, further reduce the defect density of the formed perovskite film, and improve the photoelectric performance of the perovskite solar cell.

[0057] In some embodiments, as Figure 1 As shown, the temperature control component 122 may further include: a blower mechanism 1223 .

[0058] The blowing mechanism 1223 can be separated from the liquid reservoir 1221 and the spraying mechanism 1222 , and can be arranged on the side of the spraying mechanism 1222 away from the coating device 11 . The blowing mechanism 1223 can be used to blow air toward the perovskite precursor medium on the surface of the substrate 20 .

[0059] In actual implementation, Figure 1As shown, after the substrate 20 enters the crystallization chamber 1211, the conveying mechanism 13 first transports the substrate 20 to the lower part of the spraying mechanism 1222. At this time, the spraying mechanism 1222 is controlled to communicate with the outlet of the liquid storage device 1221, and the refrigerant can flow from the liquid storage device 1221 into the spraying mechanism 1222, and then can be directly sprayed on the surface of the substrate 20 from the spraying port of the spraying mechanism 1222. The solution coating on the surface of the substrate 20 is in direct contact with the refrigerant, and the refrigerant quickly absorbs the heat of the solution coating and volatilizes, so that the temperature of the solution coating on the surface of the substrate 20 drops suddenly in a short time. A large number of crystal nuclei are first formed in the solution coating under low-temperature conditions, and then the crystal nuclei slowly grow at a lower temperature, so that more and evenly distributed crystals can be obtained. At this time, the coating on the surface of the substrate 20 includes residual solution, precipitated crystals, crystal nuclei, etc. In order to prevent the precipitated crystals and crystal nuclei from redissolving into the residual solution, the conveying mechanism 13 quickly transports the substrate 20 after low-temperature treatment to the lower part of the blowing mechanism 1223, and the blowing mechanism 1223 blows air on the surface of the cooled substrate 20 to accelerate the evaporation rate of the residual solution, thereby forming a more dense, uniform and less defective perovskite thin film. After the crystallization process is completed, the conveying mechanism 13 transports the substrate 20 away from the crystallization chamber 1211.

[0060] It should be noted that the air blown out by the blowing mechanism 1223 can include nitrogen or pure compressed gas, etc., and there is no limitation here.

[0061] For example, in some embodiments, the air blown out by the blowing mechanism 1223 is nitrogen.

[0062] The processing equipment 10 of the perovskite solar cell provided by the embodiment of the present application, through the setting of the above-mentioned blowing mechanism 1223, realizes further air-drying treatment of the coating on the surface of the substrate 20 after low-temperature cooling, can prevent the precipitated crystals and crystal nuclei from redissolving into the residual solution, so that the residual solution can be quickly and efficiently removed from the coating on the surface of the substrate 20, reduce the generation of defects and pinholes, and contribute to the subsequent formation of a dense and uniform perovskite thin film.

[0063] In some embodiments, as Figure 1 shown, the temperature control component 122 may further include: a mounting bracket 1224.

[0064] The mounting bracket 1224 can be mounted on the second housing 121, and the mounting bracket 1224 can be connected to the blowing mechanism 1223 and the spraying mechanism 1222.

[0065] The connection manner between the mounting bracket 1224 and the second housing 121 may include but is not limited to bolt connection, snap connection or riveting, etc., and there is no limitation here.

[0066] For example, in some embodiments, the connection between the mounting bracket 1224 and the second housing 121 is a bolt connection.

[0067] The connection between the mounting bracket 1224 and the blowing mechanism 1223 may include, but is not limited to, bolt connection, snap connection, riveting, etc., and is not limited here.

[0068] For example, in some embodiments, the connection between the mounting bracket 1224 and the blowing mechanism 1223 is a bolt connection.

[0069] The connection between the mounting bracket 1224 and the spraying mechanism 1222 may include, but is not limited to, bolt connection, snap connection, riveting, etc., and is not limited here.

[0070] For example, in some embodiments, the connection between the mounting bracket 1224 and the spraying mechanism 1222 is a bolt connection.

[0071] In this embodiment, as Figure 1 shown, the mounting bracket 1224 can be cantilever-connected to the side wall of the second housing 121, the liquid storage device 1221 can be arranged between the top wall of the second housing 121 and the mounting bracket 1224, the liquid storage device 1221 can be fixedly connected to the top wall of the second housing 121, and the liquid storage device 1221 can also be fixedly connected to the mounting bracket 1224. The mounting bracket 1224 can bear part of the weight of the liquid storage device 1221, and the spraying structure and the blowing mechanism 1223 can be suspended at intervals at the bottom of the mounting bracket 1224.

[0072] The processing equipment 10 of the perovskite solar cell provided by the embodiment of the present application realizes the assembly of the blowing mechanism 1223 and the spraying mechanism 1222 through the above setting of the mounting bracket 1224. On the premise of not affecting the installation reliability, the structural layout is simplified, the installation and disassembly are convenient, and the maintainability of the processing equipment 10 of the perovskite solar cell is improved.

[0073] In some embodiments, as Figure 1 shown, the spraying port of the spraying mechanism 1222 can be higher than the air outlet of the blowing mechanism 1223.

[0074] It can be understood that when the height of the surface of the substrate 20 is fixed, the lower the spraying orifice of the spraying mechanism 1222, the closer the spraying orifice of the spraying mechanism 1222 is to the surface of the substrate 20. However, for a spraying orifice that is too close to the surface of the substrate 20, after spraying the refrigerant, the actual cooling range on the surface of the substrate 20 is significantly reduced; when the height of the surface of the substrate 20 is fixed, the lower the air outlet of the blowing mechanism 1223, the closer the air outlet of the blowing mechanism 1223 is to the surface of the substrate 20. However, for an air outlet that is too close to the surface of the substrate 20, after air outlet, the wind-receiving area on the surface of the substrate 20 is significantly reduced.

[0075] The processing equipment 10 for perovskite solar cells provided by the embodiments of the present application, through the structural design that the spraying orifice of the above-mentioned spraying mechanism 1222 is higher than the air outlet of the blowing mechanism 1223, can expand the spraying range of the refrigerant as much as possible, so that the refrigerant can be sprayed evenly and comprehensively on the surface of the substrate 20, improving the refrigeration efficiency. At the same time, it can expand the coverage area of the airflow blown by the blowing mechanism 1223 as much as possible, so that the airflow can fully contact the coating on the surface of the substrate 20, accelerating the evaporation rate of the residual solution, thereby optimizing the crystallization effect of the perovskite precursor medium.

[0076] In some embodiments, as Figure 1 shown, the crystallization device 12 may further include: a valve 123.

[0077] The valve 123 can be installed at the inlet of the liquid storage tank 1221, and the valve 123 can be used to selectively block the inlet of the liquid storage tank 1221.

[0078] In this embodiment, as Figure 1 shown, the valve 123 can be installed on the top of the liquid storage tank 1221, and the valve 123 can be located outside the second housing 121. A corresponding avoidance opening can be provided on the second housing 121. The valve 123 can pass through the avoidance opening and be connected to the inlet of the liquid storage tank 1221. When the refrigerant in the liquid storage tank 1221 needs to be replenished, the valve 123 can be opened to replenish the refrigerant into the liquid storage tank 1221. After the liquid replenishment is completed, the valve 123 can be closed, and a liquid level sensor and other devices can also be provided in the liquid storage tank 1221 to prompt the timing of liquid replenishment.

[0079] The processing equipment 10 for perovskite solar cells provided by the embodiments of the present application, through the setting of the above-mentioned valve 123, blocks the inlet of the liquid storage tank 1221 when the valve 123 is closed, and can replenish the refrigerant in the liquid storage tank 1221 when the valve 123 is opened. The refrigerant can be replenished at any time without removing the liquid storage tank 1221, bringing great convenience to the use and maintenance of the processing equipment 10 for perovskite solar cells.

[0080] In some embodiments, the processing equipment 10 for perovskite solar cells may further include: a baffle assembly.

[0081] The baffle assembly is movably connected to the first housing 111 and the second housing 121, and the baffle assembly can be used to selectively block the feed port of the coating device 11, the discharge port of the coating device 11, the feed port of the crystallization device 12, and the discharge port of the crystallization device 12.

[0082] As Figure 1 shown, a plurality of conveying mechanisms 13 may be provided. The plurality of conveying mechanisms 13 are spaced apart from each other in the transverse direction. Among the plurality of conveying mechanisms 13, a part is located in the coating chamber 1111, and another part is located in the crystallization chamber 1211, and each conveying mechanism 13 does not penetrate the feed port of the coating device 11, the discharge port of the coating device 11, the feed port of the crystallization device 12, and the discharge port of the crystallization device 12, so as to avoid interference with the baffle assembly.

[0083] Wherein, the plurality means two or more than two. For example, in some embodiments, as Figure 1 shown, four conveying mechanisms 13 are provided.

[0084] In actual implementation, the baffle assembly is moved away from the feed port of the coating device 11, and the substrate 20 is transported into the coating chamber 1111 through the feed port of the coating device 11 by the conveying mechanism 13. During the coating process, the baffle assembly blocks the feed port and the discharge port of the coating device 11, so that the internal environment of the coating chamber 1111 is isolated from the external environment. After the coating process is completed, the baffle assembly is moved away from the discharge port of the coating device 11 and the feed port of the crystallization device 12, and the substrate 20 is transported into the crystallization chamber 1211 through the discharge port of the coating device 11 and the feed port of the crystallization device 12 in sequence by the conveying mechanism 13. During the crystallization process, the baffle assembly blocks the feed port and the discharge port of the crystallization device 12, so that the internal environment of the crystallization chamber 1211 is isolated from the external environment. After the crystallization process is completed, the baffle assembly is moved away from the discharge port of the crystallization device 12, and the substrate 20 is transported out of the crystallization chamber 1211 through the discharge port of the crystallization device 12 by the conveying mechanism 13.

[0085] For the processing equipment 10 for perovskite solar cells provided by the embodiments of the present application, through the above setting of the baffle assembly, on the premise of not affecting the smoothness of the conveying mechanism 13 for transporting the substrate 20, it is realized that during the coating process and the crystallization process, the internal environments of the coating chamber 1111 and the crystallization chamber 1211 can be isolated from the external environment as much as possible, preventing impurities in the external environment from entering the internal structure of the equipment, reducing the adverse effects of the external environment on the preparation of the perovskite thin film, and thus improving the quality of the final product.

[0086] In some embodiments, as Figure 1As shown, the baffle assembly may include: a first baffle 141, a second baffle 142, and a third baffle 143.

[0087] The first baffle 141 is movably installed on the first housing 111. The first baffle 141 can be used to selectively block the feed port of the coating device 11. The second baffle 142 is movably installed on the first housing 111 and / or the second housing 121. The second baffle 142 can be located between the discharge port of the coating device 11 and the feed port of the crystallization device 12. The second baffle 142 can be used to selectively block the discharge port of the coating device 11 and the feed port of the crystallization device 12. The third baffle 143 is movably installed on the second housing 121. The third baffle 143 can be used to selectively block the discharge port of the crystallization device 12.

[0088] The second baffle 142 can be connected to the first housing 111; alternatively, the second baffle 142 can be connected to the second housing 121; alternatively, the second baffle 142 can be connected to both the first housing 111 and the second housing 121.

[0089] Among them, the movable installation methods of the first baffle 141, the second baffle 142, and the third baffle 143 may include, but are not limited to, sliding assembly, rotational assembly, or other methods, etc., which are not restricted here.

[0090] As Figure 1 shown, the discharge port of the coating device 11 and the feed port of the crystallization device 12 are arranged opposite to each other. The second baffle 142 can simultaneously block the discharge port of the coating device 11 and the feed port of the crystallization device 12. Similarly, after the second baffle 142 is moved away, the discharge port of the coating device 11 and the feed port of the crystallization device 12 are simultaneously opened.

[0091] In actual implementation, as Figure 1As shown, the first baffle 141 moves upward to not block the feed port of the coating device 11, and the conveying mechanism 13 transports the substrate 20 into the coating chamber 1111 through the feed port of the coating device 11. During the coating process, the first baffle 141 and the second baffle 142 block the feed port and the discharge port of the coating device 11, so that the internal environment of the coating chamber 1111 is isolated from the external environment. After the coating process ends, the second baffle 142 moves upward to not block the discharge port of the coating device 11 and the feed port of the crystallization device 12, and the conveying mechanism 13 transports the substrate 20 into the crystallization chamber 1211 through the discharge port of the coating device 11 and the feed port of the crystallization device 12 in sequence. During the crystallization process, the second baffle 142 and the third baffle 143 block the feed port and the discharge port of the crystallization device 12, so that the internal environment of the crystallization chamber 1211 is isolated from the external environment. After the crystallization process ends, the third baffle 143 moves upward to not block the discharge port of the crystallization device 12, and the conveying mechanism 13 transports the substrate 20 out of the crystallization chamber 1211 through the discharge port of the crystallization device 12.

[0092] The processing equipment 10 of the perovskite solar cell provided by the embodiment of the present application realizes the selective blocking of the feed port of the coating device 11, the discharge port of the coating device 11, the feed port of the crystallization device 12, and the discharge port of the crystallization device 12 through the settings of the above-mentioned first baffle 141, second baffle 142, and third baffle 143. By virtue of the special installation position of the second baffle 142, the second baffle 142 can synchronously control the opening and closing of the discharge port of the coating device 11 and the feed port of the crystallization device 12, reducing the number of baffles used, thereby saving the material cost and manufacturing cost of the processing equipment 10 of the perovskite solar cell.

[0093] In some embodiments, as Figure 1 shown, the first housing 111 may have a first air inlet 1112 and a second air inlet 1113. The first air inlet 1112 may be used to supply air to the coating chamber 1111, and the second air inlet 1113 may be used to suck air from the coating chamber 1111. The second housing 121 may have a third air inlet 1212, and the third air inlet 1212 may be used to supply air to the crystallization chamber 1211.

[0094] It can be understood that during the coating process, part of the perovskite precursor solution will naturally volatilize, and the second air outlet 1113 mainly absorbs the volatilized gas. Moreover, during the preparation process of the perovskite material, the environmental control of the coating chamber 1111 and the crystallization chamber 1211 is crucial, including but not limited to the control of temperature, humidity, and atmosphere. Specifically, the first air outlet 1112 can be used to send a protective atmosphere into the coating chamber 1111, and the third air outlet 1212 can be used to send a protective atmosphere into the crystallization chamber 1211. The protective atmosphere needs to be kept dry and clean. For example, nitrogen or dry air can be used as the protective atmosphere, which helps to reduce the influence of moisture and oxygen in the air on the perovskite precursor medium.

[0095] The processing equipment 10 for perovskite solar cells provided by the embodiments of the present application, through the settings of the above-mentioned first air outlet 1112, second air outlet 1113, and third air outlet 1212, realizes the timely discharge of volatile solvents and the environmental control of the coating chamber 1111 and the crystallization chamber 1211, preventing the volatile solvents from reattaching to the coating on the surface of the substrate 20 and causing defects, and at the same time controlling the temperature, humidity, and atmosphere of the coating chamber 1111 and the crystallization chamber 1211 at appropriate levels, thereby helping to improve the stability and uniformity of the coating on the surface of the substrate 20.

[0096] In some embodiments, as Figure 1 shown, the coater 112 may include: a frame 1121 and a coating die head 1122.

[0097] The coating die head 1122 can be slidably installed on the frame 1121.

[0098] In actual implementation, taking the coater 112 as a slot coater 112 as an example, the coating die head 1122 is communicated with the solution source, and the solution source is a container for storing the perovskite precursor solution or a device for preparing the perovskite precursor solution. During the coating process, the conveying mechanism 13 can transport the substrate 20 to be coated to the coating area, and the perovskite precursor solution can be extruded from the middle of the slot of the coating die head 1122, so that the perovskite precursor solution is evenly attached to the substrate 20 to be coated to form a uniform and continuous perovskite solution coating, thus facilitating subsequent crystallization and film-forming steps.

[0099] The coating die head 1122 is slidably installed on the frame 1121 to adjust the position, but the coating die head 1122 itself may be stationary or move laterally along the moving direction of the substrate 20 during coating. The coating die head 1122 and the substrate 20 need to cooperate with each other during movement to ensure that the perovskite precursor solution can evenly cover the surface of the substrate 20.

[0100] The processing equipment 10 of the perovskite solar cell provided by the embodiment of the present application, through the settings of the above-mentioned frame 1121 and coating die head 1122, enables the perovskite precursor solution to be uniformly coated on the substrate 20 to form a continuous perovskite solution coating, improving the coating quality, thereby improving the subsequent film-forming quality. The position of the coating die head 1122 can be adjusted according to actual needs, so that the coater 112 can adapt to substrates 20 of different sizes or shapes, thereby increasing the flexibility of the processing equipment 10 of the perovskite solar cell.

[0101] The terms "first", "second", etc. in the description and claims of the present application are used to distinguish similar objects, rather than to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are usually of the same type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the description and claims means at least one of the connected objects, and the character " / " generally means that the related objects before and after are in an "or" relationship.

[0102] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present application.

[0103] In the description of the present application, the "first feature" and "second feature" may include one or more of such features.

[0104] In the description of the present application, the meaning of "a plurality" is two or more.

[0105] In the description of the present application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through additional features therebetween.

[0106] In the description of the present application, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature.

[0107] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc., mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0108] Although the embodiments of the present application have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A processing device for a perovskite solar cell, characterized in that, include: A coating device, comprising a first housing defining a coating chamber and a coater mounted in the coating chamber, the coater being configured to coat a perovskite precursor medium on a surface of a substrate; a crystallization device comprising a second housing defining a crystallization chamber and a temperature control assembly mounted in the crystallization chamber, the temperature control assembly being configured to cryogenically cool a perovskite precursor medium to form a perovskite thin film; The conveying mechanism is connected to the coating chamber and the crystallization chamber, and is used for conveying the substrate processed by the coating device to the crystallization device.

2. The processing equipment for perovskite solar cells according to claim 1, characterized in that, The temperature control component includes: a liquid accumulator, the liquid accumulator being mounted on the second shell and being used for storing refrigerant; A spraying mechanism, which can be selectively connected to the outlet of the liquid reservoir, is used to spray refrigerant onto the perovskite precursor medium on the surface of the substrate.

3. The processing equipment for perovskite solar cells according to claim 2, wherein The temperature control component also includes: The air blowing mechanism is separated from the liquid reservoir and the spraying mechanism and is arranged on a side of the spraying mechanism away from the coating device, and is used for blowing air toward the perovskite precursor medium on the surface of the substrate.

4. The processing equipment for perovskite solar cells according to claim 3, wherein, The temperature control component also includes: A mounting bracket is mounted on the second shell and is connected to the blowing mechanism and the spraying mechanism.

5. The processing equipment for a perovskite solar cell according to claim 3, characterized in that, The spraying port of the spraying mechanism is higher than the air outlet of the blowing mechanism.

6. The processing equipment for perovskite solar cells according to claim 2, wherein, The crystallization device also includes: A valve is installed at the inlet of the liquid reservoir and is used to selectively block the inlet of the liquid reservoir.

7. The processing equipment for perovskite solar cells according to any one of claims 1-6, characterized in that, Also includes: A baffle assembly is movably connected to the first shell and the second shell, and is used to selectively block the feed port of the coating device, the discharge port of the coating device, the feed port of the crystallization device, and the discharge port of the crystallization device.

8. The processing equipment for perovskite solar cells according to claim 7, characterized in that, The baffle assembly comprises: a first baffle, movably mounted on the first housing and configured to selectively block a feed port of the coating device; a second baffle, movably mounted on the first shell and / or the second shell, located between the discharge port of the coating device and the feed port of the crystallization device, and configured to selectively block the discharge port of the coating device and the feed port of the crystallization device; A third baffle is movably mounted on the second shell and is used to selectively block the discharge port of the crystallization device.

9. The processing equipment for perovskite solar cells according to any one of claims 1-6, characterized in that, The first shell has a first air outlet and a second air outlet, the first air outlet is used to supply air to the coating chamber, the second air outlet is used to suck air into the coating chamber, and the second shell has a third air outlet, the third air outlet is used to supply air to the crystallization chamber.

10. The processing equipment for perovskite solar cells according to any one of claims 1-6, characterized in that, The coating machine comprises: frame; A coating die head is slidably mounted on the frame.

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