Micro electro mechanical system microphone module and sound capturing device

Abstract

The utility model relates to the technical field of micro electro mechanical system microphones, and provides a micro electro mechanical system microphone module and a sound capturing device, the module comprises a microphone module and a transfer module, the input end of the transfer module is connected with the output end of the microphone module, the transfer module comprises a chip, the power supply end of the chip is connected with the input end of a voltage dividing module and is connected with a power supply through a magnetic bead; the first and second output ends of the voltage dividing module are respectively connected with the input end of the voltage stabilizing module and the first anode input end of the chip, and the third output end is connected with the second anode input end and the first output end of the chip; the first output end of the voltage stabilizing module is connected with the power end of the microphone module, and the second output end is connected with the output end of the microphone module and the input end of the gain module; first and second output ends of the gain module are respectively connected with a first cathode input end and a first output end of the chip; the second output end of the chip is connected with the second negative electrode input end of the chip, the first end of the first anti-interference unit and the second end of the first anti-interference unit are grounded. The cable is good in anti-interference performance and high in production efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of microelectromechanical system microphones, in particular to a microelectromechanical system microphone module and a sound capture device. Background Art

[0002] A microelectromechanical system microphone (Micro Electro Mechanical Systems Microphone, abbreviated as MEMS MIC) is an acoustic sensor that combines a micro mechanical structure with an integrated circuit. It captures sound by converting sound waves into electrical signals.

[0003] The applications of MEMS MIC have penetrated into many aspects of daily life, including but not limited to fields such as electronic products, transportation, and smart homes. With the development of wireless communication technology, Wi-Fi networks have expanded from a single 2.4 GHz frequency band to a dual-band operating mode including the 5 GHz frequency band. This change brings higher data transmission capabilities but also increases the risk of radio frequency interference. In the 2.4 GHz and 5 GHz frequency bands, the interference problem between wireless devices and MEMS MIC has become more serious, especially in application scenarios with high signal-to-noise ratio requirements.

[0004] To address this challenge, traditional metal-cased MEMS MICs are being replaced by new materials or designs to reduce electromagnetic interference. However, simply relying on changes in the casing material is no longer sufficient to cope with the increasingly complex electromagnetic environment. By integrating anti-interference capacitors, high-frequency noise can be filtered out, improving the ability of MEMS MIC to resist external interference. However, as the complexity and intensity of interference signals increase, the effect of this simple filtering gradually becomes limited.

[0005] To improve the anti-interference performance of MEMS MIC, some manufacturers have started to integrate more complex anti-interference modules in MEMS MIC, such as notch filters, shielding technologies, and digital signal processing algorithms. These modules can more effectively suppress interference signals and improve audio quality. However, these advanced anti-interference solutions will increase the cost and complexity of MEMS MIC and reduce its production efficiency in large-scale applications. Summary of the Utility Model

[0006] Therefore, the technical problem to be solved by the present utility model is to overcome the problem that the existing microelectromechanical system microphones cannot balance better anti-interference performance and higher production efficiency, and provide a microelectromechanical system microphone module and a sound capture device with better anti-interference performance and higher production efficiency.

[0007] In a first aspect, to solve the above technical problem, the present utility model provides a microelectromechanical system microphone module, including:

[0008] Microphone module;

[0009] Transfer module, the input end of which is connected to the output end of the microphone module; the transfer module includes a chip, a bead, a voltage dividing module, a voltage stabilizing module, a gain module and a first anti-interference unit;

[0010] Wherein, the power supply end of the chip is connected to the power supply through the bead, and the power supply end of the chip is also connected to the input end of the voltage dividing module; the first output end of the voltage dividing module is connected to the input end of the voltage stabilizing module, the second output end of the voltage dividing module is connected to the first positive input end of the chip, and the third output end of the voltage dividing module is connected to the second positive input end of the chip and the first output end of the chip; the first output end of the voltage stabilizing module is connected to the power supply end of the microphone module, and the second output end of the voltage stabilizing module is connected to the output end of the microphone module and the input end of the gain module; the first output end of the gain module is connected to the first negative input end of the chip, and the second output end of the gain module is connected to the first output end of the chip; the second output end of the chip is connected to the second negative input end of the chip and the first end of the first anti-interference unit, and the second end of the first anti-interference unit is grounded.

[0011] In an embodiment of the present invention, the voltage stabilizing module includes a first resistor, a first capacitor, a voltage stabilizing diode and an inductor;

[0012] Wherein, the first end of the first resistor is connected to the output end of the microphone module and the input end of the gain module, and the second end of the first resistor is connected to the first end of the first capacitor, the negative end of the voltage stabilizing diode and the first end of the inductor; the second end of the first capacitor is connected to the negative end of the voltage stabilizing diode and grounded; the second end of the inductor is connected to the power supply end of the microphone module; the negative end of the voltage stabilizing diode is also connected to the first output end of the voltage dividing module.

[0013] In an embodiment of the present invention, the gain module includes a first adjustable resistor, a second adjustable resistor and an adjustable capacitor;

[0014] Wherein, the first end of the first adjustable resistor is connected to the second output end of the voltage stabilizing module, and the second end of the first adjustable resistor is connected to the first end of the second adjustable resistor, the first end of the adjustable capacitor and the first negative input end of the chip; the second end of the second adjustable resistor is connected to the second end of the adjustable capacitor and the first output end of the chip.

[0015] In an embodiment of the present invention, the voltage dividing module includes a second resistor, a third resistor, a fourth resistor, a fifth resistor and a sixth resistor;

[0016] Among them, the first end of the second resistor is connected to the input end of the voltage stabilizing module, and the second end of the second resistor is connected to the power supply end of the chip, the first end of the third resistor, and the first end of the fourth resistor; the second end of the third resistor is connected to the first end of the fifth resistor and the first positive input end of the chip; the second end of the fourth resistor is connected to the first output end of the chip, the second positive input end of the chip, and the first end of the sixth resistor; the second end of the fifth resistor is grounded; the second end of the sixth resistor is grounded.

[0017] In an embodiment of the present invention, the voltage dividing module further includes a second capacitor, a third capacitor, and a fourth capacitor; the second capacitor and the third capacitor are connected in parallel across the two ends of the fifth resistor; the fourth capacitor is connected between the second end of the fourth resistor and the first output end of the chip.

[0018] In an embodiment of the present invention, it further includes a seventh resistor and a fifth capacitor; the first end of the seventh resistor is connected to the second output end of the chip and the second negative input end of the chip, the second end of the seventh resistor is connected to the first end of the fifth capacitor, and the second end of the fifth capacitor is connected to the first end of the first anti-interference unit.

[0019] In an embodiment of the present invention, it further includes a sixth capacitor, a seventh capacitor, and a second anti-interference unit; the first end of the sixth capacitor is connected to the power supply end of the chip, the first end of the seventh capacitor, and the first end of the magnetic bead, the second end of the sixth capacitor is connected to the second end of the seventh capacitor, the first end of the second anti-interference unit and is grounded; the second end of the second anti-interference unit is connected to the power supply and the second end of the magnetic bead.

[0020] In an embodiment of the present invention, it further includes a third anti-interference unit and an eighth capacitor; the first end of the third anti-interference unit is connected to the power supply end of the microphone module, the first end of the eighth capacitor, and the first output end of the voltage stabilizing module, and the second end of the third anti-interference unit is connected to the second end of the eighth capacitor and is grounded.

[0021] In an embodiment of the present invention, it further includes a fourth anti-interference unit and a ninth capacitor; the first end of the fourth anti-interference unit is connected to the output end of the microphone module, the first end of the ninth capacitor, and the second output end of the voltage stabilizing module, and the second end of the fourth anti-interference unit is connected to the second end of the ninth capacitor and is grounded.

[0022] In a second aspect, to solve the above technical problems, the present invention further provides a sound capture device, including the above-mentioned microelectromechanical system microphone module.

[0023] The above technical solution of the present utility model has at least the following advantages compared with the prior art:

[0024] A microelectromechanical system microphone module and a sound capture device according to the present utility model are configured with a magnetic bead and a first anti-interference unit, and have good anti-interference performance; while the transfer module powers the microphone module, it also improves the signal quality output by the microphone module. The overall structure is simple, which is convenient for large-scale application and has high production efficiency. Description of the Drawings

[0025] In order to make the content of the present utility model easier to be clearly understood, the present utility model will be further described in detail below according to the specific embodiments of the present utility model in conjunction with the drawings.

[0026] Figure 1 It is the circuit schematic diagram of a microelectromechanical system microphone module in the embodiment of the present utility model.

[0027] Description of the reference numerals in the specification drawings:

[0028] MIC microphone module; U1 chip; P1 ground terminal; P2 power supply terminal; P3 module output terminal; Bead magnetic bead;

[0029] Out1 the first output terminal of the chip; Vcc the power supply terminal of the chip; IN1- the first negative input terminal of the chip; Out2 the second output terminal of the chip; IN1+ the first positive input terminal of the chip; IN2- the second negative input terminal of the chip; IN2+ the second positive input terminal of the chip;

[0030] R1 the first resistor; C1 the first capacitor; ZD1 the voltage stabilizing diode; L1 the inductor;

[0031] RA1 the first adjustable resistor; RA2 the second adjustable resistor; CA1 the adjustable capacitor;

[0032] R2 the second resistor; R3 the third resistor; R4 the fourth resistor; R5 the fifth resistor; R6 the sixth resistor; C2 the second capacitor; C3 the third capacitor; C4 the fourth capacitor;

[0033] R7 the seventh resistor; C5 the fifth capacitor; ESD 1 the first anti-interference unit;

[0034] C6 the sixth capacitor; C7 the seventh capacitor; ESD 2 the second anti-interference unit;

[0035] C8 the eighth capacitor; ESD 3 the third anti-interference unit;

[0036] C9 the ninth capacitor; ESD 4 the fourth anti-interference unit;

[0037] C10 the tenth capacitor. Detailed Embodiments

[0038] The present utility model will be further described below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the embodiments given are not intended to limit the present utility model.

[0039] In this application, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense, which can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and can be the communication inside two components or the interaction relationship between two components, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific situations.

[0040] In addition, in this application, descriptions such as "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, features defined with "first" and "second" can explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by this application.

[0041] The applications of MEMS MICs have penetrated into many aspects of daily life, including but not limited to fields such as electronic products, transportation, and smart homes. With the development of wireless communication technology, the interference problem between wireless devices and MEMS MICs has become more serious, especially in application scenarios with high signal-to-noise ratio requirements. Traditional metal-cased MEMS MICs are being replaced by new materials or designs to reduce electromagnetic interference, but simply relying on the change of the casing material is not enough to cope with the increasingly complex electromagnetic environment. By integrating anti-interference capacitors, the ability of MEMS MICs to resist external interference can be improved, but the effect is gradually becoming limited. Some manufacturers integrate more complex anti-interference modules in MEMS MICs to suppress interference signals, such as notch filters, shielding technologies, and digital signal processing algorithms, but these advanced anti-interference solutions will increase the cost and complexity of MEMS MICs and reduce their production efficiency in large-scale applications.

[0042] For this reason, the embodiments of this application provide a microelectromechanical system microphone module and a sound capture device.

[0043] Embodiment 1

[0044] This embodiment provides a microelectromechanical system microphone module, including:

[0045] Microphone module;

[0046] Transfer module, whose input end is connected to the output end of the microphone module; the transfer module includes a chip, a magnetic bead, a voltage dividing module, a voltage stabilizing module, a gain module and a first anti-interference unit;

[0047] Among them, the power supply end of the chip is connected to the power supply through the magnetic bead, and the power supply end of the chip is also connected to the input end of the voltage dividing module; the first output end of the voltage dividing module is connected to the input end of the voltage stabilizing module, the second output end of the voltage dividing module is connected to the first positive input end of the chip, and the third output end of the voltage dividing module is connected to the second positive input end of the chip and the first output end of the chip; the first output end of the voltage stabilizing module is connected to the power supply end of the microphone module, and the second output end of the voltage stabilizing module is connected to the output end of the microphone module and the input end of the gain module; the first output end of the gain module is connected to the first negative input end of the chip, and the second output end of the gain module is connected to the first output end of the chip; the second output end of the chip is connected to the second negative input end of the chip and the first end of the first anti-interference unit, and the second end of the first anti-interference unit is grounded.

[0048] A microelectromechanical system microphone module provided in this embodiment: (1) is configured with a magnetic bead and a first anti-interference unit, has good anti-interference performance and high signal security; (2) while the transfer module powers the microphone module, it also improves the signal quality output by the microphone module. The overall structure is simple, which is convenient for large-scale application and has high production efficiency.

[0049] Please refer to Figure 1 as shown, and the following is a detailed introduction to a microelectromechanical system microphone module provided in this embodiment:

[0050] Preferably, the chip U1 is an NJM4580 chip.

[0051] Exemplarily, the power supply end Vcc of the chip U1 is connected to the power supply 12V through the magnetic bead Bead; configuring the Bead can absorb static electricity and filter out high-frequency noise and spike interference on the power supply line.

[0052] Optionally, the voltage stabilizing module includes a first resistor R1, a first capacitor C1, a voltage stabilizing diode ZD1 and an inductor L1;

[0053] Among them, the first end of the first resistor R1 is connected to the output end of the microphone module MIC and the input end of the gain module, and the second end of the first resistor R1 is connected to the first end of the first capacitor C1, the negative extreme of the voltage stabilizing diode ZD1, and the first end of the inductor L1; the second end of the first capacitor C1 is connected to the negative extreme of the voltage stabilizing diode ZD1 and grounded; the second end of the inductor L1 is connected to the power supply end of the microphone module MIC; the negative extreme of the voltage stabilizing diode ZD1 is also connected to the first output end of the voltage dividing module.

[0054] The first end of the first resistor R1 is the second output end of the voltage stabilizing module, the second end of the first resistor R1 is the input end of the voltage stabilizing module, and the second end of the inductor L1 is the first output end of the voltage stabilizing module.

[0055] The second output end of the voltage stabilizing module is the input end of the transfer module.

[0056] The voltage stabilizing module provides a stable and high-quality voltage for the microphone module, which can ensure the stable operation of the microphone module.

[0057] Optionally, the gain module includes a first adjustable resistor RA1, a second adjustable resistor RA2, and an adjustable capacitor CA1;

[0058] Among them, the first end of the first adjustable resistor RA1 is connected to the second output end of the voltage stabilizing module, and the second end of the first adjustable resistor RA1 is connected to the first end of the second adjustable resistor RA2, the first end of the adjustable capacitor CA1, and the first negative input end IN1- of the chip U1; the second end of the second adjustable resistor RA2 is connected to the second end of the adjustable capacitor CA1 and the first output end Out1 of the chip U1.

[0059] The first end of the first adjustable resistor RA1 is the input end of the gain module, the second end of the first adjustable resistor RA1 is the first output end of the gain module, and the second end of the second adjustable resistor RA2 is the second output end of the gain module.

[0060] Reasonably adjusting RA1, RA2, and CA1 according to the required gain can condition the audio signal and increase its intensity.

[0061] Optionally, a tenth capacitor C10 is connected in series between the second output end of the voltage stabilizing module and the input end of the gain module.

[0062] Optionally, the voltage dividing module includes a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, and a sixth resistor R6;

[0063] Among them, the first end of the second resistor R2 is connected to the input end of the voltage stabilization module, and the second end of the second resistor R2 is connected to the power supply terminal Vcc of the chip U1, the first end of the third resistor R3, and the first end of the fourth resistor R4; the second end of the third resistor R3 is connected to the first end of the fifth resistor R5 and the first positive input terminal IN1+ of the chip U1; the second end of the fourth resistor R4 is connected to the first output terminal Out1 of the chip U1, the second positive input terminal IN2+ of the chip U1, and the first end of the sixth resistor R6; the second end of the fifth resistor R5 is grounded; the second end of the sixth resistor R6 is grounded.

[0064] The first end of the second resistor R2 is the first output end of the voltage division module, the second end of the second resistor R2 is the input end of the voltage division module, the second end of the third resistor R3 is the second output end of the voltage division module, and the second end of the fourth resistor R4 is the third output end of the voltage division module.

[0065] Further, the voltage division module further includes a second capacitor C2, a third capacitor C3, and a fourth capacitor C4; the second capacitor C2 and the third capacitor C3 are connected in parallel across the two ends of the fifth resistor R5; the fourth capacitor C4 is connected between the second end of the fourth resistor R4 and the first output terminal Out1 of the chip U1.

[0066] The parallel use of the second capacitor C2 and the third capacitor C3 can provide capacitance support in a wider frequency range, improve the frequency response, and enhance the circuit reliability; the fourth capacitor C4 can play a role in signal coupling.

[0067] Preferably, it further includes a seventh resistor R7 and a fifth capacitor C5; the first end of the seventh resistor R7 is connected to the second output terminal Out2 of the chip U1 and the second negative input terminal IN2- of the chip U1, the second end of the seventh resistor R7 is connected to the first end of the fifth capacitor C5, the second end of the fifth capacitor C5 is connected to the first end of the first anti-interference unit ESD 1, and the second end of the first anti-interference unit ESD 1 is grounded.

[0068] The seventh resistor R7 and the fifth capacitor C5 form an RC series filter circuit, and when used in combination with the first anti-interference unit ESD 1, it can improve the anti-interference performance of a microelectromechanical system microphone module described in this embodiment.

[0069] Preferably, it further includes a sixth capacitor C6, a seventh capacitor C7, and a second anti-interference unit ESD 2; a first end of the sixth capacitor C6 is connected to a power supply terminal Vcc of the chip U1, a first end of the seventh capacitor C7, and a first end of the bead Bead, and a second end of the sixth capacitor C6 is connected to a second end of the seventh capacitor C7, a first end of the second anti-interference unit ESD 2, and grounded; a second end of the second anti-interference unit ESD 2 is connected to a power supply and a second end of the bead Bead.

[0070] The sixth capacitor C6 and the seventh capacitor C7 are connected in parallel, which can provide capacitance support in a wider frequency range, improve frequency response, and enhance circuit reliability; meanwhile, C6 and C7 increase the capacitive reactance of the second anti-interference unit ESD 2, reduce the pulse peak value of ESD 2, and make its waveform smoother, which is beneficial for ESD 2 to play a protection function and further improves the anti-interference performance of the microelectromechanical system microphone module described in this embodiment.

[0071] Preferably, it further includes a third anti-interference unit ESD 3 and an eighth capacitor C8; a first end of the third anti-interference unit ESD 3 is connected to a power supply terminal of the microphone module MIC, a first end of the eighth capacitor C8, and a first output terminal of the voltage stabilization module, and a second end of the third anti-interference unit ESD 3 is connected to a second end of the eighth capacitor C8 and grounded.

[0072] The eighth capacitor C8 enhances the performance of the third anti-interference unit ESD 3 and further improves the anti-interference performance of the microelectromechanical system microphone module described in this embodiment.

[0073] Preferably, it further includes a fourth anti-interference unit ESD 4 and a ninth capacitor C9; a first end of the fourth anti-interference unit ESD 4 is connected to an output terminal of the microphone module MIC, a first end of the ninth capacitor C9, and a second output terminal of the voltage stabilization module, and a second end of the fourth anti-interference unit ESD 4 is connected to a second end of the ninth capacitor C9 and grounded.

[0074] The ninth capacitor C9 enhances the performance of the fourth anti-interference unit ESD 4 and further improves the anti-interference performance of the microelectromechanical system microphone module described in this embodiment.

[0075] Specifically, ESD 1, ESD 2, ESD 3, and ESD 4 are electrostatic discharge (abbreviated as ESD) protection components.

[0076] Embodiment 2

[0077] This embodiment provides a sound capture device, including the above-mentioned MEMS microphone module.

[0078] For the introduction of the sound capture device provided in this embodiment, please refer to Embodiment 1, which will not be elaborated here.

[0079] The sound capture device provided in this embodiment has the same beneficial effects as the above-mentioned MEMS microphone module.

[0080] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the present utility model.

Claims

1. A microelectromechanical system microphone module, characterized in that, Comprising: A microphone module; A relay module, whose input end is connected to the output end of the microphone module; the relay module includes a chip, a bead, a voltage dividing module, a voltage stabilizing module, a gain module and a first anti-interference unit; Wherein, the power supply end of the chip is connected to the power supply through the bead, and the power supply end of the chip is also connected to the input end of the voltage dividing module; the first output end of the voltage dividing module is connected to the input end of the voltage stabilizing module, the second output end of the voltage dividing module is connected to the first positive input end of the chip, and the third output end of the voltage dividing module is connected to the second positive input end of the chip and the first output end of the chip; the first output end of the voltage stabilizing module is connected to the power supply end of the microphone module, and the second output end of the voltage stabilizing module is connected to the output end of the microphone module and the input end of the gain module; the first output end of the gain module is connected to the first negative input end of the chip, and the second output end of the gain module is connected to the first output end of the chip; the second output end of the chip is connected to the second negative input end of the chip and the first end of the first anti-interference unit, and the second end of the first anti-interference unit is grounded.

2. The MEMS microphone module according to claim 1, wherein, The voltage stabilizing module includes a first resistor, a first capacitor, a voltage stabilizing diode and an inductor; Wherein, the first end of the first resistor is connected to the output end of the microphone module and the input end of the gain module, the second end of the first resistor is connected to the first end of the first capacitor, the negative end of the voltage stabilizing diode and the first end of the inductor; the second end of the first capacitor is connected to the negative end of the voltage stabilizing diode and grounded; the second end of the inductor is connected to the power supply end of the microphone module; the negative end of the voltage stabilizing diode is also connected to the first output end of the voltage dividing module.

3. The MEMS microphone module according to claim 1, wherein, The gain module includes a first adjustable resistor, a second adjustable resistor and an adjustable capacitor; Wherein, the first end of the first adjustable resistor is connected to the second output end of the voltage stabilizing module, the second end of the first adjustable resistor is connected to the first end of the second adjustable resistor, the first end of the adjustable capacitor and the first negative input end of the chip; the second end of the second adjustable resistor is connected to the second end of the adjustable capacitor and the first output end of the chip.

4. A MEMS microphone module according to claim 1, characterized in that, The voltage dividing module includes a second resistor, a third resistor, a fourth resistor, a fifth resistor and a sixth resistor; Wherein, the first end of the second resistor is connected to the input end of the voltage stabilizing module, the second end of the second resistor is connected to the power supply end of the chip, the first end of the third resistor and the first end of the fourth resistor; the second end of the third resistor is connected to the first end of the fifth resistor and the first positive input end of the chip; the second end of the fourth resistor is connected to the first output end of the chip, the second positive input end of the chip and the first end of the sixth resistor; the second end of the fifth resistor is grounded; the second end of the sixth resistor is grounded.

5. The MEMS microphone module according to claim 4, characterized in that, The voltage dividing module further includes a second capacitor, a third capacitor and a fourth capacitor; the second capacitor and the third capacitor are connected in parallel across the two ends of the fifth resistor; the fourth capacitor is connected between the second end of the fourth resistor and the first output end of the chip.

6. The MEMS microphone module according to claim 1, wherein, It further includes a seventh resistor and a fifth capacitor; a first end of the seventh resistor is connected to a second output end of the chip and a second negative input end of the chip, a second end of the seventh resistor is connected to a first end of the fifth capacitor, and a second end of the fifth capacitor is connected to a first end of the first anti-interference unit.

7. A MEMS microphone module according to claim 1, characterized in that, It further includes a sixth capacitor, a seventh capacitor and a second anti-interference unit; a first end of the sixth capacitor is connected to a power supply end of the chip, a first end of the seventh capacitor and a first end of the bead, a second end of the sixth capacitor is connected to a second end of the seventh capacitor, a first end of the second anti-interference unit and is grounded; a second end of the second anti-interference unit is connected to a power supply and a second end of the bead.

8. The MEMS microphone module according to claim 1, wherein, It further includes a third anti-interference unit and an eighth capacitor; a first end of the third anti-interference unit is connected to a power supply end of the microphone module, a first end of the eighth capacitor and a first output end of the voltage stabilization module, and a second end of the third anti-interference unit is connected to a second end of the eighth capacitor and is grounded.

9. The MEMS microphone module according to claim 1, wherein, It further includes a fourth anti-interference unit and a ninth capacitor; a first end of the fourth anti-interference unit is connected to an output end of the microphone module, a first end of the ninth capacitor and a second output end of the voltage stabilization module, and a second end of the fourth anti-interference unit is connected to a second end of the ninth capacitor and is grounded.

10. A sound capture device, characterized in that, It includes a microelectromechanical system microphone module according to any one of claims 1-9.

Images