Internet-of-things monitoring system of electronic-grade germanium tetrafluoride material production tail gas purification tower
The Internet of Things monitoring system solves the problem that exhaust gas purification tower cannot be monitored remotely, achieves safe production and efficient management, and ensures the normal operation of exhaust gas purification tower.
Patent Information
- Application Number
- CN202421982993.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-15
- Publication Date
- 2025-08-08
- Estimated Expiration
- 2034-08-15
AI Technical Summary
The existing exhaust gas purification tower cannot be monitored and operated remotely, which may lead to air pollution and safety hazards.
An IoT monitoring system for the exhaust purification tower for the electronic-grade germanium tetrafluoride material production is designed, and remote monitoring and operation is achieved through mobile phones, PLC control modules and IoT platforms, and data transmission is carried out in combination with 5G networks.
Real-time remote monitoring and operation of exhaust gas purification towers is realized, working efficiency is improved, production safety is guaranteed, and accidents are prevented.
Smart Images

Figure CN223205802U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of production auxiliary safety and environmental protection equipment monitoring, and specifically relates to an Internet of Things monitoring system for an electronic-grade germanium tetrafluoride material production tail gas purification tower. Background Art
[0002] Electronic-grade germanium tetrafluoride (GeF4) is of great significance to the development of my country's high-end electronic chip manufacturing and electronic information industry. The main raw materials for the synthesis of electronic-grade GeF4 are high-purity germanium metal and high-purity fluorine gas. The high-purity fluorine gas used is prepared by electrolysis and purification of industrial anhydrous hydrogen fluoride. Its chemical reaction equation is: (1) Electrolysis to produce fluorine: 2HF → F2+H2; (2) GeF4 synthesis: Ge + 2F2 → GeF4. In the synthesis of electronic-grade GeF4, the raw materials hydrogen fluoride and fluorine gas used are both toxic and harmful gases. During the production of GeF4, tail gas containing a small amount of fluorine and hydrogen fluoride is generated, and the transmission pipeline will leak to a certain extent. In order to keep the toxic gas content in the workshop within a safe range, the normal operation of the tail gas purification tower is key.
[0003] Conventional exhaust gas purification towers for safe and environmentally friendly treatment are operated by on-site button start and stop. After the operator leaves the site, he or she will not be able to know whether the exhaust gas purification tower can operate normally, nor can the operator start and stop it remotely. This may result in exhaust gas emissions not meeting standards, causing air pollution. Utility Model Content
[0004] In order to solve the above technical problems, the utility model designs an Internet of Things monitoring system for the tail gas purification tower produced by electronic grade germanium tetrafluoride material, so as to realize remote operation monitoring and operation control of the tail gas purification tower and ensure the normal operation of the tail gas purification tower.
[0005] The Internet of Things monitoring system for the tail gas purification tower of electronic-grade germanium tetrafluoride material production of the utility model includes:
[0006] The mobile phone is connected to the IoT platform via 5G network communication to remotely receive the working information of the exhaust gas purification tower equipment and remotely operate it to start and stop;
[0007] The IoT platform, acting as a server, is connected to the PLC control module through a gateway and is used to store and manage the working information of the exhaust gas purification tower equipment;
[0008] A PLC control module is electrically connected to each of the exhaust gas purification tower devices. The PLC control module includes a switch output / input module, an analog output / input module, and an RS485 module. The switch input module and the analog input module collect and process data information from each device, feed it back to the PLC control module, and then transmit it to the mobile phone through the Internet of Things platform. The mobile phone outputs a control instruction, which is then transmitted to the PLC control module through the Internet of Things platform and then controls the operating status of the corresponding device through the switch output module and the analog output module.
[0009] The tail gas purification tower equipment includes a tail gas induced draft fan, a spray circulation pump motor, a spray circulation pump motor inverter, a liquid level sensor, a pH value monitor, a gas pressure sensor, and a solenoid valve;
[0010] The RS485 module is electrically connected to the spray circulation pump motor inverter.
[0011] The liquid level sensor, pH value monitor, and gas pressure sensor are installed at the positions of the medicine dispensing barrel and the spray tower, and the solenoid valves are installed at the positions of the medicine dispensing barrel and the spray tower respectively.
[0012] The beneficial effects of the utility model are:
[0013] Compared with the existing technology, the utility model combines a mobile phone, a PLC control module, and the Internet of Things technology. The PLC control module is connected to the tail gas purification tower equipment, thereby realizing real-time remote monitoring of the operation status of the tail gas purification tower equipment on a mobile phone, so that the staff can obtain the latest information on the operation status and data of the tail gas purification tower equipment at any time through the mobile phone, so as to facilitate timely taking corresponding measures; at the same time, the staff can realize the management and control of the tail gas purification tower equipment without having to go to the site in person, thereby improving work efficiency and convenience, ensuring safe production, preventing accidents, and ensuring the safe production of electronic-grade germanium tetrafluoride products. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following briefly introduces the drawings required for describing the embodiments.
[0015] Figure 1 This is a block diagram of the monitoring system in Example 1.
[0016] Figure 2 This is the design principle diagram of the PLC control module in Example 1. DETAILED DESCRIPTION
[0017] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.
[0018] Example 1
[0019] See Figure 1 As shown, an Internet of Things monitoring system for an electronic-grade germanium tetrafluoride material production tail gas purification tower includes:
[0020] Mobile phones can remotely access the IoT platform through the WeChat mini-program to remotely receive and view status indications of the exhaust draft fan, spray circulation pump motor, and solenoid valve, including operation, stop, fault, and remote operation. This includes real-time operating data such as pH value, liquid level, air pressure, spray circulation pump motor inverter frequency setting value, and spray circulation pump motor inverter current operating frequency. The on-screen operation buttons can be used to remotely start and stop the exhaust draft fan, spray circulation pump motor, and solenoid valve.
[0021] The IoT platform, acting as a server, is connected to the PLC control module via a gateway (model PLCNET-510). The gateway transmits information collected by the PLC control module to the IoT platform via the IoT protocol. The IoT platform is used to store and manage the operating information of the exhaust gas purification tower equipment. Operational data variables are designed and added to the IoT platform, along with the configuration screen. The configuration screen includes the following: start and stop buttons for the exhaust draft fan, spray circulation pump motor, and solenoid valve; operating, stop, fault, and remote operation status indicators for the exhaust draft fan, spray circulation pump motor, and solenoid valve; animated operation diagrams for the exhaust draft fan and spray circulation pump motor; display values for the solution pH value, solution level value, and spray air pressure value; and display values for the spray circulation pump motor inverter frequency setting and current operating frequency.
[0022] The PLC control module adopts Siemens-1200 model, and its design principle is as follows Figure 2 As shown, they are electrically connected to the tail gas purification tower equipment respectively. The PLC control module includes a switch output / input module, an analog output / input module, and an RS485 module. The switch input module and the analog input module collect and process data information of each device, feed it back to the PLC control module, and then transmit it to the mobile phone through the Internet of Things platform. The mobile phone outputs a control instruction, which is then transmitted to the PLC control module through the Internet of Things platform and then controls the operating status of the corresponding device through the switch output module and the analog output module.
[0023] The exhaust gas purification tower equipment includes an exhaust draft fan, a spray circulation pump motor, a spray circulation pump motor inverter, a liquid level sensor, a pH monitor, a gas pressure sensor, and a solenoid valve; the RS485 module is electrically connected to the spray circulation pump motor inverter; the liquid level sensor, pH monitor, and gas pressure sensor are installed at the dispensing barrel and spray tower positions, and the solenoid valves are installed at the dispensing barrel and spray tower positions respectively.
[0024] Through the connection between the PLC control module and the exhaust gas purification tower equipment, the switch input module collects and processes the operating status data information of the spray circulation pump motor inverter, solenoid valve, exhaust draft fan, and spray circulation pump motor. The analog input module collects and processes the working information of the liquid level sensor, pH monitor, and gas pressure sensor, and the RS485 module collects the frequency of the spray circulation pump motor inverter; and the switch input module, analog input module and RS485 module process the collected information into digital data. The digital data is transmitted to the Internet of Things platform through the gateway connected to the PLC control module, and finally obtained by remotely accessing the Internet of Things platform through the WeChat applet on the mobile phone.
[0025] Based on the information obtained, the administrator operates the buttons on the mobile phone screen to remotely start and stop the exhaust draft fan, spray circulation pump motor, solenoid valve, and adjust the operating frequency of the spray circulation pump motor inverter. After the operation signal is transmitted to the Internet of Things platform through the mobile phone, it enters the PLC control module under the connection of the gateway, and is then converted and output by the switch output module and the analog output module, thereby performing opening and closing control of the exhaust draft fan, spray circulation pump motor, solenoid valve, and adjusting the operating frequency of the spray circulation pump motor inverter.
[0026] It realizes real-time remote monitoring of the operation status of the exhaust gas purification tower equipment on mobile phones, so that staff can obtain the latest information on the operating status and data of the exhaust gas purification tower equipment at any time through their mobile phones, facilitating timely implementation of corresponding measures; at the same time, staff can manage and control the exhaust gas purification tower equipment without having to visit the site in person, which improves work efficiency and convenience, ensures safe production, prevents accidents, and ensures the safe production of electronic-grade germanium tetrafluoride products.
[0027] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the content of this specification.
Claims
1. An Internet of Things monitoring system for an electronic grade germanium tetrafluoride material production tail gas purification tower, characterized in that: include: Mobile phones, through the WeChat applet and the IoT platform via 5G network communication, are used to remotely receive the working information of the exhaust gas purification tower equipment and remotely operate it to start and stop; The IoT platform, acting as a server, is connected to the PLC control module through a gateway and is used to store and manage the working information of the exhaust gas purification tower equipment; A PLC control module is electrically connected to each of the exhaust gas purification tower devices. The PLC control module includes a switch output / input module, an analog output / input module, and an RS485 module. The switch input module and the analog input module collect and process data information from each device, feed it back to the PLC control module, and then transmit it to the mobile phone through the Internet of Things platform. The mobile phone outputs a control instruction, which is then transmitted to the PLC control module through the Internet of Things platform and then controls the operating status of the corresponding device through the switch output module and the analog output module. The tail gas purification tower equipment includes a tail gas induced draft fan, a spray circulation pump motor, a spray circulation pump motor inverter, a liquid level sensor, a pH value monitor, a gas pressure sensor, and a solenoid valve; The RS485 module is electrically connected to the spray circulation pump motor inverter.
2. The Internet of Things monitoring system for the tail gas purification tower of electronic-grade germanium tetrafluoride material production according to claim 1 is characterized in that: The liquid level sensor, pH value monitor, and gas pressure sensor are installed at the positions of the medicine dispensing barrel and the spray tower, and the solenoid valves are installed at the positions of the medicine dispensing barrel and the spray tower respectively.