Adjusting detection light source

Abstract

The utility model relates to the technical field of detection light sources, and provides an adjustable detection light source, which comprises a box body, the luminous body is mounted in the box body, is provided with a light outlet, and is used for emitting a light signal from the light outlet; the switching disc is installed in the box body, and a plurality of light-transmitting pieces are arranged on the switching disc; the driving motor is used for driving the switching disc to rotate; wherein the plurality of light-transmitting sheets can be switched at the position opposite to the light outlet along with the rotation of the switching disc, so that the light signal can be adjusted by penetrating through different light-transmitting sheets. According to the utility model, different light-transmitting sheets can be opposite to the light outlet by rotating the switching disc, so that light signals penetrate through different light-transmitting sheets to realize the adjustment of light intensity and / or color of the light signals, the limitation of a light source with high initial brightness on low-brightness detection operation is avoided, the illumination environment is simplified, and the detection efficiency is improved. The convenience of comprehensively capturing semiconductor surface features by the lens is improved, and the high efficiency and practicability of the detection light source in the practical application process are further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of detection light sources, in particular to an adjustment detection light source. Background Art

[0002] In the field of semiconductor testing, the currently widely used adjustable detection light sources have demonstrated their efficiency and versatility, but they still face significant challenges in terms of accuracy and adaptability.

[0003] Specifically, traditional inspection light sources often fail to fully consider the precision of brightness adjustment during design, resulting in an initial brightness setting that is too high, directly limiting the effective operation of low-brightness inspection stations. In addition, the color adjustment of the inspection light is complex, which is particularly inconvenient in inspection processes that require a complex lighting environment so that the inspection lens can fully capture the surface features of the semiconductor. This limits the efficiency and practicality of the inspection light source in actual applications. Utility Model Content

[0004] In view of the shortcomings of the prior art, the purpose of the present invention is to provide an adjustable detection light source that can adjust the light signal to promote the semiconductor detection effect.

[0005] In order to solve the above problems, the present invention provides the following technical solutions:

[0006] A method for adjusting and detecting a light source, comprising:

[0007] Box;

[0008] a light emitting body installed in the box, the light emitting body having a light outlet, and the light emitting body being used to emit a light signal from the light outlet;

[0009] A switching disk is installed in the box, and a plurality of light-transmitting sheets are provided on the switching disk;

[0010] A driving motor, used for driving the switching disk to rotate;

[0011] The plurality of light-transmitting sheets can be switched relative to the light outlet as the switching disk rotates, so that the optical signal can pass through different light-transmitting sheets and produce changes.

[0012] In one embodiment, the switching disk includes a color switching disk, the light-transmitting plate includes a plurality of color filters, and the colors of any two of the color filters are different.

[0013] In one embodiment, the switching disk comprises an attenuation switching disk, the light-transmitting sheet comprises a plurality of attenuation light-transmitting sheets, and the attenuation degrees of any two of the attenuation light-transmitting sheets are different.

[0014] In one embodiment, the switching disk comprises an attenuation switching disk, the light-transmitting sheet comprises a plurality of attenuation light-transmitting sheets, and the attenuation degrees of any two of the attenuation light-transmitting sheets are different.

[0015] In one embodiment, the color switching disk and the attenuation switching disk are both disposed in the housing in directions opposite to the light outlet;

[0016] The projections of the color filter and the attenuation and light-transmitting sheet relative to the light outlet direction overlap with each other.

[0017] In one embodiment, the switching disk is provided with a plurality of light-transmitting openings, one of which is not equipped with the light-transmitting sheet, and each of the remaining light-transmitting openings is equipped with a light-transmitting sheet.

[0018] In one embodiment, the box body is provided with an optical fiber fixing head, and the optical fiber fixing head is arranged opposite to the light outlet. The adjustment detection light source also includes an optical fiber, one end of which is detachably mounted on the optical fiber fixing head, and the other end is used to detect the object to be measured.

[0019] In one embodiment, the adjustment detection light source also includes a light collecting tube, which is installed in the box and located between the light-emitting body and the switching disk. The light collecting tube is assembled and connected to the light-emitting body so that the light signal passes through the light collecting tube and is irradiated onto the light-transmitting sheet.

[0020] In one embodiment, a window is provided on the box body, and the direction of the window is arranged relative to the switching disk so that at least one of the light-transmitting sheets of the switching disk is located within the projection of the window, so that the light-transmitting sheet can be installed or removed from the light-transmitting port through the window.

[0021] In one embodiment, the adjustment detection light source further includes a first driver, a second driver, and a power supply electrically connected to the first driver and the second driver;

[0022] Wherein, the first driver is electrically connected to the driving motor and is used to control the driving motor to drive the rotation of the switching disk;

[0023] The second driver is electrically connected to the light-emitting body and is used to control the operation of the light-emitting body.

[0024] The beneficial effects of the present invention are: by installing multiple light-transmitting sheets on the switching disk, and rotating the switching disk so that different light-transmitting sheets are opposite to the direction of the light outlet, the light signal can pass through different light-transmitting sheets, so that the light intensity and / or color of the light signal can be adjusted, so that the emitted light signal is adjusted to meet the user's standard for detecting the object to be measured, avoiding the limitation of the light source with high initial brightness on the low-brightness detection operation, and simplifying the lighting environment, improving the convenience of the lens in fully capturing the surface features of the semiconductor, and further improving the efficiency and practicality of the detection light source in actual application. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a three-dimensional diagram of one embodiment of an adjustable detection light source of the utility model;

[0026] Figure 2 This is a front view of one embodiment of an adjustable detection light source of the utility model;

[0027] Figure 3 This is a schematic diagram of the internal structure of one embodiment of an adjustable detection light source of the utility model;

[0028] Figure 4 This is an exploded view of one embodiment of an adjustable detection light source of the utility model;

[0029] Figure 5 This is a cross-sectional view of one embodiment of an adjustable detection light source of the present invention.

[0030] Reference numerals:

[0031] 100. Adjust the detection light source; 110. Box; 111. Light-emitting body; a1. Light outlet; d1. Light signal; 112. Drive motor; 121. Trigger port; 122. Serial port; 123. Network port; 124. Fiber optic fixing head; 114. Color switching disk; 115. Color filter; 116. Attenuation switching disk; 117. Attenuation light-transmitting plate; 12a. Light-transmitting port; 113. Light collecting tube; 11a. Window; 131. First driver; 132. Second driver; 133. Power supply; 134. Display screen. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0034] Currently, traditional inspection light sources are often designed without fully considering the precision of brightness adjustment. As a result, image overexposure is often encountered when inspecting objects at the workstation because the brightness cannot be accurately lowered. When these workstations process semiconductor features that require low-brightness inspection and are highly sensitive to light, the starting brightness is set too high, which directly limits the effective operation of the low-brightness inspection station. In addition, the color adjustment of the inspection light is complex, which is particularly inconvenient in inspection processes that require complex lighting environments so that the inspection lens can fully capture the surface features of the semiconductor. This limits the efficiency and practicality of the inspection light source in actual applications.

[0035] To address these technical challenges and improve the accuracy and flexibility of semiconductor inspection, it is particularly urgent to develop a new adjustable inspection light source system that can precisely adjust the brightness range, accommodate a variety of light source configurations, and effectively manage the startup characteristics of high-power lamps. This innovation will not only meet the increasingly stringent inspection standards of the semiconductor industry, but will also provide strong support for technological advancement and industrial upgrading in related fields.

[0036] Based on this, this embodiment provides a method for adjusting the detection light source 100, please refer to Figure 1-5 As shown, it includes: a box body 110, a light-emitting body 111, a switching disk and a driving motor 112; wherein, the light-emitting body 111 is installed in the box body 110, and the light-emitting body 111 has a light outlet a1, and the light-emitting body 111 is used to emit a light signal d1 from the light outlet a1; the switching disk is installed in the box body 110 and is located on one side of the light-emitting body 111, and a plurality of light-transmitting sheets are provided on the switching disk; the driving motor 112 is used to drive the switching disk to rotate; wherein, the plurality of light-transmitting sheets can be switched relative to the light outlet a1 as the switching disk rotates, so that different light-transmitting sheets are directly opposite to the light outlet a1, so that the light signal d1 can be adjusted by passing through different light-transmitting sheets and then emitted outward.

[0037] In the above scheme, it can be understood that the box 110 is provided with a trigger port 121, a serial port 122, a network port 123 and an optical fiber fixing head 124, the trigger port 121 is connected to the line machine, and the adjustment of the detection light source is triggered through the trigger port 121, thereby controlling the start and shut down of the detection light source, connecting to the host computer through the serial port 122, thereby obtaining the host computer protocol control instructions, and realizing the control of the detection light source adjustment process through the serial port 122 interaction, so that the detection light source is adjusted to the effect that the user wants to achieve, which is the effect of the detection light source on the color and light intensity of the light emitted by the light source 111; in addition, the computer is connected through the network port 123 Computer network, the upper computer protocol used is stored in the computer memory, and it can be used after storage; further, the light in the box 110 is emitted outward from the optical fiber fixing head 124, and the optical fiber is inserted into the optical fiber fixing head 124 to transmit the light, that is, the optical fiber is used to transmit the light emitted from the light source 111 in the light box to the object to be detected. Optionally, in the conventional options, the optical fiber can be directly connected to the object to be detected (semiconductor) for monitoring. In most cases, it is usually chosen to connect the end of the optical fiber away from the box 110 to the lens barrel, and the light of the optical fiber is irradiated onto the object to be detected through the lens barrel, thereby realizing the detection of the object to be detected.

[0038] According to the above scheme, it can be understood that this embodiment installs multiple translucent sheets on the switching disk, and rotates the switching disk to make different translucent sheets opposite to the direction of the light outlet, so that the light signal can pass through different translucent sheets, so that the light intensity and / or color of the light signal can be adjusted, so that the emitted light signal is adjusted to meet the user's standard for detecting the object to be measured, avoiding the limitation of the light source with high initial brightness on the low brightness detection operation, and simplifying the lighting environment, thereby improving the convenience of the lens in fully capturing the surface features of the semiconductor, and further improving the efficiency and practicality of the detection light source in actual application.

[0039] Specifically, in some embodiments, the switching disk includes a color switching disk 114, and the light-transmitting plate includes a color filter 115 provided on the color switching disk 114, and the colors of any two color filters 115 are different; it can be understood that by providing a plurality of color filters 115 of different models, the color of the light signal d1 after passing through changes. The color filters 115 currently equipped with the color switching disk 114 are red, green, blue, 365 wavelength ultraviolet and 405 wavelength ultraviolet; in addition, the switching disk further It includes an attenuation switching disk 116, and the translucent sheet includes an attenuation translucent sheet 117 arranged on the attenuation switching disk 116. The multiple attenuation sheets are ND attenuation sheets, and the attenuation degrees of any two attenuation translucent sheets 117 are different. Its purpose is to attenuate the light irradiated by the light source 111. In this embodiment, five attenuation translucent sheets 117 are provided, and the attenuation degrees of these five attenuation translucent sheets 117 are: transmittance 5%, 10%, 25%, 40%, and 60%, respectively. In other embodiments, the attenuation degree of the attenuation translucent sheet 117 with other values can be set according to user needs.

[0040] Specifically, in other embodiments, a color switching disk 114 may be provided separately, so that the color of the emitted light can be switched only by the color filter 115 on the color switching disk 114 . This solution is suitable for detection light sources that only need to adjust the light color.

[0041] Specifically, in other embodiments, an attenuation switching disk 116 may be provided separately, so that the intensity of the emitted light can be switched only by the attenuation light-transmitting sheet 117 on the attenuation switching disk 116. This solution is suitable for detection light sources that only need to adjust the light intensity.

[0042] Preferably, the color switching disk 114 and the attenuation switching disk 116 are arranged in the direction opposite to the light outlet a1 in the housing 110; further, the projections of the color filter 115 and the attenuation light-transmitting plate 117 relative to the light outlet a1 overlap with each other. It can be understood that the purpose of designing this structure is that when it is necessary to design the color switching disk 114 and the attenuation switching disk 116 to process light at the same time, by designing the color filter 115 and the attenuation light-transmitting plate 117 relative to the light emitting direction of the light source 111 to overlap with each other, the light emitted by the light source 111 can directly pass through the corresponding color filter 115 and attenuation light-transmitting plate 117, thereby simplifying the design structure and achieving good working effect.

[0043] Preferably, the switching disk is provided with a plurality of light transmission ports 12a. According to the above scheme, it can be understood that the number of light transmission ports 12a in this embodiment is set to six, and both the color switching disk 114 and the attenuation switching disk 116 are provided with six light transmission ports 12a, and one of the light transmission ports 12a is not installed with a color filter 115 and / or an attenuation light transmission plate 117, and each of the remaining light transmission ports 12a is respectively installed with a color filter 115 and / or an attenuation light transmission plate 117; the purpose and benefit of designing this structure is that the color switching disk 114 and the attenuation switching disk 116 can have a portion not installed with a color filter 115 and / or an attenuation light transmission plate 117. As can be understood, this embodiment is a light source required when the user needs low brightness and light of different colors to detect the object to be measured. When the user needs to use high brightness and natural light without switching colors to detect the object to be measured, the light port 12a on the color switching disk 114 without the color filter 115 installed and the light port 12a on the attenuation switching disk 116 without the attenuation light transmittance 117 installed are aligned with the light outlet a1, so that the light emitted by the light emitting body 111 can directly pass through the light port 12a on the two switching disks and be emitted outward, without passing through the color filter 115 and the attenuation light transmittance 117.

[0044] According to the above scheme, the number of color filters 115 and / or attenuation and transmissive plates 117 is set to 5 to 8. In this example, the number of color filters 115 and / or attenuation and transmissive plates 117 is set to 5. In other embodiments, other numbers of color filters 115 and / or attenuation and transmissive plates 117 can be designed according to user requirements.

[0045] Preferably, the adjustment detection light source 100 also includes a light collecting tube 113. It can be understood that the purpose of the light collecting tube 113 is to enable the light signal d1 to be collected through secondary optics in the light collecting tube 113 and form a light spot emitted outward. The light collecting tube 113 is installed in the box 110 and is located between the light-emitting body 111 and the switching disk. The light collecting tube 113 is assembled and connected to the light-emitting body 111 so that the light signal d1 forms a light spot after passing through the light collecting tube 113 and irradiates the transparent sheet.

[0046] Preferably, a window 11a is provided on the box body 110, and the orientation of the window 11a is arranged relative to the switching disk so that at least one light-transmitting sheet of the switching disk is located within the projection of the window 11a, so that the light-transmitting sheet can be installed or removed from the light-transmitting port 12a through the window 11a; it can be understood that the purpose of designing the window 11a is to allow the color filter 115 and the attenuation filter to be replaced, so that different types of color filters 115 and attenuation filters can be used, thereby increasing the diversity of light adjustment.

[0047] Understandably, the light emitters 111 in this embodiment are high-power lamp beads. As key light source components, high-power lamp beads inherently present a technical bottleneck due to their high startup voltage and current characteristics. Excessively high startup requirements not only increase energy consumption but also directly cause the cabinet 110 to emit high brightness at the initial startup, making it difficult to directly meet low-brightness detection requirements. Consequently, an additional control mechanism is required to reduce the initial brightness value, which undoubtedly increases system complexity and cost.

[0048] According to the above problem, preferably, the adjustment detection light source 100 also includes a first driver 131, a second driver 132 and a power supply 133 electrically connected to the first driver 131 and the second driver 132; wherein the first driver 131 is electrically connected to the drive motor 112 and the switching disk, and is used to control the rotation gear of the switching disk; the second driver 132 is electrically connected to the light-emitting body 111, and is used to control the current transmitted to the light-emitting body 111 by the power supply 133; it can be understood that the first driver 131 in this embodiment is set as a motor driver, which drives the drive motor 112 by being electrically connected to the motor, thereby driving the switching disk to rotate, that is, controlling the motor to generate the switching disk that needs to be rotated. The appropriate kinetic energy of the angle reached by the movement; further, the second driver 132 is set as the driver of the light-emitting body 111. It can be understood that by using the second driver 132 to be electrically connected to the power supply 133, the current delivered by the power supply 133 to the light-emitting body 111 can be controlled. When it is necessary to face the test object with low brightness detection requirements, the current of the power supply 133 is controlled by the second driver 132, so that the current used by the light-emitting body 111 to emit light is less. In this case, when the user still needs to further reduce the brightness of the light-emitting body 111, the intensity of the light emitted by the light-emitting body 111 can be adjusted by the attenuation switching disk 116 to adapt to different detection environments requiring low brightness and high brightness.

[0049] Preferably, a display screen 134 is further provided on the box body 110 of this embodiment. The display screen 134 is electrically connected to the first driver 131, the second driver 132 and the power supply 133. The rotation angle and status of the color switching disk 114 and the attenuation switching disk 116 controlled by the first driver 131 can be displayed through the display screen 134, and the power level and light adjustment status can be displayed, thereby achieving the purpose of real-time control and facilitating users to make timely adjustments according to the object being measured.

[0050] In summary, the utility model provides an adjustable detection light source. By installing multiple translucent sheets on a switching disk and rotating the switching disk so that different translucent sheets are opposite to the direction of the light outlet, the light signal can pass through different translucent sheets, so that the light intensity and / or color of the light signal can be adjusted, so that the emitted light signal is adjusted to meet the user's standard for detecting the object to be measured, avoiding the limitation of the light source with high initial brightness on the low brightness detection operation, and simplifying the lighting environment, improving the convenience of the lens to fully capture the surface features of the semiconductor, and further improving the efficiency and practicality of the detection light source in actual application.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A light source for adjusting and detecting light, characterized in that: include: Box; a light emitting body installed in the box, the light emitting body having a light outlet, and the light emitting body being used to emit a light signal from the light outlet; A switching disk is installed in the box, and a plurality of light-transmitting sheets are provided on the switching disk; A driving motor, used for driving the switching disk to rotate; The plurality of light-transmitting sheets can be switched relative to the light outlet as the switching disk rotates, so that the optical signal can be adjusted by passing through different light-transmitting sheets.

2. The adjustable detection light source according to claim 1, characterized in that: The switching disk includes a color switching disk, the light-transmitting plate includes a plurality of color filters, and the colors of any two of the color filters are different.

3. The adjustable detection light source according to claim 2, characterized in that: The switching disk includes an attenuation switching disk, the light-transmitting sheet includes a plurality of attenuation light-transmitting sheets, and the attenuation degrees of any two of the attenuation light-transmitting sheets are different.

4. The adjustable detection light source according to claim 1, characterized in that: The switching disk includes an attenuation switching disk, the light-transmitting sheet includes a plurality of attenuation light-transmitting sheets, and the attenuation degrees of any two of the attenuation light-transmitting sheets are different.

5. The adjustable detection light source according to claim 3, characterized in that: The color switching disk and the attenuation switching disk are both arranged in the box in directions opposite to the light outlet; The projections of the color filter and the attenuation and light-transmitting sheet relative to the light outlet direction overlap with each other.

6. The adjustable detection light source according to claim 1, characterized in that: The switching disk is provided with a plurality of light-transmitting openings, one of which is not provided with the light-transmitting sheet, and each of the other light-transmitting openings is provided with a light-transmitting sheet.

7. The adjustable detection light source according to claim 1, characterized in that: The box body is provided with an optical fiber fixing head, which is arranged opposite to the light outlet. The adjustment detection light source also includes an optical fiber, one end of which is detachably mounted on the optical fiber fixing head, and the other end is used to detect the object to be measured.

8. The adjustable detection light source according to claim 1, characterized in that: The adjustment and detection light source also includes a light collecting tube, which is installed in the box and located between the light-emitting body and the switching disk. One end of the light collecting tube is assembled and connected to the light-emitting body and is directly opposite to the light outlet, so that the light signal passes through the light collecting tube and is irradiated onto the light-transmitting sheet.

9. The adjustable detection light source according to claim 1, characterized in that: A window is provided on the box body, and the direction of the window is arranged opposite to the switching disk so that at least one of the light-transmitting sheets of the switching disk is located within the projection of the window, so that the light-transmitting sheet can be installed or removed from the light-transmitting port through the window.

10. The adjustable detection light source according to claim 1, characterized in that: The adjustment and detection light source further includes a first driver, a second driver, and a power supply electrically connected to the first driver and the second driver; Wherein, the first driver is electrically connected to the driving motor and is used to control the driving motor to drive the rotation of the switching disk; The second driver is electrically connected to the light-emitting body and is used to control the operation of the light-emitting body.

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