Feeding device for chip detection

By designing a feeding device for chip detection, using the multiple grab and adsorption head assembly of the grab assembly and the grab manipulator, the problem of low conveying efficiency of a single load disk in the prior art is solved, and efficient conveying and detection of multiple load disks is achieved.

CN223239108UActive Publication Date: 2025-08-19LIANSHUO SEMICON TECH (SUZHOU) CO LTD
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Patent Information

Application Number
CN202422623138.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-29
Publication Date
2025-08-19
Estimated Expiration
2034-10-29

AI Technical Summary

Technical Problem

The existing chip detection feeding device can only transport a single load disk at a time, resulting in low detection efficiency.

Method used

A feeding device for chip detection is designed, including a feeding unit, a conveying track, a grasping assembly and a grasping robot. By grabbing the loading plate multiple times by the grasping assembly and placing it on the placement plate, the adsorption head assembly on the grasping robot is used to adsorb multiple loading plates at one time and transport it to the detection unit for detection.

Benefits of technology

The conveying efficiency of chip detection is improved, and the simultaneous conveying and detection of multiple carrier disks is realized.

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Abstract

The utility model relates to the field of carrying disc conveying equipment, in particular to a feeding device for chip detection, which comprises a discharging unit, a conveying track arranged between the discharging unit and a detection unit, a grabbing assembly and a grabbing manipulator, and a plurality of placing discs are arranged on the conveying track in a sliding manner. When the carrying discs bearing the chips are conveyed to the detection unit from the discharging unit, the grabbing assembly grabs the carrying discs in multiple times and places the carrying discs on the corresponding placing discs, then all the carrying discs are adsorbed at a time through the adsorption head assembly on the grabbing mechanical arm, and then the multiple carrying discs are conveyed to the detection unit to be detected; compared with a feeding device in the prior art, the conveying efficiency is improved.
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Description

Technical Field

[0001] The utility model relates to the field of tray conveying equipment, in particular to a loading device for chip detection. Background Art

[0002] After the chip is processed, it needs to be transported to the inspection unit for inspection through a loading device. In order to improve efficiency, multiple workstations are often set up in the inspection unit to inspect multiple chips at the same time. The existing loading device can usually only transport a single carrier loaded with chips to the inspection process at a time, and the transportation efficiency is low. Utility Model Content

[0003] The technical solution adopted by the present invention to solve the technical problem is to provide a chip testing feeding device, comprising:

[0004] A material discharging unit, the material discharging unit is used to place the carrier carrying the chips;

[0005] A conveying track, wherein the two ends of the conveying track correspond to the discharge unit and the detection unit for chip detection respectively, and a plurality of placement trays are slidably arranged on the conveying track;

[0006] A gripping assembly, the gripping assembly comprising a moving unit and a rotating cylinder provided at an output end of the moving unit, the output end of the rotating cylinder being provided with a pneumatic clamp, the pneumatic clamp being used to clamp a carrier placed vertically in the discharge unit and rotate it to a horizontal state through the rotating cylinder;

[0007] A gripping robot is used to adsorb multiple carriers on the placement plate to the detection unit for detection. A suction piece is rotatably provided on the gripping robot, and multiple groups of suction head assemblies are provided on the suction piece, and each group of the suction head assemblies corresponds to a carrier.

[0008] Furthermore, multiple groups of the adsorption head assemblies are arranged in pairs about the central axis of the adsorption component.

[0009] Furthermore, the plurality of placement trays are arranged in pairs about the central axis of the conveying track.

[0010] Furthermore, the moving unit includes a first moving unit, a second moving unit and a lifting unit, the second moving unit is arranged at the output end of the first moving unit, and the lifting unit is arranged at the output end of the second moving unit.

[0011] Furthermore, the discharge unit includes a frame and a plurality of placement boxes arranged on the frame, the frame is arranged on one side of the conveying track, the first moving unit is arranged on the frame, and the carrier is placed in the placement box.

[0012] Furthermore, a plurality of partitions arranged in parallel are provided in the placement box.

[0013] Furthermore, the setting direction of the first moving unit and the setting direction of the second moving unit intersect with each other.

[0014] Furthermore, a movable module is provided on the frame, an output end of the movable module is connected to the placement box, and the placement box is slidably arranged on the frame through the movable module.

[0015] The beneficial effect of the present invention is to provide a loading device for chip testing, comprising a discharge unit, a conveying track arranged between the discharge unit and the testing unit, a gripping assembly, and a gripping manipulator, wherein a plurality of placement trays are slidably arranged on the conveying track. When a carrier carrying chips is transported from the discharge unit to the testing unit, the gripping assembly repeatedly grabs the carriers and places them on corresponding placement trays, and then the suction head assembly on the gripping manipulator sucks all the carriers at once, and then transports the plurality of carriers to the testing unit for testing. Compared with the loading device in the prior art, the conveying efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] In the picture: Figure 1 This is an application example diagram of a chip testing loading device provided by the present invention;

[0018] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0019] Figure 3 for Figure 1 The three-dimensional structure diagram of the grasping robot and detection unit is shown.

[0020] Explanation of the accompanying drawings: 100, loading device for chip detection; 10, discharge unit; 11, frame; 111, moving module; 12, placement box; 121, partition; 20, conveying track; 21, placement tray; 211, mounting groove; 212, mounting protrusion; 22, mounting plate; 23, sliding module; 30, grasping assembly; 31, first moving unit; 32, second moving unit; 33, lifting unit; 331, rotating cylinder; 332, pneumatic gripper; 40, grasping robot; 41, adsorption part; 411, adsorption head assembly; 4111, vacuum adsorption head; 200, detection unit; 201, workbench; 202, detection assembly; 2021, detection table; 2022, sliding cylinder; 2023, slide rail; 2024, placement table; 2025, probe; 2026, lifting cylinder; 300, carrier. DETAILED DESCRIPTION

[0021] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention is now described in detail with reference to the accompanying drawings. This figure is a simplified schematic diagram, which only illustrates the basics of the present invention in an illustrative manner, and therefore only shows the structures related to the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0022] Please refer to Figure 1-3 The present invention provides a chip testing loading device 100, comprising a discharge unit 10, a conveyor track 20, a gripping assembly 30, and a gripping manipulator 40. The discharge unit 10 is used to place a carrier 300 carrying chips, and the two ends of the conveyor track 20 correspond to the discharge unit 10 and the detection unit 200 for testing the chips 300. The gripping assembly 30 is used to transport the carrier 300 carrying chips from the discharge unit 10 to the placement tray 21, and the gripping manipulator 40 is used to transport the carrier 300 carrying chips from the placement tray 21 to the detection unit 200.

[0023] The unloading unit 10 includes a frame 11 and several placement boxes 12 mounted on the frame 11. The frame 11 is positioned to one side of the conveyor track 20, and the carrier trays 300 are placed within the placement boxes 12. A movable module 111 is mounted on the frame 11, and the output end of the movable module 111 is fixedly connected to the placement boxes 12. The placement boxes 12 are slidably mounted on the frame 11 via the movable module 111. Several juxtaposed partitions 121 are positioned within the placement boxes 12. Specifically, in this embodiment, when the carrier trays 300 are placed within the spaces formed by adjacent partitions 121, they are positioned along the height of the frame 11. The movable module 111 is a conventional screw drive mechanism.

[0024] Please refer to Figure 1 , with the height direction of the rack 11 as the vertical direction, and the plane formed by the length side of the rack 11 and the width side of the rack 11 as the horizontal plane.

[0025] Multiple placement trays 21 are slidably mounted on the conveyor track 20. These trays 21 are arranged in pairs about the central axis of the conveyor track 20. Specifically, in this embodiment, two placement trays 21 are provided, and the two placement trays 21 are arranged in pairs about the central axis of the conveyor track 20. The conveyor track 20 is provided with a mounting plate 22 for mounting the placement trays 21, and a sliding module 23 for driving the mounting plate 22 to slide. The sliding module 23 utilizes a conventional screw drive module.

[0026] Furthermore, in this embodiment, a mounting groove 211 is provided on the placement tray 21 for placing the carrier 300 carrying the chip, and a mounting protrusion 212 is provided in the mounting groove 211. The setting of the mounting protrusion 212 reduces the contact area between the carrier 300 and the mounting groove 211, making it easier for the grasping robot 40 to absorb the carrier 300.

[0027] The gripping assembly 30 includes a moving unit and a rotating cylinder 331 located at the output end of the moving unit. The moving unit comprises a first moving unit 31, a second moving unit 32, and a lifting unit 33. The first moving unit 31 is mounted on the frame 11, the second moving unit 32 is located at the output end of the first moving unit 31, and the lifting unit 33 is located at the output end of the second unit. The rotating cylinder 331 is located at the output end of the lifting unit 33. A pneumatic gripper 332 is provided at the output end of the rotating cylinder 331 for gripping the carrier 300. The pneumatic gripper 332 is used to grip the carrier 300, which is placed vertically in the unloading unit 10, and is rotated to a horizontal position by the rotating cylinder 331. The orientation of the first moving unit 31 and the orientation of the second moving unit 32 intersect. Furthermore, in this embodiment, the orientations of the first moving unit 31 and the second moving unit 32 are perpendicular to each other. The first moving unit 31 is positioned along the width of the frame 11, while the second moving unit 32 is positioned along the length of the frame 11. The first moving unit 31 , the second moving unit 32 and the lifting unit 33 are all made of screw transmission modules in the prior art.

[0028] The detection unit 200 includes a workbench 201 arranged on one side of the frame 11 and a plurality of detection components 202 arranged on the workbench 201. The conveying track 20 is fixedly set on the workbench 201. The grabbing robot 40 is rotatably set on the workbench 201, and the grabbing robot 40 is located on the side of the conveying track 20 away from the frame 11. The plurality of detection components 202 are distributed around the circumference of the grabbing robot 40. Specifically, in this embodiment, the detection component 202 includes a detection table 2021, a sliding cylinder 2022, a slide rail 2023 arranged on the detection table 2021, a placement table 2024 slidingly arranged on the slide rail 2023, and a probe 2025 and a lifting cylinder 2026 arranged on the detection table 2021. The placement table 2024 is used to place the carrier 300 carrying the chip. The placement table 2024 and the output end of the sliding cylinder 2022 are fixedly connected. The placement table 2024 slides to the bottom of the probe 2025 or slides to the intersection with the rotation trajectory of the grasping robot 40 through the sliding cylinder 2022. The output end of the lifting cylinder 2026 is fixedly connected to the probe 2025. The lifting cylinder 2026 controls the probe 2025 to descend to a height that contacts the chip on the carrier 300. The probe 2025 is a prior art and the specific structure is not repeated in this embodiment.

[0029] The sliding trajectory of each placement table 2024 intersects with the rotation trajectory of the grasping robot 40. The grasping robot 40 is rotatably provided with an adsorption part 41, and the adsorption part 41 is provided with multiple groups of adsorption head assemblies 411, and each group of adsorption head assemblies 411 corresponds to a carrier 300. The multiple groups of adsorption head assemblies 411 are arranged in pairs about the central axis of the adsorption part 41. Specifically, in this embodiment, the grasping robot 40 is a SCARA (selective compliance assembly robot arm) in the prior art, and there are two groups of adsorption head assemblies 411, and the two groups of adsorption head assemblies 411 are arranged in pairs about the central axis of the adsorption part 41. The positions of the two groups of adsorption head assemblies 411 correspond to the positions of the two groups of placement disks 21, and each group of adsorption head assemblies 411 includes multiple vacuum adsorption heads 4111. The positions of the adsorption head assembly 411 and the placement tray 21 correspond to each other, and the two groups of adsorption head assemblies 411 are arranged in pairs, so that the grasping robot 40 can absorb two carriers 300 at the same time, and after moving one of the carriers 300 to the placement table 2024 and inspecting the chip on the carrier 300, the placement table 2024 is moved to the bottom of the grasping robot 40. It is only necessary to rotate the adsorption component 41 180 degrees to place the other carrier 300 in the same position as the previous carrier 300. There is no need to translate the grasping robot 40, which facilitates the grasping robot 40 to locate the transfer position and improves the transfer efficiency.

[0030] The working process of a chip detection loading device 100 provided by the present invention is to first vertically place multiple processed carriers 300 carrying chips in the placement box 12 on the frame 11 in sequence, and then control the start of the pneumatic clamp 332 to move to the top of the corresponding placement box 12 through the cooperation of the first moving unit 31, the second moving unit 32 and the lifting unit 33, and start the rotating cylinder 331 to rotate the pneumatic clamp 332 to a vertical state and approach the carrier 300 in the placement box 12, and start the pneumatic clamp 332 to clamp the carrier 300 placed in the vertical state and then rotate it to a horizontal state, and place the carrier 300 carrying chips horizontally on the placement plate 21, and repeat the above process to place another carrier 300 on the other placement plate 21. The two carriers 300 are arranged in pairs about the central axis of the conveying track 20.

[0031] Then, the two placement trays 21 are controlled by the sliding module 23 to slide to the intersection with the rotation trajectory of the grabbing robot 40, and the grabbing robot 40 is started. The grabbing robot 40 rotates to the top of the placement tray 21 and adsorbs the corresponding carrier 300 through the adsorption head assembly 411. Then, the grabbing robot 40 rotates the two carriers 300 to the top of the corresponding placement table 2024. The grabbing robot 40 places one of the carriers 300 on the placement table 2024, and then rises to a height that does not affect the sliding of the placement table 2024. The sliding cylinder 2022 controls the placement table 2024 to move to the bottom of the probe 2025, and the lifting cylinder 2026 controls the probe 2025 to descend and detect the chip. After the detection is completed, the placement table 2024 slides to the bottom of the grabbing robot 40, and the grabbing robot 40 moves the carrier 300 to the next process and then moves to the placement table 2024. Then, the gripping robot 40 controls the suction member 41 to rotate 180 degrees, and places another carrier 300 at the same position as the previous carrier 300.

[0032] The chip detection loading device 100 in the above embodiment is equipped with multiple placement trays 21 and adsorption head assemblies 411 corresponding to the placement trays 21. When the carrier 300 is transported from the discharge unit 10 to the detection unit 200, the grasping assembly 30 grasps the carrier 300 multiple times and places it on the corresponding placement tray 21, and then all the carriers 300 are adsorbed at once by the adsorption head assembly 411 on the grasping robot 40, and then the multiple carriers 300 are transported to the detection unit 200 for detection. Compared with the loading device in the prior art, the conveying efficiency is improved.

Claims

1. A chip testing feeding device, characterized in that: include: A material discharging unit, the material discharging unit is used to place the carrier plate carrying the chips; A conveying track, wherein the two ends of the conveying track correspond to the discharge unit and the detection unit for chip detection respectively, and a plurality of placement trays are slidably arranged on the conveying track; A gripping assembly, the gripping assembly comprising a moving unit and a rotating cylinder provided at an output end of the moving unit, the output end of the rotating cylinder being provided with a pneumatic clamp, the pneumatic clamp being used to clamp a carrier placed vertically in the discharge unit and rotate it to a horizontal state through the rotating cylinder; A gripping robot is used to adsorb multiple carriers on the placement plate to the detection unit for detection. A suction piece is rotatably provided on the gripping robot, and multiple groups of suction head assemblies are provided on the suction piece, and each group of the suction head assemblies corresponds to a carrier.

2. The chip testing loading device according to claim 1, characterized in that: A plurality of groups of adsorption head assemblies are arranged in pairs about the central axis of the adsorption component.

3. The chip testing loading device according to claim 1, characterized in that: The plurality of placement trays are arranged in pairs about the central axis of the conveying track.

4. The chip testing loading device according to claim 1, characterized in that: The moving unit includes a first moving unit, a second moving unit and a lifting unit. The second moving unit is arranged at an output end of the first moving unit, and the lifting unit is arranged at an output end of the second moving unit.

5. The chip testing loading device according to claim 4, characterized in that: The material discharging unit includes a frame and a plurality of placement boxes arranged on the frame. The frame is arranged on one side of the conveying track. The first moving unit is arranged on the frame. The carrier plate is placed in the placement boxes.

6. The chip testing loading device according to claim 5, characterized in that: A plurality of partitions arranged in parallel are arranged in the placement box.

7. The chip testing loading device according to claim 5, characterized in that: The arrangement direction of the first moving unit and the arrangement direction of the second moving unit intersect with each other.

8. The chip testing loading device according to claim 5, characterized in that: The frame is provided with a movable module, the output end of the movable module is connected to the placement box, and the placement box is slidably arranged on the frame through the movable module.