Local viscous cleaning jig for metal mask

Abstract

The utility model discloses a local viscous cleaning jig for a metal mask, which comprises a cleaning bin, a mask fixing device is arranged at the top of the cleaning bin and is used for fixing the metal mask, and a local cleaning device is arranged in the cleaning bin and is used for cleaning the local part of the metal mask; according to the device, a mask plate needing to be cleaned is placed in a placing screen frame, then the position of a moving block is adjusted, a first hydraulic telescopic rod is started to extrude a pressing plate to fix the mask plate, and then a worker conducts cleaning through an existing controller; a second hydraulic telescopic rod and a third hydraulic telescopic rod are started to adjust the specific positions of a first limiting plate and a second limiting plate, then a controller is started to control a sprayer in a needed area at the bottom to conduct cleaning, water obtained after cleaning can be conveyed into a circulating outer frame through a second conveying assembly, and the purposes that small-range cleaning can be conducted on the mask, and cleaning efficiency is improved are achieved. Therefore, the mask is protected, and resource waste is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of metal mask plates, and more specifically, to a local sticky cleaning jig for metal mask plates. Background Art

[0002] A metal mask is a pattern transfer tool or master template used in microelectronics manufacturing. It has important applications in semiconductor manufacturing, flat-panel display production, solar cell manufacturing, and other fields. A metal mask typically consists of a thin metal film—such as chromium, nickel, or other metal materials—deposited onto a substrate to form the desired pattern structure. Produced through precision machining processes, metal masks enable high-resolution pattern transfer and are a key component in microelectronics manufacturing.

[0003] After searching, the existing patent (publication number: CN212633627U) discloses a metal mask plate cleaning device, including a main cleaning tank, a rotating mechanism and a supporting mechanism are provided in the inner cavity of the main cleaning tank, the rotating mechanism is fixedly arranged in the inner cavity of the main cleaning tank, the supporting mechanism is located above the rotating mechanism and is fixedly connected to the rotating mechanism, and waterproof cylinders are respectively provided at the opposite end edges on a side surface of the supporting mechanism close to the rotating mechanism, and a clamping mechanism is connected to the telescopic end of the waterproof cylinder. By arranging the rotating mechanism and the supporting mechanism in the inner cavity of the main cleaning tank, the metal mask plate is placed on the supporting mechanism and clamped by the clamping mechanism, and the rotating mechanism is started during cleaning. The rotation of the rotating mechanism drives the supporting mechanism to rotate and then rotates the metal mask plate, so that a certain contact friction force is generated between the metal mask plate and the cleaning liquid in the inner cavity of the main cleaning tank, thereby driving the falling off of the old material on the metal mask plate and improving the cleaning effect.

[0004] However, the above-mentioned device can only clean the metal mask during the cleaning process, which consumes a lot of resources because it needs to clean the entire mask plate; the cleaning of specific contaminated areas is not precise enough, which may affect the cleaning effect; and during the cleaning process, parts of the mask plate that do not need to be cleaned or are sensitive to the cleaning agent may be damaged, which not only increases cleaning time and cost, but also may reduce production efficiency. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides a local sticky cleaning jig for metal mask to solve the problem that overall cleaning may lead to waste of resources, inaccurate cleaning and damage to sensitive areas, increasing costs and time.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions: a local sticky cleaning jig for a metal mask, comprising a cleaning chamber, a mask fixing device is provided on the top of the cleaning chamber for fixing the metal mask, a local cleaning device is provided inside the cleaning chamber for cleaning a local part of the metal mask, a transmission component 1 is provided on one side of the cleaning chamber, a cleaning liquid circulation device is provided at one end of the transmission component 1, a transmission component 2 is provided between the cleaning chamber and the cleaning liquid circulation device, and a recovery transmission device is provided on one side of the cleaning chamber and the cleaning liquid circulation device.

[0007] Preferably, the mask fixing device includes a screen placement frame, a sliding groove, a moving block, a hydraulic telescopic rod and a pressure plate. The screen placement frame can be detachably mounted on the top of the cleaning chamber. The sliding groove is opened on both sides of the screen placement frame. The moving block is movably mounted on the sliding groove. The hydraulic telescopic rod is fixedly mounted on the top of the moving block, and the pressure plate is fixedly mounted on the bottom of the hydraulic telescopic rod.

[0008] Preferably, the local cleaning device includes a slide, a second hydraulic telescopic rod, a limit plate, and a third hydraulic telescopic rod. The slide is fixedly installed inside the cleaning bin, the second hydraulic telescopic rod is movably installed inside the slide, the limit plate is fixedly installed at one end of the second hydraulic telescopic rod, and the third hydraulic telescopic rod is fixedly installed on the inner side of the cleaning bin.

[0009] Preferably, the local cleaning device also includes a limit plate 2, a sprayer, and a partition. The limit plate 2 is fixedly mounted on one side of the hydraulic telescopic rod 3, the limit plate 1 is movably mounted on the outer surface of the limit plate 2, the sprayer is fixedly mounted on the bottom of the inner surface of the cleaning chamber, and the partition is fixedly mounted inside the cleaning chamber.

[0010] Preferably, the transmission component 1 includes a tee pipe 1 and a connecting pipe 1, one end of the tee pipe 1 is fixedly installed on one side of the cleaning bin, and one end of the connecting pipe 1 is fixedly installed on one side of the tee pipe 1.

[0011] Preferably, the cleaning liquid circulation device includes a circulation outer frame, an inclined plate, and a filter plate. The circulation outer frame is fixedly installed on the other end of the connecting pipe, the inclined plate is fixedly installed on the bottom of the inner surface of the circulation outer frame, and the filter plate is detachably installed inside the circulation outer frame.

[0012] Preferably, the transmission component 2 includes a tee pipe 2 and a connecting pipe 2. The tee pipe 2 is fixedly installed on one side of the cleaning bin, one end of the connecting pipe 2 is fixedly connected to one side of the tee pipe 2, and the other end of the connecting pipe 2 is connected to one side of the circulation outer frame.

[0013] Preferably, the recovery and transmission device includes a connecting pipe three, a water pump, and an evaporator. The connecting pipe three is fixedly installed on one side of the circulation outer frame, the water pump is fixedly installed on the connecting pipe three, the evaporator is fixedly installed on the connecting pipe three, and the other end of the connecting pipe three is connected to the sprayer.

[0014] Preferably, the slide, hydraulic telescopic rod 2, limit plate 1, hydraulic telescopic rod 3, and limit plate 2 are provided in four groups, and the four groups of the slide, hydraulic telescopic rod 2, limit plate 1, hydraulic telescopic rod 3, and limit plate 2 are provided in the four parts divided by the partition and the cleaning bin.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] The utility model places the mask to be cleaned inside the screen frame, then adjusts the position of the moving block to start the hydraulic telescopic rod one to squeeze the pressure plate to fix the mask, and then the staff starts the hydraulic telescopic rod two and the hydraulic telescopic rod three through the existing controller to adjust the specific positions of the limit plate one and the limit plate two, and then starts the controller to control the sprayer in the required area at the bottom for cleaning, and the cleaned water is transmitted to the circulation outer frame through the transmission component two, is guided by the inclined plate and filtered by the filter plate, and is then transmitted back to the sprayer for recycling through the water pump and evaporator on the connecting pipe three. With the above structure, the mask can be cleaned in a small range, thereby protecting the mask and reducing the waste of resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 This is a schematic structural diagram of the mask fixing device of the present invention;

[0019] Figure 3 This is a structural diagram of the local cleaning device, transmission component 1, and transmission component 2 of the utility model;

[0020] Figure 4 This is a schematic structural diagram of the cleaning liquid circulation device and recovery transmission device of the present utility model.

[0021] [reference numerals]

[0022] 1. Cleaning chamber; 2. Mask fixing device; 3. Local cleaning device; 4. Transmission component 1; 5. Cleaning liquid circulation device; 6. Transmission component 2; 7. Recovery transmission device; 201. Placement of screen frame; 202. Sliding groove; 203. Moving block; 204. Hydraulic telescopic rod 1; 205. Pressing plate; 301. Sliding groove; 302. Hydraulic telescopic rod 2; 303. Limiting plate 1; 304. Hydraulic telescopic rod 3; 305. Limiting plate 2; 306. Sprinkler; 307. Partition; 401. Tee pipe 1; 402. Connecting pipe 1; 501. Circulation outer frame; 502. Inclined plate; 503. Filter plate; 601. Tee pipe 2; 602. Connecting pipe 2; 701. Connecting pipe 3; 702. Water pump; 703. Evaporator. DETAILED DESCRIPTION

[0023] The following will be combined with the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] Example 1

[0025] The preferred embodiment of the metal mask local sticky cleaning tool provided by the present invention is as follows: Figures 1 to 4 As shown: it includes a cleaning chamber 1, a mask fixing device 2 is provided on the top of the cleaning chamber 1 for fixing the metal mask, a local cleaning device 3 is provided inside the cleaning chamber 1 for cleaning the local part of the metal mask, a transmission component 1 4 is provided on one side of the cleaning chamber 1, a cleaning liquid circulation device 5 is provided at one end of the transmission component 1 4, a transmission component 2 6 is provided between the cleaning chamber 1 and the cleaning liquid circulation device 5, and a recovery transmission device 7 is provided on one side of the cleaning chamber 1 and the cleaning liquid circulation device 5.

[0026] In this embodiment, the mask fixing device 2 includes a screen frame 201, a sliding groove 202, a moving block 203, a hydraulic telescopic rod 204, and a pressure plate 205. The screen frame 201 can be detachably installed on the top of the cleaning chamber 1. The sliding groove 202 is opened on both sides of the screen frame 201. The moving block 203 is movably installed on the sliding groove 202. The hydraulic telescopic rod 204 is fixedly installed on the top of the moving block 203, and the pressure plate 205 is fixedly installed on the bottom of the hydraulic telescopic rod 204.

[0027] In this embodiment, the local cleaning device 3 includes a slide 301, a hydraulic telescopic rod 2 302, a limit plate 1 303, and a hydraulic telescopic rod 3 304. The slide 301 is fixedly installed inside the cleaning chamber 1, the hydraulic telescopic rod 2 302 is movably installed inside the slide 301, the limit plate 1 303 is fixedly installed at one end of the hydraulic telescopic rod 2 302, and the hydraulic telescopic rod 3 304 is fixedly installed on the inner side of the cleaning chamber 1.

[0028] In this embodiment, the local cleaning device 3 also includes a limit plate 2 305, a sprayer 306, and a partition 307. The limit plate 2 305 is fixedly installed on one side of the hydraulic telescopic rod 3 304, the limit plate 1 303 is movably installed on the outer surface of the limit plate 2 305, the sprayer 306 is fixedly installed on the bottom of the inner surface of the cleaning chamber 1, and the partition 307 is fixedly installed inside the cleaning chamber 1.

[0029] In this embodiment, the transmission component 4 includes a three-way pipe 401 and a connecting pipe 402. One end of the three-way pipe 401 is fixedly installed on one side of the cleaning chamber 1, and one end of the connecting pipe 402 is fixedly installed on one side of the three-way pipe 401.

[0030] Example 2

[0031] On the basis of the first embodiment, the preferred embodiment of the local sticky cleaning tool for the metal mask provided by the present invention is as follows: Figures 1 to 4 As shown: the cleaning liquid circulation device 5 includes a circulation outer frame 501, an inclined plate 502, and a filter plate 503. The circulation outer frame 501 is fixedly installed at the other end of the connecting pipe 402, the inclined plate 502 is fixedly installed at the bottom of the inner surface of the circulation outer frame 501, and the filter plate 503 is detachably installed inside the circulation outer frame 501.

[0032] In this embodiment, the transmission component 2 6 includes a tee pipe 2 601 and a connecting pipe 2 602. The tee pipe 2 601 is fixedly installed on one side of the cleaning chamber 1. One end of the connecting pipe 2 602 is fixedly connected to one side of the tee pipe 2 601, and the other end of the connecting pipe 2 602 is connected to one side of the circulation outer frame 501.

[0033] In this embodiment, the recovery and transmission device 7 includes a connecting pipe three 701, a water pump 702, and an evaporator 703. The connecting pipe three 701 is fixedly installed on one side of the circulation outer frame 501, the water pump 702 is fixedly installed on the connecting pipe three 701, the evaporator 703 is fixedly installed on the connecting pipe three 701, and the other end of the connecting pipe three 701 is connected to the sprayer 306.

[0034] In this embodiment, there are four groups of slides 301, hydraulic telescopic rod 2 302, limit plate 1 303, hydraulic telescopic rod 304, and limit plate 2 305. The four groups of slides 301, hydraulic telescopic rod 2 302, limit plate 1 303, hydraulic telescopic rod 304, and limit plate 2 305 are arranged in the four parts divided by the partition 307 and the cleaning chamber 1.

[0035] The working process of this utility model is as follows:

[0036] When in use, the staff first places the mask to be cleaned inside the screen frame 201, then adjusts the position of the moving block 203 and starts the hydraulic telescopic rod 1 204 to squeeze the pressure plate 205 to fix the mask. Then the staff uses the existing controller to start the hydraulic telescopic rod 2 302 and the hydraulic telescopic rod 3 304 to adjust the specific positions of the limit plate 1 303 and the limit plate 2 305, and then starts the controller to control the sprayer 306 in the required area at the bottom for cleaning. The cleaned water will be transmitted to the circulation outer frame 501 through the transmission component 2 6, guided by the inclined plate 502 and filtered by the filter plate 503, and then the water will be cleaned and transmitted back to the sprayer 306 for recycling through the water pump 702 and the evaporator 703 on the connecting pipe 3 701.

[0037] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense, and may refer to mechanical or electrical connections, internal communication between two components, or direct connection. "Up," "down," "left," and "right" are only used to indicate relative positional relationships. When the absolute positions of the objects being described change, the relative positional relationships may also change.

[0038] Secondly: The drawings of the embodiments disclosed in this utility model only involve structures related to the embodiments disclosed in this utility model. Other structures can refer to common designs. In the absence of conflicts, the same embodiment and different embodiments of the utility model can be combined with each other.

[0039] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A local sticky cleaning jig for a metal mask, comprising a cleaning chamber (1), characterized in that: The top of the cleaning chamber (1) is provided with a mask fixing device (2) for fixing the metal mask, the interior of the cleaning chamber (1) is provided with a local cleaning device (3) for cleaning a part of the metal mask, one side of the cleaning chamber (1) is provided with a transmission component (4), one end of the transmission component (4) is provided with a cleaning liquid circulation device (5), a transmission component (6) is provided between the cleaning chamber (1) and the cleaning liquid circulation device (5), and a recovery transmission device (7) is provided between the cleaning chamber (1) and one side of the cleaning liquid circulation device (5).

2. The sticky cleaning tool for a metal mask according to claim 1, characterized in that: The mask fixing device (2) comprises a screen frame (201), a sliding groove (202), a moving block (203), a hydraulic telescopic rod (204), and a pressing plate (205); the screen frame (201) is detachably mounted on the top of the cleaning chamber (1); the sliding groove (202) is provided on both sides of the screen frame (201); the moving block (203) is movably mounted on the sliding groove (202); the hydraulic telescopic rod (204) is fixedly mounted on the top of the moving block (203); and the pressing plate (205) is fixedly mounted on the bottom of the hydraulic telescopic rod (204).

3. The local sticky cleaning jig for metal mask according to claim 2, characterized in that: The local cleaning device (3) comprises a chute (301), a second hydraulic telescopic rod (302), a first limiting plate (303), and a third hydraulic telescopic rod (304); the chute (301) is fixedly mounted inside the cleaning chamber (1); the second hydraulic telescopic rod (302) is movably mounted inside the chute (301); the first limiting plate (303) is fixedly mounted on one end of the second hydraulic telescopic rod (302); and the third hydraulic telescopic rod (304) is fixedly mounted on the inner side of the cleaning chamber (1).

4. The sticky cleaning tool for a metal mask according to claim 3, characterized in that: The local cleaning device (3) further comprises a second limiting plate (305), a sprayer (306), and a partition (307); the second limiting plate (305) is fixedly mounted on one side of the third hydraulic telescopic rod (304); the first limiting plate (303) is movably mounted on the outer surface of the second limiting plate (305); the sprayer (306) is fixedly mounted on the bottom of the inner surface of the cleaning chamber (1); and the partition (307) is fixedly mounted inside the cleaning chamber (1).

5. The sticky cleaning tool for a metal mask according to claim 4, characterized in that: The transmission component 1 (4) comprises a tee pipe 1 (401) and a connecting pipe 1 (402), one end of the tee pipe 1 (401) is fixedly mounted on one side of the cleaning chamber (1), and one end of the connecting pipe 1 (402) is fixedly mounted on one side of the tee pipe 1 (401).

6. The local sticky cleaning jig for metal mask according to claim 5, characterized in that: The cleaning liquid circulation device (5) comprises a circulation outer frame (501), an inclined plate (502), and a filter plate (503); the circulation outer frame (501) is fixedly mounted on the other end of the connecting pipe (402); the inclined plate (502) is fixedly mounted on the bottom of the inner surface of the circulation outer frame (501); and the filter plate (503) is detachably mounted inside the circulation outer frame (501).

7. The local sticky cleaning tool for metal mask according to claim 6, characterized in that: The second transmission component (6) includes a second three-way pipe (601) and a second connecting pipe (602). The second three-way pipe (601) is fixedly installed on one side of the cleaning chamber (1). One end of the second connecting pipe (602) is fixedly connected to one side of the second three-way pipe (601), and the other end of the second connecting pipe (602) is connected to one side of the circulation outer frame (501).

8. The sticky cleaning tool for a metal mask according to claim 7, characterized in that: The recovery and transmission device (7) comprises a connecting pipe (701), a water pump (702), and an evaporator (703). The connecting pipe (701) is fixedly mounted on one side of the circulation outer frame (501). The water pump (702) is fixedly mounted on the connecting pipe (701). The evaporator (703) is fixedly mounted on the connecting pipe (701). The other end of the connecting pipe (701) is connected to the sprayer (306).

9. The local sticky cleaning tool for metal mask according to claim 4, characterized in that: The chute (301), the second hydraulic telescopic rod (302), the first limiting plate (303), the third hydraulic telescopic rod (304), and the second limiting plate (305) are provided in four groups. The four groups of the chute (301), the second hydraulic telescopic rod (302), the first limiting plate (303), the third hydraulic telescopic rod (304), and the second limiting plate (305) are provided in the four parts divided by the partition (307) and the cleaning chamber (1).

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