Multi-actuator ultra-pure diaphragm valve

Abstract

The utility model provides a multi-actuator ultra-pure diaphragm valve, which relates to an ultra-pure diaphragm valve and comprises a first pneumatic actuator, a second pneumatic actuator, a connecting plate, a diaphragm and a valve seat. The driving end of a first pushing head of the first pneumatic actuator is connected with the top end of a second pushing head of the second pneumatic actuator, the bottom end of the second pushing head is connected with a diaphragm in the valve seat, and under dual pressure driving of the first pushing head and the second pushing head, the diaphragm is used for blocking a pipeline between a liquid inlet and a liquid outlet under the double pressure of the valve seat. The multi-actuator mode is adopted, under the condition that the air pressure is not changed, the valve can be opened, but the closing pressure is multiple times of that of a single actuator, so that the high-pressure application scene is solved, and a multi-actuator modularized connecting structure can also ensure that quick connection is achieved, and is simple, convenient and fast to use. And the installation cost is low.

Description

Technical Field

[0001] The utility model relates to an ultrapure diaphragm valve, in particular to an ultrapure diaphragm valve with multiple actuators. Background Art

[0002] PFA ultrapure valves typically require precise flow and pressure control in industrial applications. The actuator is a key component in the valve control system. It receives control signals and converts them into mechanical movements to control the opening and closing of the valve. In high-pressure applications, the performance of the actuator is particularly important because it directly affects whether the valve can be effectively closed and opened. In existing applications, single-actuator PFA ultrapure valves are commonly used. It is known that the existing single-actuator PFA ultrapure valves have low application pressure and cannot be closed under high pressure. If the closing pressure is increased by changing the pressure of the spring, the air pressure required to open the valve is very high. Utility Model Content

[0003] In order to solve the above technical problems, the purpose of the utility model is to provide a multi-actuator ultra-pure diaphragm valve, which adopts a multi-actuator approach. When the air pressure remains unchanged, the valve can be opened, but the closing pressure is a multiple of a single actuator, thereby solving high-pressure application scenarios. The modular connection structure of the multi-actuator can also ensure quick connection, which is relatively simple and convenient, and the installation cost is also low.

[0004] The utility model provides the following technical solutions:

[0005] A multi-actuator ultrapure diaphragm valve, comprising a pneumatic actuator 1, a pneumatic actuator 2, a connecting plate, a diaphragm and a valve seat. The pneumatic actuator 1 is superimposed and connected to the pneumatic actuator 2 via the connecting plate, and the pneumatic actuator 1 and the pneumatic actuator 2 respectively perform various reciprocating driving actions through the internal push head 1 and push head 2. The structural components of the above-mentioned pneumatic actuator are prior art and are not described in detail here. The driving end of the push head 1 is connected to the top end of the push head 2, and the bottom end of the push head 2 is connected to the diaphragm in the valve seat. Under the dual pressure drive of the push head 1 and the push head 2, the diaphragm is used to block the pipeline between the liquid inlet and the liquid outlet of the valve seat under double pressure to achieve valve closure;

[0006] At this point, for pneumatic actuator 1 and pneumatic actuator 2, when the air pressure remains unchanged, the valve can be opened, that is, the diaphragm is lifted, but the closing pressure can be a multiple of that of a single actuator, thereby solving high-pressure application scenarios. The modular connection structure of multiple actuators can also ensure quick connection, which is relatively simple and convenient, and the installation cost is also low.

[0007] Preferably, the periphery of the diaphragm is fixedly mounted at the mounting opening of the valve seat, and a group of connecting studs for threaded connection with the push head 2 are also provided at the center thereof to facilitate subsequent disassembly and maintenance.

[0008] The beneficial effects of the utility model are as follows: the multi-actuator ultrapure diaphragm valve of the utility model is based on the existing single actuator and is superimposed with the actuator by a connection structure, so that the closing pressure of the valve is multiplied, thereby solving the problem of low operating pressure of single-actuator valves in the semiconductor ultrapure industry;

[0009] The PFA ultra-pure diaphragm valve with multi-actuator structure has a high valve closing pressure and can withstand high-pressure applications. The air pressure required for switching is the same as that of a single actuator. The modular actuator connection structure has low cost and easy installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0011] Figure 1 It is a structural diagram of the utility model;

[0012] Figure 2 yes Figure 1 Schematic cross-sectional view of ;

[0013] Figure 3 yes Figure 1 Schematic diagram of the structure after the middle parts are disassembled;

[0014] Markings in the figure:

[0015] 1. Pneumatic actuator 1; 2. Pneumatic actuator 2; 3. Connecting plate; 4. Diaphragm; 5. Valve seat; 6. Push head 1; 7. Push head 2; 8. Liquid inlet; 9. Liquid outlet. DETAILED DESCRIPTION

[0016] like Figure 1-3As shown, a multi-actuator ultrapure diaphragm valve, in this embodiment, includes a pneumatic actuator 1, a pneumatic actuator 2, a connecting plate 3, a diaphragm 4 and a valve seat 5. The pneumatic actuator 1 is superimposed and connected to the pneumatic actuator 2 2 through the connecting plate 3, and the pneumatic actuator 1 and the pneumatic actuator 2 respectively perform various reciprocating driving actions through the internal push head 1 6 and the push head 2 7. The structural components of the above-mentioned pneumatic actuator are prior art and are not described in detail here. The driving end of the push head 1 6 is connected to the top of the push head 2 7, and the bottom end of the push head 2 7 is connected to the diaphragm 4 in the valve seat 5. Under the dual pressure drive of the push head 1 6 and the push head 2 7, the diaphragm 4 is used to block the pipeline between the liquid inlet 8 and the liquid outlet 9 of the valve seat 5 under double pressure to achieve valve closure;

[0017] At this point, for pneumatic actuator 1 and pneumatic actuator 2, when the air pressure remains unchanged, the valve can be opened, that is, the diaphragm is lifted, but the closing pressure can be a multiple of a single actuator, thereby solving high-pressure application scenarios, and the modular connection structure of multiple actuators can also ensure quick connection, which is relatively simple and convenient, and the installation cost is also low.

[0018] The periphery of the diaphragm 4 is fixedly mounted at the mounting port of the valve seat 5, and a group of connecting studs for threaded connection with the push head 2 7 are also provided at its center to facilitate subsequent disassembly and maintenance.

[0019] The working principle of the present invention is: after the pneumatic actuator 1 and the pneumatic actuator 2 are superimposed and connected through the connecting plate 3, the valve can be opened when the air pressure remains unchanged, that is, the diaphragm is lifted, but the closing pressure can be a multiple of a single actuator, thereby solving the high-pressure application scenario, and the modular connection structure of multiple actuators can also ensure fast connection, which is relatively simple and convenient, and the installation cost is also low. In actual application, the actuator can be directly superimposed on the existing single actuator through the connection structure to increase the closing pressure multiple of the valve, thereby solving the problem of too low operating pressure of single actuator valves in the semiconductor ultra-pure industry; the modular actuator connection structure has low cost and is easy to install.

[0020] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A multi-actuator ultrapure diaphragm valve, characterized in that: The invention comprises a pneumatic actuator 1 (1), a pneumatic actuator 2 (2), a connecting plate (3), a diaphragm (4) and a valve seat (5). The pneumatic actuator 1 (1) is connected to the pneumatic actuator 2 (2) by means of the connecting plate (3), and the pneumatic actuator 1 (1) and the pneumatic actuator 2 (2) respectively perform various reciprocating driving actions through the internal push head 1 (6) and the push head 2 (7). The driving end of the push head 1 (6) is connected to the top end of the push head 2 (7), and the bottom end of the push head 2 (7) is connected to the diaphragm (4) in the valve seat (5). Under the dual pressure drive of the push head 1 (6) and the push head 2 (7), the diaphragm (4) is used to block the pipeline between the liquid inlet (8) and the liquid outlet (9) of the valve seat (5) under double pressure, so as to realize valve closure.

2. A multi-actuator ultrapure diaphragm valve according to claim 1, characterized in that: The periphery of the diaphragm (4) is fixedly mounted on the mounting opening of the valve seat (5), and a group of connecting studs for threaded connection with the second push head (7) are also provided at its center.

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