Novel atomic force microscope

By combining the adjustment mechanism and the detection mechanism, the problem of imprecise displacement adjustment of the atomic force microscope is solved, and multi-dimensional precise adjustment and real-time monitoring are achieved, meeting the accuracy requirements of microscopic experiments.

CN223333026UActive Publication Date: 2025-09-12FOSHAN IND TECHNOLOGY RESEARCH INSTITUTE OF GUANGDONG ACADEMY OF SCIENCES CO LTD
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Patent Information

Application Number
CN202423007690.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-05
Publication Date
2025-09-12
Estimated Expiration
2034-12-05

AI Technical Summary

Technical Problem

The displacement adjustment of existing atomic force microscopes is not precise enough and cannot meet various microscopic requirements.

Method used

An adjustment mechanism is adopted, including a first motor, a lifting screw, a bracket, a first and a second drive assembly, a mounting plate and a detection mechanism. The displacement accuracy is ensured through multi-dimensional adjustment, and the sample position is monitored in real time in combination with a CCD camera.

Benefits of technology

The precision of displacement adjustment is achieved to meet various microscopic requirements and ensure the accuracy and precision of experiments.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a novel atomic force microscope. The novel atomic force microscope comprises a shell, a bottom plate, a support frame, an adjusting mechanism and a detection mechanism, the supporting frame is arranged on the bottom plate, a first mounting plate is arranged at one end, away from the bottom plate, of the supporting frame, and the detection mechanism is arranged on the first mounting plate; the adjusting mechanism is arranged on the bottom plate. The adjusting mechanism comprises a first motor, a lifting lead screw, a support, a first driving assembly, a second driving assembly and two second mounting plates, the first motor is arranged on the bottom plate through the support, an output shaft of the first motor is connected with the lifting lead screw, a connecting plate is slidably arranged on the lifting lead screw, and the two ends of the connecting plate are each connected with a translation table; one end of each second mounting plate is arranged on the support, the other end of each second mounting plate is connected with the first mounting plate, each translation table is arranged on the corresponding second mounting plate in a sliding mode, the first driving assembly is arranged on the connecting plate, and the second driving assembly is arranged on the first driving assembly. The precision of displacement adjustment can be ensured, and various microscopic requirements can be well met.
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Description

Technical Field

[0001] The utility model relates to the technical field of microscopes, in particular to a novel atomic force microscope. Background Art

[0002] The atomic force microscope (AFM) is an analytical instrument used to study the surface structure of solid materials, including insulators. AFM uses a microcantilever to sense and amplify the forces between the cantilever's fine tip and the atoms in the sample being measured, achieving detection. With its atomic-level resolution, AFM is widely used in cutting-edge scientific fields such as nanomaterials and biomedicine due to its ultra-high nanometer-level detection accuracy.

[0003] The current common displacement adjustment is not precise enough to meet various microscopy needs. Utility Model Content

[0004] In order to solve the above problems, the present invention adopts the following technical solutions: a novel atomic force microscope, comprising: a housing, a base plate, a support frame, an adjustment mechanism and a detection mechanism;

[0005] The housing has a cavity inside, the bottom plate is arranged in the cavity, the support frame is arranged on the bottom plate, a first mounting plate is arranged at one end of the support frame away from the bottom plate, and the detection mechanism is arranged on the first mounting plate;

[0006] The adjusting mechanism is arranged on the bottom plate.

[0007] Furthermore, the adjustment mechanism includes a first motor, a lifting screw, a bracket, a first drive assembly, a second drive assembly and two second mounting plates, the first motor is arranged on the base plate through the bracket, the output shaft of the first motor is connected to the lifting screw, a connecting plate is slidably provided on the lifting screw, the two ends of the connecting plate are respectively connected to a translation platform, one end of each second mounting plate is arranged on the bracket, and the other end is connected to the first mounting plate, each translation platform is slidably set on a second mounting plate, the first drive assembly is arranged on the connecting plate, and the second drive assembly is arranged on the first drive assembly.

[0008] Furthermore, the first driving assembly includes a second motor, a first platform mounting plate, a first movable platform and a first platform screw rod, the first platform mounting plate is arranged on the connecting plate, the second motor is arranged on the first platform mounting plate, the output shaft of the second motor is connected to the first platform screw rod, the first movable platform is slidably arranged on the first platform screw rod, and the first movable platform is slidably arranged on the first platform mounting plate.

[0009] Furthermore, the second driving assembly includes a third motor, a second platform mounting plate, a second platform screw, an adapter plate, a piezoelectric station and a sample stage. The second platform mounting plate is arranged on the first moving platform, the third motor is arranged on the second platform mounting plate, the output shaft of the third motor is connected to the second platform screw, the adapter plate is slidably arranged on the second platform screw, and the adapter plate is slidably arranged on the second platform mounting plate, the piezoelectric station is arranged on the adapter plate, and the sample stage is arranged on the side of the piezoelectric station away from the adapter plate.

[0010] Furthermore, a placement opening is provided on the bottom plate, and the first motor is located in the placement opening.

[0011] Furthermore, an opening is provided on the first mounting plate, and the sample stage is movably located in the opening.

[0012] Furthermore, the detection mechanism includes a mounting seat, a CCD camera and a probe assembly. The mounting seat is arranged on the first mounting plate, and the CCD camera and the probe assembly are both arranged on the mounting seat.

[0013] Furthermore, a protective shell is provided on the mounting seat, and the protective shell is located outside the probe.

[0014] Furthermore, the housing includes a bottom shell and a protective cover, the protective cover is rotatably disposed on the bottom shell, and the protective cover movably covers the outer side of the first mounting plate.

[0015] Furthermore, a control system is included, and the first motor, the second motor, the third motor, the CCD camera and the probe assembly are all connected to the control system via electrical signals.

[0016] The beneficial effects of the present invention are as follows: using this novel atomic force microscope, the adjustment mechanism is used for good adjustment, and the detection mechanism is used for detection, so the accuracy of displacement adjustment can be ensured, and various microscopic requirements can be well met. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings further illustrate the present invention, but the embodiments in the accompanying drawings do not constitute any limitation to the present invention.

[0018] Figure 1 A schematic diagram of one direction of a novel atomic force microscope provided by an embodiment;

[0019] Figure 2 A schematic diagram of one direction inside a novel atomic force microscope provided by one embodiment;

[0020] Figure 3 A schematic diagram of the interior of a novel atomic force microscope provided by one embodiment from another direction;

[0021] Figure 4 A schematic diagram showing another direction of the interior of a novel atomic force microscope provided by an embodiment. DETAILED DESCRIPTION

[0022] The following will further describe the technical solution of the present invention in conjunction with the drawings of the embodiments of the present invention. The present invention is not limited to the following specific implementation methods. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0023] like Figures 1 to 4 As shown, a new atomic force microscope includes: a shell, a base plate 200, a support frame 300, an adjustment mechanism and a detection mechanism; the shell has a cavity inside, the base plate 200 is arranged in the cavity, the support frame 300 is arranged on the base plate 200, a first mounting plate 600 is arranged at one end of the support frame 300 away from the base plate 200, and the detection mechanism is arranged on the first mounting plate 600; the adjustment mechanism is arranged on the base plate 200.

[0024] Specifically, the adjustment mechanism includes a first motor 410, a lifting screw 420, a bracket 430, a first drive assembly, a second drive assembly and two second mounting plates 460. The first motor 410 is arranged on the base plate 200 through the bracket 430. The output shaft of the first motor 410 is connected to the lifting screw 420. A connecting plate 421 is slidingly arranged on the lifting screw 420. The two ends of the connecting plate 421 are respectively connected to a translation platform 422. One end of each second mounting plate 460 is arranged on the bracket 430, and the other end is connected to the first mounting plate 600. Each translation platform 422 is slidingly arranged on a second mounting plate 460. The first drive assembly is arranged on the connecting plate 421, and the second drive assembly is arranged on the first drive assembly. The first driving assembly includes a second motor 441, a first platform mounting plate 442, a first movable platform 443 and a first platform screw rod. The first platform mounting plate 442 is arranged on the connecting plate 421, the second motor 441 is arranged on the first platform mounting plate 442, the output shaft of the second motor 441 is connected to the first platform screw rod, the first movable platform 443 is slidably arranged on the first platform screw rod, and the first movable platform 443 is slidably arranged on the first platform mounting plate 442. The second drive assembly includes a third motor 451, a second platform mounting plate 452, a second platform screw 453, an adapter plate 454, a piezoelectric station 455, and a sample stage 456. The second platform mounting plate 452 is disposed on the first movable platform 443. The third motor 451 is disposed on the second platform mounting plate 452. The output shaft of the third motor 451 is connected to the second platform screw 453. The adapter plate 454 is slidably disposed on the second platform screw 453 and the adapter plate 454 is slidably disposed on the second platform mounting plate 452. The piezoelectric station 455 is disposed on the adapter plate 454. The sample stage 456 is disposed on a side of the piezoelectric station 455 away from the adapter plate 454. The bottom plate 200 is provided with a placement opening 201, and the first motor 410 is located within the placement opening 201. The first mounting plate 600 is provided with an opening, and the sample stage 456 is movably positioned within the opening. The detection mechanism includes a mounting base 510, a CCD camera 520, and a probe assembly 530. The mounting base 510 is disposed on the first mounting plate 600, and the CCD camera 520 and the probe assembly 530 are both disposed on the mounting base 510. A protective shell 511 is disposed on the mounting base 510 and is located outside the probe. The housing includes a bottom shell 110 and a protective cover 120. The protective cover 120 is rotatably disposed on the bottom shell 110 and movably covers the outside of the first mounting plate 600.

[0025] In the above embodiment, the novel atomic force microscope further includes a control system, and the first motor 410, the second motor 441, the third motor 451, the CCD camera 520 and the probe assembly 530 are all electrically connected to the control system.

[0026] Using this new atomic force microscope, the sample is placed on the sample stage 456, and then the preset parameters are input through the control system to confirm the specific position of the sample to be tested. Then, the first motor 410 is started through the control system. The output shaft of the first motor 410 rotates to drive the lifting screw 420 to rotate, thereby adjusting the height of the connecting plate 421, which is equivalent to adjusting the position of the sample stage 456 in the Z-axis direction. After the adjustment is completed, the second motor 441 is started. The output shaft of the second motor 441 rotates to drive the first platform screw to rotate, thereby causing the first movable platform 443 to slide, which is equivalent to adjusting the position of the sample stage 456 in the X-axis direction. After the adjustment is completed, the third motor 451 is started. The output shaft of the third motor 451 rotates to drive the second platform screw 453 to rotate, thereby causing the adapter plate 454 to slide, that is, the piezoelectric stage 455 located on the adapter plate 454, and the sample stage 456 connected to the piezoelectric stage 455 also slide. Therefore, it is equivalent to adjusting the position of the sample stage 456 in the Y-axis direction. It is worth mentioning that the CCD camera 520 can monitor the position of the sample in real time, which effectively ensures the accuracy of the entire adjustment. Furthermore, through adjustment in three dimensions, the displacement adjustment can be finely adjusted to meet the requirements. In other words, after the adjustment is completed, the probe assembly 530 can be used to begin the experiment. It is worth mentioning that the probe assembly 530 can be used to perform the experiment using the probe of an atomic force microscope in the prior art, and a detailed description thereof is omitted in this embodiment.

[0027] In summary, the above embodiments are not limitative embodiments of the present invention, and any modifications or equivalent variations made by those skilled in the art based on the essential content of the present invention are within the technical scope of the present invention.

Claims

1. A novel atomic force microscope, characterized in that: include: Shell, base plate, support frame, adjustment mechanism and detection mechanism; The housing has a cavity inside, the bottom plate is arranged in the cavity, the support frame is arranged on the bottom plate, a first mounting plate is arranged at one end of the support frame away from the bottom plate, and the detection mechanism is arranged on the first mounting plate; The adjusting mechanism is arranged on the bottom plate.

2. The novel atomic force microscope according to claim 1, characterized in that: The adjusting mechanism includes a first motor, a lifting screw, a bracket, a first drive assembly, a second drive assembly and two second mounting plates. The first motor is arranged on the base plate through the bracket. The output shaft of the first motor is connected to the lifting screw. A connecting plate is slidably provided on the lifting screw. Both ends of the connecting plate are respectively connected to a translation stage. One end of each second mounting plate is arranged on the bracket, and the other end is connected to the first mounting plate. Each translation stage is slidably provided on one of the second mounting plates. The first drive assembly is arranged on the connecting plate, and the second drive assembly is arranged on the first drive assembly.

3. The novel atomic force microscope according to claim 2, characterized in that: The first driving assembly includes a second motor, a first platform mounting plate, a first movable platform and a first platform screw rod. The first platform mounting plate is arranged on the connecting plate, the second motor is arranged on the first platform mounting plate, the output shaft of the second motor is connected to the first platform screw rod, the first movable platform is slidably arranged on the first platform screw rod, and the first movable platform is slidably arranged on the first platform mounting plate.

4. The novel atomic force microscope according to claim 3, characterized in that: The second driving assembly includes a third motor, a second platform mounting plate, a second platform screw, an adapter plate, a piezoelectric station and a sample stage. The second platform mounting plate is arranged on the first moving platform, the third motor is arranged on the second platform mounting plate, the output shaft of the third motor is connected to the second platform screw, the adapter plate is slidably arranged on the second platform screw, and the adapter plate is slidably arranged on the second platform mounting plate, the piezoelectric station is arranged on the adapter plate, and the sample stage is arranged on the side of the piezoelectric station away from the adapter plate.

5. The novel atomic force microscope according to claim 4, characterized in that: A placement opening is provided on the bottom plate, and the first motor is located in the placement opening.

6. The novel atomic force microscope according to claim 5, characterized in that: An opening is formed on the first mounting plate, and the sample stage is movably located in the opening.

7. The novel atomic force microscope according to claim 6, characterized in that: The detection mechanism includes a mounting seat, a CCD camera and a probe assembly. The mounting seat is arranged on the first mounting plate, and the CCD camera and the probe assembly are both arranged on the mounting seat.

8. The novel atomic force microscope according to claim 7, characterized in that: A protective shell is provided on the mounting seat, and the protective shell is located outside the probe.

9. The novel atomic force microscope according to claim 8, characterized in that: The housing comprises a bottom shell and a protective cover. The protective cover is rotatably arranged on the bottom shell and movably covers the outer side of the first mounting plate.

10. The novel atomic force microscope according to claim 9, characterized in that: The system further comprises a control system, wherein the first motor, the second motor, the third motor, the CCD camera and the probe assembly are all connected to the control system via electrical signals.