Radio frequency power supply access device

Abstract

The utility model discloses a radio frequency power supply access device, and particularly relates to the field of plasma cleaning equipment, which comprises an electrode stem connected to the plane of an electrode plate, and a power inlet flange seat, an insulating seat, an insulating sleeve and an insulating cover are sequentially sleeved outside the electrode stem from bottom to top. A shielding cover extending to the insulating seat is sleeved outside the insulating sleeve and the insulating cover; a penetrating through hole is formed in the electricity inlet flange seat, an insulating ring is embedded in the bottom of the through hole, the bottom end of the insulating seat is inserted into the through hole and attached to the insulating ring, a sealing groove with the diameter larger than that of the electrode stem is formed in the insulating seat, and the sealing groove is filled with a first sealing spacer ring and a second sealing spacer ring which are stacked up and down. According to the utility model, the structure is convenient to disassemble and assemble, the insulation between the electrode and the vacuum cavity is realized, the vacuum sealing is carried out on the radio frequency power supply electrode stem, the effective shielding of the radio frequency power supply is ensured, and the power reflection and loss of the power supply are reduced.

Description

Technical Field

[0001] The utility model relates to the field of plasma cleaning equipment, and more specifically, to a radio frequency power supply access device. Background Art

[0002] In plasma cleaning equipment, the RF power supply needs to be connected to the vacuum chamber. If a coaxial cable and the first sealing ring are used to connect it directly to the chamber, more sealing parts are required, which is prone to air leakage. In addition, heat is generated during the plasma cleaning process, and the rubber first sealing ring is prone to aging, requiring frequent leak detection. If a ceramic sintered electrode is used, it will cause power reflection and loss, resulting in poor plasma cleaning effect. Utility Model Content

[0003] To solve the above technical problems, the utility model provides a radio frequency power supply access device, comprising an electrode rod connected to the plane of an electrode plate, an inlet flange seat, an insulating seat, an insulating sleeve and an insulating cover being sleeved on the outside of the electrode rod in sequence from bottom to top, and a shielding cover extending to the insulating seat being sleeved on the outside of the insulating sleeve and the insulating cover;

[0004] A through hole is provided inside the power inlet flange seat, an insulating ring is embedded at the bottom of the through hole, the bottom end of the insulating seat is inserted into the through hole and fits on the insulating ring, a sealing groove with a diameter larger than the diameter of the electrode rod is provided inside the insulating seat, and the sealing groove is filled with a first sealing spacer ring and a second sealing spacer ring stacked up and down.

[0005] In a preferred embodiment, a first sealing ring is embedded between the power inlet flange seat and the insulating seat, and fastening bolts for fixing are passed through the edges of the power inlet flange seat and the insulating seat.

[0006] In a preferred embodiment, a second sealing ring is embedded in the bottom of the sealing groove, and the second sealing ring is located at the bottom of the second sealing spacer ring. The electrode rod passes through the insulating ring, the insulating seat, the second sealing ring, the second sealing ring, the first sealing ring and the insulating sleeve from bottom to top and extends to the inside of the insulating cover.

[0007] In a preferred embodiment, a nut and a gasket are sleeved on the outside of the top end of the electrode rod inside the insulating cover. The gasket fits on the top end of the insulating cover, and the electrode rod is limited on the top end of the insulating cover by the nut and the gasket.

[0008] In a preferred embodiment, a screw is inserted into the top end of the electrode rod.

[0009] The technical effects and advantages of this utility model are:

[0010] The utility model has an easy-to-assemble and disassemble structure, realizes insulation between the electrode and the vacuum cavity, vacuum-seals the RF power electrode rod, ensures effective shielding of the RF power supply, and reduces power reflection and loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0012] Explanation of the accompanying reference numerals: 1 electrode plate plane, 2 electrode rod, 3 power inlet flange seat, 4 insulating seat, 5 insulating sleeve, 6 insulating cover, 7 shielding cover, 8 through hole, 9 insulating ring, 10 sealing groove, 11 first sealing spacer ring, 12 second sealing spacer ring, 13 first sealing ring, 14 fastening bolt, 15 second sealing ring, 16 nut, 17 gasket, 18 screw. DETAILED DESCRIPTION

[0013] The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for purposes of illustration and description and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention and to enable those skilled in the art to understand the present invention and design various embodiments with various modifications suitable for specific applications.

[0014] like Figure 1 The RF power supply access device shown in the figure includes an electrode rod 2 connected to an electrode plate plane 1. A power inlet flange 3, an insulating seat 4, an insulating sleeve 5, and an insulating cover 6 are sequentially sleeved on the outside of the electrode rod 2 from bottom to top. A shielding cover 7 is sleeved on the outside of the insulating sleeve 5 and the insulating cover 6 and extends to the insulating seat 4.

[0015] The insulating cover 6 is made of polytetrafluoroethylene and is sleeved on the outside of the top of the electrode rod 2. The shielding cover 7 is wrapped around the outside of the insulating cover 6. The shielding cover 7 cooperates with the insulating cover 6 to cover all the electrode rods 2 exposed outside the vacuum and reduce power reflection and loss.

[0016] A through hole 8 is provided inside the power inlet flange seat 3, an insulating ring 9 is embedded at the bottom of the through hole 8, the bottom end of the insulating seat 4 is inserted into the through hole 8 and fits on the insulating ring 9, a sealing groove 10 with a diameter larger than that of the electrode rod 2 is provided inside the insulating seat 4, and the sealing groove 10 is filled with a first sealing spacer ring 11 and a second sealing spacer ring 12 stacked up and down.

[0017] A first sealing ring 13 is embedded between the power inlet flange seat 3 and the insulating seat 4 , and fastening bolts 14 for fixing are passed through the edges of the power inlet flange seat 3 and the insulating seat 4 .

[0018] A nut 16 and a washer 17 are sleeved on the top of the electrode rod 2 located inside the insulating cover 6. The washer 17 fits on the top of the insulating sleeve 5. The electrode rod 2 is fixed on the top of the insulating sleeve 5 by the nut 16 and the washer 17. A screw 18 is inserted into the top of the electrode rod 2.

[0019] The top end of the electrode rod 2 extends from the insulating sleeve 5 to the inside of the insulating cover 6. A nut 16 and a gasket 17 are sleeved on the top of the insulating sleeve 5 to limit and fix the top end of the electrode rod 2 at the top end of the insulating sleeve 5. The insulating sleeve 5 and the inner side of the insulating seat 4 are sealed by the second sealing ring 12 and the first sealing ring 11 to ensure the sealing effect.

[0020] Based on the above, the bottom end of the electrode rod 2 is connected to the electrode plate plane 1, and then passes through the vacuum chamber and enters the interior of the device. Specifically, the electrode rod 2 is inserted from the through hole 8 at the bottom end of the power inlet flange seat 3, and passes through the insulating ring 9, the insulating seat 4, the second sealing ring 15, the second sealing ring, the first sealing ring and the insulating sleeve 5 from bottom to top and extends to the inside of the insulating cover 6. The bottom end of the insulating seat 4 protrudes downward and is inserted into the through hole 8 in the power inlet flange seat 3. The bottom is sealed by the insulating ring 9, and the second sealing ring 15, the first sealing spacer ring 11 and the second sealing spacer ring 12 are sequentially sleeved on the top for sealing. The outside of the top end of the electrode rod 2 is sleeved with an insulating cover 6 and a shielding cover 7, and a layer of first sealing ring 13 is also embedded between the power inlet flange seat 3 and the insulating seat 4 to form a sealing surface on the outside of the electrode rod 2, thereby realizing the insulation between the electrode and the vacuum chamber, vacuum sealing the RF power supply electrode rod 2, and ensuring effective shielding of the RF power supply.

[0021] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without making any creative efforts should fall within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described and explained in this utility model shall be implemented in accordance with conventional means in the field unless otherwise specified or limited.

Claims

1. A radio frequency power supply access device, characterized in that: It includes an electrode rod connected to the electrode plate plane, and the outside of the electrode rod is sequentially sleeved with a power inlet flange seat, an insulating seat, an insulating sleeve and an insulating cover from bottom to top, and a shielding cover extending to the insulating seat is sleeved outside the insulating sleeve and the insulating cover; A through hole is provided inside the power inlet flange seat, an insulating ring is embedded at the bottom of the through hole, the bottom end of the insulating seat is inserted into the through hole and fits on the insulating ring, a sealing groove with a diameter larger than the diameter of the electrode rod is provided inside the insulating seat, and the sealing groove is filled with a first sealing spacer ring and a second sealing spacer ring stacked up and down.

2. The radio frequency power supply access device according to claim 1, characterized in that: A first sealing ring is embedded between the power inlet flange seat and the insulating seat, and fastening bolts for fixing are passed through the edges of the power inlet flange seat and the insulating seat.

3. The RF power access device according to claim 1, characterized in that: A second sealing ring is embedded in the bottom of the sealing groove. The second sealing ring is located at the bottom of the second sealing spacer ring. The electrode rod passes through the insulating ring, the insulating seat, the second sealing ring, the second sealing ring, the first sealing ring and the insulating sleeve from bottom to top and extends to the inside of the insulating cover.

4. The RF power access device according to claim 3, characterized in that: A nut and a gasket are sleeved on the outside of the top end of the electrode rod located inside the insulating cover. The gasket is fitted on the top end of the insulating cover, and the electrode rod is limited on the top end of the insulating cover by the nut and the gasket.

5. The radio frequency power supply access device according to claim 4, characterized in that: A screw is inserted at the top of the electrode rod.

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