Z-axis linear motor module
By setting a magnetic spring next to the linear motor module and using it to provide constant magnetic force when the power is off, the problem of collision damage of the linear motor module in sudden power outage is solved, stable positioning of the sliding parts is achieved, equipment damage is avoided and costs are reduced.
Patent Information
- Application Number
- CN202422692275.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-04
- Publication Date
- 2025-09-12
- Estimated Expiration
- 2034-11-04
AI Technical Summary
Existing linear motor modules are prone to collision and module damage in the event of a sudden power outage, especially in scenarios where the system is frequently started and stopped.
A magnetic spring is set beside the linear motor to provide constant magnetic force when the power is off, balancing the gravity of the sliding component and the load thereon, and preventing the sliding component from moving vertically downward.
It effectively prevents sliding parts from falling vertically downward, avoids collision and damage to the module, prolongs service life, reduces costs, and has a simple structure and is easy to use.
Smart Images
Figure CN223334564U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of motor technology, and in particular to a Z-axis linear motor module. Background Art
[0002] A linear motor module is a system integration based on linear motors, linear guides, and other components. It can directly convert electrical energy into linear motion, which in turn drives the load to perform linear motion, enabling the load to perform corresponding operations.
[0003] Existing linear motor modules, when used in Z-axis linear modules, can reduce mechanical conversion steps and improve energy efficiency. However, in scenarios where frequent starts and stops are required, the linear motor module is prone to collisions and module damage in the event of a sudden power outage. Utility Model Content
[0004] The purpose of this application is to provide a Z-axis linear motor module, which aims to solve the technical problem that the existing linear motor module is prone to collision and damage in the event of a sudden power outage.
[0005] To achieve the above objectives, the solution provided by this application is:
[0006] A Z-axis linear motor module, comprising:
[0007] A linear motor comprising a first stator and a first mover, wherein the first mover is slidably mounted on the first stator to move along a length direction of the first stator, and an air gap exists between the first mover and the first stator;
[0008] a magnetic spring, the magnetic spring and the linear motor being spaced apart along a first horizontal direction, the magnetic spring comprising a second stator and a second mover, the second mover being slidably sleeved on the second stator;
[0009] a base, on which the first stator and the second stator are both mounted;
[0010] a sliding component, wherein the sliding component is connected to the first mover and the second mover respectively, so that under the action of the first mover, the sliding component drives the second mover to slide linearly in a vertical direction;
[0011] The sliding component is used to connect to a load, and a constant magnetic force is generated between the second mover and the second stator to limit the sliding component from sliding when power is off.
[0012] The Z-axis linear motor module provided in this application has the following beneficial effects:
[0013] The Z-axis linear motor module of this embodiment is provided with a linear motor and a magnetic spring arranged at intervals along the first horizontal direction. When the linear motor is energized, the first stator generates an electromagnetic force to push the first mover to move linearly on the first stator, thereby driving the sliding component and the second mover to move linearly in the vertical direction. When the linear motor is suddenly powered off, a constant magnetic force is generated between the second mover and the second stator in the magnetic spring, which can offset or balance the gravity of the sliding component and the load thereon, thereby preventing the sliding component from moving vertically downward, and then limiting the sliding component to the current position, preventing the sliding component from falling vertically downward and colliding with components such as the base or other equipment near the module, thereby avoiding damage to the module. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.
[0015] Figure 1 This is a schematic diagram of the structure of the Z-axis linear motor module provided in an embodiment of the present application from one viewing angle;
[0016] Figure 2 This is a schematic diagram of the exploded structure of the Z-axis linear motor module provided in an embodiment of the present application;
[0017] Figure 3 This is a schematic structural diagram of the Z-axis linear motor module provided in an embodiment of the present application from another perspective;
[0018] Figure 4 yes Figure 3 Schematic diagram of the cross-sectional structure along the AA direction;
[0019] Figure 5 yes Figure 3 Schematic diagram of the cross-sectional structure along the BB direction;
[0020] Figure 6 It is a structural schematic diagram of the sliding components in the Z-axis linear motor module provided in an embodiment of the present application.
[0021] Description of Figure Numbers:
[0022] 100. Z-axis linear motor module;
[0023] 1. Linear motor; 11. First stator; 111. First assembly hole; 12. First mover; 13. Ring encoder;
[0024] 2. Magnetic spring; 21. Second stator; 211. Shaft; 212. Permanent magnet; 213. Third assembly hole; 214. Fourth assembly hole; 215. First end portion; 216. Second end portion; 22. Second mover; 221. Shaft hole; 221a. First hole segment; 221b. Second hole segment; 221c. Step end surface; 23. Guide member;
[0025] 3. Base; 31. Connecting seat; 311. First mounting hole; 312. Second mounting hole;
[0026] 4. Sliding member; 41. First slide; 411. First fixing hole; 42. Second slide; 421. Second fixing hole; 43. First through hole; 44. Second through hole; 45. Fifth fixing member;
[0027] 5. First fixing member; 6. Second fixing member; 7. Third fixing member; 8. Fourth fixing member. DETAILED DESCRIPTION
[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.
[0029] It should be noted that all directional indications in the embodiments of the present application (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship and movement status between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.
[0030] It should also be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or indirectly connected to the other element through an intervening element.
[0031] In addition, the descriptions of "first", "second", etc. in this application are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.
[0032] Currently, Z-axis linear modules primarily utilize rotary motors in conjunction with mechanical transmission devices such as ball screws and rack and pinion gears. While these devices can achieve linear motion, they suffer from significant conversion efficiency losses, rapid wear, high maintenance costs, and limited positioning accuracy in certain high-precision, high-speed applications. Therefore, existing technologies are using linear motors to replace these mechanical transmission devices, reducing mechanical conversion steps and improving system performance.
[0033] In some applications, particularly those requiring frequent starts and stops and precise control, linear motors offer greater energy efficiency than mechanical transmission devices. Furthermore, their direct drive approach offers higher positioning accuracy and faster response speeds, meeting the demands for precision positioning and high-speed linear motion control in fields such as semiconductors, electronics manufacturing, precision machine tools, and medical equipment.
[0034] However, there are some defects in applying linear motors to Z-axis linear modules, such as the lack of a brake self-locking function, which can easily cause collisions, damage to equipment, and other faults in the event of a sudden power outage.
[0035] In some related technologies, the following two methods are mainly used to solve the above problems: one is to add a component with a braking function, such as a clamp, to the sliding component of the Z-axis linear module, but this component has a complex structure, high cost, and inconvenient use; the other is to add a tension spring device, but this method has great limitations, such as being unable to withstand excessive loads and limited stroke.
[0036] In view of this, an embodiment of the present application provides a Z-axis linear motor module, which arranges a magnetic spring next to the linear motor. When the linear motor is in a power-off state, the magnetic spring can provide a constant magnetic force to the sliding part, balance the gravity of the sliding part and the load thereon, and prevent the sliding part from falling downward in a vertical direction and colliding.
[0037] The following is combined with Figure 1 To the attached Figure 6 , some embodiments of the present application are described in detail. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.
[0038] like Figure 1 and Figure 2As shown, the Z-axis linear motor module 100 of this embodiment includes a linear motor 1, a magnetic spring 2, a base 3 and a sliding component 4. The magnetic spring 2 and the linear motor 1 are spaced apart along the first horizontal direction. The linear motor 1 includes a first stator 11 and a first mover 12. The first mover 12 is slidably mounted on the first stator 11 to move along the length direction (i.e., the vertical direction) of the first stator 11, and there is an air gap between the first mover 12 and the first stator 11; the magnetic spring 2 includes a second stator 21 and a second mover 22. The second mover 22 is slidably mounted on the second stator 11. stator 21, so as to move along the length direction of the second stator 21; the first stator 11 and the second stator 21 are both mounted on the base 3, which serves to connect the first stator 11 and the second stator 21, and the sliding component 4 is respectively connected to the first mover 12 and the second mover 22, so that under the action of the first mover 12, the sliding component 4 drives the second mover 22 to slide linearly in the vertical direction; the sliding component 4 is used to connect the load, and a constant magnetic force is generated between the second mover 22 and the second stator 21 to limit the sliding of the sliding component 4 when the linear motor 1 is in a power-off state.
[0039] It can be known that the first stator 11 of the linear motor 1 has a built-in coil, and the first mover 12 of the linear motor 1 has a built-in magnet. Therefore, when the linear motor 1 is energized, the first stator 11 generates a magnetic field, and the magnetic field interacts with the magnetic field of the first mover 12 to generate an electromagnetic force to push the first mover 12 to move linearly on the first stator 11, thereby driving the sliding component 4 and the second mover 22 to move linearly in the vertical direction. When the linear motor 1 is suddenly powered off, due to the constant magnetic force generated between the second mover 22 and the second stator 21 in the magnetic spring 2, the gravity of the sliding component 4 and the load thereon can be offset or balanced, thereby preventing the sliding component 4 from moving vertically downward, and then limiting the sliding component 4 to the current position, for example, fixing the sliding component 4 in the middle of the stroke or other positions to prevent the sliding component 4 from falling vertically downward and colliding with components such as the base 3 or other equipment near the module, thereby avoiding damage to the module.
[0040] In addition, there is an air gap between the first mover 12 and the first stator 11, so that when the first mover 12 moves along the length direction of the first stator 11, the first mover 12 does not contact the first stator 11, thereby avoiding friction loss of the first mover 12 during movement of the first stator 11, which helps to extend the service life of the linear motor 1.
[0041] In this embodiment, the first mover 12 can move within the length of the first stator 11. Compared to the method of adding a tension spring, this embodiment expands the travel range of the first mover 12. In addition, compared to adding a brake component such as a clamp to the sliding member 4, this embodiment provides a magnetic spring 2 beside the linear motor 1, which has a simpler structure, is more convenient to use, and reduces costs.
[0042] The second stator 21 is a magnetic spring stator, the second mover 22 is a magnetic spring mover, and the linear motor 1 can be a rod-shaped motor.
[0043] like Figure 2 and Figure 4 As shown, in some embodiments, the magnetic spring 2 further includes two guide members 23, each of which is sleeved on the second stator 21 and fixed to the second mover 22. The guide members 23 are located between the second stator 21 and the second mover 22 to separate the second stator 21 and the second mover 22, effectively preventing the second mover 22 from rubbing against the second stator 21 during sliding, effectively preventing the second mover 22 from sticking to the second stator 21, and thus preventing the sliding of the sliding component 4. Furthermore, the two guide members 23 are spaced apart in the vertical direction to guide the second mover 22 to move in the vertical direction, thereby guiding the sliding component 4 to move in the vertical direction. In the magnetic spring 2 of this embodiment, two guide members 23 arranged in the vertical direction are provided between the second stator 21 and the second mover 22, and both guide members 23 are fixed within the second mover 22. This not only makes the second mover 22 and the second stator 21 coaxial, but also provides the magnetic spring 2 with a linear guide function, eliminating the need for a separate guide mechanism in the Z-axis linear motor module 100. Exemplarily, the guide member 23 is a guide sleeve, which is sleeved on the outer circumference of the second stator 21 and fixed on the inner circumference of the second mover 22 .
[0044] like Figure 3 and Figure 4 As shown, in some embodiments, the second stator 21 includes a shaft 211 and a permanent magnet 212. The shaft 211 extends in a vertical direction (i.e., the length direction of the second mover 22). The permanent magnet 212 is disposed within the shaft 211. The permanent magnet 212 within the second stator 21 generates a constant magnetic force that balances or offsets the gravity of the sliding member 4 and the load thereon when power is off, thereby limiting the sliding of the sliding member 4. The second mover 22 has an axial hole 221 through which the shaft 211 passes, with a gap between the shaft 211 and the inner wall of the axial hole 221. The second mover 22 is slidably mounted on the shaft 211 and moves vertically under the drive of the sliding member 4. Each guide member 23 is mounted on the shaft 211 and is located between the shaft 211 and the second mover 22 to separate the shaft 211 and the second mover 22, effectively preventing the second mover 22 from rubbing against the outer circumferential surface of the shaft 211 during sliding. For example, the permanent magnet 212 may be made of magnetic steel, and the second mover 22 may be a sleeve, such as a sleeve made of carbon steel.
[0045] like Figure 4As shown, in some embodiments, the axial hole 221 of the second mover 22 includes a first hole segment 221a and two second hole segments 221b. In the vertical direction (i.e., the length direction of the second mover 22), the two second hole segments 221b are respectively located on either side of the first hole segment 221a. The two guide members 23 correspond one-to-one with the two second hole segments 221b. The guide members 23 are located in the second hole segments 221b, and the second hole segments 221b can accommodate the guide members 23. In some embodiments, the aperture of the first hole segment 221a is smaller than the aperture of the second hole segment 221b, so that a stepped end surface 221c is formed at the intersection of the first hole segment 221a and the second hole segment 221b. The guide members 23 can press against the stepped end surface 221c in the vertical direction, thereby improving the installation stability of the guide members 23.
[0046] like Figure 4 As shown, in some embodiments, a fixing layer (not shown) is provided in the shaft body 211. The fixing layer is located between the permanent magnet 212 and the shaft body 211. The permanent magnet 212 is fixed in the shaft body 211 by the fixing layer to improve the installation stability of the permanent magnet 212. In some embodiments, the fixing layer can be a fixing glue, such as a fixing glue formed by filling the shaft body 211 with epoxy resin.
[0047] like Figure 1 and Figure 2 As shown, in some embodiments, the base 3 includes two connecting seats 31, the two connecting seats 31 are spaced apart in the vertical direction, and the first stator 11 and the second stator 21 are spaced apart in the first horizontal direction. Specifically, the two connecting seats 31 are parallel to each other, and the first stator 11 and the second stator 21 are parallel to each other. In the vertical direction, the two ends of the first stator 11 are respectively mounted on the two connecting seats 31, and the two ends of the second stator 21 are respectively mounted on the two connecting seats 31, so that the first stator 11 and the second stator 21 are both mounted on the base 3. Exemplarily, the first stator 11 and the second stator 21 are both columnar.
[0048] like Figure 2 As shown, in some embodiments, the first stator 11 has a first assembly hole 111 and a second assembly hole (not shown) at both ends, each connecting seat 31 has a first mounting hole 311, and the Z-axis linear motor module 100 further includes a first fixing member 5 and a second fixing member 6. The first fixing member 5 is provided through the first assembly hole 111 and the first mounting hole 311 of one of the connecting seats 31, and the second fixing member 6 is provided through the second assembly hole and the first mounting hole 311 of the other connecting seat 31, so as to respectively mount the two ends of the first stator 11 on the two connecting seats 31. Exemplarily, the first fixing member 5 and the second fixing member 6 are both screws.
[0049] like Figure 2 and Figure 4As shown, in some embodiments, a third assembly hole 213 and a fourth assembly hole 214 are respectively provided at both ends of the second stator 21, and each connecting seat 31 is further provided with a second mounting hole 312. The Z-axis linear motor module 100 further includes a third fixing member 7 and a fourth fixing member 8. The third fixing member 7 is provided through and connected to the third assembly hole 213 and the second mounting hole 312 of one of the connecting seats 31, and the fourth fixing member 8 is provided through and connected to the fourth assembly hole 214 and the second mounting hole 312 of the other connecting seat 31, so as to respectively mount the two ends of the second stator 21 on the two connecting seats 31. Exemplarily, the third fixing member 7 and the fourth fixing member 8 are both screws, and in the same connecting seat 31, the first mounting hole 311 and the second mounting hole 312 are spaced apart along the first horizontal direction.
[0050] like Figure 4 As shown, in an embodiment in which the second stator 21 includes a shaft 211 and a permanent magnet 212 , the second stator 21 also includes a first end 215 and a second end 216 respectively connected to both ends of the shaft 211 , the third assembly hole 213 is located at the first end 215 , and the fourth assembly hole 214 is located at the second end 216 .
[0051] Combine Figure 2 In some application scenarios, the Z-axis linear motor module 100 can be set on an external machine (not shown) to prevent the linear motor 1 in the Z-axis linear motor module 100 from rotating around the magnetic spring 2 set on one side of the linear motor 1. Specifically, the external machine is provided with two mounting positions, and the two connecting seats 31 are fixedly mounted on the two mounting positions respectively to fix the Z-axis linear motor module 100 on the external machine. It should be understood that the external machine is not part of the Z-axis linear motor module 100. Specifically, the external machine includes a frame and an XY motion platform. The Z-axis linear motor module 100 can be installed on the X-axis platform or the Y-axis platform, or on the frame. The combination of the Z-axis linear motor module 100 and the XY motion platform can realize XYZ three-axis movement. Furthermore, each connecting seat 31 is also provided with a third mounting hole (not shown in the figure). In the same connecting seat 31, the third mounting hole is located between the first mounting hole 311 and the second mounting hole 312. At the same time, hole positions corresponding to the first mounting hole 311 and the second mounting hole 312 are respectively set on the two mounting positions, so as to facilitate the determination of the installation positions of the two connecting seats 31 respectively.
[0052] like Figure 2As shown, in some embodiments, the linear motor 1 further includes a ring encoder 13, which is mounted on the first stator 11 and fixed to the first mover 12. The ring encoder 13 is used to detect and provide feedback on the current position of the first mover 12. In specific applications, the ring encoder 13 is a ring magnetic induction encoder that uses magnetic field induction to provide feedback on the position of the first mover 12, thereby achieving closed-loop control. The ring encoder 13 of this embodiment provides closed-loop position feedback, achieving high-precision position information feedback, and helping to improve the operational stability of the Z-axis linear motor module 100.
[0053] In some embodiments, the ring encoder 13 can provide feedback to a back-end controller, and the first stator 11 is connected to an external driver (not shown) to control the motion parameters of the linear motor 1. It should be understood that the external driver is not part of the Z-axis linear motor module 100.
[0054] like Figure 2 and Figure 6 As shown, in some embodiments, the sliding component 4 includes a first slide 41 and a second slide 42, and the first slide 41 and the second slide 42 are connected along the second horizontal direction and enclosed to form a first through hole 43 and a second through hole 44. The first mover 12 is installed in the first through hole 43, and the second mover 22 is installed in the second through hole 44, so that the sliding component 4 is respectively connected to the first mover 12 and the second mover 22, and the second horizontal direction is orthogonal to the first horizontal direction. The first slide 41 or the second slide 42 is used to connect the load.
[0055] like Figure 2 and Figure 5 As shown, in some embodiments, the first slide 41 is provided with a plurality of first fixing holes 411, which are arranged in a matrix, and the second slide 42 is provided with a plurality of second fixing holes 421, which are arranged in a matrix. The plurality of first fixing holes 411 and the plurality of second fixing holes 421 correspond one-to-one. The sliding component 4 also includes a plurality of fifth fixing members 45, which correspond one-to-one with the plurality of first fixing holes 411. The fifth fixing members 45 are provided to connect a portion of the first fixing holes 411 and the second fixing holes 421 to achieve the connection between the first slide 41 and the second slide 42, and the other portion of the second fixing holes 421 is fixedly connected to the hole position of the load. Exemplarily, the fifth fixing members 45 are screws.
[0056] like Figure 2As shown, in some embodiments, the number of magnetic springs 2 is two, and the two magnetic springs 2 have the same structure. Along the first horizontal direction, the two magnetic springs 2 are respectively located on both sides of the linear motor 1, which can improve the compactness of the structure. In this embodiment, two magnetic springs 2 are provided. Compared with providing one magnetic spring 2, a greater constant magnetic force can be provided to adapt to heavier loads. In addition, compared with the method of using a device that adds a tension spring, it can adapt to heavier loads. In this embodiment, magnetic springs 2 are provided on both sides of the linear motor 1. Compared with providing a magnetic spring 2 on one side of the linear motor 1, the linear motor 1 can be prevented from rotating around the magnetic spring 2 on one side, thereby improving the structural stability of the Z-axis linear motor module 100.
[0057] The above description is only a preferred embodiment of the present application and does not limit the patent scope of the present application. All equivalent structural transformations made based on the contents of the present application specification and drawings, or direct / indirect application in other related technical fields, are included in the patent protection scope of the present application.
Claims
1. A Z-axis linear motor module, characterized in that: include: A linear motor, comprising a first stator and a first mover, wherein the first mover is slidably sleeved on the first stator, and an air gap exists between the first mover and the first stator; a magnetic spring, the magnetic spring and the linear motor being spaced apart along a first horizontal direction, the magnetic spring comprising a second stator and a second mover, the second mover being slidably sleeved on the second stator; a base, on which the first stator and the second stator are both mounted; a sliding component, wherein the sliding component is connected to the first mover and the second mover respectively, so that under the action of the first mover, the sliding component drives the second mover to slide linearly in a vertical direction; The sliding component is used to connect to a load, and a constant magnetic force is generated between the second mover and the second stator to limit the sliding of the sliding component when the linear motor is in a power-off state.
2. The Z-axis linear motor module according to claim 1, characterized in that: The magnetic spring also includes two guide members, each of which is sleeved on the second stator and fixed to the second stator, and is located between the second stator and the second mover. The two guide members are spaced apart in the vertical direction to guide the second mover to move in the vertical direction.
3. The Z-axis linear motor module according to claim 2, characterized in that: The second stator includes a shaft and a permanent magnet, wherein the shaft extends in a vertical direction and the permanent magnet is disposed in the shaft; The second mover is provided with an axial hole, the shaft body passes through the axial hole, and a gap exists between the shaft body and the inner wall of the axial hole; each of the guide members is sleeved on the shaft body and is located between the shaft body and the second mover.
4. The Z-axis linear motor module according to claim 3, characterized in that: The axial hole includes a first hole segment and two second hole segments. In the vertical direction, the two second hole segments are respectively located on both sides of the first hole segment; the two guide members correspond one-to-one to the two second hole segments, and the guide members are located in the second hole segments.
5. The Z-axis linear motor module according to claim 1, characterized in that: The base includes two connecting seats, the two connecting seats are spaced apart in the vertical direction, and the first stator and the second stator are spaced apart in the first horizontal direction; The two ends of the first stator are respectively mounted on the two connecting seats, and the two ends of the second stator are respectively mounted on the two connecting seats.
6. The Z-axis linear motor module according to claim 5, characterized in that: The two ends of the first stator are respectively provided with a first assembly hole and a second assembly hole, and each connecting seat is provided with a first mounting hole. The Z-axis linear motor module also includes a first fixing member and a second fixing member. The first fixing member is connected to the first assembly hole and the first mounting hole of one of the connecting seats, and the second fixing member is connected to the second assembly hole and the first mounting hole of the other connecting seat, so that the two ends of the first stator are respectively installed on the two connecting seats.
7. The Z-axis linear motor module according to claim 5, characterized in that: The two ends of the second stator are respectively provided with a third assembly hole and a fourth assembly hole, each of the connecting seats is provided with a second mounting hole, and the Z-axis linear motor module includes a third fixing member and a fourth fixing member, the third fixing member is passed through and connected to the third assembly hole and the second mounting hole of one of the connecting seats, and the fourth fixing member is passed through and connected to the fourth assembly hole and the second mounting hole of the other connecting seat, so that the two ends of the second stator are respectively installed on the two connecting seats.
8. The Z-axis linear motor module according to claim 1, characterized in that: The linear motor further includes an annular encoder, which is sleeved on the first stator and fixed to the first mover. The annular encoder is used to detect and provide feedback on the current position of the first mover.
9. The Z-axis linear motor module according to claim 1, characterized in that: The sliding component includes a first slide and a second slide, wherein the first slide and the second slide are connected along a second horizontal direction and enclose a first through hole and a second through hole; The first mover is installed in the first through hole, the second mover is installed in the second through hole, the second horizontal direction is orthogonal to the first horizontal direction, and the first slide or the second slide is used to connect a load.
10. The Z-axis linear motor module according to any one of claims 1 to 9, characterized in that: There are two magnetic springs, and along the first horizontal direction, the two magnetic springs are respectively located on both sides of the linear motor.