Apparatus for manufacturing display device

Abstract

An apparatus for manufacturing a display device includes: a mask assembly; and a magnetic force portion facing the mask assembly, where the magnetic force portion applies a magnetic force toward the mask assembly. The mask assembly includes: a mask frame having a plurality of first openings defined therethrough and a second opening defined in a first surface thereof, where the second opening is arranged between two adjacent first openings of the plurality of first openings; a mask film disposed on a second surface of the mask frame opposite to the first surface and overlapping with at least one of the plurality of first openings; and a support member on the first surface of the mask frame and including a magnetic body, in which the support member is disposed on a surface of the mask frame defining the first opening or a surface of the mask frame defining the second opening.

Description

[0001] This application claims priority to and all benefits derived from Korean Patent Application No. 10-2024-0017624, filed on February 5, 2024, the entire contents of which are incorporated herein by reference in their entirety. Technical Field

[0002] One or more embodiments relate to a method and apparatus for manufacturing a display device, wherein the display device may be a display device including a light emitting diode. Background Art

[0003] Display devices visually display data. Display devices can provide images using light-emitting diodes. The uses and structures of display devices have diversified, with structures capable of bending from a flat state to a certain angle being developed, and various designs for improving the quality of display devices have been attempted.

[0004] A display device may include a plurality of pixels arranged in a pattern to produce an image. In such a display device, several layers including an emissive layer may be included in the plurality of pixels arranged in a pattern. These layers may be arranged in different patterns on a substrate depending on their type. Utility Model Content

[0005] Each layer of the display device can be formed by depositing a deposition material using a mask having openings corresponding to the pattern to be formed above the substrate. In order to deposit the deposition material in a more precise pattern, it is desirable to bring the substrate and the mask into close contact with each other. In this regard, the substrate and the mask can be placed between a magnetic portion capable of applying a magnetic force and a metal support member, and a magnetic force can be applied to the metal support member using the magnetic portion, thereby pressing the substrate and the mask into close contact with each other. However, in this case, various problems may arise during the deposition process, including the accumulation of deposition material on the metal support member.

[0006] According to one or more embodiments, an apparatus for manufacturing a display device includes: a mask assembly; and a magnetic portion facing the mask assembly, wherein the magnetic portion applies a magnetic force toward the mask assembly, wherein the mask assembly includes: a mask frame having a plurality of first openings defined therethrough and a second opening defined in a first surface thereof, wherein the second opening is arranged between two adjacent first openings among the plurality of first openings; a mask film disposed on a second surface of the mask frame opposite to the first surface and overlapping with at least one of the plurality of first openings; and a supporting member disposed on the first surface of the mask frame and including a magnetic body, wherein the supporting member is disposed on at least one selected from a surface of the mask frame defining the first openings and a surface of the mask frame defining the second openings.

[0007] According to an embodiment, a depth of the second opening may be smaller than a thickness of the mask frame.

[0008] According to an embodiment, the support member may define a slot overlapping the second opening.

[0009] According to an embodiment, the width of the second opening may vary in a depth direction of the second opening.

[0010] According to an embodiment, the width of the second opening may be about half or greater than the distance between the two adjacent first openings.

[0011] According to an embodiment, the supporting member may completely fill the second opening.

[0012] According to an embodiment, a third opening may be defined in the first surface of the mask frame, wherein the third opening may be arranged outside the plurality of first openings, and a portion of the support member may be arranged in the third opening.

[0013] According to an embodiment, the second opening may be provided in plural, and the plurality of second openings may be separated from each other and arranged between the two adjacent first openings among the plurality of first openings.

[0014] According to an embodiment, in a plan view, the second opening may at least partially surround one of the plurality of first openings.

[0015] According to one embodiment, the thickness of the support member may be about 10 angstroms or greater.

[0016] According to one or more embodiments, a method for manufacturing a display device includes: placing a workpiece between a magnetic part and a mask assembly in an apparatus for manufacturing a display device; and bringing the workpiece and the mask assembly into close contact with each other by applying a magnetic force to the mask assembly via the magnetic part, wherein the mask assembly includes: a mask frame having a plurality of first openings defined therethrough and a second opening defined in a first surface thereof, wherein the second opening is arranged between two adjacent first openings among the plurality of first openings; a mask film provided on a second surface of the mask frame opposite to the first surface and overlapping with at least one of the plurality of first openings; and a support member provided on the first surface of the mask frame and including a magnetic body, wherein the support member is provided on at least one selected from a surface of the mask frame defining the first openings and a surface of the mask frame defining the second openings.

[0017] According to an embodiment, a depth of the second opening may be smaller than a thickness of the mask frame.

[0018] According to an embodiment, the support member may define a slot overlapping the second opening.

[0019] According to an embodiment, the width of the second opening may vary in a depth direction of the second opening.

[0020] According to an embodiment, the width of the second opening may be about half or greater than the distance between the two adjacent first openings.

[0021] According to an embodiment, the supporting member may completely fill the second opening.

[0022] According to an embodiment, a third opening may be defined in the first surface of the mask frame, wherein the third opening may be arranged outside the plurality of first openings, and a portion of the support member may be arranged in the third opening.

[0023] According to an embodiment, the second opening may be provided in plurality, wherein the plurality of second openings may be separated from each other and arranged between the two adjacent first openings among the plurality of first openings.

[0024] According to an embodiment, in a plan view, the second opening may at least partially surround one of the plurality of first openings.

[0025] According to one embodiment, the thickness of the support member may be about 10 angstroms or greater. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The above and other features of certain embodiments of the present disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0027] Figure 1A and Figure 1B is a cross-sectional view of an apparatus for manufacturing a display device according to an embodiment;

[0028] Figure 2 is a plan view of a mask frame according to an embodiment;

[0029] Figure 3A is a plan view of a mask assembly according to an embodiment;

[0030] Figure 3B It is along Figure 3A A cross-sectional view of the mask assembly taken along line III-III';

[0031] Figure 3C It shows Figure 3B an enlarged cross-sectional view of a portion of the mask assembly;

[0032] Figure 4A is a plan view of a mask assembly according to an embodiment;

[0033] Figure 4B It is along Figure 4A A cross-sectional view of the mask assembly taken along line IV-IV';

[0034] Figure 5 is a bottom view of a mask assembly according to one embodiment;

[0035] Figure 6 is a bottom view of a mask assembly according to another embodiment;

[0036] Figure 7 is a bottom view of a mask assembly according to yet another embodiment;

[0037] Figure 8 is a cross-sectional view of a portion of a mask assembly according to an embodiment;

[0038] Figure 9 is a cross-sectional view of a portion of a mask assembly according to another embodiment;

[0039] Figure 10 is a cross-sectional view of a portion of a mask assembly according to yet another embodiment;

[0040] Figure 11 is a cross-sectional view of a portion of a mask assembly according to yet another embodiment;

[0041] Figure 12 is a cross-sectional view of a portion of a mask assembly according to yet another embodiment;

[0042] 13A to 13E is a cross-sectional view illustrating operations in a process of manufacturing a mask assembly according to an embodiment;

[0043] Figure 14 is a plan view of a display device manufactured by using an apparatus for manufacturing a display device according to an embodiment; and

[0044] Figure 15 It is along Figure 14 1 is a cross-sectional view of the display device taken along line XV-XV'. DETAILED DESCRIPTION

[0045] The present disclosure will now be more fully described with reference to the accompanying drawings showing various embodiments. However, the present disclosure may be implemented in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure will be thorough and complete and will fully convey the scope of the present disclosure to those skilled in the art.

[0046] One or more embodiments will be described in more detail below with reference to the accompanying drawings. Regardless of the figure number, those elements that are identical or corresponding to each other are represented by the same reference numerals, and any repeated detailed description thereof may be omitted or simplified.

[0047] It will be understood that although the terms "first," "second," "third," etc. may be used herein to describe various elements, components, regions, layers, and / or sections, these elements, components, regions, layers, and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, or section from another element, component, region, layer, or section. Thus, a "first element," "component," "region," "layer," or "section" discussed below could be referred to as a second element, component, region, layer, or section without departing from the teachings herein.

[0048] The terms used herein are only used to describe the purpose of specific embodiments and are not intended to be restrictive. As used herein, "one", "the" and "at least one" do not represent quantitative limitations, and are intended to include both the singular and the plural, unless the context clearly states otherwise. Therefore, in the claims, the reference to "one" element followed by the reference to "the" element includes one element and multiple elements. For example, "element" has the same meaning as "at least one element" unless the context clearly states otherwise. "At least one" should not be interpreted as limiting "one" or "one". "Or" refers to "and / or". As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Throughout this disclosure, the expression "at least one of a, b and c" or "at least one selected from a, b and c" represents only a, only b, only c, a and b both, a and c both, b and c both, a, b and c all or its variations.

[0049] It will be further understood that the terms “comprise” or “comprising” when used in this specification expressly specify the presence of stated features, regions, integers, steps, operations, elements and / or parts, but do not preclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, parts and / or groups thereof.

[0050] It will be further understood that when a layer, region or element is referred to as being on, over, under or under another layer, region or element, it can be directly or indirectly on or under the other layer, region or element. That is, for example, intervening layers, regions or elements may be present.

[0051] For the convenience of description, the size of the elements in the drawings may be enlarged or reduced. For example, for the convenience of description, the size and thickness of the elements in the drawings are arbitrarily shown, and the following embodiments are not limited thereto.

[0052] The first direction DR1, the second direction DR2, and the third direction DR3 are not limited to the three directions of the rectangular coordinate system and can be interpreted in a broader sense. For example, the first direction DR1, the second direction DR2, and the third direction DR3 can be perpendicular to each other, or can represent different directions that are not perpendicular to each other.

[0053] When an embodiment can be implemented differently, a certain process order can be performed in a different order than described. For example, two processes described successively can be performed substantially simultaneously or in a reverse order to the described order.

[0054] In addition, relative terms such as "lower" or "bottom" and "upper" or "top" may be used herein to describe the relationship of one element to another element illustrated in the accompanying drawings. It will be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation depicted in the accompanying drawings. For example, if the device in one of the accompanying drawings is turned over, the element described as being on the "lower" side of the other elements would then be oriented on the "upper" side of the other elements. Thus, the term "lower" can encompass both "lower" and "upper" orientations, depending on the particular orientation of the accompanying drawings. Similarly, if the device in one of the accompanying drawings is turned over, the element described as being "below" or "beneath" the other elements would then be oriented "above" the other elements. Thus, the term "lower" or "beneath" can encompass both "lower" and "upper" orientations.

[0055] As used herein, "about" or "approximately" is inclusive of the stated value and means within an acceptable range of deviation of the particular value determined by one of ordinary skill in the art taking into account the measurement in question and the errors associated with the measurement of the particular quantity (i.e., the limitations of the measurement system). For example, "about" can mean within one or more standard deviations, or within ±30%, 20%, 10%, or 5% of the stated value.

[0056] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and this disclosure, and will not be interpreted in an idealized or overly formal sense unless expressly defined herein.

[0057] Embodiments are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments. As such, variations in the shapes of the illustrations due to, for example, manufacturing techniques and / or tolerances are anticipated. Therefore, the embodiments described herein should not be construed as limited to the specific shapes of the regions as illustrated herein, but rather include shape deviations that result, for example, from manufacturing. For example, a region illustrated or described as flat may typically have rough and / or nonlinear features. Furthermore, illustrated sharp angles may be rounded. Therefore, the regions illustrated in the drawings are schematic in nature, and their shapes are not intended to illustrate the precise shape of the regions and are not intended to limit the scope of the claims.

[0058] Figure 1A and Figure 1B is a cross-sectional view of an apparatus 100 for manufacturing a display device according to an embodiment.

[0059] refer to Figure 1A and Figure 1B , an embodiment of an apparatus 100 for manufacturing a display device may include a chamber 110 , a first support 120 , a second support 130 , a deposition source 140 , a mask assembly 150 , a magnetic portion 160 , a visual portion 170 , and a pressure controller 180 . Figure 1A The embodiment is shown in a state in which the mask assembly 150 , the workpiece D, and the magnetic part 160 are separated from each other. Figure 1B The embodiment is shown in a state where the mask assembly 150, the workpiece D, and the magnetic portion 160 are close to each other and in close contact with each other. In the present disclosure, the workpiece D may refer to an object processed by an apparatus for manufacturing a display device, and may also refer to a display substrate D of a display device (refer to FIG. Figure 15 ). Hereinafter, for the convenience of description, the term "workpiece D" will be used to describe the apparatus 100, and the term "display substrate D" will be used to describe the display device 20 (refer to Figure 14 ), but both can refer to the same object.

[0060] The chamber 110 may include a space defined therein, and a portion thereof may be open. A gate valve 110-1 may be installed in the open portion of the chamber 110. In one embodiment, the open portion of the chamber 110 may be opened or closed based on the operation of the gate valve 110-1.

[0061] A first support member 120 may be provided in the chamber 110. The first support member 120 may allow the workpiece D to be placed thereon to support the workpiece D. In one embodiment, the first support member 120 may be in the form of a frame fixed inside the chamber 110. In another embodiment, the first support member 120 may be in the form of a shuttle member that is linearly movable in the chamber 110. In another embodiment, the first support member 120 may include an electrostatic chuck or an adhesive chuck disposed in the chamber 110 so as to be fixed to the chamber 110 or capable of being raised or lowered in the chamber 110. Hereinafter, for ease of description, an embodiment in which the first support member 120 is in the form of a frame fixed inside the chamber 110 will be mainly described.

[0062] The mask assembly 150 may be disposed in the chamber 110. The mask assembly 150 may be placed on the second support 130. In this case, the second support 130 may be disposed inside the chamber 110. The second support 130 may fine-tune the position of the mask assembly 150. In one embodiment, the second support 130 may include a separate drive or alignment unit for moving the mask assembly 150 in different directions. In another embodiment, the second support 130 may be in the form of a shuttle. In such an embodiment, the second support 130 may allow the mask assembly 150 to be placed thereon and may be capable of transporting the mask assembly 150. In one embodiment, for example, the second support 130 may be moved out of the chamber 110 to allow the mask assembly 150 to be placed thereon, and then the chamber 110 may be accessed from outside the chamber 110.

[0063] In one embodiment, the first support member 120 and the second support member 130 may be integrally formed as a single, indivisible component. In such an embodiment, the first support member 120 and the second support member 130 may include movable shuttle members. In such an embodiment, the first support member 120 and the second support member 130 may include structures that secure the mask assembly 150 and the workpiece D to each other so that the workpiece D is positioned on the mask assembly 150, and may linearly move the workpiece D and the mask assembly 150 simultaneously.

[0064] Hereinafter, for convenience of description, an embodiment having a form in which the first support 120 and the second support 130 are different from each other and arranged at different positions and a form in which the first support 120 and the second support 130 are arranged inside the chamber 110 will be mainly described.

[0065] The deposition source 140 may be disposed in the chamber 110 so as to face the mask assembly 150. In one embodiment, a deposition material may be contained in the deposition source 140 and may be evaporated or sublimated by heating the deposition material. The deposition source 140 may be fixed inside the chamber 110 or may be arranged inside the chamber 110 to move linearly in one direction. Hereinafter, for ease of description, an embodiment in which the deposition source 140 is fixed inside the chamber 110 will be mainly described.

[0066] The mask assembly 150 may include a mask frame 151, a mask film 152, and a support member 153. The mask frame 151 may be provided with a first opening OP1 that overlaps with the mask film 152, that is, the first opening OP1 may be defined or formed through the mask frame 151 so as to overlap with the mask film 152. The mask frame 151 may also be provided with a second opening OP2 disposed between two adjacent first openings OP1. The mask film 152 may be provided with a plurality of holes 152-1 that define a deposition area of ​​the mask assembly 150. At least a portion (e.g., all) of the support member 153 may be disposed in the second opening OP2.

[0067] The magnetic portion 160 may be disposed in the chamber 110 so as to face the workpiece D. In one embodiment, the magnetic portion 160 may apply a magnetic force to the mask assembly 150 (e.g., the support member 153), thereby pressing the mask assembly 150 toward the workpiece D. In such an embodiment, the magnetic portion 160 may effectively prevent the mask film 152 from sagging and may also bring the mask film 152 into close contact with the workpiece D. In addition, the magnetic portion 160 may maintain a uniform distance between the mask film 152 and the workpiece D in the length direction of the mask film 152 (e.g., the second direction DR2 or the third direction DR3).

[0068] The vision section 170 may be installed at the chamber 110 and may capture images of the positions of the workpiece D and the mask assembly 150. In one embodiment, the vision section 170 may include a camera for capturing images of the workpiece D and the mask assembly 150. The positions of the workpiece D and the mask assembly 150 may be identified based on the images captured by the vision section 170, and based on the images, the first support 120 may fine-tune the position of the workpiece D, or the second support 130 may fine-tune the position of the mask assembly 150. Hereinafter, for ease of description, an embodiment in which the second support 130 fine-tunes the position of the mask assembly 150 so that the positions of the workpiece D and the mask assembly 150 are aligned with each other will be primarily described.

[0069] The pressure controller 180 may be connected to the chamber 110 to control the internal pressure of the chamber 110. In one embodiment, for example, the pressure controller 180 may adjust the internal pressure of the chamber 110 to a level that is the same as or similar to the level of atmospheric pressure. Alternatively, the pressure controller 180 may adjust the internal pressure of the chamber 110 to a level that is the same as or similar to the level of a vacuum state.

[0070] The pressure controller 180 may include a connection pipe 181 connected to the chamber 110 and a pump 182 installed at the connection pipe 181. In such an embodiment, according to the operation of the pump 182, external air may flow in through the connection pipe 181, or the gas inside the chamber 110 may be guided to the outside through the connection pipe 181.

[0071] Such an apparatus 100 may be used to manufacture a display device described below. In one embodiment, when the pressure controller 180 adjusts the internal pressure of the chamber 110 to a level that is the same as or similar to that of atmospheric pressure, the gate valve 110 - 1 may operate to open the open portion of the chamber 110 .

[0072] Subsequently, the workpiece D can be loaded into the chamber 110 from outside the chamber 110. In this process, the workpiece D can be loaded into the chamber 110 in various ways. In one embodiment, for example, the workpiece D can be loaded into the chamber 110 from outside the chamber 110 by a robot arm disposed outside the chamber 110. In another embodiment in which the first support 120 is in the form of a shuttle, after the first support 120 is brought out of the chamber 110 from inside the chamber 110, the workpiece D can be placed on the first support 120 by a separate robot arm disposed outside the chamber 110, and the first support 120 can be loaded into the chamber 110 from outside the chamber 110. Hereinafter, for ease of description, the embodiment in which the workpiece D is loaded into the chamber 110 from outside the chamber 110 by a robot arm disposed outside the chamber 110 will be mainly described.

[0073] In one embodiment, as described above, the mask assembly 150 may be disposed inside the chamber 110. In another embodiment, the mask assembly 150 may be loaded into the chamber 110 from outside the chamber 110 in the same or similar manner as the workpiece D. Hereinafter, for ease of description, an embodiment will be mainly described in which only the workpiece D is loaded into the chamber 110 from outside the chamber 110 and the mask assembly 150 is disposed inside the chamber 110.

[0074] In another embodiment, the first support 120 and the second support 130 may be in the form of shuttles, and the workpiece D and the mask assembly 150 may be fixed thereto and then may be loaded into the chamber 110 from outside the chamber 110 .

[0075] When the workpiece D is loaded into the chamber 110, the workpiece D may be positioned on the first support 120. In one embodiment, the vision portion 170 may capture an image of the position of the workpiece D and the mask assembly 150. In such an embodiment, the vision portion 170 may capture an image of the first alignment mark of the workpiece D and the second alignment mark of the mask assembly 150.

[0076] Based on the captured images of the first and second alignment marks, the positions of the workpiece D and the mask assembly 150 can be identified. In one embodiment, the apparatus 100 may include a separate controller to identify the positions of the workpiece D and the mask assembly 150. Once the positions of the workpiece D and the mask assembly 150 are identified, the second support member 130 may fine-tune the position of the mask assembly 150.

[0077] Subsequently, the deposition source 140 may operate to spray the deposition material toward the mask assembly 150 (e.g., in the first direction DR1), and the deposition material passing through the plurality of holes 152 - 1 in the mask film 152 may be deposited on the workpiece D. In one embodiment, the pump 182 may suck gas inside the chamber 110 and exhaust the gas to the outside, thereby maintaining the internal pressure of the chamber 110 at a level that is the same as or similar to that of a vacuum state.

[0078] The deposition material may pass through the hole 152 - 1 in the mask film 152 and be deposited on the workpiece D. The hole 152 - 1 in the mask film 152 may correspond to a designed deposition region of the workpiece D and thus may provide a deposition region that is the same as or similar to the designed deposition region.

[0079] In one embodiment, the above operation may be repeatedly performed on a plurality of workpieces D. In such an embodiment, when the number of depositions on the plurality of workpieces D becomes the same as a preset number of depositions, the apparatus 100 may stop operating and the mask assembly 150 may be withdrawn from the chamber 110. Subsequently, a new mask assembly 150 may be loaded into the chamber 110 to repeat the above operation.

[0080] Through the above process, the apparatus 100 can allow deposition material to be deposited on an area having a shape identical or similar to that designed on the workpiece D. In addition, the apparatus 100 can allow deposition material to be deposited in a precise pattern, and thus can allow manufacture of a display device capable of precisely realizing images.

[0081] Figure 2 is a plan view of a mask frame 151 according to an embodiment.

[0082] refer to Figure 2In one embodiment, the mask frame 151 may be provided with a plurality of first openings OP1 through which the deposition material described above can pass. The first openings OP1 may be spaced apart from each other in a plan view or when viewed in the first direction DR1. The first openings OP1 may be arranged side by side in one direction. In one embodiment, for example, the first openings OP1 may be arranged side by side in the second direction DR2 or the third direction DR3.

[0083] The mask frame 151 may include a protrusion 151-P arranged on its periphery. The protrusion 151-P of the mask frame 151 may be provided in plurality, and the plurality of protrusions 151-P may be arranged along the periphery of the mask frame 151. In one embodiment, the protrusions 151-P may be arranged symmetrically with respect to the center of the mask frame 151. In one embodiment, the protrusions 151-P may be arranged in pairs. In one embodiment, the protrusions 151-P may have a substantially quadrilateral shape and may include an opening. In one embodiment, the protrusions 151-P may be aligned with the second support member 130 described above (refer to FIG. 1 ). Figure 1A ) contacts or is coupled to the second support member 130 described above (reference Figure 1A ), and thus can be supported by the second support member 130 (reference Figure 1A )support.

[0084] although Figure 2 The embodiment in which the mask frame 151 has a substantially circular shape is shown, but one or more embodiments are not limited thereto. The mask frame 151 may have various shapes (such as a polygonal shape, an elliptical shape, or an atypical shape). In addition, although Figure 2 In the embodiment shown, each of the first openings OP1 has a substantially square shape, but one or more embodiments are not limited thereto. Similar to the mask frame 151, the first openings OP1 may have various shapes (such as a polygonal shape, an elliptical shape, or an atypical shape), and the shape and / or size of each first opening OP1 may be different from each other. Hereinafter, for ease of description, an embodiment will be mainly described in which the mask frame 151 has an overall circular shape and the first openings OP1 each have a square shape of the same size.

[0085] Figure 3A is a plan view of a mask assembly 150 according to one embodiment. Figure 3B It is along Figure 3A 1 is a cross-sectional view of the mask assembly 150 taken along line III-III'. Figure 3C It shows Figure 3B FIG. 1 is an enlarged cross-sectional view of a partial area of ​​the mask assembly 150 .

[0086] refer to Figures 3A to 3CHereinafter, one surface of the mask frame 151 facing a direction opposite to the first direction DR1 will be referred to as a first surface 151-1 of the mask frame 151, and the other surface of the mask frame 151 facing the first direction DR1 will be referred to as a second surface 151-2 of the mask frame 151. Accordingly, "disposed on the first surface 151-1 of the mask frame 151" may be understood as disposed on the first surface 151-1 of the mask frame 151 so as to face a direction opposite to the first direction DR1. Similarly, "disposed on the second surface 151-2 of the mask frame 151" may be understood as disposed on the second surface 151-2 of the mask frame 151 so as to face the first direction DR1.

[0087] The mask film 152 may be disposed on the second surface 151-2 of the mask frame 151. Figure 3A As shown in , the mask film 152 can be provided in plurality, and the plurality of mask films 152 can overlap with the first opening OP1 respectively. In one embodiment, each mask film 152 can be separated from another. In one embodiment, the shape of the mask film 152 can be similar to the shape of the corresponding first opening OP1, and the size of the mask film 152 can be larger than the size of the corresponding first opening OP1. In one embodiment, for example, the first opening OP1 and the mask film 152 can have a substantially square shape, and the size of the mask film 152 can be larger than the size of the first opening OP1. Accordingly, the mask film 152 can completely cover the first opening OP1. As described above, similar to the shape and size of the first opening OP1, the shape and size of each mask film 152 can also be changed in various ways.

[0088] The mask film 152 may be provided with a hole 152 - 1 overlapping the first opening OP1 . In one embodiment, one mask film 152 may include a plurality of holes 152 - 1 , and the plurality of holes 152 - 1 may overlap with one first opening OP1 .

[0089] like Figure 3B As shown in FIG, a first opening OP1 in the mask frame 151 may be defined or formed through the mask frame 151. Similarly, a hole 152-1 in the mask film 152 may be defined or formed through the mask film 152. When the deposition material described above is sprayed, the deposition material may pass through the mask frame 151 and the mask film 152 through the first opening OP1 and the hole 152-1. Accordingly, the hole 152-1 in the mask film 152 may define the deposition area described above.

[0090] In one embodiment, if Figure 3BAs shown in FIG, the hole 152-1 in the mask film 152 may have a constant width in the first direction DR1 (or a length in the second direction DR2), but one or more embodiments are not limited thereto. In another embodiment, the width of the hole 152-1 in the mask film 152 (or a length in the second direction DR2) may vary in the first direction DR1. In other words, Figure 3B Unlike shown in FIG, a surface of the mask film 152 defining each hole 152 - 1 may not be parallel to the first direction DR1 .

[0091] In one embodiment, if Figure 3B As shown in FIG, the first opening OP1 in the mask frame 151 may have a constant width (or length in the second direction DR2), but one or more embodiments are not limited thereto. In another embodiment, the width (or length in the second direction DR2) of the first opening OP1 in the mask frame 151 may vary in the first direction DR1. In other words, Figure 3B Unlike shown in FIG, a surface of the mask frame 151 defining each first opening OP1 may not be parallel to the first direction DR1.

[0092] The second opening OP2 in the mask frame 151 may be arranged in the first surface 151-1 of the mask frame 151. In one embodiment, the second opening OP2 may be arranged between two first openings OP1 adjacent to each other. In one embodiment, for example, the second opening OP2 may not be arranged in Figure 3A In one embodiment, for example, the second opening OP2 may not be arranged on the second direction DR2 side of the first opening OP1 that is outermost in the second direction DR2 among the first openings OP1 that have the same position relative to the third direction DR3 (i.e., are arranged in a row on the second direction DR2). Alternatively, the second opening OP2 may not be arranged on the third direction DR3 side of the first opening OP1 that is outermost in the third direction DR3 among the first openings OP1 that have the same position relative to the second direction DR2 (i.e., are arranged in a row on the third direction DR3). Such a feature may be Figure 3B Seen in Figure 3B It is along Figure 3A For example, referring to the cross-sectional view taken along line III-III'. Figure 3B , it can be seen that the second opening OP2 is not arranged on each of the left side (or the side opposite to the second direction DR2) of the first opening OP1 located on the left side (or the side opposite to the second direction DR2) and the right side (or the side on the second direction DR2) of the first opening OP1 located on the right side (or the side on the second direction DR2).

[0093] In one embodiment, the second openings OP2 may be defined or formed in the mask frame 101 in the form of a recess or groove. The second openings OP2 may not be defined or formed completely through the mask frame 151. In other words, the depth OP2-d (or the length in the first direction DR1) of each of the second openings OP2 may be less than the thickness 151-d (or the length in the first direction DR1) of the mask frame 151. In one embodiment, the depth OP2-d of each second opening OP2 may be the same as each other.

[0094] although Figure 3B A total of four second openings OP2 are shown disposed between two adjacent first openings OP1, but one or more embodiments are not limited thereto. In another embodiment, N (where N is a natural number, N≠4) second openings OP2 may be disposed between two adjacent first openings OP1.

[0095] In one embodiment, the mask frame 151 and the mask film 152 may include silicon. In one embodiment, for example, the mask film 152 may include silicon oxide (SiO x ), silicon nitride (SiN x ) or silicon oxynitride (SiO x N y ), and the mask frame 151 may include a silicone polymer.

[0096] In one embodiment, if Figure 3C As shown in , the support member 153 may be disposed on the first surface 151-1 of the mask frame 151, and at least a portion thereof may be arranged in the second opening OP2. In one embodiment, a portion of the mask frame 151 may be open in a direction opposite to the first direction DR1 through the second opening OP2, and the support member 153 may be received in the second opening OP2. Because the second opening OP2 may be between adjacent first openings OP1, at least a portion of the support member 153 may be between adjacent first openings OP1. In one embodiment, the support member 153 may be arranged along the inner surface of the mask frame 151 that defines the second opening OP2. In one embodiment, the support member 153 may cover at least a portion (e.g., the entirety) of the inner surface of the mask frame 151 that defines the second opening OP2. In one embodiment, the support member 153 may not completely fill the second opening OP2. In one embodiment, the support member 153 may include a groove 153-1 that overlaps the second opening OP2. In one embodiment, one surface of the support member 153 (e.g., a surface facing a direction opposite to the first direction DR1) may be on the same plane as the first surface 151-1 of the mask frame 151. In one embodiment, the support member 153 may include a magnetic body. In one embodiment, the support member 153 may include metal.

[0097] Figure 4A is a plan view of a mask assembly 150 according to one embodiment. Figure 4B It is along Figure 4A 1 is a cross-sectional view of the mask assembly 150 taken along line IV-IV′.

[0098] In the following, for the convenience of description, Figure 4A and Figure 4B The embodiment shown in the reference Figure 3A and Figure 3B Any repeated detailed description of features that are identical will be described, and the differences will mainly be described.

[0099] refer to Figure 4A and Figure 4B , the mask film 152 may be integrally formed as a single integral and indivisible component and disposed on the second surface 151-2 of the mask frame 151. Accordingly, one mask film 152 may overlap with a plurality of first openings OP1. In one embodiment, the mask film 152 may overlap with all first openings OP1 in the mask frame 151. In one embodiment, the area between adjacent first openings OP1 may be completely covered by the mask film 152. In one embodiment, as Figure 4A , the outline of the mask film 152 may be shaped similarly to the outline of the first opening OP1 in a plan view. In another embodiment, the outline of the mask film 152 may be shaped similarly to the shape of the mask frame 151 in a plan view. For example, in another embodiment, the mask film 152 may have a substantially circular shape having a smaller diameter than that of the mask frame 151 in a plan view.

[0100] In one embodiment, if Figure 4B As shown in , the mask film 152 may overlap each of the second openings OP2 and the support member 153 disposed in the second openings OP2. In an embodiment, the mask film 152 may overlap all of the second openings OP2 and the support member 153 disposed in the second openings OP2.

[0101] Figure 5 is a bottom view of a mask assembly 150 according to one embodiment. Figure 6 is a bottom view of a mask assembly 150 according to another embodiment. Figure 7 is a bottom view of a mask assembly 150 according to yet another embodiment.

[0102] refer to Figure 5 In one embodiment, the second openings OP2 may be grooves extending in one direction. In such an embodiment, the second openings OP2 may be separated from each other in a direction different from the above direction (eg, a vertical direction).

[0103] In one embodiment, if Figure 5 As shown in FIG, in a plan view, the second openings OP2 may each extend in the third direction DR3 and may be separated from each other in the second direction DR2. In such an embodiment, the second opening OP2 may be arranged between two first openings OP1 separated from each other in the second direction DR2.

[0104] In another embodiment, the second openings OP2 may each extend in the second direction DR2 and may be separated from each other in the third direction DR3. In such an embodiment, the second opening OP2 may be disposed between two first openings OP1 separated from each other in the third direction DR3.

[0105] In another embodiment, some of the second openings OP2 may extend in the second direction DR2 and may be separated from each other in the third direction DR3 , and other second openings OP2 may extend in the third direction DR3 and may be separated from each other in the second direction DR2 .

[0106] In one embodiment, the second openings OP2 may be parallel to each other. In one embodiment, a support member 153 may be disposed in each second opening OP2.

[0107] refer to Figure 6 , with Figure 5 In a similar manner to the embodiment shown in FIG. 1 , the second opening OP2 may extend in one direction in a plan view. Figure 6 In the embodiment shown in FIG, the second opening OP2 may be a trench that further extends in one direction and passes through the plurality of first openings OP1 in the extending direction.

[0108] In one embodiment, the second openings OP2 may extend in the third direction DR3 and may be separated from each other in the second direction DR2. In such an embodiment, the second openings OP2 may extend beyond the edge of an adjacent first opening OP1 in the third direction DR3, reaching near another first opening OP1. In other words, the length of the second opening OP2 in the third direction DR3 may be greater than the length of the first opening OP1 in the third direction DR3. Accordingly, the second opening OP2 may pass between first openings OP1 that are separated from each other in the second direction DR2, and may also pass between other first openings OP1 located in the third direction DR3 of the first opening OP1.

[0109] In another embodiment, the second openings OP2 may extend in the second direction DR2 and may be separated from each other in the third direction DR3. In such an embodiment, the second openings OP2 may extend beyond the edge of the adjacent first opening OP1 in the second direction DR2 and reach the vicinity of another first opening OP1. In other words, the length of the second opening OP2 in the second direction DR2 may be greater than the length of the first opening OP1 in the second direction DR2. Accordingly, the second opening OP2 may pass between first openings OP1 that are separated from each other in the third direction DR3, and may also pass between other first openings OP1 located in the second direction DR2 of the first opening OP1.

[0110] In another embodiment, the trench-shaped second openings OP2 extending in the third direction DR3 and the trench-shaped second openings OP2 extending in the second direction DR2 may be arranged to cross each other.

[0111] refer to Figure 7 In an embodiment, the second openings OP2 may have a mesh shape or a grid shape at least partially surrounding each of the first openings OP1 in a plan view.

[0112] In one embodiment, the second opening OP2 closest to the first opening OP1 may have a frame shape that at least partially (e.g., completely) surrounds the first opening OP1. In one embodiment, the inner side of the frame shape of the second opening OP2 may have the same shape as the first opening OP1, but may be larger than the first opening OP1. In one embodiment, for example, the inner side of the frame shape of the second opening OP2 may have a square shape like the first opening OP1, but may be larger than the first opening OP1. Similarly, another second opening OP2 surrounding the second opening OP2 closest to the first opening OP1 may have a frame shape that is larger than the second opening OP2 closest to the first opening OP1.

[0113] In one embodiment, the second opening OP2 arranged in the middle between the first openings OP1 may have a mesh shape or a grid shape in which a plurality of frames are put together or combined with each other. In such an embodiment, the second opening OP2 may have a mesh shape in which a plurality of frames are arranged in holes in a mesh having a plurality of holes.

[0114] Figure 8 is a cross-sectional view of a portion of a mask assembly 150 according to an embodiment. Figure 9 is a cross-sectional view of a portion of a mask assembly 150 according to another embodiment. Figure 10 is a cross-sectional view of a portion of a mask assembly 150 according to yet another embodiment. Figure 11 is a cross-sectional view of a portion of a mask assembly 150 according to yet another embodiment. Figure 12is a cross-sectional view of a portion of a mask assembly 150 according to yet another embodiment.

[0115] refer to Figure 8 In one embodiment, the support member 153 may completely cover a portion of the mask frame 151 provided with the second opening OP2 .

[0116] In one embodiment, for example, the support member 153 may cover a portion of the surface of the mask frame 151 facing the second direction DR2 and the opposite direction and the direction opposite to the first direction DR1. In one embodiment, the support member 153 may cover the inner surface of the mask frame 151 that defines the second opening OP2. In addition, the support member 153 may cover the surface of the mask frame 151 that is adjacent to the second opening OP2 and faces the direction opposite to the first direction DR1. In addition, the support member 153 may cover a portion of the inner surface of the mask frame 151 that defines the first opening OP1. Accordingly, in such an embodiment, a portion of the support member 153 may be arranged in the first opening OP1. In one embodiment, the support member 153 may be in direct contact with the mask film 152 in the first opening OP1. In one embodiment, the support member 153 may include a groove 153-1 that overlaps with the second opening OP2. In another embodiment, Figure 8 Unlike shown in FIG, the support member 153 may be completely filled in the second opening OP2 without including the groove 153 - 1 .

[0117] refer to Figure 9 In one embodiment, the width of the second opening OP2 (or the length in the second direction DR2 ) may vary in the first direction DR1 .

[0118] In one embodiment, for example, Figure 9 As shown in , the width of the second opening OP2 (or the length in the second direction DR2) may decrease in the first direction DR1. Accordingly, the width of the portion of the second opening OP2 that opens toward the first surface 151-1 of the mask frame 151 (or the length in the second direction DR2) may be greater than the width of the portion of the second opening OP2 that is adjacent to the mask film 152 (or the length in the second direction DR2). In one embodiment, the cross-section of the second opening OP2 may have a substantially triangular shape. In one embodiment, the cross-section of the second opening OP2 may have a substantially trapezoidal shape. In one embodiment, the width of the second opening OP2 (or the length in the second direction DR2) may increase in the first direction DR1. In this case, the width of the portion of the second opening OP2 that opens toward the first surface 151-1 of the mask frame 151 (or the length in the second direction DR2) may be less than the width of the portion of the second opening OP2 that is adjacent to the mask film 152 (or the length in the second direction DR2).

[0119] refer to Figure 10 In one embodiment, a single second opening OP2 may be defined between two adjacent first openings OP1 .

[0120] In one embodiment, the second opening OP2 may be formed throughout the entire area of ​​the mask frame 151. In one embodiment, for example, the width of the second opening OP2 may be approximately half or greater than the width of the portion of the mask frame 151 between the first openings OP1. In one embodiment, the second opening OP2 may overlap with the mask film 152 on both sides thereof. In one embodiment, the support member 153 may be provided on the surface of the mask frame 151 defining the second opening OP2, the surface of the mask frame 151 defining the first opening OP1, and the surface of the mask frame 151 facing a direction opposite to the first direction DR1. In another embodiment, the support member 153 may be provided only on the surface of the mask frame 151 defining the second opening OP2. In one embodiment, the groove 153-1 in the support member 153 may also overlap with the mask film 152 on both sides thereof.

[0121] refer to Figure 11 In one embodiment, the support member 153 may be completely filled in the second opening OP2 .

[0122] In one embodiment, the support member 153 may not include a groove overlapping the second opening OP2 and may be completely filled in the second opening OP2. In such an embodiment, a surface of the support member 153 facing a direction opposite to the first direction DR1 and the first surface 151-1 of the mask frame 151 may be in the same plane.

[0123] refer to Figure 12 In one embodiment, the mask frame 151 may further include a third opening OP3 , and a portion of the support member 153 may be disposed in the third opening OP3 .

[0124] In one embodiment, the mask frame 151 may further include a third opening OP3 adjacent to the first opening OP1. The third opening OP3 is defined in the first surface 151-1 of the mask frame 151. The third opening OP3 may be arranged outside the outermost first opening OP1. Figure 2, the third opening OP3 can be arranged farther than the outermost first opening OP1 among the first openings OP1. In one embodiment, for example, the third opening OP3 can be arranged on the second direction DR2 side of the first opening OP1 that is outermost in the second direction DR2 among the first openings OP1. The third opening OP3 can differ from the second opening OP2 only in the arrangement position, and the other features of the third opening OP3 can be substantially the same as those of the second opening OP2. In other words, among the non-penetrating openings in the mask frame 151, the non-penetrating openings located between the first openings OP1 can be understood as the second openings OP2, and the non-penetrating openings located outside the first opening OP1 can be understood as the third opening OP3. The support member 153 can be arranged in the third opening OP3 in a manner substantially the same as that in the second opening OP2.

[0125] It will be apparent to those skilled in the art that the above reference Figures 8 to 12 The features of the described embodiments can be combined with one another or modified.

[0126] Additionally, it will be apparent to those skilled in the art that Figure 3A and Figure 4A The embodiment shown in (plan view), Figures 5 to 7 The embodiment shown in (bottom view) and Figure 3B 、 Figure 4B and Figures 8 to 12 The embodiments (cross-sectional views) shown in FIG. 1 can be combined with each other or modified in various ways.

[0127] 13A to 13E 1 is a cross-sectional view illustrating operations in a process of manufacturing a mask assembly according to an embodiment. Specifically, 13A to 13E Is to show the manufacturing basis Figure 3B 1 is a cross-sectional view of an operation in a process of a mask assembly of an embodiment shown in FIG.

[0128] refer to Figure 13A , a mask film 152 may be provided on the frame base material 151'. The frame base material 151' may include a second surface 151'-2 facing the first direction DR1 and a first surface 151'-1 facing a direction opposite to the first direction DR1. The mask film 152 may be provided on the second surface 151'-2 of the frame base material 151'. The mask film 152 may be provided with a plurality of holes 152-1.

[0129] refer to Figure 13A and Figure 13B, the first opening OP1 can be formed by etching a portion of the frame base material 151'. In one embodiment, for example, the first opening OP1 can be formed by etching a portion of the first surface 151'-1 of the frame base material 151'. The frame base material 151' having the first opening OP1 formed therein can be understood as a mask frame 151. In one embodiment, the frame base material 151' can be etched in such a manner that the first opening OP1 overlaps with the hole 152-1 in the mask film 152 and is formed through the frame base material 151'. In one embodiment, the etching process can include dry etching.

[0130] refer to Figure 13C , the second opening OP2 may be formed by etching a portion of the mask frame 151 between the first openings OP1. In one embodiment, the process of forming the second opening OP2 may include dry etching.

[0131] refer to Figure 13D , a thin film layer 153' may be formed in the second opening OP2 first. In one embodiment, the thin film layer 153' may be understood as forming the support member 153 (refer to Figure 13E In one embodiment, the thin film layer 153' may include a thin film layer 153' and a thin film layer 153'. Figure 13E In one embodiment, the thickness 153'-t of the thin film layer 153' may be about 10 angstroms. In one embodiment, the process of forming the thin film layer 153 ′ may include a deposition process.

[0132] Reference together Figure 13D and Figure 13E , the thin film layer 153' can be converted into the support member 153. In one embodiment, the thickness 153-t of the support member 153 can be about 10 angstroms. or greater. In one embodiment, the thickness 153'-t of the thin film layer 153' may be less than the thickness 153-t of the support member 153. Accordingly, the support member 153 may be formed by adding the same material to the thin film layer 153' to increase its thickness. In one embodiment, the process of forming the support member 153 may include an electroforming process. In another embodiment, the process may be Figure 13D The operation period shown in FIG is terminated, and the formed thin film layer 153 ′ may be referred to as a support member 153 .

[0133] Figure 14 is a plan view of a display device 20 manufactured by using an apparatus for manufacturing a display device according to an embodiment. Figure 15 It is along Figure 14 1 is a cross-sectional view of the display device 20 taken along line XV-XV′.

[0134] refer to Figure 14 and Figure 15 , an embodiment of the display device 20 may have a display area DA and a non-display area NDA defined on a substrate 21, wherein the non-display area NDA is arranged around the display area DA. The light-emitting element 28 may be arranged in the display area DA, and power wiring (not shown) may be arranged in the non-display area NDA. In addition, a pad portion C may be arranged in the non-display area NDA.

[0135] A plurality of deposition material patterns may be arranged in the display area DA. Figure 14 The embodiment in which the display device 20 and the display area DA have a substantially quadrilateral shape is shown, but one or more embodiments are not limited thereto. The display area DA may have another shape, such as an atypical shape.

[0136] The display device 20 may include a display substrate D, an intermediate layer 28 - 2 disposed on the display substrate D, and an opposing electrode 28 - 3 disposed on the intermediate layer 28 - 2. In addition, the display device 20 may include a thin film encapsulation layer E disposed on the opposing electrode 28 - 3.

[0137] The display substrate D may include a substrate 21 , a thin film transistor TFT, a through hole layer 27 , and a pixel electrode 28 - 1 .

[0138] The substrate 21 may include a plastic material or a metal material. In one embodiment, for example, the substrate 21 may include polyimide (PI).

[0139] The thin film transistor TFT may be disposed over the substrate 21 , the through-hole layer 27 may cover the thin film transistor TFT, and the light emitting element 28 may be disposed on the through-hole layer 27 .

[0140] A buffer layer 22 including an organic compound and / or an inorganic compound may be further provided on the substrate 21, and the buffer layer 22 may include SiO x (x≥1) and / or SiN x (x≥1).

[0141] After the active layer 23 arranged in a specific pattern is disposed on the buffer layer 22, the active layer 23 may be buried by the gate insulating layer 24. The active layer 23 may include a source region 23-1 and a drain region 23-3, and may further include a channel region 23-2 therebetween.

[0142] The active layer 23 may include at least one selected from a variety of materials. In one embodiment, the active layer 23 may include an inorganic semiconductor material (such as amorphous silicon or crystalline silicon). In another embodiment, the active layer 23 may include an oxide semiconductor. In another embodiment, the active layer 23 may include an organic semiconductor material. Hereinafter, for ease of description, the embodiment in which the active layer 23 is formed of amorphous silicon will be mainly described.

[0143] The active layer 23 may be formed by forming an amorphous silicon layer on the buffer layer 22, crystallizing the amorphous silicon layer into a polysilicon layer, and patterning the polysilicon layer. Depending on the type of thin film transistor (such as a driving thin film transistor (not shown), a switching thin film transistor (not shown), etc.), the active layer 23 may have a source region 23-1 and a drain region 23-3 doped with impurities.

[0144] A gate electrode 25 corresponding to the active layer 23 and an interlayer insulating layer 26 covering the gate electrode 25 may be disposed on the gate insulating layer 24. After the contact hole H1 is formed in the interlayer insulating layer 26 and the gate insulating layer 24, a source electrode 27-1 and a drain electrode 27-2 may be disposed on the interlayer insulating layer 26 to contact the source region 23-1 and the drain region 23-3, respectively.

[0145] A through-hole layer 27 is provided over the thin film transistor TFT, and a pixel electrode 28-1 of the light-emitting element 28 is provided on the through-hole layer 27. The pixel electrode 28-1 contacts the drain electrode 27-2 of the thin film transistor TFT through a through hole H2 in the through-hole layer 27. The through-hole layer 27 can be formed of an inorganic material and / or an organic material in a single layer or two or more layers, and can be a planarization layer having a flat upper surface regardless of the curve in the lower layer, or can be curved along the curve in the lower layer.

[0146] After the pixel electrode 28 - 1 is disposed on the via layer 27 , the pixel defining layer 29 may be formed of an organic material and / or an inorganic material to cover the pixel electrode 28 - 1 and the via layer 27 , and may be provided with an opening to expose the pixel electrode 28 - 1 .

[0147] The intermediate layer 28-2 and the counter electrode 28-3 are disposed on the pixel electrode 28-1. In one embodiment, the counter electrode 28-3 may be disposed over the entire surface of the display substrate D. In such an embodiment, the counter electrode 28-3 may be disposed on the intermediate layer 28-2 and the pixel-defining layer 29. Hereinafter, for ease of description, the embodiment in which the counter electrode 28-3 is disposed on the intermediate layer 28-2 and the pixel-defining layer 29 will be primarily described.

[0148] The pixel electrode 28 - 1 may function as an anode and the counter electrode 28 - 3 may function as a cathode, or the pixel electrode 28 - 1 may function as a cathode and the counter electrode 28 - 3 may function as an anode.

[0149] The pixel electrode 28 - 1 and the counter electrode 28 - 3 are insulated from each other by the intermediate layer 28 - 2 , and voltages of different polarities are applied to the intermediate layer 28 - 2 to emit light from the organic emission layer.

[0150] The intermediate layer 28-2 may include an organic emission layer. In one embodiment, for example, the intermediate layer 28-2 may include an organic emission layer and, in addition, may further include at least one selected from a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. The present disclosure is not limited thereto, and the intermediate layer 28-2 may include an organic emission layer and may further include various other functional layers (not shown).

[0151] In one embodiment, the intermediate layer 28-2 can be formed by the apparatus for manufacturing a display device described above. The intermediate layer 28-2 can be provided in plurality, and the plurality of intermediate layers 28-2 can form the display area DA. In such an embodiment, the plurality of intermediate layers 28-2 can be separated from each other in the display area DA.

[0152] A unit pixel is defined by or composed of a plurality of sub-pixels, and the plurality of sub-pixels can emit light of various colors. In one embodiment, for example, the plurality of sub-pixels may include sub-pixels that emit red light, green light, and blue light, respectively, and may include sub-pixels that emit red light, green light, blue light, and white light (not shown).

[0153] The sub-pixel described above may include an intermediate layer 28 - 2 . In one embodiment, when forming a sub-pixel, the intermediate layer 28 - 2 may be formed by the apparatus for manufacturing a display device described above.

[0154] The thin film encapsulation layer E may include a plurality of inorganic layers, or may include an inorganic layer and an organic layer. The organic layer of the thin film encapsulation layer E may be formed of a polymer, and more specifically, may be a single layer or a laminated layer formed of at least one selected from polyethylene terephthalate, polyimide, polycarbonate, epoxy resin, polyethylene, and polyacrylate. The inorganic layer of the thin film encapsulation layer E may be a single layer or a laminated layer containing a metal oxide or a metal nitride. In one embodiment, for example, the inorganic layer may contain SiN x 、Al2O3、SiO x and TiO 2 . The externally exposed top layer of the thin film encapsulation layer E may be an inorganic layer for preventing moisture from penetrating into the light emitting element.

[0155] The thin film encapsulation layer E may have at least one sandwich structure, with at least one organic layer between at least two inorganic layers. In one embodiment, for example, the thin film encapsulation layer E may have at least one sandwich structure, with at least one inorganic layer between at least two organic layers. In one embodiment, for example, the thin film encapsulation layer E may have a sandwich structure with at least one organic layer between at least two inorganic layers, and a sandwich structure with at least one inorganic layer between at least two organic layers.

[0156] According to the embodiments of the present disclosure, as described above, an apparatus for manufacturing a display device can be provided, wherein a mask and a substrate can be brought into close contact with each other by applying a magnetic force to a mask assembly including a magnetic body, without using a separate metal support member. In such an embodiment, because the main body of the mask assembly does not need to be made of metal, a more precise pattern can be achieved by making the mask film and / or mask frame from silicon. Accordingly, a display device with higher resolution can be manufactured.

[0157] The present disclosure should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the present disclosure to those skilled in the art.

[0158] While the present disclosure has been particularly shown and described with reference to embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit or scope of the present disclosure as defined by the claims.

Claims

1. An apparatus for manufacturing a display device, characterized in that: The device comprises: a mask assembly; and a magnetic portion facing the mask assembly, wherein the magnetic portion applies a magnetic force toward the mask assembly, The mask assembly comprises: a mask frame having a plurality of first openings defined therethrough and a second opening defined in a first surface thereof, wherein the second opening is disposed between two adjacent first openings of the plurality of first openings; a mask film disposed on a second surface of the mask frame opposite to the first surface and overlapping at least one of the plurality of first openings; and A support member is provided on the first surface of the mask frame and includes a magnetic body, wherein the support member is provided on at least one selected from a surface of the mask frame defining the first opening and a surface of the mask frame defining the second opening.

2. The device according to claim 1, characterized in that A depth of the second opening is smaller than a thickness of the mask frame.

3. The device according to claim 1, characterized in that The support member defines a slot overlapping the second opening.

4. The device according to claim 1, characterized in that The width of the second opening varies in a depth direction of the second opening.

5. The device according to claim 1, characterized in that The width of the second opening is half or greater than the distance between the two adjacent first openings.

6. The device according to claim 1, characterized in that The supporting member completely fills the second opening.

7. The device according to claim 1, characterized in that a third opening is defined in the first surface of the mask frame, wherein the third opening is arranged outside the plurality of first openings, A portion of the support member is disposed in the third opening.

8. The device according to claim 1, characterized in that The second opening is provided in plurality, The plurality of second openings are separated from each other and arranged between the two adjacent first openings in the plurality of first openings.

9. The device according to claim 1, characterized in that In a plan view, the second opening at least partially surrounds one of the plurality of first openings.

10. The device according to claim 1, characterized in that The thickness of the support member is 10 angstroms or greater.

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