Automatic filtering and cleaning device of semiconductor diaphragm pump

Abstract

The utility model discloses an automatic filtering and cleaning device of a semiconductor diaphragm pump. The automatic filtering and cleaning device comprises a shell assembly and a filtering assembly. The filtering assembly is arranged on a mounting ring in the shell assembly, and the filtering assembly is sequentially provided with a first filtering assembly and a second filtering assembly from top to bottom; the first filter assembly is provided with a first filter screen, a collecting tank, a cleaning device, a compression device and a transmission device. A transmission device, a compression device and a cleaning device are arranged in a first filter assembly, the transmission device can drive the cleaning device connected with the transmission device to rotate together, particle impurities at a first filter screen are effectively cleaned, in addition, a collecting groove is formed in the lower end of the first filter screen, and the particle impurities can be effectively collected; therefore, the filtering efficiency of the filter screen is effectively improved, and efficient filtering and automatic cleaning functions in the liquid conveying process are achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor pneumatic diaphragm pump technical field especially relates to a kind of automatic filtering cleaning device of semiconductor diaphragm pump. BACKGROUND

[0002] Pneumatic diaphragm pump is a kind of new fluid machinery for realizing liquid transport purpose using the reciprocating motion of diaphragm, which mainly uses compressed air as main power source, and has strong self-suction capacity, can transport various corrosive, toxic, flammable, volatile liquid and contain small particle, high viscosity liquid, and can support forward rotation and reverse rotation, with good leak-proof, corrosion-resistant, easy-to-maintain characteristics.

[0003] Pneumatic diaphragm pump is also widely used in semiconductor field, which is usually used to transport various chemical liquids, etching liquid, cleaning liquid, waste liquid, etc., and in actual use process, diaphragm structure, as an important conveying accessory, plays a major role in liquid conveying. The existing filtering device used by semiconductor pneumatic diaphragm pump is usually single-layer filter screen, and after long-term use, liquid impurities will accumulate at the filter screen of semiconductor pneumatic diaphragm pump, causing impurity blockage at the filter screen and continuous decline of filter efficiency, and more seriously, affecting the normal work of the device. UTILITY MODEL CONTENT

[0004] To solve the above problems, the present application provides an automatic filtering cleaning device for semiconductor diaphragm pump, which solves the problems of impurity blockage and accumulation at the filter screen caused by single-layer filter screen, and reduces the filtering efficiency in the prior art.

[0005] To achieve the above technical purposes, the utility model provides the following scheme:

[0006] An automatic filtering cleaning device for semiconductor diaphragm pump, characterized by comprising a shell assembly and a filtering assembly; the shell assembly is provided with a mounting ring inside; the filtering assembly is arranged on the mounting ring inside the shell assembly, wherein the filtering assembly is sequentially provided with a first filtering assembly and a second filtering assembly from top to bottom; the first filtering assembly comprises a first filter screen, a collection tank, a cleaning device, a compression device and a transmission device; wherein the first filter screen is designed in a cylindrical shape; the transmission device is located at the top center of the first filter screen and connected with the cleaning device through the first filter screen; the end of the cleaning device away from the transmission device is connected with the compression device; the cleaning device and the compression device are both located inside the first filter screen, and the collection tank is located at the bottom of the outer circle of the first filter screen.

[0007] Further, the transmission device comprises a transmission blade, a transmission member and a connecting shaft; the transmission blade is arranged on the transmission member, and the transmission member is arranged on the connecting shaft.

[0008] Further, the cleaning device comprises a connecting piece, a connecting plate and a cleaning plate, the connecting piece is located at one end of the connecting shaft close to the compression device, and the connecting piece is externally provided with the connecting plate, and the outer side of the connecting plate is provided with the cleaning plate.

[0009] Further, the compression device comprises a spring body, a compression shaft and a support plate, the compression shaft is located inside the spring body, one end of the compression shaft close to the cleaning device is connected with the support plate, the other end of the compression shaft away from the cleaning device is connected with the mounting ring, the compression shaft is further connected with the axis of the connecting shaft by penetrating the support plate, and the diameter of the compression shaft is smaller than the diameter of the connecting shaft.

[0010] Further, the collecting groove is connected with the first groove provided around the mounting ring, and a first sealing pad layer is further arranged at the connecting position between the lower end of the collecting groove and the first groove.

[0011] Further, the second filter assembly is provided with a second filter screen and a connecting buckle, the second filter screen is connected with the connecting buckle and the connecting buckle hole provided on the shell assembly, and a second sealing pad layer is arranged at the connecting buckle hole.

[0012] Further, the top end of the shell assembly is further provided with a limiting ring and a limiting frame, the limiting frame is connected with the inner wall of the shell assembly, the limiting ring is arranged at the center of the limiting frame, the limiting ring is connected with the connecting shaft, and the connecting shaft can penetrate the limiting ring and move back and forth.

[0013] Further, the lower end of the shell assembly is provided with a connecting device, and a plurality of connecting holes are arranged on the connecting device for fixing and mounting the device.

[0014] Further, the first filter screen and the collecting groove are designed in an integrated manner.

[0015] Further, the shell assembly, the mounting ring, the limiting ring and the limiting frame are designed in an integrated manner.

[0016] The beneficial effects of the present application include but are not limited to:

[0017] (1) The first filter assembly and the second filter assembly are arranged, so that the filtering efficiency during liquid transportation is improved, the transmission device, the compression device and the cleaning device are arranged in the first filter assembly, the transmission device can rotate during the liquid transportation process, the transmission device can drive the cleaning device connected therewith to rotate, in addition, the liquid transportation can drive the transmission device and the cleaning device to move towards the compression device, the cleaning device can better clean the particulate impurities at the first filter screen, so as to prevent the particulate impurities from accumulating at the first filter screen, in addition, the collecting groove is arranged at the lower end of the first filter screen, so as to effectively collect the particulate impurities and prevent the particulate impurities from being repeatedly filtered or clogging the bottom filter hole, thereby effectively improving the filtering efficiency of the filter screen and realizing the self-cleaning function of the filter screen during the liquid transportation process.

[0018] (2) The second filter screen is arranged, so that the first filter screen and the second filter screen can realize secondary filtration of impurities in the liquid conveying process, and the filtration efficiency of the device is further improved.

[0019] (3) The first sealing gasket layer is arranged at the connecting position of the collecting groove and the first groove, and the second sealing gasket layer is arranged at the connecting buckle and the connecting buckle hole at the lower end of the second filter screen, so that the sealing performance of the connecting position of the device is better guaranteed, and the filtration efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings, which are included to provide a further understanding of the present application, form a part of the present application and illustrate the illustrative embodiments of the present application and the description thereof, and do not constitute improper limitations to the present application. In the drawings: an automatic filtering and cleaning device for a semiconductor diaphragm pump

[0021] Figure 1 is a sectional view of the automatic filtering and cleaning device for the semiconductor diaphragm pump provided by the present application;

[0022] Figure 2 is a structural schematic view of the automatic filtering and cleaning device for the semiconductor diaphragm pump provided by the present application;

[0023] Figure 3 is a top view of the automatic filtering and cleaning device for the semiconductor diaphragm pump provided by the present application;

[0024] PARTS AND LIST OF REFERENCE NUMBERS

[0025] 1, filter assembly; 2, housing assembly; 101, first filter assembly; 102, second filter assembly; 103, transmission device; 104, cleaning device; 105, compression device; 106, transmission blade; 107, transmission piece; 108, connecting shaft; 109, connecting piece; 110, connecting plate; 111, cleaning plate; 112, spring body; 113, compression shaft; 114, support plate; 115, collecting groove; 116, first sealing gasket layer; 117, first filter screen; 118, second filter screen; 119, connecting buckle; 120, second sealing gasket layer; 121, limiting ring; 122, limiting frame; 201, mounting ring; 202, connecting buckle hole; 203, connecting device; 204, connecting hole; 205 first groove. DETAILED DESCRIPTION

[0026] In order to more clearly illustrate the overall concept of the present application, the following will be described in detail in an exemplary manner combined with the drawings of the specification.

[0027] In order to enable a more clear understanding of the above-mentioned objects, features and advantages of the present application, the present application will be further described below in conjunction with the drawings and specific embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0028] In the following description, a large number of specific details are set forth in order to facilitate a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and therefore the scope of protection of the present application is not limited by the specific embodiments disclosed below.

[0029] In addition, in the description of the present application, it should be understood that the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0030] An automatic filter cleaning device for a semiconductor diaphragm pump, as shown in Figures 1-2 The housing assembly 2 is provided with a mounting ring 201, and the filter assembly 1 is arranged on the mounting ring 201 inside the housing assembly 2. The filter assembly 1 is arranged in the mounting ring 201 from top to bottom in sequence of the first filter assembly 101 and the second filter assembly 102. The first filter assembly 101 comprises a first filter screen 117, a collection groove 115, a cleaning device 104, a compression device 105, and a transmission device 103. The first filter screen 117 is designed in a cylindrical shape. The transmission device 103 is located at the top center of the first filter screen 117 and connected with the cleaning device 104 through the first filter screen 117. The end of the cleaning device 104 away from the transmission device 103 is connected with the compression device 105. The cleaning device 104 and the compression device 105 are both located inside the first filter screen 117, and the collection groove 115 is located at the bottom of the outer circle of the first filter screen 117.

[0031] By setting the filter assembly 1 on the mounting ring 201 inside the shell assembly 2, the filter assembly 1 can be better fixed and connected, and by setting the first filter assembly 101 and the second filter assembly 102, the filtering efficiency during liquid transportation can be effectively improved. By setting the transmission device 103, the compression device 105 and the cleaning device 104 in the first filter assembly 101, the transmission device 103 can rotate during the liquid transportation process, and the transmission device 103 can drive the cleaning device 104 connected thereto to rotate. In addition, the liquid transportation can drive the transmission device 103 and the cleaning device 104 to move towards the compression device 105. The cleaning device 104 can better clean the particulate impurities at the first filter screen 117, preventing the particulate impurities from accumulating at the first filter screen 117. In addition, the collection groove 115 is arranged at the lower end of the first filter screen 117, which can effectively collect the particulate impurities and prevent them from being repeatedly filtered or clogging the bottom filter holes, thereby effectively improving the filtering efficiency of the filter screen and realizing the self-cleaning function of the filter screen during the liquid transportation process.

[0032] The transmission principle of the automatic filtering and cleaning device is as follows: when the liquid is transported, it will first pass through the transmission device 103. When the liquid passes through the transmission device 103, it will drive the transmission device 103 to rotate. The transmission device 103 is self-rotating at this time and does not need an additional power device to drive it. The transmission device 103 drives the cleaning device 104 to move in a circular motion, and the cleaning device 104 cleans the impurities accumulated and clogged on the first filter screen 117. Further, the compression device 105 is compressed by force, and the transmission device 103 moves towards one end of the compression device 105, and the cleaning device 104 is also moved towards the end close to the compression device 105. At this time, the compression device 105 is compressed, thereby realizing a larger cleaning area of the cleaning device 104. When the liquid transportation process stops, the compression device 105 returns to the original position. During the above cleaning process, the impurities fall into the collection groove 115 from the first filter screen 117, and the solid particulate impurities are deposited at the bottom of the collection groove 115, thereby avoiding the clogging problem during long-term use of the filter screen.

[0033] In another embodiment, as Figure 1 , Figure 3As shown, the transmission device 103 comprises a transmission blade 106, a transmission piece 107, and a connecting shaft 108; the transmission blade 106 is arranged on the transmission piece 107, and the transmission piece 107 is arranged on the connecting shaft 108. By arranging the transmission blade 106, the transmission piece 107, and the connecting shaft 108, wherein the transmission blade 106 is fixedly arranged on the transmission piece 107, the transmission piece 107 is fixedly arranged on the connecting shaft 108, and the transmission blade 106, the transmission piece 107, and the connecting shaft 108 are integrally designed, the transmission blade 106 can be guaranteed to rotate while driving the transmission piece 107 and the connecting shaft 108 to rotate together; when the liquid conveying process is performed, the liquid will first pass through the transmission blade 106, and the water flow will drive the transmission blade 106 to rotate, at which time the transmission blade 106 will synchronously drive the transmission piece 107 and the connecting shaft 108 to move together, so as to realize the overall movement process of the transmission device 103 and drive the cleaning device 104 to move through the connecting shaft 108.

[0034] In another embodiment, as shown in Figure 1 As shown, the cleaning device 104 comprises a connecting piece 109, a connecting plate 110, and a cleaning plate 111; the connecting piece 109 is located at one end of the connecting shaft 108 close to the compression device 105, the connecting piece 109 is externally provided with the connecting plate 110, and the connecting plate 110 is externally provided with the cleaning plate 111. By arranging the corresponding connecting piece 109, the center position of the connecting piece 109 is fixedly connected with the connecting shaft 108, the outer ring of the connecting piece 109 is fixedly connected with the connecting plate 110, the outermost side of the connecting plate 110 is provided with the cleaning plate 111, the cleaning plate 111 is provided with a brush head, the cleaning plate 111 can be in contact with the first filter screen 117 through the brush head, and the cleaning plate 111 can clean the impurities on the first filter screen 117; when the transmission blade 106 in the transmission device 103 drives the connecting shaft 108 to move, the connecting piece 109 in the cleaning device 104 will be driven to rotate through the connecting shaft 108, and the connecting plate 110 and the cleaning plate 111 fixedly connected with the connecting piece 109 will simultaneously rotate, so as to realize the cleaning of the first filter screen 117 by the brush on the cleaning plate 111; the cleaning process is as follows: the liquid drives the transmission blade 106 to rotate, drives the connecting shaft 108 to rotate, and drives the connecting piece 109 to rotate at the same time, and the connecting plate 110 and the cleaning plate 111 will rotate together with the connecting piece 109 at this time, at which time the cleaning device 104 starts to act on the first filter screen 117 and completes the cleaning of the impurities on the first filter screen 117; with the rotation of the cleaning device 104, the impurity particles outside the first filter screen 117 can be cleaned into the collecting groove 115.

[0035] In another embodiment, as shown in Figure 1As shown, the compression device 105 comprises a spring body 112, a compression shaft 113, and a support plate 114. The compression shaft 113 is located inside the spring body 112, and one end of the compression shaft 113 close to the cleaning device 104 is connected with the support plate 114. The other end of the compression shaft 113 far from the cleaning device 104 is connected with the mounting ring 201. The compression shaft 113 is also connected with the shaft center of the connecting shaft 108 through the support plate 114, and the diameter of the compression shaft 113 is smaller than that of the connecting shaft 108. By setting the compression device 105, when the liquid is transported, the spring body 112 is compressed by the support plate 114, and is compressed into the connecting shaft 108 after compression. The compression shaft 113 is connected with the shaft center of the connecting shaft 108, and the diameter of the compression shaft 113 is smaller than that of the connecting shaft 108. When the liquid transportation process is over, the spring body 112 restores the elastic force to provide a counterforce to the support plate 114, and pushes the cleaning device 104 and the transmission device 103 to the original position.

[0036] The working principle of the first filter assembly 101 is as follows. When the liquid starts to be transported, the liquid first passes through the transmission device 103. The transmission blade 106 rotates to drive the connecting shaft 108, the connecting piece 109, the connecting plate 110, and the cleaning plate 111 fixedly connected thereto. With the change of the liquid pressure, the transmission blade 106 and the connecting shaft 108 are compressed to the spring body 112 through the support plate 114. At this time, the spring body 112 is compressed, and the compression shaft 113 is compressed into the connecting shaft 108. The connecting piece 109 and the connecting plate 110 move towards the spring end to realize the rotating cleaning process from the upper part to the lower part of the first filter screen 117. During the compression process of the compression device 105, the cleaning device 104 rotates together with the transmission device 103, and sweeps the impurities outside the first filter screen 117 into the collection groove 115.

[0037] In another embodiment, as shown in Figure 1 The collection groove 115 is connected with the first groove 205 arranged around the mounting ring 201, and the first sealing pad layer 116 is arranged at the connection position of the lower end of the collection groove 115 and the first groove 205. By arranging the first sealing pad layer 116 at the connection position of the collection groove 115 and the first groove 205, the sealing property and stability between the filter groove and the mounting ring 201 can be effectively improved.

[0038] In another embodiment, as shown in Figure 1As shown, the second filter assembly 102 is provided with a second filter screen 118, a connecting buckle 119, the second filter screen 118 is connected with the connecting buckle hole 202 provided on the shell assembly 2 through the connecting buckle 119, and the second sealing gasket 120 is arranged at the connecting buckle hole 202. By arranging the second filter screen, the filtering efficiency can be improved in cooperation with the first filter screen. Meanwhile, the second filter screen 118 is designed in a spherical top conical shape with high middle and low periphery, which effectively improves the filtering efficiency of impurities. In addition, the connecting buckle 119 is arranged at the lower end of the second filter screen 118, which can be elastically connected with the connecting buckle hole 202 on the shell assembly 2. At this time, the second filter screen 118 can be embedded and connected with the connecting buckle hole 202 on the shell assembly 2 through the connecting buckle 119, and remains fixed, which is convenient for disassembly in the subsequent use process. Meanwhile, the second sealing gasket 120 is arranged at the connecting buckle hole 202, which increases the stability and sealing performance of the device connection.

[0039] In another embodiment, as shown in Figure 1 , the shell assembly 2 is further provided with a limiting ring 121 and a limiting frame 122, the limiting frame 122 is connected with the inner wall of the shell assembly 2, the limiting ring 121 is arranged at the center of the limiting frame 122, the limiting ring 121 is connected with the connecting shaft 108, and the connecting shaft 108 can penetrate through the limiting ring 121 and reciprocate. By connecting the limiting frame 122 with the inner wall of the shell assembly 2, and arranging the limiting ring 121 at one end of the limiting frame 122 close to the connecting shaft 108, the limiting ring 121 can effectively limit the connecting shaft 108. The connecting shaft 108 can not only make circular motion in the limiting ring 121, but also make reciprocating motion in the up-down direction.

[0040] In another embodiment, as shown in Figure 1 , Figure 3 , the shell assembly 2 is further provided with a connecting device 203 at the lower end, the connecting device 203 is provided with a plurality of connecting holes 204 for fixing and mounting the device. By arranging the connecting device 203 at the lower end of the shell assembly 2, the device can be better fixed and connected with the semiconductor pneumatic diaphragm pump delivery port, thereby improving the stability of the device.

[0041] In another embodiment, as shown in Figure 1 , the first filter screen 117 and the collecting groove 115 are designed in an integrated manner. By arranging the first filter screen 117 and the collecting groove 115 in an integrated manner, the durability and stability of the device can be improved.

[0042] In another embodiment, as shown in Figure 1As shown, the shell assembly 2, the mounting ring 201, the limiting ring 121 and the limiting frame 122 are designed in one body.

[0043] The above merely provides an example of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the scope of claims of the present application.

Claims

1. An automatic filtering and cleaning device for a semiconductor diaphragm pump, characterized in that: Including housing assembly and filter assembly; The housing assembly is provided with a mounting ring, and the filter assembly is provided on the mounting ring inside the housing assembly, wherein the filter assembly is provided with a first filter assembly and a second filter assembly in order from top to bottom; the first filter assembly includes a first filter screen, a collection tank, a cleaning device, a compression device, and a transmission device; The first filter screen is designed to be cylindrical, the transmission device is located at the top center of the first filter screen, and passes through the first filter screen to be connected to the cleaning device, the end of the cleaning device away from the transmission device is connected to the compression device, the cleaning device and the compression device are both located inside the first filter screen, and the collection tank is located at the bottom end of a circle outside the first filter screen.

2. The automatic filtering and cleaning device according to claim 1, characterized in that: The transmission device includes a transmission blade, a transmission member, and a connecting shaft; the transmission blade is arranged on the transmission member, and the transmission member is arranged on the connecting shaft.

3. The automatic filtering and cleaning device according to claim 1, characterized in that: The cleaning device includes a connecting piece, a connecting plate and a cleaning plate. The connecting piece is located at one end of the connecting shaft close to the compression device. The connecting plate is provided outside the connecting piece, and the cleaning plate is provided outside the connecting plate.

4. The automatic filtering and cleaning device according to claim 1, characterized in that: The compression device includes a spring body, a compression shaft, and a support plate. The compression shaft is located inside the spring body. The end of the compression shaft close to the cleaning device is connected to the support plate, and the end of the compression shaft away from the cleaning device is connected to the mounting ring. The compression shaft also passes through the support plate and is connected to the axis of the connecting shaft. The diameter of the compression shaft is smaller than the diameter of the connecting shaft.

5. The automatic filtering and cleaning device according to claim 1, characterized in that: The collecting groove is connected to a first groove arranged around the mounting ring, and a first sealing gasket layer is further provided at the connection between the lower end of the collecting groove and the first groove.

6. The automatic filtering and cleaning device according to claim 1, characterized in that: The second filter assembly is provided with a second filter screen and a connecting buckle. The second filter screen is connected to a connecting buckle provided on the shell assembly through the connecting buckle. A second sealing gasket layer is provided at the connecting buckle.

7. The automatic filtering and cleaning device according to claim 2, characterized in that: A limiting ring and a limiting frame are also provided at the top of the shell assembly. The limiting frame is connected to the inner wall of the shell assembly. A limiting ring is provided at the center of the limiting frame. The limiting ring is connected to the connecting shaft. At the same time, the connecting shaft can pass through the limiting ring and perform reciprocating motion.

8. The automatic filtering and cleaning device according to claim 1, characterized in that: A connecting device is provided at the lower end of the shell assembly, and a plurality of connecting holes are provided on the connecting device for fixing and installing the device.

9. The automatic filtering and cleaning device according to claim 1, characterized in that: The first filter screen and the collecting tank are both integrated in design.

10. The automatic filtering and cleaning device according to claim 8, characterized in that: The housing assembly, mounting ring, limiting ring and limiting frame are all of integrated design.

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