Vacuum diaphragm pump

Abstract

The invention provides a vacuum diaphragm pump which is provided with a cavity, different spaces are formed in the cavity, the vacuum diaphragm pump is provided with a steam extraction channel and a process gas extraction channel which are independent of each other, and the steam extraction channel and the process gas extraction channel communicate with the different spaces of the cavity correspondingly. Two different fluids (such as steam and process gas) can be extracted respectively through the steam extraction channel and the process gas extraction channel which are independent of each other, so that the two different fluids are prevented from flowing through the same extraction channel to react; deposited powder (namely process gas) is prevented from being adhered to the inner wall of the extraction channel or the inner wall of the cavity under the action of steam, so that the pollution and blockage of the vacuum pump cavity caused by sediments are prevented, the performance of the vacuum diaphragm pump is ensured, and the service life of the vacuum diaphragm pump is prolonged; besides, different temperature control can be carried out on different channels according to different extracted process objects, so that the stability of the process gas in the channels is ensured.

Description

Technical Field

[0001] This invention belongs to the field of vacuum pump technology, and specifically relates to a vacuum diaphragm pump. Background Technology

[0002] In semiconductor or photovoltaic processes, process gases and water vapor are generated alternately. When the same diaphragm pump is used for extraction, powder deposited by the process gases in the pump chamber and pipelines becomes less likely to be blown out by the airflow when it encounters water vapor. As the amount of water vapor increases, the moist powder adheres to the pump chamber or pipeline walls, causing the pump chamber volume and pipeline flow cross-section to decrease, resulting in a sharp decline in pump performance. Therefore, separating the extraction of process gases and water vapor is an urgent problem to be solved. Summary of the Invention

[0003] The embodiments of the present invention aim to at least solve one of the technical problems existing in the prior art, and provide a vacuum diaphragm pump.

[0004] This invention provides a vacuum diaphragm pump, which has a chamber and independent steam extraction channel and process gas extraction channel, which are respectively connected to different spaces in the chamber.

[0005] In some embodiments of this disclosure, the steam extraction channel includes a first air inlet, a first air intake distributor, a first pressure distributor, and a first air outlet. The first air inlet is connected to the first air intake distributor, the first air intake distributor is connected to the chamber via a first air intake pipe, the chamber is connected to the first pressure distributor via a first air outlet pipe, and the first pressure distributor is connected to the first air outlet.

[0006] In some embodiments of this disclosure, the first air inlet pipe and the first air outlet pipe are located on the same side of the chamber and form a steam delivery pipeline. The steam extraction channel includes at least two sets of the steam delivery pipelines, which are spaced apart around the periphery of the chamber.

[0007] In some embodiments of this disclosure, the steam extraction channel includes two sets of steam delivery pipelines, which are located on opposite sides of the chamber.

[0008] In some embodiments of this disclosure, the steam extraction channel further includes a connecting pipe that connects the first pressure distributor to the first gas outlet.

[0009] In some embodiments of this disclosure, the process gas extraction channel and the steam extraction channel have the same structure, and the process gas extraction channel and the steam extraction channel are arranged crosswise at one end of the vacuum diaphragm pump.

[0010] In some embodiments of this disclosure, the vacuum diaphragm pump has at least two independent chambers, which are arranged along the length of the vacuum diaphragm pump.

[0011] In some embodiments of this disclosure, the steam extraction channel and the process gas extraction channel are respectively provided with temperature control devices, which control the temperature of the steam extraction channel and the temperature of the process gas extraction channel respectively.

[0012] In some embodiments of this disclosure, the vacuum diaphragm pump further includes: a diaphragm pump body and a connecting bracket, the diaphragm pump body forming the chamber, the connecting bracket being connected to one end of the diaphragm pump body, and the steam extraction channel and the process gas extraction channel being respectively connected to the connecting bracket.

[0013] In some embodiments of this disclosure, the vacuum diaphragm pump further includes: a housing base and a housing upper cover, the housing upper cover being connected to the housing base to form a working space, the diaphragm pump body being connected to the housing base and located within the working space, and a portion of the steam extraction channel and a portion of the process gas extraction channel being located within the working space.

[0014] According to an embodiment of the present invention, the vacuum diaphragm pump has a chamber with different spaces. The vacuum diaphragm pump has independent steam extraction channels and process gas extraction channels, which are respectively connected to different spaces within the chamber. Through the independent steam extraction channels and process gas extraction channels, two different fluids (such as steam and process gas) can be extracted separately, thereby preventing the two different fluids from reacting when flowing through the same extraction channel. This avoids the deposition of powder (i.e., process gas) from adhering to the inner wall of the extraction channel or the inner wall of the chamber due to the action of steam, thus preventing contamination and blockage of the vacuum pump cavity by deposits, ensuring the performance of the vacuum diaphragm pump, and improving its service life. Furthermore, different channels can be temperature-controlled according to the different process materials being extracted, ensuring the stability of the process gas within the channels. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the disassembled structure of the vacuum diaphragm pump of the present invention; Figure 2 for Figure 1 The diagram shows the assembly structure of the vacuum diaphragm pump. Figure 3 for Figure 1 The diagram shown is an isometric view of the vacuum diaphragm pump, omitting the outer casing. Figure 4 for Figure 3 The diagram shows a right-hand view of the vacuum diaphragm pump, omitting the outer casing. Figure 5 for Figure 1 The diagram shows the structure of the first air intake / return assembly and the diaphragm pump body. Figure 6 for Figure 1 The diagram shows the structure of the second air inlet / outlet assembly and the diaphragm pump body. Figure 7 for Figure 1 The diagram shows the structure of the air intake and exhaust assembly.

[0016] The labels in the attached diagram are as follows: 1. Diaphragm pump body; 11. Chamber; 2. Outer casing; 3. Outer casing and base; 4. Steam extraction channel; 41. First air inlet; 42. First air intake distributor; 421. First air inlet pipe A; 422. First air inlet pipe B; 43. First pressure distributor; 431. First air outlet pipe A; 432. First air outlet pipe B; 44. First air outlet; 45. Connecting pipe; 5. Process gas extraction channel; 51. Second air inlet port; 52. Second air intake distributor; 521. Second air inlet pipe A; 522. Second air inlet pipe B; 53. Second pressure distributor; 531. Second air outlet pipe A; 532. Second air outlet pipe B; 54. Second air outlet port; 6. Connecting bracket; 9. Electric motor. Detailed Implementation

[0017] To enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the present invention and are not intended to limit the invention. The described embodiments are some, but not all, of the embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present invention.

[0018] like Figures 1 to 7 As shown, this embodiment of the invention provides a vacuum diaphragm pump, which has a chamber 11 and independent steam extraction channel 4 and process gas extraction channel 5. The steam extraction channel 4 and the process gas extraction channel 5 are respectively connected to different spaces in the chamber 11.

[0019] According to an embodiment of the present invention, the vacuum diaphragm pump has a chamber 11 with different spaces within it. The vacuum diaphragm pump has independent steam extraction channels 4 and process gas extraction channels 5, which are respectively connected to different spaces within the chamber 11. Through the independent steam extraction channels 4 and process gas extraction channels 5, two different fluids (such as steam and process gas) can be extracted separately, thereby preventing the two different fluids from reacting when flowing through the same extraction channel. This also prevents powder (i.e., process gas) deposited in the extraction channel from adhering to the inner wall of the extraction channel or the inner wall of the chamber 11 due to the action of steam, thus preventing contamination and blockage of the vacuum pump cavity by deposits, ensuring the performance of the vacuum diaphragm pump, improving its service life, and extending the maintenance cycle.

[0020] like Figure 4 , Figure 5 As shown, in some embodiments of this disclosure, the steam extraction channel 4 includes a first air inlet 41, a first air intake distributor 42, a first pressure distributor 43, and a first air outlet 44. The first air inlet 41 is connected to the first air intake distributor 42, the first air intake distributor 42 is connected to the chamber 11 through a first air intake pipe, the chamber 11 is connected to the first pressure distributor 43 through a first air outlet pipe, and the first pressure distributor 43 is connected to the first air outlet 44. When the steam extraction channel 4 is working, gas enters the first air intake distributor 42 through the first air intake 41. The gas entering the first air intake distributor 42 enters the first space of the chamber 11 through the first air intake pipe. After the piston does work, the gas enters the first air outlet pipe from the first space of the chamber 11, and then enters the first pressure distributor 43 through the first air outlet pipe. Finally, it enters the first air outlet 44 through the first pressure distributor 43 and is discharged through the first air outlet 44. In some embodiments of the present invention, the steam extraction channel 4 further includes a connecting pipe 45, which connects the first air outlet 44 and the first pressure distributor 43. The connection of the connecting channel allows the first air outlet 44 and the first air inlet 41 to be spaced apart, so that the first air inlet 41 has sufficient installation space to ensure the normal operation of the exhaust process.

[0021] In some embodiments of this disclosure, the first inlet pipe and the first outlet pipe are located on the same side of the chamber 11 and form a steam delivery pipeline. By arranging the first inlet pipe and the first outlet pipe on the same side of the chamber 11, the structure of the steam extraction channel 4 can be made more compact. The steam extraction channel 4 includes at least two sets of steam delivery pipelines, which are spaced apart around the periphery of the chamber 11. By arranging at least two sets of steam delivery pipelines spaced apart around the periphery of the chamber 11, the pumping efficiency of the vacuum diaphragm pump can be improved, the airflow stability can be improved, and problems such as excessively fast local pumping speed and airflow short circuits caused by a single steam delivery pipeline can be avoided. Specifically, there can be two, three, four, or more sets of steam delivery pipelines. Those skilled in the art can arrange the corresponding number of steam delivery pipelines according to the actual space.

[0022] In some embodiments of this disclosure, the steam extraction channel 4 includes two sets of steam delivery pipelines. These two sets of steam delivery pipelines ensure stable airflow from the vacuum diaphragm pump, improve pumping efficiency, and do not occupy excessive space. The two sets of steam delivery pipelines are located on opposite sides of the chamber 11, facilitating the installation of process gas extraction channels 5 on the other opposite sides of the chamber 11, making the vacuum diaphragm pump structure more compact and reducing its overall volume. Specifically, the two sets of steam delivery pipelines include a first inlet pipe A421, a first inlet pipe B422, a first outlet pipe A431, and a first outlet pipe B432. The first inlet pipe A421 and the first outlet pipe A431 constitute the first set of steam delivery pipelines, while the first inlet pipe B422 and the first outlet pipe B432 constitute the second set of steam delivery pipelines. The first and second sets of steam delivery pipelines are respectively located on opposite sides of the chamber 11. The first and second sets of steam delivery pipelines connect to two first spaces within the chamber 11.

[0023] like Figure 4 , Figure 6As shown, in some embodiments of this disclosure, the process gas extraction channel 5 and the steam extraction channel 4 have the same structure. Specifically, the process gas extraction channel 5 includes a second air inlet 51, a second air intake distributor 52, a second pressure distributor 53, and a second air outlet 54. The second air inlet 51 is connected to the second air intake distributor 52, the second air intake distributor 52 is connected to the chamber 11 through a second air intake pipe, the chamber 11 is connected to the second pressure distributor 53 through a second air outlet pipe, and the second pressure distributor 53 is connected to the second air outlet 54. When the process gas extraction channel 5 is working, the gas enters the second intake distributor 52 through the second intake port 51. The gas entering the second intake distributor 52 enters the second space of the chamber 11 through the second intake pipe. After the piston does work, the gas enters the second outlet pipe through the second space of the chamber 11, and then enters the second pressure distributor 53 through the second outlet pipe. Finally, it enters the second outlet port 54 through the second pressure distributor 53 and is discharged through the second outlet port 54.

[0024] The process gas extraction channel 5 includes two sets of process gas delivery pipelines. These two sets of pipelines ensure stable airflow from the vacuum diaphragm pump, improve pumping efficiency, and do not occupy excessive space. The two sets of process gas delivery pipelines are located on opposite sides of the chamber 11, facilitating the installation of the process gas extraction channel 5 on the other opposite sides of the chamber 11, thus making the vacuum diaphragm pump structure more compact and reducing its overall size. Specifically, the two sets of process gas delivery pipelines include a second inlet pipe A521, a second inlet pipe B522, a second outlet pipe A531, and a second outlet pipe B532. The second inlet pipe A521 and the second outlet pipe A531 constitute the first set of process gas delivery pipelines, while the second inlet pipe B522 and the second outlet pipe B532 constitute the second set. The first and second sets of process gas delivery pipelines are respectively located on opposite sides of the chamber 11. The second set of process gas delivery pipelines connects to the two second spaces of chamber 11.

[0025] Furthermore, the process gas extraction channel 5 and the steam extraction channel 4 are arranged crosswise at one end of the vacuum pump body 1 where the connecting bracket 6 is located. Two sets of steam delivery pipelines are located on opposite sides of the chamber 11, and two sets of process gas delivery pipelines are located on the other opposite sides of the chamber 11. The crosswise arrangement of the process gas extraction channel 5 and the steam extraction channel 4 allows for a more compact structure and reduced overall size of the vacuum diaphragm pump. By changing the phase of the crank connecting rod, the pumps can be grouped in the axial direction to extract different process gases. Additionally, in this embodiment, the steam extraction channel 4 and the process gas extraction channel can simultaneously extract different fluids for efficient operation.

[0026] In some embodiments of this disclosure, the vacuum diaphragm pump has at least two independent chambers 11, which are arranged along the length of the pump. The sequential arrangement of two or more chambers 11 along the length of the pump facilitates the arrangement of the process gas extraction channel 5 and the steam extraction channel 4, saving installation space. Furthermore, adjacent chambers 11 are independent of each other to ensure that each chamber 11 operates independently. In this embodiment, three chambers 11 are preferred, ensuring a sufficient pumping rate while preventing the vacuum diaphragm pump from becoming excessively large.

[0027] In some embodiments of this disclosure, the steam extraction channel 4 and the process gas extraction channel 5 are respectively equipped with temperature control devices. The temperature of the steam extraction channel 4 and the process gas extraction channel 5 are controlled by the temperature control devices to make the temperature of each extraction channel correspond to the extracted gas, thereby ensuring the stability of the process gas in the process gas extraction channel 5 and the stability of the steam in the steam extraction channel 4.

[0028] In some embodiments of this disclosure, the vacuum diaphragm pump further includes: a diaphragm pump body 1. The diaphragm pump body 1 has chambers 11 formed therein. Specifically, the diaphragm pump body 1 has three chambers 11, which are arranged sequentially along the length of the vacuum diaphragm pump.

[0029] In some embodiments of the present invention, the vacuum diaphragm pump further includes: a connecting bracket 6, which is bolted to one end of the diaphragm pump body 1; a steam extraction channel 4 and a process gas extraction channel 5 are respectively connected to the connecting bracket 6; and a motor 9 is provided at the other end of the diaphragm pump body 1, i.e., the motor 9 and the connecting bracket 6 are located at opposite ends of the diaphragm pump body 1. Specifically, the first outlet distributor 43 and the first outlet port 44 of the steam extraction channel 4, and the second outlet distributor 53 and the second outlet port 54 of the process gas extraction channel 5 are respectively connected to the connecting bracket 6. Furthermore, along the direction away from the diaphragm pump body 1, the first outlet distributor 43, the first inlet distributor 42, and the first inlet port 41 are sequentially connected; and along the direction away from the diaphragm pump body 1, the second outlet distributor 53, the second inlet distributor 52, and the second inlet port 51 are sequentially connected. Figure 1 , Figure 2 As shown, the vacuum diaphragm pump also includes: a housing base 3 and a housing cover 2. The diaphragm pump body 1 is connected to the housing base 3. The housing cover 2 is connected to the housing base 3 and forms a working space. The diaphragm pump body 1 is located in the working space. The housing base 3 and the housing cover 2 protect the diaphragm pump body 1 and most of the air inlet and outlet components in the working space.

[0030] Furthermore, the upper cover 2 of the outer shell is provided with a plurality of mounting holes on one end near the connecting bracket 6. Each mounting hole corresponds to an air inlet or an air outlet, so that the air inlet and the exhaust port can extend to the outside of the upper cover 2, which facilitates the connection of the air inlet to the air supply equipment and the air outlet to the exhaust equipment.

[0031] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A vacuum diaphragm pump, characterized in that, The vacuum diaphragm pump has a chamber, and the vacuum diaphragm pump has independent steam extraction channels and process gas extraction channels, which are respectively connected to different spaces in the chamber.

2. The vacuum diaphragm pump according to claim 1, characterized in that, The steam extraction channel includes a first air inlet, a first air intake distributor, a first pressure distributor, and a first air outlet. The first air inlet is connected to the first air intake distributor, the first air intake distributor is connected to the chamber through a first air intake pipe, the chamber is connected to the first pressure distributor through a first air outlet pipe, and the first pressure distributor is connected to the first air outlet.

3. The vacuum diaphragm pump according to claim 2, characterized in that, The first air inlet pipe and the first air outlet pipe are located on the same side of the chamber and form a steam delivery pipeline. The steam extraction channel includes at least two sets of the steam delivery pipelines, which are spaced apart around the periphery of the chamber.

4. The vacuum diaphragm pump according to claim 3, characterized in that, The steam extraction channel includes two sets of steam delivery pipelines, which are located on opposite sides of the chamber.

5. The vacuum diaphragm pump according to claim 2, characterized in that, The steam extraction channel also includes a connecting pipe that connects the first pressure distributor to the first gas outlet.

6. The vacuum diaphragm pump according to any one of claims 2 to 5, characterized in that, The process gas extraction channel and the steam extraction channel have the same structure, and the process gas extraction channel and the steam extraction channel are arranged crosswise at one end of the vacuum diaphragm pump.

7. The vacuum diaphragm pump according to claim 1, characterized in that, The vacuum diaphragm pump has at least two independent chambers, and the at least two chambers are arranged along the length of the vacuum diaphragm pump.

8. The vacuum diaphragm pump according to claim 1, characterized in that, The steam extraction channel and the process gas extraction channel are each equipped with a temperature control device, which controls the temperature of the steam extraction channel and the temperature of the process gas extraction channel, respectively.

9. The vacuum diaphragm pump according to claim 1, characterized in that, The vacuum diaphragm pump further includes: a diaphragm pump body and a connecting bracket, wherein the diaphragm pump body forms the chamber, the connecting bracket is connected to one end of the diaphragm pump body, and the steam extraction channel and the process gas extraction channel are respectively connected to the connecting bracket.

10. The vacuum diaphragm pump according to claim 9, characterized in that, The vacuum diaphragm pump further includes: a housing base and a housing upper cover, the housing upper cover being connected to the housing base to form a working space, the diaphragm pump body being connected to the housing base and located within the working space, and a portion of the steam extraction channel and a portion of the process gas extraction channel being located within the working space.

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