Microwave transmission coaxial waveguide matching structure

Abstract

The utility model relates to the technical field of microwave plasma vapor deposition equipment, in particular to a microwave transmission coaxial waveguide matching structure which comprises a cavity shell, a fixing mechanism is arranged in the cavity shell, a base plate table is arranged in the cavity shell, a molybdenum table is installed above the base plate table, a coaxial shell is installed at the bottom of the cavity shell, and the coaxial shell is arranged in the cavity shell. A coaxial core wire is installed at the bottom of the substrate table, and a microwave channel exists between the coaxial core wire and the coaxial shell. According to the microwave transmission coaxial waveguide matching structure, the cavity shell and the fixing mechanism are matched, the substrate table and the cavity shell are matched through the multiple fixing columns, the effect of strong extrusion on the rubber ring is achieved, the deformation form is large, the sealing performance is enhanced, the vacuum degree of an operation cavity is improved, the fixing columns are evenly distributed, and the service life of the microwave transmission coaxial waveguide matching structure is prolonged. The influence on microwave transmission and microwave field distribution is small, and normal microwave transmission is ensured.

Description

Technical Field

[0001] This utility model relates to the field of microwave plasma vapor deposition equipment technology, specifically a microwave transmission coaxial waveguide matching structure. Background Technology

[0002] The coaxial method transmits electromagnetic waves using coaxial cables. A coaxial cable consists of two conductors, an inner and an outer one, separated by an insulation layer and a shielding layer. The signal is transmitted through the inner conductor, while the shielding layer isolates external interference. Coaxial cables are suitable for transmission in the lower frequency range, such as television signals and broadcast signals.

[0003] For example, a microwave plasma cavity double-sealed furnace door structure with announcement number "CN216155963U" includes a growth chamber and a connecting chamber connected from top to bottom, a water-cooled substrate located in the growth chamber, a threaded molybdenum stage located on the water-cooled substrate, and a waveguide located in the connecting chamber. Diamond crystals are placed on the threaded molybdenum stage and continuously grown in the growth chamber. A water-cooled cavity wall is provided outside the growth chamber, and the water-cooled cavity wall and the water-cooled substrate work together to achieve water cooling. A furnace door is located at the bottom of the growth chamber to facilitate the placement and removal of diamond crystals, and the lower furnace door facilitates the disassembly and maintenance of the water-cooled substrate. However, in this microwave plasma cavity double-sealed furnace door structure, the coaxial core wire is hollow to allow cooling water to enter and exit the substrate stage, resulting in limited tensile strength. This leads to weak compressive force between the substrate stage and the outer shell of the reaction chamber on the vacuum sealing ring, resulting in poor vacuum sealing of the working chamber and preventing normal microwave transmission. Summary of the Invention

[0004] The purpose of this invention is to solve the problem that the coaxial core wire, being hollow in order to input and output cooling water to the substrate stage, has limited tensile strength, resulting in weak compressive force between the substrate stage and the outer shell of the reaction chamber on the vacuum sealing ring, leading to poor vacuum sealing effect of the working chamber and preventing normal microwave transmission. Therefore, a microwave transmission coaxial waveguide matching structure is proposed.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A microwave transmission coaxial waveguide matching structure is designed, including a cavity shell, a fixing mechanism inside the cavity shell, a substrate stage inside the cavity shell, a molybdenum stage mounted above the substrate stage, a coaxial shell mounted at the bottom of the cavity shell, a coaxial core wire mounted at the bottom of the substrate stage, and a microwave channel between the coaxial core wire and the coaxial shell.

[0007] Preferably, the fixing mechanism includes a fixing post and an upper quartz ring. The upper end of each fixing post is fixedly connected to the base plate. Each fixing post passes through the outer shell of the cavity through a through hole. The outer wall of each fixing post is threadedly connected to a nut. A rubber plug is installed on the upper end of each nut. The outer wall of each rubber plug abuts against the outer shell of the cavity. The upper quartz ring and the lower quartz ring are slidably connected. A rubber ring is installed at the bottom of the upper quartz ring. The bottom of the rubber ring abuts against the lower quartz ring.

[0008] Preferably, the upper end of the upper quartz ring is fixedly connected to the substrate stage.

[0009] Preferably, the bottom of each lower quartz ring is fixedly connected to the outer shell of the cavity.

[0010] Preferably, the fixing posts are evenly distributed below the substrate platform.

[0011] The present invention proposes a coaxial waveguide matching structure for microwave transmission, which has the following advantages: through the cooperation of the cavity shell and the fixing mechanism, multiple fixing posts are used to cooperate with the substrate stage and the cavity shell to achieve a strong squeezing effect on the rubber ring, resulting in a large deformation shape, enhancing the sealing performance, improving the vacuum degree of the working cavity, and the uniform distribution of the fixing posts has little impact on microwave transmission and microwave field distribution, thus ensuring normal microwave transmission. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model;

[0013] Figure 2 for Figure 1 A front sectional view;

[0014] Figure 3 for Figure 1 Top sectional view;

[0015] Figure 4 for Figure 2 A partial 3D schematic diagram;

[0016] Figure 5 for Figure 2 A magnified view of part A in the diagram.

[0017] In the diagram: 1. Cavity shell, 2. Molybdenum stage, 3. Substrate stage, 4. Fixing mechanism, 401. Fixing post, 402. Rubber plug, 403. Nut, 404. Upper quartz ring, 405. Rubber ring, 406. Lower quartz ring, 5. Coaxial shell, 6. Coaxial core wire. Detailed Implementation

[0018] The present invention will be further described below with reference to the accompanying drawings:

[0019] See attached document Figure 1-5In this embodiment, a microwave transmission coaxial waveguide matching structure includes a cavity shell 1, a fixing mechanism 4 inside the cavity shell 1, a substrate platform 3 inside the cavity shell 1, a molybdenum platform 2 mounted above the substrate platform 3, a coaxial shell 5 mounted at the bottom of the cavity shell 1, a coaxial core wire 6 mounted at the bottom of the substrate platform 3, and a microwave channel between the coaxial core wire 6 and the coaxial shell 5.

[0020] The fixing mechanism 4 includes a fixing post 401 and an upper quartz ring 404. The upper end of the fixing post 401 is fixedly connected to the base plate 3. The fixing post 401 passes through the cavity shell 1 through the through hole. The outer wall of the fixing post 401 is threadedly connected to the nut 403. A rubber plug 402 is installed on the upper end of the nut 403. The outer wall of the rubber plug 402 abuts against the cavity shell 1. The upper quartz ring 404 and the lower quartz ring 406 are slidably connected. A rubber ring 405 is installed at the bottom of the upper quartz ring 404. The bottom of the rubber ring 405 abuts against the lower quartz ring 406.

[0021] The upper end of the upper quartz ring 404 is fixedly connected to the substrate stage 3, and the bottom of the lower quartz ring 406 is fixedly connected to the cavity shell 1. The fixing posts 401 are evenly distributed below the substrate stage 3.

[0022] Working principle:

[0023] When using a coaxial waveguide matching structure for microwave transmission:

[0024] The operator inserts the upper quartz ring 404 into the lower quartz ring 406 and makes multiple fixing posts 401 pass through the cavity shell 1. Then the operator rotates multiple nuts 403. When the outer wall of the rubber plug 402 is pressed against the cavity shell 1, the operator stops rotating the nuts 403. When the nuts 403 are rotated, the upper quartz ring 404 moves downward to press the rubber ring 405. The multiple fixing posts 401 are evenly distributed below the substrate 3, so that the vertical force on the upper quartz ring 404 and the lower quartz ring 406 is relatively uniform. At the same time, the rubber ring 405 will undergo a large deformation. It is not only due to the tension applied by the hollow coaxial core wire 6 that it deforms. This can ensure the sealing between the upper quartz ring 404, the lower quartz ring 406 and the substrate 3 and the cavity shell 1, and ensure the vacuum degree of the working cavity.

[0025] The rubber plug 402 can prevent air leakage from the outside of the fixing post 401, and the uniform distribution of the fixing posts 401 can reduce the impact of microwave transmission.

[0026] Although the present invention has been illustrated and described with reference to preferred embodiments, those skilled in the art should understand that various changes in form and detail are possible within the scope of the claims.

Claims

1. A microwave transmission coaxial waveguide matching structure, comprising a cavity shell (1), characterized in that: The cavity shell (1) is provided with a fixing mechanism (4), the cavity shell (1) is provided with a substrate stage (3), a molybdenum stage (2) is installed above the substrate stage (3), a coaxial shell (5) is installed at the bottom of the cavity shell (1), a coaxial core wire (6) is installed at the bottom of the substrate stage (3), and a microwave channel exists between the coaxial core wire (6) and the coaxial shell (5).

2. The microwave transmission coaxial waveguide matching structure according to claim 1, characterized in that: The fixing mechanism (4) includes a fixing post (401) and an upper quartz ring (404). The upper end of the fixing post (401) is fixedly connected to the base plate (3). The fixing post (401) passes through the cavity shell (1) through the through hole. The outer wall of the fixing post (401) is threadedly connected to the nut (403). The upper end of the nut (403) is equipped with a rubber plug (402). The outer wall of the rubber plug (402) is pressed against the cavity shell (1). The upper quartz ring (404) and the lower quartz ring (406) are slidably connected. A rubber ring (405) is installed at the bottom of the upper quartz ring (404). The bottom of the rubber ring (405) is pressed against the lower quartz ring (406).

3. The microwave transmission coaxial waveguide matching structure according to claim 2, characterized in that: The upper end of the upper quartz ring (404) is fixedly connected to the substrate stage (3).

4. The microwave transmission coaxial waveguide matching structure according to claim 2, characterized in that: The bottom of the lower quartz ring (406) is fixedly connected to the outer shell (1) of the cavity.

5. The microwave transmission coaxial waveguide matching structure according to claim 2, characterized in that: The fixing posts (401) are evenly distributed below the substrate platform (3).

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