Sucker cleaning device

Abstract

The utility model relates to the technical field of semiconductors, in particular to a suction cup cleaning device. The suction cup cleaning device comprises an air inlet channel and a suction cup, wherein the air inlet channel is used for introducing cleaning air; the first end of the ultrasonic generator is connected with the air inlet channel; the air outlet channel is connected with the second end of the ultrasonic generator and provided with an air outlet facing the suction cup; the controller is at least connected with the ultrasonic generator. The ultrasonic generator is arranged to connect the gas inlet channel and the gas outlet channel, so that the clean gas obtains high-frequency vibration. The vibrating clean gas causes vibration and mutual collision of ambient gas molecules to form a pressure gradient. Furthermore, the vibrating cleaning gas is in contact with the particulate matters on the surface of the suction cup, so that the particulate matters are subjected to pressure action in different directions, and the pressure difference can cause the particulate matters to vibrate or move, so that the adhesive force between the particulate matters and the surface of the suction cup is reduced, and the particulate matters are more easily separated from the surface of the suction cup.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a suction cup cleaning device. Background Technology

[0002] In semiconductor fabrication, wafers and other structures are typically placed on a stage within a process chamber for deposition, etching, and other processes. The stage often includes chucks or similar structures to hold the wafer in place. During deposition and etching, the chucks come into contact with the wafer, causing tiny particles to adhere to them. These particles can damage the bottom surface of the wafer, necessitating regular cleaning of the chucks.

[0003] In related technologies, a common method for cleaning suction cups is to use a lint-free cloth in conjunction with a vacuum cleaner. However, this cleaning method is not effective enough, and tiny particles still remain on the surface of the suction cup. Utility Model Content

[0004] Therefore, it is necessary to provide a suction cup cleaning device to address the problem that it is difficult to remove tiny particles from the surface of suction cups in the existing technology.

[0005] To achieve the above objectives, a suction cup cleaning device is provided, comprising:

[0006] An air intake channel has an air inlet for receiving clean gas.

[0007] An ultrasonic generator, the first end of which is connected to the air inlet channel;

[0008] An air outlet channel is connected to the second end of the ultrasonic generator, and the air outlet channel has an air outlet facing the suction cup;

[0009] The controller is connected to at least the ultrasonic generator.

[0010] In one embodiment, the suction cup cleaning device includes:

[0011] The suction channel has a suction port facing the suction cup;

[0012] An air pump, connected to the air intake channel, is used to provide negative pressure to the air intake channel.

[0013] In one embodiment, the end of the air outlet channel having the air outlet extends to the air intake channel, and the air intake channel is located on the outer periphery of the air outlet channel.

[0014] In one embodiment, the exhaust channel protrudes outward from the intake port of the intake channel.

[0015] In one embodiment, the surface of the air intake channel is provided with a first roller.

[0016] In one embodiment, the intake channel is provided with a gas filter, and / or the exhaust channel is provided with a gas filter, and / or the pump includes a silent pump.

[0017] In one embodiment, the suction cup cleaning device includes:

[0018] The return tank is connected to the air pump.

[0019] In one embodiment, the suction cup cleaning device further includes:

[0020] A cleaning head is provided at one end of the air outlet channel where the air outlet is located, and the cleaning head is equipped with a lifting device.

[0021] In one embodiment, the cleaning head is provided with a second roller, and the ultrasonic generator is located closer to the air outlet of the air outlet than the air inlet of the air inlet channel.

[0022] In one embodiment, the suction cup cleaning device includes:

[0023] The housing contains the ultrasonic generator, the air inlet channel and the air outlet channel, which extend through the surface of the housing. A third roller is provided at the bottom of the housing.

[0024] The suction cup cleaning device described in this manual has the following beneficial effects: By connecting the inlet and outlet channels with an ultrasonic generator, the cleaning gas undergoes high-frequency vibration. This vibration causes ambient gas molecules to vibrate and collide, creating a pressure gradient. Consequently, the vibrating cleaning gas comes into contact with particles on the suction cup surface, subjecting the particles to pressure from different directions. This pressure difference causes the particles to vibrate or move, reducing the adhesion between the particles and the suction cup surface, making it easier for the particles to separate. Furthermore, the cleaning gas can also possess a certain velocity, causing its volume to expand rapidly at the outlet. The high-frequency vibration of the cleaning gas further intensifies this volume expansion, producing a micro-explosion effect, which further detaches particles from the suction cup surface. In addition, the suction cup cleaning device in this manual includes a controller to adjust parameters such as the frequency and amplitude of the cleaning gas vibration, making it suitable for various scenarios. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of a suction cup cleaning device provided in one embodiment;

[0027] Figure 2 This is a schematic diagram of a cleaning head provided in one embodiment;

[0028] Figure 3 This is a schematic diagram of the air intake and air exhaust channels provided in one embodiment;

[0029] Figure 4 This is a schematic diagram of a cleaning head provided in another embodiment.

[0030] Explanation of reference numerals in the attached drawings: Suction cup cleaning device - 100; Air inlet channel - 110; Ultrasonic generator - 120; Air outlet channel - 130; Air suction channel - 140; Air pump - 150; Connecting pipe - 151; First roller - 160; Second roller - 161; Third roller - 162; Return tank - 170; Cleaning head - 180; Housing 190-190; Suction cup - 200. Detailed Implementation

[0031] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate preferred embodiments of the application. However, this application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the content of this application.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0033] In each embodiment, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in each embodiment according to the specific circumstances.

[0034] It should be understood that when an element or layer is referred to as "on," "adjacent to," or "connected to" other elements or layers, it may be directly on, adjacent to, or connected to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," or "directly connected to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this embodiment, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion.

[0035] Spatial relation terms such as “below,” “under,” “below,” “below,” “above,” “above,” etc., are used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, an element or feature described as “below,” “below,” or “below” will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0036] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that when the terms “comprise” and / or “comprising” are used in this specification, the presence of the stated feature, integer, step, operation, element, and / or part is established, but the presence or addition of one or more other features, integers, steps, operations, elements, parts, and / or groups is not excluded. Meanwhile, when used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0037] Embodiments of the embodiments are described herein with reference to cross-sectional views that serve as schematic diagrams of ideal embodiments (and intermediate structures) of this specification. Variations in the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are to be expected. Therefore, embodiments of this specification should not be limited to the specific shapes of the regions shown herein, but rather include shape deviations due to, for example, manufacturing techniques. The regions shown in the figures are substantially schematic, and their shapes do not represent the actual shapes of regions of the device, nor do they limit the scope of this embodiment.

[0038] In one embodiment, see Figures 1 to 3 This embodiment provides a suction cup cleaning device 100. It is understood that the suction cup cleaning device 100 provided in this embodiment and the following embodiments can be a suction cup cleaning device 100 independent of the process chamber, or it can be integrated into the process chamber. The suction cup cleaning device 100 provided in this embodiment includes an air inlet channel 110, an ultrasonic generator 120, an air outlet channel 130, and a controller.

[0039] The air inlet channel 110 has an air inlet for receiving a cleaning gas. The cleaning gas may include inert or rare gases. For example, the cleaning gas may include nitrogen, helium, neon, and argon. In one possible example, the air inlet channel 110 may be connected to a cleaning gas source, which may be independent of or integrated into the suction cup cleaning device 100. This embodiment does not impose specific limitations on this. The cleaning gas flowing into the air inlet channel 110 may have a certain velocity; this embodiment also does not impose specific limitations on the flow rate of the cleaning gas.

[0040] The ultrasonic generator 120 can be used to generate high-frequency vibrations in a clean gas. As an example, the ultrasonic generator 120 may include an ultrasonic generator, etc. Further, the ultrasonic generator may include a piezoelectric ultrasonic generator or an electromagnetic ultrasonic generator, etc. In one possible example, if the ultrasonic generator includes a piezoelectric ultrasonic generator, the piezoelectric ultrasonic generator may be equipped with a piezoelectric ceramic or a piezoelectric crystal, etc. When an electric field is applied to the piezoelectric ceramic or piezoelectric crystal, the piezoelectric ceramic or piezoelectric crystal deforms, thereby generating mechanical vibrations. These vibrations are amplified and converted into ultrasonic waves through a resonant cavity or transducer. These ultrasonic waves, when propagating in the clean gas, cause the clean gas to vibrate, thereby causing the clean gas to generate high-frequency vibrations.

[0041] The ultrasonic generator 120 has its first end connected to the air inlet channel 110 and its second end connected to the air outlet channel 130. It is understood that the cleaning gas flowing from the second end of the ultrasonic generator 120 has a certain vibration frequency. The air outlet channel 130 has an outlet facing the suction cup 200. The air outlet channel 130 may have a certain length, and it may also be movable or retractable to facilitate moving the outlet of the air outlet channel 130 to the surface of different suction cups 200. In one possible example, the diameter of the end of the air outlet channel 130 near the outlet may gradually decrease, thereby concentrating the cleaning gas more at the outlet.

[0042] Furthermore, the ultrasonic generator 120 or the air outlet channel 130 can adjust the speed of the cleaning gas. For example, the ultrasonic generator 120 or the air outlet channel 130 can increase or decrease the speed of the cleaning gas. In this case, the ultrasonic generator 120 or the air outlet channel 130 can be equipped with a negative pressure device, etc.

[0043] The controller can use a programmable PLC for human-machine interaction control. The controller may also have a communication unit (e.g., an IE communication unit or a network communication unit) to communicate with devices such as the ultrasonic generator 120. As an example, the controller may include a laptop, mobile phone, or tablet.

[0044] The controller can be connected to the ultrasonic generator 120. In this case, the controller can precisely adjust the electric field applied to the piezoelectric ceramic or piezoelectric crystal, thereby controlling the frequency, amplitude, and other parameters of the cleaning gas vibration. Alternatively, the controller can be connected to the air inlet channel 110 to control whether the cleaning gas flows into the ultrasonic generator 120. Or, the controller can be connected to the air outlet channel 130 to control whether the cleaning gas flows to the suction cup 200.

[0045] Furthermore, the controller can be equipped with manual and automatic modes. In manual mode, the operator can set various parameters of the ultrasonic generator 120, etc. Alternatively, the controller can be connected to the process chamber, in which case the controller can also set various parameters of the process chamber. In automatic mode, the controller can be set to activate the ultrasonic generator 120, etc., when multiple parameters of the suction cup cleaning device 100 reach design standards.

[0046] In this embodiment, an ultrasonic generator 120 is connected to the air inlet channel 110 and the air outlet channel 130, thereby enabling the cleaning gas to undergo high-frequency vibration. The vibrating cleaning gas causes the ambient gas molecules to vibrate and collide with each other, forming a pressure gradient. Subsequently, the vibrating cleaning gas comes into contact with the particles on the surface of the suction cup 200, subjecting the particles to pressure from different directions. This pressure difference causes the particles to vibrate or move, thereby reducing the adhesion between the particles and the surface of the suction cup 200, making it easier for the particles to separate from the surface of the suction cup 200. Furthermore, the cleaning gas can also have a certain velocity, causing its volume to expand rapidly at the outlet. When the cleaning gas undergoes high-frequency vibration, this high-frequency vibration further intensifies this volume expansion, producing a micro-explosion effect, which further causes the particles on the surface of the suction cup 200 to detach from the surface of the suction cup 200. Moreover, this embodiment includes a controller to adjust parameters such as the frequency and amplitude of the cleaning gas vibration, making the suction cup cleaning device 100 applicable to various scenarios. That is, when the surface of the suction cup 200 has small particles, the controller can adjust the vibration frequency of the cleaning gas to be lower. When the surface of the suction cup 200 has larger particles, the controller can adjust the vibration frequency of the cleaning gas to be higher.

[0047] In one embodiment, see Figure 1 The suction cup cleaning device 100 includes a suction channel 140 and a vacuum pump 150.

[0048] The suction channel 140 may have a suction port facing the suction cup 200. The suction channel 140 may collect the cleaning gas blown out of the exhaust channel 130, the gas on the surface of the suction cup 200, or blown particles. The suction channel 140 may also be movable or retractable.

[0049] The vacuum pump 150 is connected to the suction channel 140 and is used to provide negative pressure to the suction channel 140. For example, see [link to relevant documentation]. Figure 3 The vacuum pump 150 is connected to the suction channel 140 via a connecting pipe 151. As an example, the vacuum pump 150 may include a silent pump, a vacuum pump, etc. Of course, while providing negative pressure to the suction channel 140, the vacuum pump 150 can also accelerate the flow of clean gas within the exhaust channel 130.

[0050] In one possible example, please see Figure 2 and Figure 3 The outlet end of the air outlet 130 extends into the intake channel 140 (for example, the extension distance H2 can be 100 mm), and the intake channel 140 is located on the outer periphery of the air outlet 130. In this case, the diameter of the intake port is larger than the diameter of the outlet. For example, the diameter of the outlet (D2) can be 20 mm, and the diameter of the intake port (D1) can be 40 mm.

[0051] Of course, in another possible example, the two intake ports can also be located on opposite sides of the exhaust port. In this case, this embodiment does not impose specific limitations on the diameters of the intake and exhaust ports. For example, the diameter of the intake port (D1) can be 10 mm, and the diameter of the exhaust port (D2) can be 20 mm. In the two examples above, the intake channel 140 can collect the particles blown up by the cleaning gas more comprehensively and quickly.

[0052] For further details, please refer to Figure 2 The outlet of the exhaust channel 130 can protrude beyond the inlet of the intake channel 140, ensuring that the intake channel 140 does not affect the exhaust efficiency of the exhaust channel 130. For example, the outlet of the exhaust channel 130 can protrude 5mm-10mm beyond the inlet of the intake channel 140. In another possible example, the exhaust channel 130 and the intake channel 140 are arranged independently. In this case, the exhaust channel 130 can be used to blow up particles first, and then the intake channel 140 can be used to collect the particles. In yet another possible example, the exhaust channel 130 and the intake channel 140 can also be arranged side-by-side, etc.

[0053] In this embodiment, firstly, by setting up the suction channel 140 and the vacuum pump 150, it is easier to collect the particles blown up by the exhaust channel 130, thereby cleaning the suction cup 200 more quickly. Secondly, the vacuum pump 150 can provide negative pressure to the suction channel 140 while also accelerating the cleaning gas in the exhaust channel 130, thereby achieving a higher rate of cleaning gas in the exhaust channel 130 and further enhancing the cleaning ability of particles on the surface of the suction cup 200.

[0054] In one embodiment, a gas filter is provided in the intake passage 140 and / or the exhaust passage 130.

[0055] A gas filter can be installed in the suction channel 140 to concentrate particulate matter on the surface of the suction cup 200. A gas filter is installed in the exhaust channel 130 to prevent the cleaning gas from containing particulate matter. As an example, the filter element of the gas filter may include filter media such as glass fiber, polyester fiber, polypropylene, and polytetrafluoroethylene.

[0056] Furthermore, a gas filter comprises two parts: a low-efficiency filter and a high-efficiency filter. The material, density, or arrangement of the filter elements in each part may differ. For example, the side of a gas filter closest to the outlet or inlet may be a low-efficiency filter, while the side furthest from the outlet or inlet may be a high-efficiency filter.

[0057] Furthermore, the gas filter may include replaceable filter elements to meet various cleaning needs. For example, for suction cups 200 that have not been cleaned for a long time, the filter element of the gas filter may include high-density glass fiber. For suction cups 200 that are cleaned regularly, the filter element of the gas filter may include low-density glass fiber. Further, the gas filter may dewater to remove moisture and other substances that may be present in the air.

[0058] Meanwhile, the suction cup cleaning device 100 may also include a return tank 170. The return tank 170 can be connected to a vacuum pump 150. In this case, the gas drawn back by the vacuum pump 150 can be stored in the return tank 170 and, after purification, can be used again as cleaning gas. The return tank 170 can be configured as a detachable structure. In this case, when there is a large amount of gas in the return tank 170, the return tank 170 can be disassembled and the gas processed. When there is a small amount of gas in the return tank 170, the return tank 170 does not need to be processed.

[0059] In this embodiment, by providing gas filters in the suction channel 140 and the exhaust channel 130, particulate matter on the surface of the suction cup 200 is concentrated, or the cleaning gas is ensured to be free of particulate matter, thereby improving the cleaning efficiency of the suction cup 200. Furthermore, the gas filters can be used in conjunction with the return tank 170 to recover the cleaning gas, reducing the cost of the cleaning gas.

[0060] In one embodiment, the suction cup cleaning device 100 further includes a cleaning head 180.

[0061] The cleaning head 180 may be positioned at one end of the air outlet channel 130. The cleaning head 180 may have an opening facing the suction cup 200, which exposes the air outlet of the air outlet channel 130. Additionally, please refer to... Figure 2 When the end of the air outlet channel 130 with the air outlet extends to the air intake channel 140, the opening can simultaneously expose both the air outlet and the air intake.

[0062] This embodiment does not limit the specific shape and size of the cleaning head 180. For example, the opening of the cleaning head 180 can be square, circular, or irregular in shape. The specific size of the cleaning head 180 can be related to the diameter of the wafer. For example, the diameter (W) of the wafer can be 300 mm, and the diameter of the cleaning head 180 can be between 50 mm and 200 mm, that is, the diameter of the cleaning head 180 is less than or equal to the diameter of the wafer.

[0063] This embodiment, by providing a cleaning head 180, facilitates observation of the specific location of the air outlet, preventing damage caused by contact between the air outlet channel 130 and the suction cup 200. As an example, the cleaning head 180 may be made of aluminum alloy, dark plastic, etc. In another example, the cleaning head 180 may be made of transparent plastic, allowing the operator to visually observe the positional relationship between the air outlet channel 130 and the suction cup 200.

[0064] In addition, the suction cup cleaning device 100 is equipped with a lifting device. This lifting device can be connected to a controller, which can precisely control the position of the cleaning head 180, thereby further preventing the air outlet 130 from contacting the suction cup 200. For example, the lifting device can control the cleaning head 180 to move 0.5mm-1mm (see, for example, [reference needed]). Figure 2 , Figure 2 The intermediate distance H1 can range from 0.5mm to 1mm. Alternatively, the cleaning head 180 can be in no contact with the suction cup 200. In this case, the cleaning head 180 can also be equipped with a position sensor or a distance sensor. When the distance between the cleaning head 180 and the suction cup 200 is less than a preset distance, the position sensor or distance sensor can trigger an alarm via the controller.

[0065] In this embodiment, by setting the cleaning head 180 to be connected to the end of the air outlet 130 where the air outlet is located, the surface of the suction cup 200 is prevented from contacting the air outlet 130 and thus being damaged, thereby extending the service life of the suction cup cleaning device 100.

[0066] For further details, please refer to Figure 4 The ultrasonic generator 120 is positioned closer to the air outlet of the air outlet 130 than the air inlet of the air inlet channel 110; that is, the ultrasonic generator 120 is close to the air outlet. In one possible example, the ultrasonic generator 120 may be located on the surface of the cleaning head 180 away from the suction cup 200. In another possible example, the air inlet channel 110 may be longer, and the air outlet channel 130 may be shorter. In both examples, positioning the ultrasonic generator 120 close to the air outlet avoids loss of cleaning gas within the air outlet channel 130.

[0067] In one embodiment, the suction cup cleaning device 100 also includes a plurality of rollers.

[0068] In one possible example, when the end of the air outlet 130 with the air outlet extends into the air intake 140, the surface of the air intake 140 is provided with a first roller 160. At this time, the lifting device can also control the lifting of the first roller 160.

[0069] In another possible example, the cleaning head 180 may have multiple second rollers 161 on one side facing the suction cup 200. The multiple second rollers 161 may be symmetrically distributed.

[0070] In another possible example, the suction cup cleaning device 100 includes a housing 190 with a third roller 162 at its bottom. It is understood that when the suction cup cleaning device 100 includes the housing 190, the ultrasonic generator 120, the air pump 150, and the return tank 170 can be located within the housing 190, the air intake channel 110 and the air intake channel 140 extend through the surface of the housing 190, and the controller can be located on the surface of the housing 190. The material of the housing 190 can include stainless steel, etc. The portions of the air intake channel 110 that contact the housing 190, or the portions of the air intake channel 140 that contact the housing 190, can be welded to create a seal between the air intake channel 110 and the housing 190, or between the air intake channel 140 and the housing 190.

[0071] The outer circumference of the roller can be made of materials such as rubber, thereby reducing noise during roller movement. The inner circumference of the roller can be made of materials such as metal, thereby extending the roller's lifespan.

[0072] In this embodiment, by providing a first roller 160 on the surface of the suction channel 140, or by providing a second roller 161 on the side of the cleaning head 180 facing the suction cup 200, or by providing a third roller 162 at the bottom of the housing 190, the suction channel 140, the cleaning head 180, or the housing 190 can be moved, so that the suction cup cleaning device 100 can clean the suction cups 200 of multiple process chambers.

[0073] It is understood that the suction cup cleaning device 100 of this embodiment can not only be used to clean the suction cup 200, but also to clean other instruments used in the semiconductor manufacturing process.

[0074] In the description of this specification, references to terms such as "some embodiments," "other embodiments," and "ideal embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. It should be understood that the phrase "this embodiment" or "an embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of this application. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification do not necessarily refer to the same embodiment.

[0075] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features of the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0076] The embodiments described above are merely examples of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims. The above descriptions are merely preferred embodiments of this application and do not limit the patent scope of this application. Any equivalent structural transformations made based on the inventive concept of this application, utilizing the description and drawings of this application, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this application.

Claims

1. A suction cup cleaning device, characterized in that, include: An air intake channel has an air inlet for receiving clean gas. An ultrasonic generator, the first end of which is connected to the air inlet channel; An air outlet channel is connected to the second end of the ultrasonic generator, and the air outlet channel has an air outlet facing the suction cup; The controller is connected to at least the ultrasonic generator.

2. The suction cup cleaning device according to claim 1, characterized in that, The suction cup cleaning device includes: The suction channel has a suction port facing the suction cup; An air pump, connected to the air intake channel, is used to provide negative pressure to the air intake channel.

3. The suction cup cleaning device according to claim 2, characterized in that, The air outlet channel has one end with the air outlet extending to the air intake channel, and the air intake channel is located on the outer periphery of the air outlet channel.

4. The suction cup cleaning device according to claim 3, characterized in that, The air outlet protrudes outward from the air inlet of the air inlet.

5. The suction cup cleaning device according to claim 2, characterized in that, The surface of the air intake channel is provided with a first roller.

6. The suction cup cleaning device according to claim 2, characterized in that, The air intake channel is equipped with a gas filter, and / or the air outlet channel is equipped with a gas filter, and / or the air pump includes a silent pump.

7. The suction cup cleaning device according to claim 2, characterized in that, The suction cup cleaning device includes: The return tank is connected to the air pump.

8. The suction cup cleaning device according to claim 1, characterized in that, The suction cup cleaning device also includes: A cleaning head is disposed at the end of the air outlet channel where the air outlet is located; A lifting device is used to raise and lower the cleaning head.

9. The suction cup cleaning device according to claim 8, characterized in that, The cleaning head is equipped with a second roller, and the ultrasonic generator is closer to the air outlet of the air outlet than the air inlet of the air inlet channel.

10. The suction cup cleaning device according to claim 1, characterized in that, The suction cup cleaning device includes: The housing contains the ultrasonic generator, the air inlet channel and the air outlet channel, which extend through the surface of the housing. A third roller is provided at the bottom of the housing.

Images