Vacuum carrying table clamping device
By combining the side and end clamping components of the vacuum stage clamping device with the design of vacuum adsorption holes, the problem of unstable membrane fixation is solved, and stable membrane fixation and high-precision detection are achieved.
Patent Information
- Application Number
- CN202423117265.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-17
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-12-17
AI Technical Summary
The existing membrane placement stage has poor membrane fixation effect, resulting in the inability to achieve high accuracy during the testing process.
A vacuum stage clamping device is used to clamp and fix the edge of the diaphragm through side clamping components and end clamping components, and to fix the diaphragm through vacuum adsorption holes, so as to ensure the stability and accuracy of the diaphragm on the stage.
This method achieves stable fixation of the diaphragm, avoids scratches and stress concentration, improves the accuracy and stability of the testing process, and ensures the flatness of the diaphragm during material handling.
Smart Images
Figure CN223493085U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of diaphragm positioning technology, and in particular to a vacuum stage clamping device. Background Technology
[0002] Diaphragm defect detection typically relies on advanced automated equipment and sophisticated inspection techniques. For example, a common method involves real-time scanning and image acquisition of the diaphragm surface using a high-resolution industrial camera or laser sensor. These images are then analyzed and processed using advanced image processing techniques and algorithms to identify and locate various defects on the diaphragm surface.
[0003] During membrane testing, the membrane needs to be placed and fixed on a stage, but existing membrane placement stages provide poor fixation. This results in inconsistent accuracy during subsequent testing. Therefore, improvements are needed to the existing membrane testing fixation stage structure. Utility Model Content
[0004] To solve the above problems, this utility model is used for diaphragm fixing, especially suitable for fixing deformed and warped diaphragms. The robot places the diaphragm on the platform, and the side clamping component and the end face clamping component clamp and fix the edge of the diaphragm, so that the entire diaphragm is adsorbed with the vacuum adsorption hole of the platform, thus realizing a fixed vacuum platform clamping device.
[0005] The technical solution adopted by this utility model is: a vacuum stage clamping device, including a base, a stage, side clamping components and end clamping components. The stage is disposed on the base, and a plurality of vacuum adsorption holes are evenly distributed on the stage. Two sets of side clamping components are provided, which are disposed opposite to each other on both sides of the base and are used to clamp and fix the two sides of the membrane to the stage. Two sets of end clamping components are provided, which are disposed opposite to each other at both ends of the base and are used to clamp and fix the two ends of the membrane to the stage.
[0006] A further improvement to the above solution is that the base includes a base plate and supporting side plates, the supporting side plates are disposed on both sides of the base plate, and the platform is disposed on the upper surface of the supporting side plates.
[0007] A further improvement to the above scheme is that the stage is provided with an adsorption surface, the adsorption surface is a flat surface, and the vacuum adsorption hole is provided on the adsorption surface to adsorb and fix the membrane on the adsorption surface.
[0008] A further improvement to the above solution is that a pressing groove is provided at the edge of the stage, and the pressing groove is used to cooperate with the side clamping assembly and the end clamping assembly to press the edge of the diaphragm.
[0009] A further improvement to the above scheme is that a diaphragm positioning block is provided on one side of the stage, and the diaphragm positioning block is used for placing and positioning the diaphragm.
[0010] A further improvement to the above scheme is that a pressure display is provided on one side of the stage to display the pressure value of vacuum adsorption.
[0011] A further improvement to the above solution is that the side clamping assembly includes a side clamping moving module, a side clamping driving module, and a side clamping plate. The side clamping moving module is disposed on the base, the side clamping driving module is disposed on the driving end of the side clamping moving module, and the side clamping plate is disposed on the driving end of the side clamping driving module. The side clamping driving module is used to drive the side clamping plate to clamp and fix the diaphragm on the platform.
[0012] A further improvement to the above solution is that the side clamping moving module includes a side moving cylinder, a side moving slide rail, and a side sliding seat. The side moving cylinder and the side moving slide rail are mounted on the base, and the side sliding seat is slidably mounted on the side moving slide rail. Two sets of side clamping drive modules are provided, with the two sets of side clamping drive modules mounted on both sides of the side sliding seat, and the side clamping plate is mounted between the two sets of side clamping drive modules.
[0013] A further improvement to the above solution is that the end face clamping assembly includes an end face clamping moving module, an end face clamping driving module, and an end face clamping plate. The end face clamping moving module is disposed on the base, the end face clamping driving module is disposed on the driving end of the end face clamping moving module, and the end face clamping plate is disposed on the driving end of the end face clamping driving module. The end face clamping driving module is used to drive the end face clamping plate to clamp and fix the diaphragm on the carrier.
[0014] A further improvement to the above solution is that the end face clamping moving module includes an end face moving cylinder, an end face moving slide rail, and an end face sliding seat. The end face moving cylinder and the end face moving slide rail are mounted on the base, and the end face sliding seat is slidably mounted on the end face moving slide rail. Two sets of end face clamping driving modules are provided, and the two sets of end face clamping driving modules are located on both sides of the end face sliding seat. The end face clamping plate is located between the two sets of end face clamping driving modules.
[0015] The beneficial effects of this utility model are:
[0016] Compared to existing membrane carriers, this invention is used for membrane fixation, especially suitable for fixing deformed or warped membranes. The robot places the membrane onto the carrier, and the edges of the membrane are clamped and fixed by the side clamping components and the end clamping components, so that the entire membrane is adsorbed onto the vacuum adsorption holes of the carrier, thus achieving fixation. After adsorption, the membrane will remain in an adsorbed and fixed state even after the clamping is released. During material unloading, the robot first adsorbs the membrane, and then the vacuum adsorption holes are disconnected, which ensures the flatness of the membrane during the material unloading process.
[0017] This invention utilizes multiple vacuum adsorption holes evenly distributed on the platform to effectively adsorb and fix a diaphragm, ensuring its stability and precision. This vacuum adsorption method avoids the scratches or stress concentration problems that may occur with traditional clamping methods, providing excellent protection for the diaphragm. Secondly, the side clamping components further enhance the clamping stability of the diaphragm. Two sets of side clamping components are positioned opposite each other on both sides of the base, precisely clamping both sides of the diaphragm. Furthermore, the addition of end-face clamping components provides extra assurance for diaphragm fixation. Two sets of end-face clamping components are positioned opposite each other at both ends of the base, firmly clamping both ends of the diaphragm. This allows the entire diaphragm to adsorb and be fixed to the vacuum adsorption holes of the platform. Even after adsorption, the diaphragm remains in a fixed adsorbed state when the clamping is released. Attached Figure Description
[0018] Figure 1 This is a three-dimensional schematic diagram of the vacuum stage clamping device of this utility model;
[0019] Figure 2 for Figure 1 Explosion diagram of the vacuum stage clamping device;
[0020] Figure 3 for Figure 1 An explosion diagram from another perspective of the vacuum stage clamping device;
[0021] Figure 4 for Figure 1 A three-dimensional schematic diagram of the structure of the clamping device for the medium vacuum stage.
[0022] Explanation of reference numerals in the attached drawings: Base 1, Base plate 11, Support side plate 12, Platform 2, Vacuum adsorption hole 21, Adsorption surface 22, Pressing groove 23, Diaphragm positioning block 24, Pressure value display table 25, Side clamping assembly 3, Side clamping moving module 31, Side moving cylinder 311, Side moving slide rail 312, Side sliding seat 313, Side clamping drive module 32, Side clamping plate 33, End face clamping assembly 4, End face clamping moving module 41, End face moving cylinder 411, End face moving slide rail 412, End face sliding seat 413, End face clamping drive module 42, End face clamping plate 43. Detailed Implementation
[0023] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Preferred embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.
[0024] It should be noted that when a component is said to be "fixed to" another component, it can be directly attached to the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component.
[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
[0026] like Figures 1-4 As shown, in one embodiment of this utility model, a vacuum stage clamping device is provided, including a base 1, a stage 2, side clamping components 3, and end clamping components 4. The stage 2 is disposed on the base 1, and a plurality of vacuum adsorption holes 21 are evenly distributed on the stage 2. Two sets of side clamping components 3 are provided, which are arranged opposite to each other on both sides of the base 1 and are used to clamp and fix the two sides of the membrane to the stage 2. Two sets of end clamping components 4 are provided, which are arranged opposite to each other at both ends of the base 1 and are used to clamp and fix the two ends of the membrane to the stage 2. This embodiment is used for membrane fixing, especially suitable for fixing deformed and warped membranes. The robot places the membrane on the stage 2, and the side clamping components 3 and end clamping components 4 clamp and fix the edges of the membrane, so that the entire membrane is adsorbed with the vacuum adsorption holes 21 of the stage 2, thus achieving fixation. After adsorption, the membrane will remain in an adsorbed and fixed state even after the clamping is released. During material handling, the robot first adsorbs the membrane, and then the vacuum adsorption hole 21 is disconnected to ensure the flatness of the membrane during the material handling process.
[0027] This invention utilizes multiple vacuum adsorption holes 21 evenly distributed on the stage 2 to effectively adsorb and fix the diaphragm, ensuring its stability and precision. This vacuum adsorption method avoids the scratches or stress concentration problems that may occur with traditional clamping methods, providing excellent protection for the diaphragm. Secondly, the side clamping components 3 further enhance the clamping stability of the diaphragm. Two sets of side clamping components 3 are positioned opposite each other on both sides of the base 1, accurately clamping both sides of the diaphragm. Furthermore, the addition of end-face clamping components 4 provides additional assurance for the fixation of the diaphragm. Two sets of end-face clamping components 4 are positioned opposite each other at both ends of the base 1, firmly clamping both ends of the diaphragm. This allows the entire diaphragm to adsorb and be fixed to the vacuum adsorption holes 21 of the stage 2. Even after adsorption, the diaphragm remains in an adsorbed and fixed state when the clamping is released.
[0028] The base 1 includes a base plate 11 and supporting side plates 12, with the supporting side plates 12 disposed on both sides of the base plate 11 and the platform 2 disposed on the upper surface of the supporting side plates 12. In this embodiment, the base plate 11 serves as the foundation of the entire structure, providing stable support; while the supporting side plates 12 effectively connect the base plate 11 and the platform 2, forming a robust overall frame capable of withstanding large loads without deformation.
[0029] The stage 2 is provided with an adsorption surface 22, which is a flat surface. Vacuum adsorption holes 21 are disposed on the adsorption surface 22 to adsorb and fix the membrane onto it. In this embodiment, during use, the vacuum adsorption holes 21 generate negative pressure, tightly adsorbing the membrane onto the adsorption surface 22, preventing displacement or shaking of the membrane during processing, and significantly improving processing accuracy and stability. Simultaneously, the flat adsorption surface 22 ensures good contact between the membrane and the stage 2, further enhancing the adsorption effect.
[0030] A clamping groove 23 is provided at the edge of the stage 2. The clamping groove 23 is used to cooperate with the side clamping assembly 3 and the end clamping assembly 4 to clamp the edge of the membrane. In this embodiment, the clamping groove 23 achieves a firm clamping of the membrane edge by precisely cooperating with the side clamping assembly 3 and the end clamping assembly 4, effectively improving the stability and reliability of clamping. At the same time, when clamping the membrane, it ensures that the edge of the membrane does not come into contact with the adsorption surface 22, and no damage occurs.
[0031] A diaphragm positioning block 24 is provided on one side of the stage 2. The diaphragm positioning block 24 is used for diaphragm placement and positioning. In this embodiment, the diaphragm positioning block 24 is specifically designed for diaphragm placement and positioning, ensuring the precise position of the diaphragm on the vacuum stage 2. Through the diaphragm positioning block 24, the accuracy and stability of diaphragm placement can be greatly improved, and the material handling error caused by position deviation can be effectively reduced.
[0032] A pressure display 25 is provided on one side of the stage 2 to display the pressure value of the vacuum adsorption. In this embodiment, by continuously monitoring the pressure value, the operator can adjust the adsorption force in a timely manner to prevent the workpiece from falling off due to insufficient adsorption force or being damaged due to excessive adsorption force, effectively improving the working efficiency and reliability of the clamping device. In addition, the pressure display 25 also facilitates troubleshooting and maintenance. Once the pressure value fluctuates abnormally, the operator can quickly locate the problem and take corresponding measures, reducing equipment downtime and maintenance costs.
[0033] The side clamping assembly 3 includes a side clamping moving module 31, a side clamping driving module 32, and a side clamping plate 33. The side clamping moving module 31 is mounted on the base 1, the side clamping driving module 32 is mounted on the driving end of the side clamping moving module 31, and the side clamping plate 33 is mounted on the driving end of the side clamping driving module 32. The side clamping driving module 32 is used to drive the side clamping plate 33 to clamp and fix the diaphragm on the stage 2. Specifically, the side clamping moving module 31 includes a side moving cylinder 311, a side moving slide rail 312, and a side sliding seat 313. The side moving cylinder 311 and the side moving slide rail 312 are mounted on the base 1, and the side sliding seat 313 is slidably mounted on the side moving slide rail 312. There are two sets of side clamping driving modules 32, which are located on both sides of the side sliding seat 313. The side clamping plate 33 is located between the two sets of side clamping driving modules 32. In this embodiment, the side clamping moving module 31, through the coordinated action of the side moving cylinder 311 and the side moving slide rail 312, achieves precise horizontal displacement of the side clamping plate 33, providing a stable and reliable foundation for diaphragm alignment and clamping. Simultaneously, the sliding arrangement of the side sliding seat 313 not only ensures the smoothness of the clamping process but also enhances the flexibility and adaptability of the device. The configuration of two sets of side clamping drive modules 32 further improves the uniformity and stability of the clamping force, effectively preventing deformation or displacement of the diaphragm during clamping. The side clamping plate 33, as the component directly acting on the diaphragm, is positioned between the two drive modules, ensuring precise application of the clamping force and thus achieving secure fixation of the diaphragm on the vacuum stage 2.
[0034] The end face clamping assembly 4 includes an end face clamping moving module 41, an end face clamping driving module 42, and an end face clamping plate 43. The end face clamping moving module 41 is disposed on the base 1, the end face clamping driving module 42 is disposed on the driving end of the end face clamping moving module 41, and the end face clamping plate 43 is disposed on the driving end of the end face clamping driving module 42. The end face clamping driving module 42 is used to drive the end face clamping plate 43 to clamp and fix the diaphragm on the stage 2. Specifically, the end-face clamping moving module 41 includes an end-face moving cylinder 411, an end-face moving slide rail 412, and an end-face sliding seat 413. The end-face moving cylinder 411 and the end-face moving slide rail 412 are mounted on the base 1, and the end-face sliding seat 413 is slidably mounted on the end-face moving slide rail 412. Two sets of end-face clamping driving modules 42 are provided, positioned on both sides of the end-face sliding seat 413. The end-face clamping plate 43 is positioned between the two sets of end-face clamping driving modules 42. In this embodiment, precise and stable displacement control is achieved through the end-face clamping moving module 41. The combination of the end-face moving cylinder 411 and the slide rail ensures high precision and stability in the clamping process, providing a strong guarantee for the accurate positioning of the diaphragm on the vacuum stage 2. The arrangement of two sets of end-face clamping drive modules 42 not only enhances the clamping force but also makes the clamping process more balanced and reliable, effectively avoiding deformation or displacement of the diaphragm due to uneven force. At the same time, the design of the end-face clamping plate 43 fully considers the tightness and stability of the clamping, ensuring that the diaphragm is firmly clamped in a vacuum environment.
[0035] The above embodiments only illustrate several implementation methods of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. A vacuum stage clamping device, characterized in that: The device includes a base, a stage, side clamping assemblies, and end clamping assemblies. The stage is mounted on the base and has multiple vacuum adsorption holes evenly distributed on it. There are two sets of side clamping assemblies, which are arranged opposite each other on both sides of the base and are used to clamp and fix the two sides of the membrane to the stage. There are also two sets of end clamping assemblies, which are arranged opposite each other at both ends of the base and are used to clamp and fix the two ends of the membrane to the stage.
2. The vacuum stage clamping device according to claim 1, characterized in that: The base includes a base plate and supporting side plates, the supporting side plates are disposed on both sides of the base plate, and the platform is disposed on the upper surface of the supporting side plates.
3. The vacuum stage clamping device according to claim 1, characterized in that: The stage is provided with an adsorption surface, which is a flat surface. The vacuum adsorption holes are provided on the adsorption surface to adsorb and fix the membrane on the adsorption surface.
4. The vacuum stage clamping device according to claim 1, characterized in that: The edge of the stage is provided with a pressing groove, which is used to cooperate with the side clamping assembly and the end clamping assembly to press the edge of the diaphragm.
5. The vacuum stage clamping device according to claim 1, characterized in that: A diaphragm positioning block is provided on one side of the stage, and the diaphragm positioning block is used for placing and positioning the diaphragm.
6. The vacuum stage clamping device according to claim 1, characterized in that: A pressure display is provided on one side of the stage to display the pressure value of vacuum adsorption.
7. The vacuum stage clamping device according to claim 1, characterized in that: The side clamping assembly includes a side clamping moving module, a side clamping driving module, and a side clamping plate. The side clamping moving module is mounted on the base, the side clamping driving module is mounted on the driving end of the side clamping moving module, and the side clamping plate is mounted on the driving end of the side clamping driving module. The side clamping driving module is used to drive the side clamping plate to clamp and fix the diaphragm on the platform.
8. The vacuum stage clamping device according to claim 7, characterized in that: The side clamping moving module includes a side moving cylinder, a side moving slide rail, and a side sliding seat. The side moving cylinder and the side moving slide rail are mounted on the base, and the side sliding seat is slidably mounted on the side moving slide rail. There are two sets of side clamping drive modules, which are mounted on both sides of the side sliding seat. The side clamping plate is mounted between the two sets of side clamping drive modules.
9. The vacuum stage clamping device according to claim 1, characterized in that: The end face clamping assembly includes an end face clamping moving module, an end face clamping driving module, and an end face clamping plate. The end face clamping moving module is mounted on the base, the end face clamping driving module is mounted on the driving end of the end face clamping moving module, and the end face clamping plate is mounted on the driving end of the end face clamping driving module. The end face clamping driving module is used to drive the end face clamping plate to clamp and fix the diaphragm on the carrier stage.
10. The vacuum stage clamping device according to claim 9, characterized in that: The end face clamping moving module includes an end face moving cylinder, an end face moving slide rail, and an end face sliding seat. The end face moving cylinder and the end face moving slide rail are mounted on the base, and the end face sliding seat is slidably mounted on the end face moving slide rail. There are two sets of end face clamping driving modules, which are located on both sides of the end face sliding seat. The end face clamping plate is located between the two sets of end face clamping driving modules.