Spin etching anti-splash structure
By designing a Spin etching anti-splash structure, using protective plates and diversion plates to block liquid splashing, and cleaning and collecting mechanisms to remove the liquid, the problem of product contamination caused by liquid splashing is solved, improving work efficiency and product yield.
Patent Information
- Application Number
- CN202422924535.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-28
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-11-28
AI Technical Summary
In the existing Spin single-wafer etching process, the chemical solution is ejected and impacts the side wall of the equipment, causing backsplashing, which leads to product contamination and affects yield.
A Spin etching anti-splash structure was designed, including a protective plate, a diversion plate, a baffle, a cleaning mechanism, and a collection mechanism. The inclined design of the diversion plate and the baffle block the liquid, reducing splashing. The cleaning mechanism cleans the liquid, and the collection mechanism collects the liquid.
It effectively reduces splashing of medicine, improves work efficiency, simplifies the cleaning process, and reduces the risk of product contamination.
Smart Images

Figure CN223496629U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of etching processing technology, and in particular to a Spin etching anti-splash structure. Background Technology
[0002] Etching is a technique that removes materials through chemical reactions or physical impacts. After exposure and development, the protective film of the area to be etched is removed. During etching, the material comes into contact with a chemical solution, which dissolves and corrodes it, creating a textured or hollowed-out effect.
[0003] The existing Chinese patent (authorization announcement number: CN218801703U) mentions a positioning and adjustment device for mold etching, which can set up a structure to position the mold at both ends, and set up a rotatable clamping structure inside the positioning structure. By adjusting the angle of the clamping structure, the mold can be flipped, which facilitates the mold to be flipped without disassembly during the etching and positioning process, improves the convenience of mold positioning and adjustment, and enhances the convenience of using the positioning structure.
[0004] The current mainstream etching method for removing adhesive is the Spin single-piece etching method. During the product operation, the product rotates at high speed, which can ensure that all parts of the product are in uniform contact with the etching solution during the etching process, thereby improving the consistency and quality of etching. However, when the liquid is thrown out and hits the side wall of the equipment, it will cause backsplash. The backsplashed liquid may cause secondary contamination to the product and affect the product yield. Utility Model Content
[0005] The purpose of this invention is to solve the problem that when liquid is thrown out and hits the side wall of the equipment, it will cause back splashing, which may cause secondary pollution to the product. This invention provides a Spin etching anti-back splash structure.
[0006] To achieve the above objectives, this utility model specifically adopts the following technical solution:
[0007] A Spin Etching Anti-Splash Structure includes a protective plate, a plurality of mounting bolts are equidistantly installed on the top of the protective plate, a diversion plate is fixedly connected to the bottom of the protective plate, a base plate is fixedly connected to the bottom of the diversion plate, a baffle is fixedly connected to the top of the base plate, a cleaning mechanism is provided on the top of the protective plate, and a collection mechanism is provided on the bottom of the protective plate.
[0008] By adopting the above technical solution, the high-speed rotation of the Spin blade carries the liquid medicine to the protective plate. Under the action of gravity, the liquid medicine flows downward to the outside of the guide plate. The guide plate is set at an angle, so that the liquid medicine flows to the top of the bottom plate. Then, the baffle blocks the liquid medicine, so that the liquid medicine cup is stored above the bottom plate, thereby reducing the splashing of liquid medicine. The cleaning mechanism reduces the inconvenience of manual cleaning, and the collection mechanism can collect the liquid medicine during cleaning.
[0009] Furthermore, the cleaning mechanism includes a cleaning hole opened on the top of the protective plate, a movable rod slidably connected inside the cleaning hole, a horizontal plate fixedly connected to the top of the movable rod, a handle fixedly connected to the top of the horizontal plate, and a cleaning block fixedly connected to the bottom of the movable rod. When the cleaning block moves, it abuts against the top of the base plate.
[0010] By adopting the above technical solution, pulling the handle moves the horizontal plate, the horizontal plate moves the moving rod inside the cleaning hole, and the moving rod moves the cleaning block to push the liquid medicine above the bottom plate, thereby cleaning the liquid medicine water.
[0011] Furthermore, a mounting block is fixedly connected to the top of the protective plate, and a sliding groove is provided on the top of the mounting block. A slider is fixedly connected to the bottom of the horizontal plate, and the slider is adapted to the sliding groove and the slider is slidably connected to the sliding groove.
[0012] By adopting the above technical solution, the slider and the groove provide a guiding function for the horizontal plate, so that the horizontal plate can maintain the correct movement trajectory when moving.
[0013] Furthermore, the collection mechanism includes a fixed plate fixedly connected to the bottom of the protective plate, a collection box overlapping the top of the fixed plate, the top of the collection box being open, a collection hole being provided on the top of the bottom plate, and the opening of the collection box matching the collection hole.
[0014] By adopting the above technical solution, the top of the collection box is set to be open, allowing the liquid medicine to enter the collection box for collection.
[0015] Furthermore, clamping seats are fixedly connected to both sides of the fixing plate, and a threaded rod is threadedly connected to the outer side of the clamping seat. A knob is fixedly connected to one end of the threaded rod, and the end of the threaded rod away from the knob passes through the clamping seat and is rotatably connected to a clamping block. When the clamping block moves, it abuts against the collection box.
[0016] By adopting the above technical solution, the collection box is firmly placed on top of the fixed plate.
[0017] Furthermore, a guide post is fixedly connected to the side of the clamping block away from the collection box, and the end of the guide post away from the clamping block passes through the clamping seat, and the guide post is slidably connected to the clamping seat.
[0018] By adopting the above technical solution, the clamping block can remain stable when moving.
[0019] In summary, this utility model has at least one of the following beneficial effects;
[0020] 1. In this utility model, when cleaning the liquid medicine, the worker first pulls the handle to drive the cleaning block to push the liquid medicine above the base plate, thereby cleaning the liquid medicine, reducing the disadvantage of the worker not being able to clean it properly, and thus improving work efficiency.
[0021] 2. In this utility model, when the liquid medicine moves to the collection hole, the liquid medicine will fall into the collection hole under the action of gravity, so that the liquid medicine will enter the collection box for collection. When cleaning is required, simply remove the collection box for cleaning. The operation is simple and convenient, and it is convenient for staff to use. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the three-dimensional structure of the protective plate in this utility model;
[0023] Figure 2 This is a schematic diagram of the cross-sectional structure of the protective plate in this utility model;
[0024] Figure 3 This is a utility model Figure 2 Enlarged schematic diagram of the structure at point A;
[0025] Figure 4 This is a three-dimensional structural diagram of the collecting mechanism in this utility model.
[0026] Explanation of reference numerals in the attached figures:
[0027] 1. Protective plate; 2. Mounting bolts; 3. Drainage plate; 4. Base plate; 5. Baffle; 6. Cleaning hole; 7. Moving rod; 8. Horizontal plate; 9. Handle; 10. Cleaning block; 11. Mounting block; 12. Slide groove; 13. Sliding block; 14. Fixing plate; 15. Collection box; 16. Collection hole; 17. Clamping seat; 18. Threaded rod; 19. Knob; 20. Clamping block; 21. Guide post. Detailed Implementation
[0028] The following is in conjunction with the appendix Figure 1-4 The present invention will be described in further detail below.
[0029] This utility model discloses a Spin etching anti-splash structure.
[0030] Reference Figure 1 and Figure 2 A Spin Etching Anti-Splash Structure includes a protective plate 1, a number of mounting bolts 2 are installed at equal intervals on the top of the protective plate 1, a diversion plate 3 is fixedly connected to the bottom of the protective plate 1, a base plate 4 is fixedly connected to the bottom of the diversion plate 3, a baffle 5 is fixedly connected to the top of the base plate 4, a cleaning mechanism is provided on the top of the protective plate 1, and a collection mechanism is provided on the bottom of the protective plate 1.
[0031] During splash prevention, the protective plate 1 is first fixed to the top of the Spin plate of the equipment using mounting bolts 2. Then, the Spin plate rotates at high speed, carrying the liquid medicine onto the protective plate 1. Under the action of gravity, the liquid medicine flows down the protective plate 1 to the outside of the diversion plate 3. The diversion plate 3 is set at an angle, so that the liquid medicine flows to the top of the bottom plate 4. Then, the baffle 5 blocks the liquid medicine, so that the liquid medicine cup is stored on the top of the bottom plate 4, thereby reducing the back splashing of the liquid medicine. The cleaning mechanism can clean the liquid medicine accumulated on the top of the bottom plate 4, reducing the inconvenience of manual cleaning. The collection mechanism can collect the liquid medicine during cleaning.
[0032] Reference Figure 2 and Figure 3 The cleaning mechanism includes a cleaning hole 6 on the top of the protective plate 1. A moving rod 7 is slidably connected inside the cleaning hole 6. A horizontal plate 8 is fixedly connected to the top of the moving rod 7. A handle 9 is fixedly connected to the top of the horizontal plate 8. A cleaning block 10 is fixedly connected to the bottom of the moving rod 7. When the cleaning block 10 moves, it abuts against the top of the base plate 4.
[0033] The top of the protective plate 1 is fixedly connected to the mounting block 11, and the top of the mounting block 11 is provided with a sliding groove 12. The bottom of the horizontal plate 8 is fixedly connected to the slider 13, which is adapted to the sliding groove 12 and is slidably connected to the sliding groove 12.
[0034] When cleaning the liquid medicine, the staff first pulls the handle 9 to move the horizontal plate 8. The movement of the horizontal plate 8 causes the moving rod 7 to move inside the cleaning hole 6. The movement of the moving rod 7 will cause the cleaning block 10 to push the liquid medicine above the bottom plate 4, thereby cleaning the liquid medicine, reducing the disadvantage of the staff not being able to clean it properly, and thus improving work efficiency.
[0035] When the horizontal plate 8 moves, the slider 13 and the groove 12 provide guidance for the horizontal plate 8, so that the horizontal plate 8 can maintain the correct movement trajectory when moving.
[0036] Reference Figure 2 and Figure 4The collection mechanism includes a fixed plate 14 fixedly connected to the bottom of the protective plate 1. A collection box 15 is attached to the top of the fixed plate 14. The top of the collection box 15 is open. A collection hole 16 is provided on the top of the bottom plate 4. The opening of the collection box 15 is adapted to the collection hole 16.
[0037] The fixed plate 14 is fixedly connected to clamping seats 17 on both sides. The outer side of the clamping seat 17 is threadedly connected to a threaded rod 18. One end of the threaded rod 18 is fixedly connected to a knob 19. The end of the threaded rod 18 away from the knob 19 passes through the clamping seat 17 and is rotatably connected to a clamping block 20. When the clamping block 20 moves, it abuts against the collection box 15.
[0038] In addition, a guide post 21 is fixedly connected to the side of the clamping block 20 away from the collection box 15. The end of the guide post 21 away from the clamping block 20 passes through the clamping seat 17, and the guide post 21 is slidably connected to the clamping seat 17.
[0039] When the liquid medicine moves to the collection hole 16, it will fall into the collection hole 16 under the action of gravity. Then, the liquid medicine enters the collection box 15 through the opening at the top for collection. When cleaning is required, the staff only needs to take out the collection box 15 for cleaning. The operation is simple and convenient, making it easy for the staff to use.
[0040] After the collection box 15 is placed, the staff rotates the knob 19 to drive the threaded rod 18 to rotate. The rotation of the threaded rod 18 causes the clamping block 20 to abut against the collection box 15, thereby making the collection box 15 firmly placed above the fixing plate 14, reducing the risk of the collection box 15 falling due to external force during operation and improving the working stability of the collection box 15.
[0041] When the clamping block 20 moves, the guide post 21 provides additional support points for the clamping block 20, so that the clamping block 20 can remain stable when moving.
[0042] Working principle: The protective plate 1 is fixed above the Spin plate of the equipment by the mounting bolts 2. Then, the Spin plate rotates at high speed, which drives the liquid medicine to the protective plate 1. Under the action of gravity, the liquid medicine flows down the protective plate 1 to the outside of the diversion plate 3. The diversion plate 3 is set in an inclined position, so that the liquid medicine flows to the top of the bottom plate 4. Then, the baffle 5 blocks the liquid medicine, so that the liquid medicine cup is stored above the bottom plate 4, thereby reducing the back splashing of the liquid medicine. First, pull the handle 9 to move the horizontal plate 8. The movement of the horizontal plate 8 moves the moving rod 7 inside the cleaning hole 6. The movement of the moving rod 7 will drive the cleaning block 10 to push the liquid medicine above the bottom plate 4, thereby cleaning the liquid medicine.
Claims
1. A Spin Etching Anti-Splash Structure, comprising a protective plate (1), characterized in that: The top of the protective plate (1) is equidistantly equipped with several mounting bolts (2), the bottom of the protective plate (1) is fixedly connected with a diversion plate (3), the bottom of the diversion plate (3) is fixedly connected with a base plate (4), the top of the base plate (4) is fixedly connected with a baffle (5), the top of the protective plate (1) is provided with a cleaning mechanism, and the bottom of the protective plate (1) is provided with a collection mechanism.
2. The Spin Etching Anti-Splash Structure according to claim 1, characterized in that: The cleaning mechanism includes a cleaning hole (6) on the top of the protective plate (1), a moving rod (7) is slidably connected inside the cleaning hole (6), a horizontal plate (8) is fixedly connected to the top of the moving rod (7), a handle (9) is fixedly connected to the top of the horizontal plate (8), and a cleaning block (10) is fixedly connected to the bottom of the moving rod (7). When the cleaning block (10) moves, it abuts against the top of the base plate (4).
3. The Spin Etching Anti-Splash Structure according to claim 2, characterized in that: The top of the protective plate (1) is fixedly connected to an installation block (11), and the top of the installation block (11) is provided with a sliding groove (12). The bottom of the horizontal plate (8) is fixedly connected to a slider (13), which is adapted to the sliding groove (12) and the slider (13) is slidably connected to the sliding groove (12).
4. The Spin Etching Anti-Splash Structure according to claim 1, characterized in that: The collection mechanism includes a fixed plate (14) fixedly connected to the bottom of the protective plate (1), and a collection box (15) is attached to the top of the fixed plate (14). The top of the collection box (15) is set to be open. A collection hole (16) is opened on the top of the bottom plate (4). The opening of the collection box (15) is adapted to the collection hole (16).
5. The Spin Etching Anti-Splash Structure according to claim 4, characterized in that: The two sides of the fixed plate (14) are fixedly connected to clamping seats (17). The outer side of the clamping seat (17) is threadedly connected to a threaded rod (18). One end of the threaded rod (18) is fixedly connected to a knob (19). The end of the threaded rod (18) away from the knob (19) passes through the clamping seat (17) and is rotatably connected to a clamping block (20). When the clamping block (20) moves, it abuts against the collection box (15).
6. The Spin Etching Anti-Splash Structure according to claim 5, characterized in that: The clamping block (20) is fixedly connected to a guide post (21) on the side away from the collection box (15). The end of the guide post (21) away from the clamping block (20) passes through the clamping seat (17). The guide post (21) is slidably connected to the clamping seat (17).
Citation Information
Patent Citations
A positioning adjustment device for mold etching
CN218801703U