Device for testing flow of quartz filter

Abstract

The utility model discloses a device for testing the flow of a quartz filter, and relates to the technical field of flow testing of quartz filters. Comprising a high-purity nitrogen gas source, a first pressure reducer, a buffer tank, a filter, a precise pressure reducer, a pressure transmitter, an electromagnetic valve, a regulating valve, an electronic flowmeter, a glass rotameter and a quartz filter which are sequentially connected through a pipeline, and through cooperation of all the elements, precise measurement of the flow of the quartz filter and flow testing under different pressures are achieved. The automatic control and data recording of the system are realized by the computer, the printer, and the pressure transmitter, the electromagnetic valve and the electronic flowmeter which are electrically connected with the computer and the printer, and the design of the safety valve ensures that the high pressure in the system can be automatically released when the secondary pressure reducer fails, so that the reliability of the test result is ensured. The safety of the quartz filter and a system pipeline is protected, the operation safety is improved, manual intervention is reduced, and the working efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of quartz filter testing technology, specifically to a device for testing the flow rate of a quartz filter. Background Technology

[0002] Quartz filters are widely used in the semiconductor industry due to the advantages of quartz, such as low expansion, heat resistance, and corrosion resistance. Quartz filters are used in some chip manufacturing processes that require a slow-release vacuum environment to gradually release gas within the chamber. A crucial performance indicator for quartz filters is their flow rate at a specified pressure. However, after manufacturing, flow rate testing often needs to be performed at the customer's site during the manufacturing process. If the flow rate does not meet the process requirements, the product will be scrapped, wasting time and causing product loss. Therefore, there is an urgent need for a testing device and method to perform flow rate testing on quartz filters before they leave the factory. Utility Model Content

[0003] To address the shortcomings of existing technologies, this invention provides a device for testing the flow rate of quartz filters, which solves the problem that existing equipment testing methods easily generate process waste.

[0004] To achieve the above objectives, this utility model is implemented through the following technical solution: a device for testing the flow rate of a quartz filter, comprising a high-purity nitrogen gas source connected in sequence via pipelines, a first pressure reducer for primary pressure reduction of the gas, a buffer tank for buffering the gas flowing into the system pipeline, a filter for filtering impurities in the gas source, a precision pressure reducer for accurately adjusting the system pressure, a pressure transmitter for reading the pressure value after secondary pressure reduction, a solenoid valve for controlling the gas flow, a regulating valve for adjusting the system flow, an electronic flow meter, a glass rotor flow meter, and a quartz filter;

[0005] The device also includes an switching component and a control component.

[0006] Preferably, the switching assembly includes a first shut-off valve and a second shut-off valve disposed on the pipeline, the first shut-off valve being disposed between the first pressure reducer and the buffer tank, and the second shut-off valve being disposed between the quartz filter and the glass rotor flow meter.

[0007] Preferably, the control components include a computer and a printer electrically connected to the computer, and the pressure transmitter, solenoid valve, and electronic flow meter are electrically connected to the computer via wires.

[0008] Preferably, a safety valve is provided on the pipeline between the solenoid valve and the regulating valve. The safety valve can automatically release the high pressure in the system when the second-stage pressure reducer fails.

[0009] Preferably, the pipeline is made of stainless steel.

[0010] A method for testing the flow rate of a quartz filter includes the following steps:

[0011] S1, Calibration;

[0012] S2. Install the quartz filter in the system, turn on the high-purity nitrogen gas source, and the nitrogen gas is depressurized through the first pressure reducer;

[0013] S3. Open the first shut-off valve, check the pressure transmitter, and adjust the pressure of the precision pressure reducer to achieve the required test pressure.

[0014] S4. The solenoid valve is opened by computer control, thus opening the second shut-off valve.

[0015] S5. Open the regulating valve, adjust it to the required flow rate, and then adjust the regulating valve to the maximum test flow rate of the quartz filter.

[0016] S6. After the computer completes the sampling, it shuts off the high-purity nitrogen gas source and pressure regulator. After the gas in the system is emptied, it shuts off the solenoid valve, the second shut-off valve, the regulating valve, and the first shut-off valve.

[0017] S7. Remove the quartz filter and use a computer and printer to print out the pressure and flow curves of the quartz filter.

[0018] Preferably, the specific method for calibration in step S1 is as follows:

[0019] Turn on the high-purity nitrogen gas source, open the first shut-off valve, adjust the pressure of the precision pressure reducer, and control the solenoid valve through the computer to make the solenoid valve open.

[0020] Turn the glass rotor flow meter to its maximum setting;

[0021] Check the flow rate of the electronic flow meter by adjusting the regulating valve and check the flow rate scale value of the glass rotor. If the two values ​​are consistent, the calibration is complete. Turn off the high-purity nitrogen gas source, and after the gas in the system is purged, close the solenoid valve, the regulating valve, and the first shut-off valve via the computer.

[0022] Beneficial effects

[0023] This invention provides a device for testing the flow rate of a quartz filter, which has the following advantages:

[0024] By designing components such as a high-purity nitrogen gas source, a first pressure reducer, a buffer tank, a filter, a precision pressure reducer, a pressure transmitter, a solenoid valve, a regulating valve, an electronic flow meter, a glass rotor flow meter, and a quartz filter, the system achieves accurate measurement of the flow rate of the quartz filter and flow testing under different pressures. This design not only improves measurement accuracy but also ensures the reliability of the test results.

[0025] The control components include a computer, printer, and electrically connected pressure transmitters, solenoid valves, and electronic flow meters, enabling automated control and data logging of the system. The safety valve design ensures that the high pressure in the system can be automatically released in the event of failure of the secondary pressure reducer, protecting the quartz filter and system pipelines. This design not only improves operational safety but also reduces manual intervention and increases work efficiency.

[0026] The electronic flow meter is calibrated using a glass rotor flow meter to ensure measurement accuracy. The built-in filter effectively removes impurities from the gas source, ensuring the cleanliness of the gas flowing into the system pipeline, thereby protecting the cleanliness of the quartz filter. This design not only improves the reliability and lifespan of the system but also ensures the purity of the testing environment.

[0027] This device uses common mechanical and electrical components, has relatively low manufacturing costs, is easy to maintain, and has a high cost-performance ratio. At the same time, its versatility and adaptability enable it to play an important role in a variety of quartz filter testing scenarios, making it highly practical. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of this utility model.

[0029] In the diagram: 1. High-purity nitrogen gas source; 2. First pressure regulator; 3. First shut-off valve; 4. Buffer tank; 5. Filter; 6. Precision pressure regulator; 7. Pressure transmitter; 8. Solenoid valve; 9. Safety valve; 10. Regulating valve; 11. Electronic flow meter; 12. Glass rotor flow meter; 13. Second shut-off valve; 14. Quartz filter; 15. Computer; 16. Printer. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Please see Figure 1This utility model provides a technical solution: a device for testing the flow rate of a quartz filter 14, comprising a high-purity nitrogen gas source 1, a first pressure reducer 2 for primary pressure reduction of the gas, a buffer tank 4 for buffering the gas flowing into the system pipeline, a filter 5 for filtering impurities in the gas source, a precision pressure reducer 6 for accurately adjusting the system pressure, a pressure transmitter 7 for reading the pressure value after secondary pressure reduction, a solenoid valve 8 for controlling the gas flow, a regulating valve 10 for adjusting the system flow, an electronic flow meter 11, a glass rotor flow meter 12, and a quartz filter 14, all connected in sequence through pipelines.

[0032] The device also includes an switching component and a control component.

[0033] By adopting the above technical solution, accurate testing of the flow rate of the quartz filter 14 was achieved, ensuring the reliability and accuracy of the testing process. The coordinated operation of each component ensured the functions of stable gas supply, pressure regulation, impurity filtration, and flow measurement.

[0034] In this embodiment, the switching component includes a first shut-off valve 3 and a second shut-off valve 13 disposed on the pipeline. The first shut-off valve 3 is disposed between the first pressure reducer 2 and the buffer tank 4, and the second shut-off valve 13 is disposed between the quartz filter 14 and the glass rotor flow meter 12.

[0035] By adopting the above technical solution, the two shut-off valves can control the gas flow at different stages, providing a reliable shut-off method and ensuring the gas flow control at different stages.

[0036] In this embodiment, the control components include a computer 15 and a printer 16 electrically connected to the computer 15, and the pressure transmitter 7, solenoid valve 8, and electronic flow meter 11 are electrically connected to the computer 15 via wires.

[0037] By adopting the above technical solution, the computer 15 can monitor and control the working status of each component in real time and record test data; the printer 16 is used to print out the test results, realizing automated control and data recording, improving test efficiency and accuracy, simplifying the operation process, reducing manual intervention, and ensuring the consistency and reliability of the test.

[0038] In this embodiment, a safety valve 9 is provided on the pipeline between the solenoid valve 8 and the regulating valve 10. The safety valve 9 can ensure that when the secondary pressure reducer fails, it can automatically release the high pressure in the system.

[0039] By adopting the above technical solution, when the secondary pressure reducer fails, the safety valve 9 can work automatically to release the high pressure in the system, ensuring the safety of the system, providing necessary safety protection, preventing the high pressure in the system from damaging the equipment, and enhancing the safety and reliability of the system.

[0040] In this embodiment, the pipeline is further configured to be made of stainless steel.

[0041] By adopting the above technical solution, the pipeline is made of stainless steel, which has good corrosion resistance and sealing performance, and is suitable for the transmission of high-purity gases, reducing maintenance costs and extending the service life of the equipment.

[0042] A method for testing the flow rate of a quartz filter 14 includes the following steps:

[0043] S1, Calibration;

[0044] S2. Install the quartz filter 14 in the system, turn on the high-purity nitrogen gas source 1, and reduce the pressure of the nitrogen gas through the first pressure reducer 2;

[0045] S3. Open the first shut-off valve 3, check the pressure transmitter 7, and adjust the pressure of the precision pressure reducer 6 to achieve the required test pressure.

[0046] S4. The solenoid valve 8 is opened by the computer 15, thus opening the second shut-off valve 13.

[0047] S5. Open the regulating valve 10, adjust it to the required flow rate, and then adjust the regulating valve 10 to the maximum test quartz filter 14 maximum flow rate.

[0048] S6, computer 15 completes sampling, shuts off high-purity nitrogen gas source 1 and pressure reducer, and after the gas in the system is emptied, shuts off solenoid valve 8, shuts off second shut-off valve 13, shuts off regulating valve 10, and shuts off first shut-off valve 3.

[0049] S7. Remove the quartz filter 14 and use the computer 15 and printer 16 to print out the pressure and flow curves of the quartz filter 14.

[0050] In this embodiment, the specific method for calibration in step S1 is further configured as follows:

[0051] Turn on the high-purity nitrogen gas source 1, open the first shut-off valve 3, adjust the pressure of the precision pressure reducer 6, and control the solenoid valve 8 through the computer 15 to make the solenoid valve 8 open.

[0052] Turn the glass rotor flow meter to its maximum setting (12).

[0053] By adjusting the regulating valve 10, check the flow rate of the electronic flow meter 11 and the flow rate scale value of the glass rotor. If the two values ​​are consistent, the calibration is completed. After the high-purity nitrogen gas source 1 is turned off and the gas in the system is emptied, the solenoid valve 8, regulating valve 10, and first shut-off valve 3 are turned off via the computer 15.

[0054] By adopting the above technical solutions, and through components such as the precision pressure reducer 6, pressure transmitter 7, and electronic flow meter 11, the accurate testing of the flow rate of the quartz filter 14 is ensured. The design of the safety valve 9 provides necessary safety protection to prevent high pressure in the system from damaging the equipment. The computer 15 and printer 16 realize automated control and data recording, improving testing efficiency and accuracy. The design of the shut-off valve provides reliable gas on / off control, enhancing the flexibility and safety of the system. Detailed test procedures and calibration methods ensure the consistency and standardization of the testing process.

[0055] Those skilled in the art can connect the components in this case sequentially. The specific connection and operation sequence should refer to the working principle described below. The detailed connection methods are well-known technologies in the field. The working principle and process are mainly described below.

[0056] Example: This application discloses a testing device, specifically:

[0057] Gas source and pressure reduction system

[0058] High-purity nitrogen gas source 1: Provides a stable gas supply.

[0059] First pressure reducer 2: Performs primary pressure reduction on high-purity nitrogen gas to ensure stable gas pressure flowing into the system.

[0060] Precision pressure reducer 6: Performs two-stage pressure reduction on the system, precisely regulating the pressure within the system.

[0061] Buffer and filter components

[0062] Buffer tank 4: Buffers the gas flowing into the system pipeline to ensure stable pressure.

[0063] Filter 5: Filters impurities in the gas source to ensure the cleanliness of the gas entering the system.

[0064] Measurement and control components

[0065] Pressure transmitter 7: Reads the pressure value after the secondary pressure reduction and transmits the data to computer 15.

[0066] Solenoid valve 8: Controls the gas flow through computer 15 to control the working time of quartz filter 14.

[0067] Control valve 10: Used to regulate the flow rate of the system and test the maximum flow rate of the quartz filter 14.

[0068] Electronic Flow Meter 11: Accurately measures the flow rate of a system.

[0069] Glass rotor flowmeter 12: assists in calibrating electronic flowmeter 11 to ensure measurement accuracy.

[0070] Security Components

[0071] Safety valve 9: Located between solenoid valve 8 and regulating valve 10, it automatically works when the secondary pressure reducer fails to release the high pressure in the system and protect the system safety.

[0072] Open / close components

[0073] First shut-off valve 3: Located between first pressure reducer 2 and buffer tank 4, it controls the pipeline switch.

[0074] Second shut-off valve 13: Located between quartz filter 14 and glass rotor flow meter 12, it controls the pipeline switch.

[0075] Control and recording components

[0076] Computer 15 and Printer 16: Computer 15 is electrically connected to various sensors and controllers to record and process test data; Printer 16 is used to print test results, such as pressure-flow curves.

[0077] Wires: connect pressure transmitter 7, solenoid valve 8, electronic flow meter 11 and computer 15 to achieve data communication.

[0078] Pipe material

[0079] Stainless steel piping: ensures the system's corrosion resistance and long-term stability.

[0080] The specific testing method is as follows:

[0081] Open the high-purity nitrogen gas source 1 and the first shut-off valve 3, and adjust the pressure of the precision pressure reducer 6.

[0082] The computer 15 controls the solenoid valve 8 to be in the open state, and opens the glass rotor flow meter 12 to its maximum.

[0083] Adjust the regulating valve 10 and check whether the flow value of the electronic flow meter 11 is consistent with the scale value of the glass rotor flow meter 12. After completing the calibration, turn off the relevant equipment and purge the gas in the system.

[0084] Install the quartz filter 14 in the system, turn on the high-purity nitrogen gas source 1, and the nitrogen gas is depressurized through the first pressure reducer 2.

[0085] Open the first shut-off valve 3, check the pressure transmitter 7, and adjust the pressure of the precision pressure reducer 6 to achieve the required test pressure.

[0086] The computer 15 controls the solenoid valve 8 to open, thereby opening the second shut-off valve 13.

[0087] Open the regulating valve 10, adjust it to the required flow rate, and then adjust the regulating valve 10 to the maximum to test the maximum flow rate of the quartz filter 14.

[0088] After computer 15 completes sampling, it shuts off the high-purity nitrogen gas source 1 and pressure reducer. After the gas in the system is purged, it shuts off the solenoid valve 8, the second shut-off valve 13, the regulating valve 10, and the first shut-off valve 3.

[0089] Remove the quartz filter 14 and use the computer 15 and printer 16 to print out the pressure and flow curves of the quartz filter 14.

[0090] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0091] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for testing the flow rate of a quartz filter, characterized in that, The system includes a high-purity nitrogen gas source (1) connected in sequence via pipelines, a first pressure reducer (2) for primary pressure reduction of the gas, a buffer tank (4) for buffering the gas flowing into the system pipeline, a filter (5) for filtering impurities in the gas source, a precision pressure reducer (6) for precisely adjusting the system pressure, a pressure transmitter (7) for reading the pressure value after secondary pressure reduction, a solenoid valve (8) for controlling the gas flow, a regulating valve (10) for adjusting the system flow, an electronic flow meter (11), a glass rotor flow meter (12), and a quartz filter (14). The device also includes an switching component and a control component.

2. The apparatus for testing the flow rate of a quartz filter according to claim 1, characterized in that, The switching assembly includes a first shut-off valve (3) and a second shut-off valve (13) disposed on the pipeline. The first shut-off valve (3) is disposed between the first pressure reducer (2) and the buffer tank (4), and the second shut-off valve (13) is disposed between the quartz filter (14) and the glass rotor flow meter (12).

3. The apparatus for testing the flow rate of a quartz filter according to claim 2, characterized in that, The control components include a computer (15) and a printer (16) electrically connected to the computer (15). The pressure transmitter (7), solenoid valve (8), and electronic flow meter (11) are electrically connected to the computer (15) via wires.

4. The apparatus for testing the flow rate of a quartz filter according to claim 3, characterized in that, A safety valve (9) is provided on the pipeline between the solenoid valve (8) and the regulating valve (10). The safety valve (9) can ensure that the high pressure in the system can be released automatically when the secondary pressure reducer fails.

5. The apparatus for testing the flow rate of a quartz filter according to claim 1, characterized in that, The pipeline is made of stainless steel.

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