Glue spraying device convenient to operate

Abstract

The utility model relates to a glue spraying device convenient to operate, which comprises a shell, a flow guide pipe is mounted at the top of the shell in a matched manner, and a funnel-shaped partition plate is arranged in the shell, so that the inner space of the shell is divided into a first accommodating cavity and a second accommodating cavity which are isolated from each other from top to bottom; a circular-truncated-cone-shaped boss is arranged on the end face of the top of the partition plate, a through hole is formed in the middle of the boss, and therefore an air inlet channel is formed, the inlet end of the air inlet channel is connected with an external air source through an air guide pipe, a circular-truncated-cone-shaped first sleeve is installed outside the boss in a matched mode, and a liquid inlet channel is formed between the inner side wall face of the first sleeve and the outer side wall face of the boss. The top of the first sleeve is cooperatively provided with a nozzle. By arranging the spray head, the gas inlet channel, the liquid inlet channel and the flow guide pipe, vaporific liquid drops can be uniformly sprayed towards a workpiece, the operation is simple and convenient, the operation efficiency is high, and the glue spraying precision and uniformity are effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially a glue spraying device convenient to operate. BACKGROUND

[0002] The photoresist spraying process is to deposit photoresin on the surface of the substrate through atomization to form a continuous photoresin film, which has high glue coating efficiency and uniformity, and can uniformly spray photoresin on the substrate with a non-flat surface.

[0003] In related technologies, the photoresist spraying process is realized by a glue spraying machine. The glue spraying machine conducts ultrasonic waves generated by a vibration source to the surface of the photoresin based on the ultrasonic atomization mode, so that the surface is vibrated to generate a mesh wave, thereby splitting to form fine droplets, which are sprayed on the surface of the substrate through a nozzle. However, in the actual operation process, the size of the liquid outlet hole of the nozzle is fixed, so the operator must accurately control the liquid outlet amount to ensure the stability of the spraying process. If the flow rate is not properly set, either the spraying effect will be affected due to droplet accumulation, or the spraying will be interrupted due to insufficient flow rate, which is difficult to operate, has complex steps, and has low operation efficiency. SUMMARY

[0004] In view of the above-mentioned shortcomings in the existing production technology, the present application provides a glue spraying device convenient to operate. By setting the nozzle, the gas inlet channel, the liquid inlet channel, and the flow guide pipe, mist droplets can be uniformly sprayed towards the workpiece, which is simple and convenient to operate, has high operation efficiency, effectively improves the glue spraying precision and uniformity, and optimizes the glue spraying process. It is convenient to clean and replace, and the manufacturing and maintenance cost is low.

[0005] The technical solutions adopted by the utility model are as follows:

[0006] A glue spraying device convenient to operate, comprising an internally hollow shell, a flow guide pipe is installed on the top of the shell, the inlet end of the flow guide pipe is in communication with the internal space of the shell, the outlet end of the flow guide pipe faces the workpiece, a funnel-shaped partition plate is arranged in the internal space of the shell, thereby separating the internal space of the shell into a first accommodating cavity and a second accommodating cavity, a circular truncated cone-shaped boss is arranged on the top end surface of the partition plate, a through hole is formed in the middle of the boss, thereby forming a gas inlet channel, the inlet end of the gas inlet channel is connected with an external gas source through a gas guide pipe, a circular truncated cone-shaped first sleeve is installed on the outside of the boss, the inner side wall surface of the first sleeve and the outer side wall surface of the boss are uniformly and spacedly arranged, thereby forming a liquid inlet channel between the inner side wall surface of the first sleeve and the outer side wall surface of the boss, a nozzle is installed on the top of the first sleeve, the outlet end of the gas inlet channel and the outlet end of the liquid inlet channel are both connected with the inside of the nozzle, the first accommodating cavity contains photoresin liquid, and the inlet end of the liquid inlet channel is immersed in the photoresin liquid;

[0007] The external gas source blows compressed gas into the gas inlet channel through the gas guide pipe, the compressed gas flows in the gas inlet channel to form negative pressure inside the spray head, so that the photoresist liquid enters the spray head through the liquid inlet channel, and then the compressed gas blown out through the outlet end of the gas inlet channel disperses the mist liquid drops, the mist liquid drops are sprayed into the inside of the gas guide pipe through the spray head, and are sprayed to the surface of the workpiece under the action of the gas guide pipe.

[0008] As a further improvement of the above technical solution:

[0009] The structure of the spray head comprises a hollow atomizing shell, a center hole is formed in the bottom wall surface of the atomizing shell, a plurality of through holes are formed in the side wall surface of the atomizing shell and are uniformly and spacedly arranged along the circumference, and the through holes are used for spraying mist liquid drops.

[0010] A second sleeve is fitted and arranged outside the atomizing shell, and the second sleeve surrounds the atomizing shell and is spacedly arranged with the outer side wall surface of the atomizing shell.

[0011] The external gas source adopts a nitrogen gas source.

[0012] The top end surface of the first sleeve is higher than the top end surface of the boss.

[0013] An inclined surface is arranged above the gas inlet channel, so that the inner diameter of the gas inlet channel decreases along the flow direction of the compressed gas.

[0014] The shell and the gas guide pipe are simultaneously provided with a connecting frame, and the connecting frame is connected with the working end of the mechanical arm.

[0015] A feeding port is formed in the side wall surface of the shell, and the feeding port is used for feeding the photoresist liquid.

[0016] The boss and the partition plate are concentrically arranged.

[0017] The spray head is arranged directly below the inlet end of the gas guide pipe.

[0018] The beneficial effects of the utility model are as follows:

[0019] The utility model discloses compact structure, reasonable, convenient operation can form the gas inlet channel 13 and liquid inlet channel to the spray head through setting first sleeve, boss, so that the photoresist and compressed gas can be passed into the spray head, and make the photoresist liquid be dispersed by compressed gas, simultaneously, through setting spray head, can guarantee that the mist liquid drops are evenly sprayed into the gas guide pipe, thereby improving the uniformity of spraying glue. DRAWINGS

[0020] Figure 1 The utility model discloses compact structure, reasonable, convenient operation can form the gas inlet channel 13 and liquid inlet channel to the spray head through setting first sleeve, boss, so that the photoresist and compressed gas can be passed into the spray head, and make the photoresist liquid be dispersed by compressed gas, simultaneously, through setting spray head, can guarantee that the mist liquid drops are evenly sprayed into the gas guide pipe, thereby improving the uniformity of spraying glue.

[0021] Figure 2The utility model discloses a.

[0022] Figure 3 For Figure 2 The top view of the utility model.

[0023] Figure 4 For the structure diagram of the spray head in the utility model.

[0024] Figure 5 For the schematic diagram of the utility model in the working condition.

[0025] 1, shell, 2, gas guide pipe, 3, flow guide pipe, 4, buckle cover, 5, spray head, 6, partition, 7, connecting frame, 8, first sleeve, 9, second sleeve, 10, boss, 11, first accommodating cavity, 12, second accommodating cavity, 13, air inlet channel, 14, inclined plane, 15, liquid inlet channel, 16, feed inlet,

[0026] 501, atomization shell, 502, center hole, 503, via hole. Specific embodiments

[0027] The specific embodiments of the utility model are described below in combination with the drawings.

[0028] The structure and function of the utility model are as follows:

[0029] For example Figure 1As shown, the easy-to-operate glue spraying device of this embodiment includes a hollow outer shell 1. A guide pipe 3 is installed on the top of the outer shell 1. The inlet end of the guide pipe 3 communicates with the internal space of the outer shell 1, and the outlet end of the guide pipe 3 faces the workpiece. A funnel-shaped partition 6 is provided inside the outer shell 1, thereby dividing the internal space of the outer shell 1 into a first accommodating cavity 11 and a second accommodating cavity 12 that are isolated from each other from top to bottom. A frustum-shaped boss 10 is provided on the top end face of the partition 6. A through hole is opened in the middle of the boss 10, thereby forming an air intake channel 13. The inlet end of the air intake channel 13 is connected to an external air source through an air guide pipe 2. A frustum-shaped first sleeve 8 is installed on the outside of the boss 10. The inner side wall of the first sleeve 8 and the outer side wall of the boss 10 are evenly spaced. This creates a liquid inlet channel 15 between the inner wall of the first sleeve 8 and the outer wall of the boss 10. A nozzle 5 is fitted on the top of the first sleeve 8. The outlet ends of the air inlet channel 13 and the liquid inlet channel 15 both lead to the interior of the nozzle 5. The first accommodating cavity 11 contains photoresist liquid, which is submerged in the inlet end of the liquid inlet channel 15. An external air source blows compressed gas into the air inlet channel 13 through the air guide pipe 2. The compressed gas flows in the air inlet channel 13, creating a negative pressure inside the nozzle 5. This allows the photoresist liquid to enter the interior of the nozzle 5 through the liquid inlet channel 15. The compressed gas then disperses the liquid into mist droplets through the outlet end of the air inlet channel 13. The mist droplets are then sprayed into the interior of the guide pipe 3 through the nozzle 5 and onto the workpiece surface under the action of the guide pipe 3. The first sleeve 8 and the boss 10 form an air inlet channel 13 and a liquid inlet channel 15 leading to the nozzle 5, so that the photoresist and compressed gas can enter the nozzle 5 and the photoresist liquid can be dispersed by the compressed gas. At the same time, by setting the nozzle 5, it can be ensured that the mist droplets are evenly sprayed into the guide tube 3, thereby improving the uniformity of the spraying.

[0030] like Figure 4 As shown, the nozzle 5 has the following structure: it includes a hollow atomizing shell 501, a central hole 502 on the bottom wall of the atomizing shell 501, and several through holes 503 evenly spaced along the circumference on the side wall of the atomizing shell 501. The through holes 503 are used for spraying out atomized liquid droplets. The central hole 502 is used for installation in conjunction with the first sleeve 8.

[0031] A second sleeve 9 is fitted to the outside of the atomizing shell 501. The second sleeve 9 surrounds the atomizing shell 501 and is spaced apart from the outer wall of the atomizing shell 501. The second sleeve 9 can adhere to large atomized droplets, thereby preventing larger atomized droplets from being sprayed into the guide tube 3, thus improving the uniformity of adhesive spraying.

[0032] The external gas source adopts a nitrogen gas source. In the utility model, high-pressure nitrogen gas is used to break the photoresist liquid, the pressure range of the high-pressure nitrogen gas is 0.05MPa-0.09MPa, by reasonably controlling the pressure of the compressed gas, the proportion of the gas component and the liquid component in the mist liquid drops can be adjusted, so that the proportion of the gas component is greater than that of the liquid component, and then the mist liquid drops can smoothly flow through the flow guide pipe 3 and are sprayed to the workpiece surface through the outlet end of the flow guide pipe 3.

[0033] The top end surface of the first sleeve 8 is higher than the top end surface of the boss 10, and the upper portion of the air inlet channel 13 is provided with an inclined surface 14, so that the inner diameter of the air inlet channel 13 decreases along the flow direction of the compressed gas. In the utility model, a negative pressure is formed in the spray head 5 based on the Venturi effect, so that the photoresist liquid in the first containing cavity 11 can flow into the spray head 5 through the liquid inlet channel 15.

[0034] In addition, in order to improve the device compatibility and ensure that the photoresist liquid has good spraying effect on different types of workpieces, the air flow regulating valve is installed on the air guide pipe 2 in cooperation, the flow rate of the compressed gas can be adjusted, so that the pressure difference between the internal pressure of the spray head 5 and the external pressure of the spray head 5 is adjusted, and then the flow of the photoresist liquid in the liquid inlet channel 15 is adjusted.

[0035] The connecting frame 7 is installed on the outer shell 1 and the flow guide pipe 3 at the same time, and is connected with the working end of the mechanical arm through the connecting frame 7. The connecting frame 7 comprises two clamps, one clamp is clamped on the outer circumferential surface of the flow guide pipe 3, and the other clamp is clamped on the outer side wall surface of the outer shell 1, the two clamps are connected through a connecting rod, and the working end of the mechanical arm clamps the connecting rod, so that the photoresist liquid spraying device can be integrally moved to uniformly spray the photoresist liquid on the workpiece.

[0036] The side wall surface of the outer shell 1 is provided with a feeding port 16, and the feeding port 16 is used for feeding the photoresist liquid. The buckle cover 4 is installed at the feeding port 16 in cooperation, so as to avoid that the external foreign matters and dust fall into the inside of the outer shell 1 through the feeding port 16.

[0037] The boss 10 is concentrically installed with the partition plate 6.

[0038] The spray head 5 is arranged directly below the inlet end of the flow guide pipe 3.

[0039] The working process of the utility model is as follows:

[0040] The photoresist liquid spraying device is fixed on the working end of the mechanical arm through the connecting frame 7, and the photoresist liquid is injected into the first containing cavity 11 through the feeding port 16;

[0041] The external gas source is started, and the pre-spraying time is 3s, so as to check whether the device can normally work;

[0042] After confirmation, the external gas source sends high-pressure nitrogen gas to the gas inlet channel 13 through the gas guide pipe 2, and in the process of flowing into the spray head 5 through the gas inlet channel 13, a negative pressure is generated in the spray head 5, so that the photoresist liquid in the first containing cavity 11 flows into the spray head 5 through the liquid inlet channel 15, and is broken into mist droplets at the outlet end of the liquid inlet channel 15 by the high-pressure nitrogen gas, and then is uniformly sprayed outside the spray head 5 through the hole 503;

[0043] At the same time, under the driving action of high-pressure nitrogen gas, the mist droplets are sprayed out in turn through the second sleeve 9 and the flow guide pipe 3, so as to be uniformly sprayed on the workpiece surface;

[0044] Under the driving action of the mechanical arm, the photoresist spraying device uniformly sprays the workpiece.

[0045] The above description is an explanation of the utility model, not a limitation of the utility model, the scope defined by the utility model is referred to the claims, and any form of modification can be made within the protection scope of the utility model.

Claims

1. A glue spraying device for easy operation, characterized in that: The utility model provides a kind of nozzle and the structure of the nozzle is as follows: including the hollow shell (1) of inside, the top of the shell (1) is fitted with the flow guide pipe (3), the inlet end of the flow guide pipe (3) is communicated with the internal space of shell (1), the outlet end of the flow guide pipe (3) is towards workpiece, the inside of shell (1) is provided with funnel-shaped baffle (6), so as to divide the first accommodating cavity (11) and the second accommodating cavity (12) that are mutually isolated by the internal space of shell (1) from top to bottom, the top end surface of the baffle (6) is provided with circular platform-shaped boss (10), the middle part of the boss (10) is provided with through hole, so as to form air inlet channel (13), the inlet end of the air inlet channel (13) is connected with external gas source by gas guide pipe (2), the outside of the boss (10) is fitted with circular platform-shaped first sleeve (8), the inner side wall surface of the first sleeve (8) and the outer side wall surface of boss (10) are evenly spaced, so that the inner side wall surface of the first sleeve (8) and the outer side wall surface of boss (10) form liquid inlet channel (15) between, the top of the first sleeve (8) is fitted with spray head (5), the outlet end of the air inlet channel (13) and the outlet end of liquid inlet channel (15) are all directed to the inside of spray head (5), the first accommodating cavity (11) is filled with photoresist liquid, and the inlet end of liquid inlet channel (15) is immersed in photoresist liquid. External gas source blows compressed gas into air inlet channel (13) through gas guide pipe (2), the compressed gas flows in air inlet channel (13) to form negative pressure in the inside of spray head (5), so that photoresist liquid enters the inside of spray head (5) through liquid inlet channel (15), and then is blown by the compressed gas sprayed through the outlet end of air inlet channel (13) to form mist droplets, the mist droplets are sprayed into the inside of flow guide pipe (3) through spray head (5), and are sprayed to the surface of workpiece under the action of flow guide pipe (3).

2. A convenient operation glue spraying device according to claim 1, characterized in that: The structure of the spray head (5) is as follows: including the hollow atomizing shell (501) of inside, the bottom wall surface of the atomizing shell (501) is provided with central hole (502), the side wall surface of the atomizing shell (501) is provided with a plurality of through holes (503) evenly spaced along the circumference, and the through holes (503) are used for spraying mist droplets.

3. A convenient operation glue spraying device according to claim 2, characterized in that: The outside of the atomizing shell (501) is fitted with the second sleeve (9), and the second sleeve (9) surrounds the atomizing shell (501) and is spaced apart from the outer side wall surface of the atomizing shell (501).

4. The device of claim 1, wherein: The external gas source uses nitrogen gas source.

5. The device of claim 1, wherein: The top end surface of the first sleeve (8) is higher than the top end surface of the boss (10).

6. A convenient operation glue spraying device according to claim 1, characterized in that: The upper part of the air inlet channel (13) is provided with inclined surface (14), so that the inner diameter of the air inlet channel (13) decreases along the flow direction of the compressed gas.

7. A convenient operation glue spraying device according to claim 1, characterized in that: The connecting frame (7) is simultaneously installed on the shell (1) and the flow guide pipe (3), and is connected with the working end of the mechanical arm.

8. The device of claim 1, wherein: The side wall surface of the shell (1) is provided with feeding port (16), and the feeding port (16) is used for feeding photoresist liquid.

9. The device of claim 1, wherein: The boss (10) and the baffle (6) are concentrically installed.

10. The device of claim 1, wherein: The spray head (5) is arranged directly below the inlet end of the flow guide pipe (3).

Images