Crystal ingot cleaning device

Abstract

The utility model provides a crystal ingot cleaning device, which belongs to the technical field of semiconductor processing equipment, and particularly comprises a cleaning tank body and a lifting clamping mechanism, the lifting clamping mechanism is arranged on the cleaning tank body, the lifting clamping mechanism is used for clamping a to-be-cleaned crystal ingot and moving the to-be-cleaned crystal ingot into the cleaning tank body, and an ultrasonic cleaning mechanism in the cleaning tank body conducts ultrasonic cleaning on the crystal ingot. According to the crystal ingot cleaning device provided by the embodiment of the invention, the lifting clamping mechanism is used for clamping and fixing the to-be-cleaned crystal ingot and moving the to-be-cleaned crystal ingot into the cleaning tank body, and the ultrasonic cleaning mechanism in the cleaning tank body performs ultrasonic cleaning on the to-be-cleaned crystal ingot. The lifting clamping mechanism is designed to clamp and move the crystal ingot, the clamping effect on the crystal ingot is kept in the cleaning process, it can be guaranteed that the position of the crystal ingot is kept unchanged in the cleaning process, the crystal ingot is not affected by ultrasound and buoyancy, and accurate material taking of a mechanical arm after cleaning is facilitated.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing equipment technology, and more specifically, to an ingot cleaning apparatus. Background Technology

[0002] A silicon ingot, also known as a single-crystal silicon rod, is a high-purity silicon material widely used in the electronics industry. During the processing of silicon ingots, cleaning is necessary. The main purpose of ingot cleaning is to remove contaminants from its surface, which may include dust, grease, metallic impurities, organic matter, and inorganic salts. Cleaning ensures that the ingot surface is in a clean and controlled state, which is crucial for subsequent processing and manufacturing.

[0003] Traditional ingot cleaning tanks are not suitable for ingots of various thicknesses. When thinner ingots are cleaned, they cannot be fixed in position. Under the action of ultrasound and buoyancy, the position of the ingot moves around randomly during the cleaning process, making it difficult to accurately pick up the material after cleaning. Utility Model Content

[0004] The purpose of this application is to provide a crystal ingot cleaning device, which aims to solve the problem that the traditional crystal ingot cleaning tank in the related technology cannot be used for crystal ingots of various thicknesses. When thinner crystal ingots are cleaned, they cannot be fixed in position. Under the action of ultrasound and buoyancy, the position of the crystal ingot moves randomly during the cleaning process, which makes it inconvenient to accurately pick up the material after cleaning.

[0005] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description or may be learned by practice of this application.

[0006] According to a first aspect of this application, an ingot cleaning apparatus is provided, comprising:

[0007] Cleaning tank and lifting clamping mechanism;

[0008] The lifting and clamping mechanism is installed on the cleaning tank. The lifting and clamping mechanism is used to clamp the crystal ingot to be cleaned and move it into the cleaning tank. The ultrasonic cleaning mechanism in the cleaning tank performs ultrasonic cleaning on the crystal ingot.

[0009] In an exemplary embodiment of the present application, the lifting clamping mechanism comprises a first lifting mechanism and a second lifting mechanism, which are arranged on two sides of the cleaning tank body, at least one of the first lifting mechanism and the second lifting mechanism is slidingly provided with a horizontal moving mechanism, the first lifting mechanism or the second lifting mechanism is slidingly provided with a horizontal moving mechanism, the horizontal moving mechanism has a first clamping part, the second lifting mechanism or the first lifting mechanism has a second clamping part, the first clamping part and the second clamping part are adapted to clamp the crystal ingot to be cleaned when the horizontal moving mechanism moves towards the second lifting mechanism or the first lifting mechanism, and the first lifting mechanism and the second lifting mechanism are used to jointly drive the crystal ingot to be cleaned to move into the cleaning tank body.

[0010] In an exemplary embodiment of the present application, the first lifting mechanism and the second lifting mechanism are slidingly provided with horizontal moving mechanisms, the horizontal moving mechanisms on the first lifting mechanism and the second lifting mechanism form a first clamping part and a second clamping part respectively, the first clamping part and the second clamping part are adapted to clamp the crystal ingot to be cleaned when the two horizontal moving mechanisms move towards each other, and the first lifting mechanism and the second lifting mechanism are used to jointly drive the crystal ingot to be cleaned to move into the cleaning tank body.

[0011] In an exemplary embodiment of the present application, the first clamping part comprises a first supporting plate extending transversely along the cleaning tank body, the second clamping part comprises a second supporting plate extending transversely along the cleaning tank body, the first supporting plate and the second supporting plate are oppositely arranged, and the first supporting plate and the second supporting plate are both provided with positioning columns for clamping the side surface of the crystal ingot when the horizontal moving mechanism moves towards the second lifting mechanism.

[0012] In an exemplary embodiment of the present application, the supporting plate is further provided with a supporting head for receiving the crystal ingot.

[0013] In an exemplary embodiment of the present application, a drying tank body is further included, which is arranged on one side of the cleaning tank body, the drying tank body is provided with a drying mechanism, and the drying mechanism is used to dry the cleaned crystal ingot.

[0014] In an exemplary embodiment of the present application, the drying mechanism comprises an air knife, the air knife is provided with an air outlet hole for blowing gas to dry the crystal ingot.

[0015] The air knife is rotatably installed on the side wall of the drying tank body.

[0016] A pressing block is arranged at the connecting position of the air knife and the sidewall of the blow-drying groove body, the pressing block has a pressing state for keeping the position of the air knife unchanged, and the pressing block also has an unlocking state for rotating the air knife on the sidewall of the blow-drying groove body to adjust the angle of the air knife.

[0017] In an exemplary embodiment of the present application, the blow-drying mechanism further comprises a fixed shaft, the tail of the air knife is connected with the fixed shaft, and the fixed shaft is rotatably connected with the sidewall of the blow-drying groove body.

[0018] The pressing block and the sidewall of the blow-drying groove body form an installation space of the fixed shaft, and the pressing block is in the pressing state when pressing the fixed shaft.

[0019] In an exemplary embodiment of the present application, the blow-drying mechanism further comprises a blowing block, the blowing block is connected with the fixed shaft, and the air knife is installed on the blowing block.

[0020] In an exemplary embodiment of the present application, a waterproof door mechanism is further included and arranged on the blow-drying groove body, the waterproof door mechanism is used for shielding the top surface of the blow-drying groove body.

[0021] The waterproof door mechanism comprises a driving device, a movable door, a connecting piece and a hinge, the movable door is rotatably installed on the blow-drying groove body through the hinge, the driving device is connected with the movable door through the connecting piece, and the driving device is used for driving the movable door to rotate on the blow-drying groove body to open or close the blow-drying groove body.

[0022] In an exemplary embodiment of the present application, the movable door has two, the two movable doors are oppositely arranged, the movable side of each of the two movable doors is provided with an avoiding slot, and the two avoiding slots form an avoiding space for the robot when the movable door is closed.

[0023] The exemplary embodiments of the present application can have the following parts or all of the beneficial effects:

[0024] The crystal ingot cleaning device provided in the exemplary embodiments of the present application comprises a cleaning groove body and a lifting clamping mechanism. The lifting clamping mechanism is arranged on the cleaning groove body and is used for clamping and fixing the crystal ingot to be cleaned and moving the crystal ingot to be cleaned into the cleaning groove body. The ultrasonic cleaning mechanism in the cleaning groove body is used for ultrasonic cleaning of the crystal ingot to be cleaned. The lifting clamping mechanism is designed to clamp and move the crystal ingot, and the clamping effect of the crystal ingot is maintained during the cleaning process, so that the position of the crystal ingot during the cleaning process is kept unchanged and is not affected by the ultrasonic wave and the buoyancy, and the accurate material taking of the robot after cleaning is facilitated.

[0025] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application, as claimed. BRIEF DESCRIPTION OF DRAWINGS

[0026] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and serve to explain the principles of the application. It is readily apparent to one skilled in the art that other alternative embodiments of the application can be devised without departing from the spirit of the application. Thus, the following drawings should be regarded only as illustrative of the application.

[0027] Figure 1 A top view of a crystal ingot cleaning device in an embodiment of the application is shown;

[0028] Figure 2 A structural schematic view of a crystal ingot cleaning device in an embodiment of the application is shown;

[0029] Figure 3 A side view of a second lifting mechanism in an embodiment of the application is shown;

[0030] Figure 4 A structural schematic view of a second lifting mechanism in an embodiment of the application is shown;

[0031] Figure 5 A top view of a second lifting mechanism in an embodiment of the application is shown;

[0032] Figure 6 A side view of a first lifting mechanism in an embodiment of the application is shown;

[0033] Figure 7 A structural schematic view of a first lifting mechanism in an embodiment of the application is shown;

[0034] Figure 8 A side view of a blow-drying mechanism in an embodiment of the application is shown;

[0035] Figure 9 A structural schematic view of a blow-drying mechanism in an embodiment of the application is shown;

[0036] Figure 10 A top view of a waterproof door mechanism in an embodiment of the application is shown;

[0037] Figure 11 A structural schematic view of a waterproof door mechanism in an embodiment of the application is shown.

[0038] BRIEF DESCRIPTION OF DRAWINGS

[0039] 1, cleaning tank body; 2, second lifting mechanism; 21, second lifting support; 22, second lifting cylinder; 23, second connecting plate; 24, third reinforcing rib; 25, second vertical plate; 26, fourth reinforcing rib; 27, second supporting plate; 3, first lifting mechanism; 31, first lifting support; 32, first lifting cylinder; 33, fixed plate; 34, horizontal moving mechanism; 35, first connecting plate; 36, first reinforcing rib; 37, first vertical plate; 38, second reinforcing rib; 39, first supporting plate; 4, waterproof door mechanism; 41, driving device; 42, connecting piece; 43, mandrel; 44, movable door; 45, hinge; 46, avoiding groove; 5, blow-drying mechanism; 51, supporting bracket; 52, fixed shaft; 53, pressing block; 54, blowing-up block; 55, air knife; 6, blow-drying tank body; 7, positioning column; 8, supporting head. DETAILED DESCRIPTION

[0040] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations can be implemented in any

[0041] Although relative terms such as "upper", "lower", etc. are used herein to describe one component's relationship to another component of the icon, these terms are used herein for convenience only and are not necessarily carried into the description of the icon's device as actually used. It is to be understood that, if the icon's device is turned over so that the upper becomes the lower, as described, the component recited as being on "upper" will become the component on "lower". When a structure is "on" another structure, it can mean that the structure is formed integrally with the other structure or that the structure is "directly" on the other structure or that the structure is "indirectly" on the other structure via another structure.

[0042] The terms "one", "a", "an", and "the" are used to mean that "at least one" of something is present; the terms "comprising" and "having" are used to mean "including" and also encompassing the possibility that there are additional items not specifically recited in the list; the term "first", "second", etc. are used to denote the names of similar elements, and do not require or imply any actual relationship between these elements.

[0043] EMBODIMENT

[0044] The present embodiment provides a specific implementation of a crystal ingot cleaning device, as shown in Figure 1 and Figure 2As shown, the device comprises a cleaning tank 1 and a lifting clamping mechanism, wherein the lifting clamping mechanism is arranged on the cleaning tank 1 and is used for clamping and fixing the crystal ingot to be cleaned and moving the crystal ingot to the cleaning tank 1, and the ultrasonic cleaning mechanism in the cleaning tank 1 is used for ultrasonic cleaning of the crystal ingot to be cleaned. By designing the lifting clamping mechanism to clamp and move the crystal ingot, and keeping the clamping effect on the crystal ingot during the cleaning process, the position of the crystal ingot during the cleaning process can be kept unchanged and will not be affected by the ultrasonic and buoyancy, which facilitates the accurate picking of the mechanical hand after cleaning.

[0045] In the embodiment, the lifting clamping mechanism comprises a first lifting mechanism 3 and a second lifting mechanism 2, and the first lifting mechanism 3 and the second lifting mechanism 2 are arranged on the two sides of the cleaning tank 1. At least one of the first lifting mechanism 3 and the second lifting mechanism 2 is slidably provided with a horizontal moving mechanism 34. In the embodiment, the horizontal moving mechanism 34 is arranged on the first lifting mechanism 3. The first lifting mechanism 3 is slidably provided with the horizontal moving mechanism 34. The horizontal moving mechanism 34 has a first clamping part. The second lifting mechanism 2 has a second clamping part. When the horizontal moving mechanism 34 moves towards the second lifting mechanism 2, the first clamping part moves towards the second clamping part and clamps the crystal ingot to be cleaned between the first clamping part and the second clamping part. Then, the first lifting mechanism 3 and the second lifting mechanism 2 jointly drive the crystal ingot to be cleaned to move into the cleaning tank 1 for ultrasonic cleaning.

[0046] In other embodiments, the first lifting mechanism 3 and the second lifting mechanism 2 are both provided with the horizontal moving mechanism 34. The two horizontal moving mechanisms 34 are arranged opposite to each other. The first clamping part and the second clamping part are arranged on the two horizontal moving mechanisms 34 respectively. The first clamping part and the second clamping part can move away from or close to each other. When the first clamping part and the second clamping part move away from each other, the space for accommodating the crystal ingot to be cleaned can be released. After the mechanical hand moves the crystal ingot to be cleaned between the first clamping part and the second clamping part, the two horizontal moving mechanisms move the first clamping part and the second clamping part close to each other until the first clamping part and the second clamping part clamp the crystal ingot to be cleaned.

[0047] Further, the first clamping part comprises a first supporting plate 39 extending transversely along the cleaning tank 1. The second clamping part comprises a second supporting plate 27 extending transversely along the cleaning tank 1. The first supporting plate 39 and the second supporting plate 27 are arranged opposite to each other. The first supporting plate 39 and the second supporting plate 27 are provided with positioning columns 7. When the first clamping part and the second clamping part clamp the crystal ingot, the positioning columns 7 on the first supporting plate 39 and the positioning columns 7 on the second supporting plate 27 are clamped on the circumferential side of the crystal ingot.

[0048] Further, the first supporting plate 39 and the second supporting plate 27 are provided with supporting heads 8 for supporting the ingot, and the supporting heads 8 are preferably designed as hemispheres, so as to reduce the contact area between the bottom surface of the ingot and the first supporting plate 39 and the second supporting plate 27, and make the ultrasonic cleaning more thorough.

[0049] As shown in Figure 3 , Figure 4 and Figure 5 , the second lifting mechanism 2 comprises a second lifting support 21, a second lifting cylinder 22, a second connecting plate 23, a third reinforcing rib 24, a second vertical plate 25, a fourth reinforcing rib 26 and a second supporting plate 27. The second lifting support 21 is installed on the side of the cleaning tank body 1, the second lifting cylinder 22 is installed on the second lifting support 21, the second connecting plate 23 is connected to the driving end of the second lifting cylinder 22, the top end of the second vertical plate 25 is connected to the second connecting plate 23, the second supporting plate 27 is connected to the lower end of the second vertical plate 25, the third reinforcing rib 24 is arranged at the connecting position of the second vertical plate 25 and the second connecting plate 23, the fourth reinforcing rib 26 is arranged at the connecting position of the second vertical plate 25 and the second supporting plate 27, and the second supporting plate 27 is provided with the positioning column 7 and the supporting head 8. The second lifting cylinder 22 can drive the second connecting plate 23, the third reinforcing rib 24, the second vertical plate 25, the fourth reinforcing rib 26 and the second supporting plate 27 to move up and down together.

[0050] As shown in Figure 6 and Figure 7As shown, the first lifting mechanism 3 comprises a first lifting support 31, a first lifting cylinder 32, a fixed plate 33, a horizontal moving mechanism 34, a first connecting plate 35, a first reinforcing rib 36, a first vertical plate 37, a second reinforcing rib 38, and a first supporting plate 39. The first lifting support 31 is installed on the side of the cleaning tank body 1. The first lifting cylinder 32 is installed on the first lifting support 31. The horizontal moving mechanism 34 is connected to the driving end of the first lifting cylinder 32 through the fixed plate 33. The first connecting plate 35 is connected to the driving end of the horizontal moving mechanism 34. The top end of the first vertical plate 37 is connected to the first connecting plate 35. The bottom end of the first vertical plate 37 is connected to the first supporting plate 39. The first reinforcing rib 36 is arranged at the connection position of the first vertical plate 37 and the first connecting plate 35. The second reinforcing rib 38 is arranged at the connection position of the first vertical plate 37 and the first supporting plate 39. The first supporting plate 39 is provided with the positioning column 7 and the supporting head 8. The first lifting cylinder 32 can drive the fixed plate 33, the horizontal moving mechanism 34, the first connecting plate 35, the first reinforcing rib 36, the first vertical plate 37, the second reinforcing rib 38, and the first supporting plate 39 to move up and down together. The horizontal moving mechanism 34 can drive the first connecting plate 35 to drive the first vertical plate 37 and the first supporting plate 39 to move horizontally. The positioning column 7 on the first supporting plate 39 can press the crystal ingot between the first vertical plate 37 and the second vertical plate 25 to the positioning column 7 on the second supporting plate 27, so as to clamp the crystal ingot.

[0051] Further, the horizontal moving mechanism 34 can be a telescopic rod, a cylinder, a hydraulic cylinder, or the like, as long as it can realize horizontal movement.

[0052] In the embodiment, the blow-drying tank body 6 is arranged on one side of the cleaning tank body 1. The blow-drying tank body 6 is provided with the blow-drying mechanism 5. The crystal ingot after ultrasonic cleaning can be moved into the blow-drying tank body 6 by the mechanical hand and subjected to blow-drying treatment by the blow-drying mechanism 5.

[0053] In the embodiment, the blow-drying tank body 6 is provided with the air knife 55. The air knife 55 is provided with an air outlet. The air knife 55 can blow out gas to blow-dry the crystal ingot.

[0054] Further, the air knife 55 is rotationally installed on the side wall of the blow-drying tank body 6 through the blowing block 54. The blowing block 54 is rotationally installed on the side wall of the blow-drying tank body 6 through the fixed shaft 52. The pressing block 53 forms an installation space of the fixed shaft 52 between the side wall of the blow-drying tank body 6 and the pressing block 53. The pressing block 53 can press the fixed shaft 52 in the pressing state, so that the fixed shaft 52 cannot rotate in the installation space. The air knife 55 can maintain a certain blowing angle. The pressing block 53 can release the pressing of the fixed shaft 52 in the unlocking state. The operator can control the blowing block 54 and the air knife 55 to rotate, so as to adjust the blowing angle of the air outlet and better blow-dry the crystal ingot.

[0055] Further, the pressing block 53 is mounted on the sidewall of the blow-drying groove body 6 by screws, and the mounting space of the fixing shaft 52 formed between the pressing block 53 and the sidewall of the blow-drying groove body 6 is a circular through hole, the size of the through hole is smaller than the diameter of the fixing seat, so that when the screws are tightened, the through hole is in interference fit with the fixing shaft 52, so that the pressing block 53 can press the fixing shaft 52, and the fixing shaft 52 no longer rotates.

[0056] In other embodiments, the tail of the air knife 55 can also be directly connected with the fixing shaft 52 without the blow-up block 54.

[0057] In the embodiment, the air knife 55 has two, and the two air knives 55 are distributed in an up-down manner on the sidewall of the blow-drying groove body 6, and the air outlets of the two air knives 55 are both directed to the crystal ingot.

[0058] In the embodiment, as shown in Figure 8 and Figure 9 , the blow-drying mechanism 5 includes a support bracket 51, a fixing shaft 52, a pressing block 53, a blow-up block 54, and an air knife 55, the support bracket 51 is mounted on the side of the blow-drying groove body 6, the fixing shaft 52 is connected to the support bracket 51 by the pressing block 53, the blow-up block 54 is fixed to the fixing shaft 52, and the air knife 55 is fixed to the blow-up block 54. After the conventional cleaning tank cleans the crystal ingot, it is not blow-dried, in order to prevent water droplets from falling on the equipment, a water collecting tank is usually added on the transfer path of the crystal ingot during the transfer process of the crystal ingot, and the structure of the water collecting tank needs to consider the structures of all paths and equipment, so that the use of the water collecting tank is not convenient for processing and installation, and the application adds the blow-drying groove body 6 and the blow-drying mechanism 5 on one side of the cleaning tank body 1, which solves the problem well, and the crystal ingot is blow-dried before being transferred, which is simple and convenient to operate, avoids water droplets from falling on the equipment during the transfer of the crystal ingot, and at the same time, avoids adding the structure of the water collecting tank.

[0059] In the embodiment, the waterproof door mechanism 4 is also included, as shown in Figure 10 and Figure 11 , which is arranged on the blow-drying groove body 6, and after the robot moves the cleaned crystal ingot to the blow-drying groove body 6, the waterproof door mechanism 4 is closed to shield the top surface of the blow-drying groove body 6, so as to avoid water droplets from splashing out from the top surface during the blow-drying of the crystal ingot.

[0060] Further, the waterproof door mechanism 4 includes two movable doors 44, and the movable side of each of the two movable doors 44 is provided with an avoiding slot 46, and the two avoiding slots 46 form an avoiding space for the robot when the movable door 44 is closed.

[0061] The waterproof door mechanism 4 comprises a driving device 41, a connecting piece 42, a mandrel 43, a movable door 44 and a hinge 45. The driving device 41 is arranged on one side of the blow-drying groove body 6. The driving end of the driving device 41 is connected with the movable door 44 through the connecting piece 42 and the mandrel 43. The driving device 41 can drive the movable door 44 to rotate around the hinge 45. Specifically, the driving device 41 can be a pneumatic cylinder.

[0062] Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. It is intended that the specification and examples be considered as exemplary only, with the true scope and spirit of the application being indicated by the following claims.

Claims

1. A crystal ingot cleaning apparatus characterized by comprising: The utility model relates to a crystal ingot cleaning device, including: a cleaning tank body and a lifting clamping mechanism; the lifting clamping mechanism is arranged on the cleaning tank body, and the lifting clamping mechanism is used for clamping and moving the crystal ingot to be cleaned into the cleaning tank body, and the ultrasonic cleaning mechanism in the cleaning tank body is used for ultrasonic cleaning the crystal ingot; the lifting clamping mechanism includes first lifting mechanism and second lifting mechanism, first lifting mechanism and second lifting mechanism are separately arranged on both sides of the cleaning tank body, and at least one of first lifting mechanism and second lifting mechanism is slidably provided with a horizontal moving mechanism, the horizontal moving mechanism is slidably arranged on first lifting mechanism or second lifting mechanism, the horizontal moving mechanism has a first clamping part, second lifting mechanism or first lifting mechanism has a second clamping part, and the first clamping part and the second clamping part are adapted to clamp the crystal ingot to be cleaned when the horizontal moving mechanism moves towards second lifting mechanism or first lifting mechanism, and first lifting mechanism and second lifting mechanism are used to jointly drive the crystal ingot to be cleaned to move into the cleaning tank body.

2. The crystal ingot cleaning apparatus according to claim 1, characterized by horizontal moving mechanisms are slidably arranged on first lifting mechanism and second lifting mechanism, and the horizontal moving mechanisms on first lifting mechanism and second lifting mechanism form first clamping part and second clamping part respectively, the first clamping part and the second clamping part are adapted to clamp the crystal ingot to be cleaned when the two horizontal moving mechanisms move towards each other, and first lifting mechanism and second lifting mechanism are used to jointly drive the crystal ingot to be cleaned to move into the cleaning tank body.

3. The crystal ingot cleaning apparatus according to claim 2, wherein the first clamping part includes a first supporting plate extending transversely along the cleaning tank body, the second clamping part includes a second supporting plate extending transversely along the cleaning tank body, the first supporting plate and the second supporting plate are oppositely arranged, and positioning columns are arranged on the first supporting plate and the second supporting plate, the positioning columns are used for clamping the side surface of the crystal ingot when the horizontal moving mechanism moves towards the second lifting mechanism.

4. The crystal ingot cleaning apparatus according to claim 3, wherein a supporting head for receiving the crystal ingot is further arranged on the supporting plate.

5. The crystal ingot cleaning apparatus according to claim 1, wherein a drying tank body is further included and arranged on one side of the cleaning tank body, a drying mechanism is arranged in the drying tank body, and the drying mechanism is used for drying the cleaned crystal ingot; the drying mechanism includes an air knife, air outlets are formed in the air knife, and the air knife is used for blowing gas to dry the crystal ingot; the air knife is rotatably installed on the side wall of the drying tank body; a pressing block is arranged at the connection position between the air knife and the side wall of the drying tank body, the pressing block has a pressing state for keeping the position of the air knife unchanged, and the pressing block further has an unlocking state for rotating the air knife on the side wall of the drying tank body to adjust the angle of the air knife.

6. The crystal ingot cleaning apparatus according to claim 5, wherein the drying mechanism further includes a fixed shaft, the tail part of the air knife is connected with the fixed shaft, and the fixed shaft is rotatably connected with the side wall of the drying tank body; an installation space of the fixed shaft is formed between the pressing block and the side wall of the drying tank body, and the pressing block is in the pressing state when the pressing block presses the fixed shaft.

7. The crystal ingot cleaning apparatus according to claim 6, wherein the drying mechanism further includes a blowing block, the blowing block is connected with the fixed shaft, and the air knife is installed on the blowing block.

8. The crystal ingot cleaning apparatus according to any one of claims 5 to 7, characterized by The waterproof door mechanism is arranged on the blow-drying groove body and used for shielding the top surface of the blow-drying groove body. The waterproof door mechanism comprises a driving device, a movable door, a connecting piece and a hinge. The movable door is rotatably installed on the blow-drying groove body through the hinge. The driving device is connected with the movable door through the connecting piece. The driving device is used for driving the movable door to rotate on the blow-drying groove body so as to open or close the blow-drying groove body.

9. The crystal ingot cleaning apparatus according to claim 8, wherein The movable door has two, and the two movable doors are oppositely arranged. The movable side of each of the two movable doors is provided with an avoiding groove. When the movable door is closed, the two avoiding grooves form an avoiding space for the avoiding robot arm.

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