Device for renovating inner hole of gas-guide tube
By designing an inner hole refurbishment device, and utilizing a pipe clamping platform and linear drive components in conjunction with coolant, the problem of unstable gas flow caused by deposition in the inner hole of the gas guide tube was solved, achieving high-precision refurbishment of the inner hole of the gas guide tube and reducing material consumption and costs in semiconductor chip manufacturing.
Patent Information
- Application Number
- CN202423137173.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-12-19
AI Technical Summary
During use, the gas flow rate in the inner hole of the gas duct becomes unstable due to thin film deposition. Existing refurbishment methods cannot guarantee the accuracy of the inner and outer diameter dimensions, resulting in high manufacturing costs for semiconductor chips.
An internal bore renovation device is used, which stably clamps the air guide tube through a tube moving clamp, controls the movement of the reaming tool using a linear drive, and continuously injects coolant into the inner bore through a liquid supply pipe. This results in good cooling and chip removal effects, and effectively renovates the inner bore of the tube.
It improves the accuracy and stability of the pore enlargement of the gas guide tube, and reduces the material consumption and cost of semiconductor chip manufacturing.
Smart Images
Figure CN223557074U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of air guide pipe renovation, and particularly relates to an air guide pipe inner hole renovation device. BACKGROUND
[0002] A chemical vapor deposition process requires a quartz or silicon air guide pipe to guide process gas into a deposition cavity. When the pipe body of the air guide pipe is used for gas delivery, some reaction gas will deposit on the inner and outer surfaces of the pipe body, and the thickness of the deposited film is not uniform along the length of the pipe, which causes the inner hole of the air guide pipe to continuously decrease and the gas flow to be insufficient.
[0003] In view of the semiconductor chip manufacturing process, the quality and dimensional accuracy of the inner hole wall of the pipe body of the air guide pipe are required to be high. Air guide pipes that do not meet the requirements can only be scrapped and replaced, which results in a large consumption of pipe parts for semiconductor manufacturing and high product costs, and thus high use costs.
[0004] The conventional renovation method is to use a center water outlet deep hole drilling device to ream the hole. This method has two disadvantages. First, the hollow drill has poor rigidity when the length is large, and the drill will bend and cause the drilling direction to deviate when it is mechanically extruded. Second, because the renovated product is a hollow pipe, the cooling liquid cannot effectively stay in the pipe during drilling, which results in poor drilling effect and the pipe body is easily broken under vibration.
[0005] Another background technology is to use quicksand polishing and grinding inside the hole of the air guide pipe and sand blasting outside the hole. However, these methods can only be used when the thickness of the deposits inside and outside the pipe is uniform. Because quicksand polishing and sand blasting are non-selective equivalent elimination, the dimensional accuracy of the inner and outer diameters of the pipe body cannot be guaranteed again. UTILITY MODEL CONTENTS
[0006] The utility model aims to solve the problem that the inner hole of the pipe body of the air guide pipe will deposit a film as the use time increases, which causes the gas flow of the air guide pipe to be unstable and affects the manufacturing of semiconductor chips.
[0007] To solve the above problems, the utility model provides an air guide pipe inner hole renovation device, which comprises an inner hole renovation platform, a driving head, a reaming tool and a pipe moving clamp table. The driving head is fixed to the front part of the inner hole renovation platform. The pipe moving clamp table is located at the rear part of the inner hole renovation platform and is used for clamping the pipe body. The rear part of the pipe moving clamp table is provided with a liquid supply pipe. The inner hole renovation platform is provided with a linear driving member for driving the pipe moving clamp table to move in the front-rear direction. The front end of the reaming tool is connected to the driving head, and the rear end faces the pipe moving clamp table.
[0008] Compared with the prior art, the inner hole reconditioning device has the pipe moving clamping table to stably clamp the pipe body, the linear driving element controls the moving amount of the pipe moving platform, the pipe expanding cutter can expand the inner hole of the pipe body on the pipe moving clamping table from front to back, and the liquid supply pipe can continuously inject the cooling liquid into the inner hole of the pipe body on the pipe moving clamping table from back to front, so that the cooling liquid flows in the opposite direction of the pipe expanding direction of the pipe expanding cutter, and better cooling and chip removal effects are achieved, thereby effectively reconditioning the inner hole of the pipe body.
[0009] In an improved scheme, the pipe moving clamping table is provided with an upper clamping plate and a lower clamping plate, the upper side of the lower clamping plate is provided with a lower accommodating groove extending in the front-rear direction, and the lower side of the upper clamping plate is provided with an upper accommodating groove extending in the front-rear direction, and the upper clamping plate is stacked above the lower clamping plate, so that the upper accommodating groove and the lower accommodating groove clamp and fix the pipe body.
[0010] In an improved scheme, the rear part of the lower clamping plate is provided with a liquid supply connector, the front end of the liquid supply connector is arranged towards the rear side of the lower accommodating groove, and the rear end is connected with the liquid supply pipe. The front end of the liquid supply connector is used to be connected to the pipe body in the lower accommodating groove, so as to provide the inner hole of the pipe body with cooling liquid and support the pipe body in the front-rear direction, to ensure that the pipe body does not move backward when the pipe expanding cutter expands the inner hole of the pipe body.
[0011] In an improved scheme, the upper side of the upper clamping plate is connected with an upper fixed block, and the lower side of the lower clamping plate is connected with a lower fixed block, the material hardness of the upper fixed block is greater than that of the upper clamping plate, and the material hardness of the lower fixed block is greater than that of the lower clamping plate, so that the material hardness of the upper clamping plate and the lower clamping plate is smaller, to avoid damaging the pipe body, and the material hardness of the upper fixed block and the lower fixed block is greater, to reinforce the upper clamping plate and the lower clamping plate.
[0012] In an improved scheme, the upper fixed block is preferably made of metal, and the upper clamping plate is preferably made of PVC; the lower fixed block is preferably made of metal, so as to have better structural strength, and the lower clamping plate is preferably made of PVC, the upper clamping plate and the lower clamping plate made of PVC have a certain deformation ability, to avoid damaging the pipe body, and the upper fixed block and the lower fixed block made of metal have better structural strength, to reinforce the upper clamping plate and the lower clamping plate.
[0013] In an improved scheme, the lower clamping plate and the lower fixing block are fixed relative to the pipe moving clamping table, the upper fixing block and the upper clamping plate are provided with a plurality of vertical mounting holes, the lower clamping plate is provided with a plurality of vertical screw holes, the mounting holes and the screw holes correspond one by one, and the mounting holes are provided with screws for being connected to the screw holes, so that the upper clamping plate and the lower clamping plate are fixedly connected, and the clamping tightness of the upper clamping plate and the lower clamping plate can be controlled by rotating the screws, so that the pipe is clamped with appropriate pressure, and the pipe is prevented from being loosened due to small clamping force or being broken due to large clamping force.
[0014] In an improved scheme, the linear driving member comprises a guide rail and a screw motor pair arranged along the front-rear direction, the pipe moving clamping table is slidably connected to the guide rail, and the pipe moving clamping table is provided with a pipe moving screw table which is screw-connected to the screw motor pair. The movement of the pipe moving sliding table is controlled by the screw motor pair, so that the accuracy is high and the stability is good.
[0015] In an improved scheme, the inner hole renewal device further comprises a limiting sliding table slidably connected to the guide rail, the limiting sliding table is located between the pipe moving clamping table and the driving head, and the limiting sliding table is provided with a clamping seat for clamping the pipe, so that the position of the pipe extending out of the moving clamping table is clamped by the clamping seat, and the stability of the pipe during the hole expansion is ensured.
[0016] In an improved scheme, the clamping seat is annular, the inner ring side of the clamping seat is provided with a rubber ring, and the inner ring size of the rubber ring is matched with the pipe, so that the pipe is clamped more stably by the rubber ring of the clamping seat, and the pipe is prevented from being damaged by the clamping seat. BRIEF DESCRIPTION OF DRAWINGS
[0017] Figure 1 It is a whole schematic diagram of the inner hole renewal device of the air guide pipe Figure One ;
[0018] Figure 2 It is a whole schematic diagram of the inner hole renewal device of the air guide pipe Figure Two .
[0019] BRIEF DESCRIPTION OF DRAWINGS,
[0020] a1, inner hole renewal platform; a11, guide rail; a12, screw motor pair; a13, limiting sliding table; a14, clamping seat; a15, rubber ring; a2, driving head; a3, hole expansion cutter; a4, pipe moving clamping table; a41, upper clamping plate; a411, upper accommodating groove; a412, mounting hole; a42, lower clamping plate; a421, lower accommodating groove; a422, screw hole; a43, upper fixing block; a44, lower fixing block; a45, pipe moving screw table; a46, screw; a5, liquid supply pipe; a6, liquid supply connector. DETAILED DESCRIPTION
[0021] Those skilled in the art will understand that the following embodiments are merely used for explaining the technical principles of the embodiments of the present application, and are not intended to limit the protection scope of the embodiments of the present application. Those skilled in the art can make adjustments to them as needed in order to adapt to specific application occasions.
[0022] In the description of the following embodiments, it should be noted that unless explicitly specified and limited, the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrally connected, it can be mechanically connected, or electrically connected, it can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.
[0023] In the embodiments of the present application, unless explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0024] The present application will be further described in detail below in conjunction with the drawings and specific embodiments.
[0025] As shown in Figure 1 and Figure 2 The embodiments of the present application provide a gas guide tube hole renovation device, which comprises a hole renovation platform a1, a driving machine head a2, a hole expanding cutter a3 and a pipe clamping table a4. The driving machine head a2 is fixed to the front part of the hole renovation platform a1, and the pipe clamping table a4 is located at the rear part of the hole renovation platform a1 and is used for clamping the pipe body. The rear part of the pipe clamping table a4 is provided with a liquid supply pipe a5, and the hole renovation platform a1 is provided with a linear driving element for driving the pipe clamping table a4 to move in the front-rear direction. The front end of the hole expanding cutter a3 is connected to the driving machine head a2, and the rear end faces the pipe clamping table a4.
[0026] The hole renovation device of the above scheme realizes stable clamping of the pipe body through the pipe clamping table a4, controls the movement amount of the pipe clamping platform through the linear driving element, so that the hole expanding cutter a3 can expand the hole of the pipe body on the pipe clamping table a4 from front to back, and the liquid supply pipe a5 can continuously inject cooling liquid into the hole of the pipe body on the pipe clamping table a4 from back to front, so that the cooling liquid flows in the opposite direction of the hole expanding direction of the hole expanding cutter a3, and plays a better cooling and chip removal role, thereby realizing effective renovation of the hole of the pipe body.
[0027] The clamping mode of the pipe moving clamp table a4 to the pipe body can be in the form of the prior art, or in the embodiment, the pipe moving clamp table a4 is provided with an upper clamping plate a41 and a lower clamping plate a42, the upper side of the lower clamping plate a42 is provided with a lower accommodating groove a421 extending in the front-rear direction, the lower side of the upper clamping plate a41 is provided with an upper accommodating groove a411 extending in the front-rear direction, and the upper clamping plate a41 is stacked above the lower clamping plate a42 so that the upper accommodating groove a411 and the lower accommodating groove a421 achieve clamping and fixing of the pipe body.
[0028] Further, in the embodiment, the upper side of the upper clamping plate a41 is connected with an upper fixed block a43, the lower side of the lower clamping plate a42 is connected with a lower fixed block a44, the material hardness of the upper fixed block a43 is greater than that of the upper clamping plate a41, and the material hardness of the lower fixed block a44 is greater than that of the lower clamping plate a42, so that the material hardness of the upper clamping plate a41 and the lower clamping plate a42 is smaller, avoiding damage to the pipe body, and the material hardness of the upper fixed block a43 and the lower fixed block a44 is greater, playing a reinforcing role on the upper clamping plate a41 and the lower clamping plate a42.
[0029] More specifically, the upper fixed block a43 is preferably of metal material, and the upper clamping plate a41 is preferably of PVC material; the lower fixed block a44 is preferably of metal material so as to have better structural strength, and the lower clamping plate a42 is preferably of PVC material, the upper clamping plate a41 and the lower clamping plate a42 of PVC material have a certain deformation capacity, avoiding damage to the pipe body, while the upper fixed block a43 and the lower fixed block a44 of metal material have better structural strength, playing a reinforcing role on the upper clamping plate a41 and the lower clamping plate a42.
[0030] In the embodiment, the lower clamping plate a42 and the lower fixed block a44 are both fixed relative to the pipe moving clamp table a4, the upper fixed block a43 and the upper clamping plate a41 are both provided with a plurality of vertical mounting holes a412, the lower clamping plate a42 is provided with a plurality of vertical screw holes a422, the mounting holes a412 and the screw holes a422 correspond one by one, the mounting holes a412 are provided with screws a46 connected to the screw holes a422, so as to achieve the clamping and fixing of the upper clamping plate a41 and the lower clamping plate a42, and by rotating the screws a46, the clamping tightness of the upper clamping plate a41 and the lower clamping plate a42 can be controlled, ensuring that the upper clamping plate a41 and the lower clamping plate a42 have appropriate clamping pressure on the pipe body, avoiding loosening of the pipe body due to too small clamping force or fragmentation of the pipe body due to too large clamping force.
[0031] In the embodiment, the rear part of the lower clamping plate a42 is provided with a liquid supply connector a6, the front end of the liquid supply connector a6 is arranged towards the rear side of the lower accommodating groove a421, and the rear end is connected with the liquid supply pipe a5. The front end of the liquid supply connector a6 is used to connect to the pipe body in the lower accommodating groove a421, so as to provide cooling liquid to the inner hole of the pipe body, and also to support the pipe body in the front-rear direction, so as to ensure that the pipe body does not move backward when the reaming tool a3 reams the inner hole of the pipe body.
[0032] In the embodiment, the linear driving member includes a guide rail a11 and a screw motor pair a12 which are arranged in the front-rear direction, the pipe moving clamping table a4 is slidingly connected to the guide rail a11, and the pipe moving clamping table a4 is provided with a pipe moving screw table a45 which is screw-connected to the screw motor pair a12. The movement of the pipe moving sliding table is controlled by the screw motor pair a12, which has high accuracy and good stability. Of course, the linear driving member can also be in other forms, such as an electric cylinder, and the design does not limit this.
[0033] As an improvement of the embodiment, the inner hole reconditioning device further includes a limiting sliding table a13 which is slidingly connected to the guide rail a11, the limiting sliding table a13 is located between the pipe moving clamping table a4 and the driving head a2, and the limiting sliding table a13 is provided with a clamping seat a14 which is used to clamp the pipe body, so as to clamp the position of the pipe body which extends from the moving clamping table by the clamping seat a14, and ensure the stability of the pipe body when being reamed.
[0034] More specifically, the clamping seat a14 is annular, and the inner ring side of the clamping seat a14 is provided with a rubber ring a15, the inner ring size of the rubber ring a15 is matched with the pipe body, so that the clamping seat a14 realizes more stable clamping of the pipe body through the rubber ring a15, and avoids damage to the pipe body caused by the clamping seat a14.
[0035] It should be noted that in the description of the present application, the terms indicating the direction or position relationship are based on the direction or position relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the device or member must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application; all directional indications (such as up, down, left, right, front, rear, inner, outer) are only used to explain the relative position relationship, movement condition, etc. between the components in a certain specific posture, and if the specific posture changes, the directional indications also change accordingly.
[0036] In the description of the application, the description of the terms "one embodiment", "some embodiments", "in this embodiment", "specific example", or "some examples" and the like means that the specific features, mechanisms, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the description, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, mechanisms, materials or characteristics described can be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of the different embodiments or examples without contradiction.
[0037] The above description is merely a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.
Claims
1. A tracheal tube bore refurbishment device, characterised in that, The inner hole renovation platform (a1), the driving head (a2), the reaming tool (a3) and the pipe moving clamp table (a4), the driving head (a2) is fixed to the front of the inner hole renovation platform (a1), the pipe moving clamp table (a4) is located at the rear of the inner hole renovation platform (a1) and is used for clamping the pipe body, the rear of the pipe moving clamp table (a4) is provided with a liquid supply pipe (a5), the inner hole renovation platform (a1) is provided with a linear driving element for driving the pipe moving clamp table (a4) to move along the front and rear directions, and the front end of the reaming tool (a3) is connected to the driving head (a2) and the rear end faces the pipe moving clamp table (a4).
2. The airway tube hole refurbishing device of claim 1, wherein, The pipe moving clamp table (a4) is provided with an upper clamp plate (a41) and a lower clamp plate (a42), the upper side of the lower clamp plate (a42) is provided with a lower containing groove (a421) extending along the front and rear directions, the lower side of the upper clamp plate (a41) is provided with an upper containing groove (a411) extending along the front and rear directions, and the upper clamp plate (a41) is overlapped on the upper side of the lower clamp plate (a42) so that the upper containing groove (a411) and the lower containing groove (a421) clamp and fix the pipe body.
3. The air duct hole refurbishing device of claim 2, wherein, The rear of the lower clamp plate (a42) is provided with a liquid supply connector (a6), the front end of the liquid supply connector (a6) faces the rear side of the lower containing groove (a421) and the rear end is connected with the liquid supply pipe (a5).
4. The air duct hole refurbishing device of claim 2, wherein, The upper side of the upper clamp plate (a41) is connected with an upper fixed block (a43), the lower side of the lower clamp plate (a42) is connected with a lower fixed block (a44), the material hardness of the upper fixed block (a43) is greater than that of the upper clamp plate (a41), and the material hardness of the lower fixed block (a44) is greater than that of the lower clamp plate (a42).
5. The air duct hole refurbishing device of claim 4, wherein, The upper fixed block (a43) is preferably made of metal, and the upper clamp plate (a41) is preferably made of PVC; the lower fixed block (a44) is preferably made of metal so as to have better structural strength, and the lower clamp plate (a42) is preferably made of PVC.
6. A tracheal hole refurbishment device according to claim 4 or 5, wherein, The lower clamp plate (a42) and the lower fixed block (a44) are both fixed relative to the pipe moving clamp table (a4), the upper fixed block (a43) and the upper clamp plate (a41) are both provided with a plurality of vertical mounting holes (a412), the lower clamp plate (a42) is provided with a plurality of vertical screw holes (a422), the mounting holes (a412) and the screw holes (a422) correspond one by one, and the mounting holes (a412) are provided with screws (a46) connected to the screw holes (a422).
7. The airway tube hole refurbishing device of claim 1, wherein, The linear driving element includes guide rails (a11) and screw motor pairs (a12) both arranged along the front and rear directions, the pipe moving clamp table (a4) is slidingly connected to the guide rails (a11), and the pipe moving clamp table (a4) is provided with a pipe moving screw table (a45) screw-connected to the screw motor pairs (a12).
8. The air duct hole refurbishing device of claim 7, wherein, The inner hole renovation device further includes a limiting sliding table (a13) slidingly connected to the guide rails (a11), the limiting sliding table (a13) is located between the pipe moving clamp table (a4) and the driving head (a2), and the limiting sliding table (a13) is provided with a clamping seat (a14) for clamping the pipe body.
9. The air duct hole refurbishing device of claim 8, wherein, The clamping seat (a14) is annular, and the inner ring side of the clamping seat (a14) is provided with a rubber ring (a15), and the inner ring size of the rubber ring (a15) is matched with the pipe body.