Power equipment information acquisition device
By integrating temperature sensors and nozzle cooling systems into the power equipment, the problem of lack of real-time information acquisition in silicon wafer processing is solved, enabling real-time monitoring and control of the grinding head temperature, thus improving processing quality and the protective capabilities of the device.
Patent Information
- Application Number
- CN202423266234.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-12-30
AI Technical Summary
In existing technologies, power equipment lacks real-time information collection of the working head during silicon wafer processing, especially temperature detection, which causes heat to affect processing quality.
A power equipment information acquisition device was designed, which includes a temperature sensor, a fiber optic transceiver, a processing module and a power supply module. The temperature sensor detects the temperature of the grinding head in real time and transmits the information to the working platform. Combined with the nozzle cooling system and the drying mechanism, the real-time temperature control of the grinding head is realized.
It enables real-time monitoring and control of the grinding head temperature, avoiding the impact of high temperature on silicon wafer processing quality, improving the effectiveness and flexibility of the device, and enhancing its protective capabilities.
Smart Images

Figure CN223588967U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of information acquisition technology, and in particular to an information acquisition device for power equipment. Background Technology
[0002] During silicon wafer processing, power equipment is used to provide power for processing. Power equipment is usually equipped with corresponding data acquisition, but the working head connected to the equipment is rarely monitored. Therefore, it is necessary to collect information from the working head during the processing of power equipment.
[0003] A search revealed a grinding device for circular monocrystalline silicon wafers, disclosed in announcement number CN213795780U. This device uses a fan mounted on a support to dissipate heat from the silicon wafer during grinding and to blow away a large amount of debris generated during the grinding process. However, the friction between the grinding head and the silicon wafer during grinding generates heat, which affects the processing quality. After prolonged operation, it becomes difficult to observe the heat from the grinding head, thus impacting the processing quality of the silicon wafers. Utility Model Content
[0004] The purpose of this utility model is to address the shortcomings of existing technologies by proposing a power equipment information acquisition device.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] A power equipment information acquisition device includes a housing. A placement box is fixedly connected to the top outer wall of the housing. A communication module, a fiber optic transceiver, a processing module, and a power module are installed on the bottom inner wall of the placement box. A fixed column is fixedly connected to one side outer wall of the placement box, and a rotating column is movably connected to one side of the fixed column. An antenna is installed at one end of the rotating column. A connecting assembly is provided between the rotating column and the fixed column. A first motor is fixedly connected to the top outer wall of the housing. A grinding head is movably connected to the top inner wall of the housing, and one end of the output shaft of the first motor is fixed to the grinding head. A temperature sensor is fixedly connected to the top inner wall of the housing and is electrically connected to the communication module, the fiber optic transceiver, the processing module, and the power module. A humidity sensor is fixedly connected to the top inner wall of the housing. Two water outlet pipes are inserted and fixedly connected to the top of the housing, and nozzles are movably connected to the bottom ends of both water outlet pipes. A drying mechanism is provided on one side of the housing.
[0007] As a further embodiment of this utility model, the drying mechanism includes an air inlet, which is located on one side of the housing. A fan is fixedly connected to the outer side of the air inlet. A mounting bracket is fixedly connected to the inner wall of one side of the housing, and the mounting bracket is located on one side of the air inlet. Multiple heating wires are fixedly connected inside the mounting bracket.
[0008] As a further embodiment of this utility model, the connecting component includes a mounting groove, which is opened on one side of the fixing post. An elastic ball is fixedly connected in the mounting groove. A plurality of arc-shaped grooves are opened on one side of the fixing post, and the elastic ball is engaged with the arc-shaped grooves.
[0009] As a further embodiment of this utility model, a fan blade frame is movably connected to one inner wall of the housing, and a second motor is fixedly connected to one outer wall of the housing, with one end of the output shaft of the second motor fixed to the fan blade frame.
[0010] As a further embodiment of this utility model, a wind guide plate is fixedly connected to the bottom inner wall of the housing, and the wind guide plate is located on the side of the fan blade frame.
[0011] As a further embodiment of this invention, the antenna is electrically connected to the communication module and the fiber optic transceiver, and the communication module is electrically connected to the processing module and the power supply module.
[0012] As a further improvement of this invention, a filter screen is fixedly connected to the outer side of the mounting bracket.
[0013] The beneficial effects of this utility model are as follows:
[0014] 1. This utility model uses a temperature sensor to detect the temperature of the grinding head during operation and transmits the detected temperature information to the operator's work platform. This allows the operator to cool the grinding head in a timely manner, preventing the grinding head from remaining at a high temperature and affecting the processing quality of the silicon wafer, thus improving the effectiveness of the device.
[0015] 2. This utility model, through the combined use of an arc-shaped groove and an elastic ball, facilitates the adjustment of the antenna angle by the operator, enabling the device to receive signals better and improving the device's flexibility.
[0016] 3. This utility model protects the heating wire and the fan by providing a filter screen, preventing impurities generated during grinding from adhering to the heating wire and entering the fan, thus improving the protective effect of the device. Attached Figure Description
[0017] Figure 1 This is a three-dimensional structural diagram of a power equipment information acquisition device proposed in this utility model;
[0018] Figure 2 This is a schematic diagram of the internal structure of a power equipment information acquisition device proposed in this utility model;
[0019] Figure 3 This is a partially enlarged structural diagram of a power equipment information acquisition device proposed in this utility model;
[0020] Figure 4 This is a partial cross-sectional view of a power equipment information acquisition device proposed in this utility model.
[0021] In the diagram: 1. Housing; 2. Rotating column; 3. Fan; 4. Placement box; 5. Temperature sensor; 6. Mounting bracket; 7. Filter screen; 8. Heating wire; 9. Fan blade holder; 10. Air guide plate; 11. Humidity sensor; 12. Fixing column; 13. Communication module; 14. Fiber optic transceiver; 15. Processing module; 16. Power module; 17. Mounting slot; 18. Elastic ball; 19. Arc-shaped groove; 20. Antenna. Detailed Implementation
[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. The described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.
[0023] Reference Figures 1-4 A power equipment information acquisition device includes a housing 1. A placement box 4 is bolted to the top outer wall of the housing 1. A communication module 13, an optical fiber transceiver 14, a processing module 15, and a power module 16 are installed on the bottom inner wall of the placement box 4. The placement box 4 can protect multiple modules. A fixing post 12 is bolted to one side outer wall of the placement box 4. A rotating post 2 is rotatably connected to one side of the fixing post 12. An antenna 20 is installed at one end of the rotating post 2. A connecting assembly is provided between the rotating post 2 and the fixing post 12. A first motor is bolted to the top outer wall of the housing 1. A grinding head is rotatably connected to the top inner wall of the housing 1, and one end of the output shaft of the first motor is fixed to the grinding head. A temperature sensor 5, model M1, is bolted to the top inner wall of the housing 1. 8767, and the temperature sensor 5 is electrically connected to the communication module 13, the fiber optic transceiver 14, the processing module 15 and the power module 16. The top inner wall of the housing 1 is fixed with a humidity sensor 11 by bolts. The humidity sensor 11 is of model HTU21. Two water outlet pipes are inserted and fixed to the top of the housing 1. The bottom end of the two water outlet pipes is threaded with a nozzle. The grinding head rotates to grind the material. The temperature sensor 5 detects the temperature of the grinding head in real time. The detected temperature information is transmitted to the operator's work platform through the fiber optic transceiver 14 and the processing module 15. The operator observes the collected temperature information of the grinding head. When the temperature is high, external cooling water enters the water outlet pipe and is sprayed out through the nozzle, thereby cooling the grinding head. A drying mechanism is provided on one side of the housing 1.
[0024] In this utility model, it should be noted that the drying mechanism includes an air inlet located on one side of the housing 1. A fan 3 is bolted to the outer side of the air inlet. A mounting bracket 6 is bolted to the inner wall of one side of the housing 1, and the mounting bracket 6 is located on one side of the air inlet. Multiple heating wires 8 are bolted to the inside of the mounting bracket 6. When the humidity sensor 11 detects high humidity inside the device, it starts the fan 3 and the heating wires 8, allowing hot air to enter the housing 1 and dry the air inside the housing 1. The connecting assembly includes a mounting groove 17 located on one side of the fixing post 12. An elastic ball 18 is bonded to the mounting groove 17. Multiple arc-shaped grooves 19 are provided on one side of the fixing post 12. The use of the arc-shaped grooves 19 and the elastic balls 18 facilitates the adjustment of the angle of the antenna 20 by the operator, allowing the device to be better adjusted. The receiving signal is received, and the elastic ball 18 is engaged with the arc-shaped groove 19. A fan blade frame 9 is rotatably connected to one side of the inner wall of the housing 1. A second motor is fixed to one side of the outer wall of the housing 1 by bolts, and one end of the output shaft of the second motor is fixed to the fan blade frame 9. The rotation of the second motor causes the fan blade frame 9 to rotate, thereby causing the air inside the housing 1 to be fanned and turbulent. A wind guide plate 10 is fixed to the bottom inner wall of the housing 1 by bolts, and the wind guide plate 10 is located on the side of the fan blade frame 9. The wind guide plate 10 guides the wind generated by the rotation of the fan blade frame 9. The antenna 20 is electrically connected to the communication module 13 and the fiber optic transceiver 14. The communication module 13 is electrically connected to the processing module 15 and the power module 16. A filter screen 7 is fixed to the outside of the mounting bracket 6 by bolts. The filter screen 7 can protect the heating wire 8 and the fan 3, and prevent impurities generated by grinding from adhering to the heating wire 8 and entering the fan 3.
[0025] Working principle: When the detection head needs to be cleaned, the grinding head rotates to grind the silicon wafer. The temperature sensor 5 detects the temperature of the grinding head in real time, and transmits the detected temperature information to the operator's work platform through the fiber optic transceiver 14 and the processing module 15. The operator observes the collected temperature information of the grinding head. When the temperature is high, external cooling water enters the water outlet pipe and is sprayed out through the nozzle, thereby cooling the grinding head. When the humidity sensor 11 detects that the humidity inside the device is high, the fan 3 is started and the heating wire 8 is activated, so that hot air enters the housing 1 to dry the air inside the housing 1. At the same time, the second motor is started, and the rotation of the second motor causes the fan blade frame 9 to rotate, thereby turbulenting the air inside the housing 1.
[0026] Finally, it should be noted that those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A power equipment information acquisition device, comprising a housing (1), characterized in that, A placement box (4) is fixedly connected to the top outer wall of the housing (1). A communication module (13), an optical fiber transceiver (14), a processing module (15), and a power module (16) are installed on the bottom inner wall of the placement box (4). A fixed column (12) is fixedly connected to one side outer wall of the placement box (4). A rotating column (2) is movably connected to one side of the fixed column (12). An antenna (20) is installed at one end of the rotating column (2). A connecting component is provided between the rotating column (2) and the fixed column (12). A first motor is fixedly connected to the top outer wall of the housing (1). A grinding head is movably connected to the top inner wall of the housing (1), and one end of the output shaft of the first motor is fixed to the grinding head. A temperature sensor (5) is fixedly connected to the top inner wall of the housing (1), and the temperature sensor (5) is electrically connected to the communication module (13), the fiber optic transceiver (14), the processing module (15), and the power module (16). A humidity sensor (11) is fixedly connected to the top inner wall of the housing (1). Two water outlet pipes are inserted and fixed to the top of the housing (1), and spray nozzles are movably connected to the bottom ends of the two water outlet pipes. A drying mechanism is provided on one side of the housing (1).
2. The power equipment information acquisition device according to claim 1, characterized in that, The drying mechanism includes an air inlet, which is located on one side of the housing (1). A fan (3) is fixedly connected to the outside of the air inlet. A mounting bracket (6) is fixedly connected to the inner wall of one side of the housing (1), and the mounting bracket (6) is located on one side of the air inlet. Multiple heating wires (8) are fixedly connected inside the mounting bracket (6).
3. The power equipment information acquisition device according to claim 1, characterized in that, The connecting component includes a mounting groove (17), which is opened on one side of the fixing post (12). An elastic ball (18) is fixedly connected in the mounting groove (17). A plurality of arc-shaped grooves (19) are opened on one side of the fixing post (12), and the elastic ball (18) is engaged with the arc-shaped grooves (19).
4. The power equipment information acquisition device according to claim 1, characterized in that, A fan blade frame (9) is movably connected to one side of the inner wall of the housing (1), and a second motor is fixedly connected to one side of the outer wall of the housing (1), with one end of the output shaft of the second motor fixed to the fan blade frame (9).
5. The power equipment information acquisition device according to claim 4, characterized in that, A guide plate (10) is fixedly connected to the bottom inner wall of the housing (1), and the guide plate (10) is located on the side of the fan blade frame (9).
6. The power equipment information acquisition device according to claim 1, characterized in that, The antenna (20) is electrically connected to the communication module (13) and the fiber optic transceiver (14), and the communication module (13) is electrically connected to the processing module (15) and the power supply module (16).
7. The power equipment information acquisition device according to claim 2, characterized in that, A filter screen (7) is fixedly connected to the outside of the mounting bracket (6).
Citation Information
Patent Citations
Grinding device for circular monocrystalline silicon wafer
CN213795780U