Vacuum butterfly valve rotating mechanism capable of preventing jamming

Abstract

The utility model relates to the technical field of rotating mechanisms, and discloses an anti-locking vacuum butterfly valve rotating mechanism which comprises a valve body and a connecting plate which is arranged at one end of the valve body and plays a role in limiting. A valve plate, a rotating piece, a self-lubricating elastic diaphragm and a sealing plunger are arranged in the valve body; the rotating piece is fixedly connected with the valve plate through a bolt, a first chamfer is arranged at one end of the rotating piece, the middles of the two ends of the self-lubricating elastic membrane are arranged in a waisted mode and are coaxially connected with the end, provided with the first chamfer, of the rotating piece, and a gap is formed between the first chamfer and the self-lubricating elastic membrane. The sealing plunger is arranged at the end, away from the rotating piece, of the self-lubricating elastic membrane and connected with the valve body through the two O-rings. A stepped hole is formed in the end, away from the first chamfer, of the rotating piece, of the valve body, and the interior of the stepped hole is connected with the valve body in the mode that two O-rings are matched with the rotating piece.

Description

TECHNICAL FIELD

[0001] The utility model relates to a rotating mechanism technical field, concretely relates to a kind of anti-jamming vacuum butterfly valve rotating mechanism. BACKGROUND

[0002] As an important flow control equipment, butterfly valve is widely used in gas delivery and exhaust emission process in semiconductor production environment;Its core function is to realize the accurate control of gas flow through the rotating action of valve disc;Especially in the semiconductor industry, since its application environment has extremely high cleanliness requirement and strict process standard, the control precision and reliability of butterfly valve are particularly critical;However, the structure of existing butterfly valve still has certain technical limitations in actual use, especially in long-time operation or complex working conditions, the phenomenon of flow control precision decline or even valve disc jamming is prone to occur.

[0003] In current semiconductor process, butterfly valve is often used for exhaust emission of downstream process;There are a large number of deposited debris in exhaust gas, which will gradually deposit around valve disc and rotating shaft during the operation of butterfly valve;The rotating shaft of traditional butterfly valve usually adopts rigid connection, and the gap between shaft and valve body is very small (usually only 0.1mm). Under this design, when debris deposition occurs on the surface of valve disc or shaft cavity, it is easy to cause the rotation of shaft to be blocked, the movement of valve disc to be limited, and even the phenomenon of jamming occurs. Valve disc jamming not only affects the flow control precision of butterfly valve, but also may cause the interruption of entire process flow, increase equipment maintenance cost and downtime.

[0004] In view of the above, the anti-jamming vacuum butterfly valve rotating mechanism is proposed to solve the above problems. When the deposits hinder the movement of rotating shaft, the self-lubricating elastic diaphragm in the application can be elastically deformed radially, so as to effectively avoid the possible jamming point. This design not only reduces the direct friction between shaft and valve body, but also reduces the damage of deposits to metal parts. UTILITY MODEL CONTENTS

[0005] In view of the deficiencies of the prior art, the utility model provides an anti-jamming vacuum butterfly valve rotating mechanism, which solves the problems proposed in the above background art.

[0006] To achieve the above purpose, the utility model is realized by the following technical scheme:

[0007] An anti-jamming vacuum butterfly valve rotating mechanism, comprising a valve body and a connecting plate arranged at one end of the valve body to limit the position;

[0008] The valve body is provided with a valve plate, a rotating part, a self-lubricating elastic diaphragm and a sealing plunger; the rotating part is fixedly connected with the valve plate through bolts, one end of the rotating part is provided with a first chamfer, the middle part of both ends of the self-lubricating elastic diaphragm is arranged in a tapered shape, and the self-lubricating elastic diaphragm is coaxially connected with the end of the rotating part provided with the first chamfer, wherein a gap is formed between the first chamfer and the self-lubricating elastic diaphragm, and the sealing plunger is arranged at one end of the self-lubricating elastic diaphragm away from the rotating part and is connected with the valve body through two O-rings;

[0009] The end of the valve body away from the end of the rotating part provided with the first chamfer is provided with a stepped hole, and the rotating part is connected with the valve body through two O-rings in the stepped hole;

[0010] The side of the connecting plate away from the valve body is provided with a shaft coupling and a pair of angular contact bearings, wherein the end of the rotating part away from the self-lubricating elastic diaphragm is connected with the shaft coupling and the pair of angular contact bearings to be connected with the motor.

[0011] Optionally, the valve body comprises a front shaft and a rear shaft; the rear shaft is mounted on the front shaft on the side of the rotating part away from the sealing plunger.

[0012] Optionally, the front shaft is provided with a metal plate, and the side of the sealing plunger away from the self-lubricating elastic diaphragm is connected with the metal plate.

[0013] Optionally, the O-rings in the stepped hole are arranged at the end of the rear shaft away from the front shaft.

[0014] Optionally, the rotating part comprises a short shaft, a connecting shaft, a middle shaft and a mounting shaft;

[0015] The short shaft is adaptively connected with the middle part of the self-lubricating elastic diaphragm;

[0016] The first chamfer is arranged at one end of the connecting shaft, and the short shaft is connected with the end of the connecting shaft provided with the first chamfer.

[0017] The middle shaft is arranged on the side of the connecting shaft away from the short shaft, and the surface of the middle shaft is provided with a groove for adaptively mounting the valve plate;

[0018] The mounting shaft is arranged on the side of the middle shaft away from the connecting shaft and is connected with the shaft coupling and the pair of angular contact bearings.

[0019] Optionally, the self-lubricating elastic diaphragm is divided into an A zone, a B zone and a C zone;

[0020] The B zone and the C zone are the same size and are symmetrically arranged at both ends of the A zone.

[0021] Optionally, the B region and the C region are provided with a second chamfer matched with the first chamfer at the end connected with the A region.

[0022] The utility model provides a kind of anti-jamming vacuum butterfly valve rotating mechanism, with the following beneficial effects:

[0023] 1, by the application of self-lubricating elastic diaphragm, when the rotating shaft is about to be jammed, it can produce radial elastic deformation, avoid jamming state;Second, avoid direct metal contact between rotating shaft and valve body, prevent the rotating shaft from being scratched or metal particle pollution due to jamming, significantly reduce maintenance frequency.

[0024] 2, sealing plunger and stepped hole are matched with rotating shaft to form high-efficiency sealing by O-ring, and the stepped hole and O-ring can facilitate later maintenance, which can meet the sealing requirements and facilitate disassembly and replacement, and improve the service life of the device.

[0025] 3, by the combination design of rotating shaft, self-lubricating elastic diaphragm and sealing plunger, the device has anti-jamming and sealing performance, which solves the problem of sealing failure caused by jamming of traditional butterfly valve.

[0026] 4, the self-lubricating elastic diaphragm has better elastic deformation capacity under the premise of ensuring structural strength, which adapts to high-frequency opening and closing operation in complex working conditions. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 is a structural schematic diagram of the utility model;

[0028] Figure 2 is a structural schematic diagram of the utility model rotating part;

[0029] Figure 3 is a structural schematic diagram of the utility model self-lubricating elastic diaphragm;

[0030] Figure 4 is a structural schematic diagram of the utility model coupling.

[0031] In the figure: 1, valve body; 101, stepped hole; 11, front shaft; 111, metal plate; 12, rear shaft; 2, connecting plate; 3, valve piece; 4, rotating part; 41, short shaft; 42, connecting shaft; 43, middle shaft; 431, groove; 44, mounting shaft; 401, first chamfer; 5, self-lubricating elastic diaphragm; 501, second chamfer; 51, A region; 52, B region; 53, C region; 6, sealing plunger; 7, coupling; 8, angular contact bearing. DETAILED DESCRIPTION

[0032] In order to make the technical means, creation characteristics, purposes and effects of the utility model easy to understand, the utility model will be further described below in combination with specific embodiments.

[0033] In the description of the utility model, it needs to be understood that the directions or position relations indicated by the terms "transverse", "longitudinal", "end", "edge", "side wall", "upper", "lower", "upper part", "lower part", "directly above", "surface", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", "end", "head", "tail" are based on the directions or position relations shown in the drawings, which are only for the convenience of describing the technical scheme of the utility model and simplifying the description, and cannot be understood as limiting the indicated devices or elements to have a specific direction, to be constructed and operated in a specific direction, and therefore cannot be understood as limiting the utility model.

[0034] The application provides a vacuum butterfly valve rotating mechanism capable of preventing clamping.

[0035] Reference can be made to Figure 1 and Figure 4 The application mainly comprises a valve body 1, a valve plate 3 arranged in the valve body 1, a rotating part 4, a self-lubricating elastic diaphragm 5 and a sealing plunger 6, a connecting plate 2 arranged at one end of the valve body 1 to play a limiting role, and a coupling 7 and a pair of angular contact bearings 8 arranged on the side, away from the valve body 1, of the connecting plate 2, and the clamping state of the butterfly valve can be effectively avoided through the cooperation between the groups of structures, and the number of subsequent maintenance times is reduced.

[0036] Reference can be made to Figure 1 Further, the valve body 1 comprises a front shaft 11 and a rear shaft 12, wherein the valve plate 3, the rotating part 4, the self-lubricating elastic diaphragm 5 and the sealing plunger 6 are mainly arranged in the front shaft 11, and a metal plate 111 is arranged in the front shaft 11 to cooperate with the installation and limiting of the subsequent sealing plunger 6.

[0037] Reference can be made to Figures 1-2 The rotating part 4 is connected with the valve plate 3 through bolts, one end of the rotating part 4 is provided with a first chamfer 401, the first chamfer 401 is preferably provided with an angle of 45°, and the end, provided with the first chamfer 401, of the rotating part 4 is connected with the self-lubricating elastic diaphragm 5; in the prior art, when there is a certain deposit on the valve body, if rigid connection is used, that is, the upper end of the rotating part is in contact with the metal part when working, the clamping state exists, the upper shaft end of the rotating part is scratched, and metal particles are polluted; in order to avoid the occurrence of the situation and to set the self-lubricating elastic diaphragm 5 in the application, when the rotating part 4 is about to be clamped, the self-lubricating elastic diaphragm 5 is elastically deformed in the radial direction along the clamping position, the clamping state is avoided, and the rotating part and the valve body are prevented from being rubbed.

[0038] Further, when the elastic deformation between the rotating part 4 and the self-lubricating elastic diaphragm 5 is completed, interference between the two is prevented, affecting the normal operation, and further structural limitations are made to the rotating part 4 and the self-lubricating elastic diaphragm 5; wherein,

[0039] The rotating part 4 includes a short shaft 41, a connecting shaft 42, a middle shaft 43, and a mounting shaft 44; the short shaft 41 is connected to the middle part of the self-lubricating elastic diaphragm 5, and the diameter of the short shaft 41 is the same from front to back; the first chamfer 401 is located at one end of the connecting shaft 42, and the connecting shaft 42 is connected to the short shaft 41 at the end with the first chamfer 401. After connection, the short shaft 41 cooperates with the connecting shaft 42 and the first chamfer 401 to complete the radial change in cooperation with the self-lubricating elastic diaphragm 5; the middle shaft 43 is located on the side away from the short shaft 41 of the connecting shaft 42, and the surface is provided with a groove 431 for adapting to the valve plate 3, wherein the middle shaft 43 does not form a connection relationship with the inner cavity of the valve body 1; finally, the mounting shaft 44 is located on the side away from the connecting shaft 42 of the middle shaft 43, and is connected with the coupling 7 and a pair of angular contact bearings 8, and the connection with the motor through the coupling 7 and the pair of angular contact bearings 8 realizes the connection relationship and starts the rotating operation.

[0040] Reference can be made to Figure 1 With Figure 3 The middle part of both ends of the self-lubricating elastic diaphragm 5 is designed to be tapered, and the self-lubricating elastic diaphragm 5 as a whole can be divided into three parts: A zone 51, B zone 52, and C zone 53;

[0041] B zone 52 and C zone 53 are the same size and symmetrically arranged at both ends of A zone 51, and the connecting end of B zone 52 and C zone 53 to A zone 51 is provided with a second chamfer 501 adapted to the first chamfer 401, and the second chamfer 501 is the inclined surface in the tapered design; when the first chamfer 401 is preferably set at 45°, the second chamfer 501 can also be preferably set at 45°, so that the first chamfer 401 and the second chamfer 501 form parallel, and there is a certain gap between them, which can effectively avoid friction between the two; secondly, in different embodiments, the first chamfer 401 and the second chamfer 501 have different inclination angles, at this time, as long as the inclination angles selected by the two still have a gap after installation, the gap will not cause the first chamfer 401 and the second chamfer 501 to contact after movement.

[0042] The self-lubricating elastic diaphragm 5 is designed to have a maximum diameter in the A area smaller than the maximum diameters of the B area 52 and the C area 53, and the B area 52 and the C area 53 are connected to form obtuse angles on both sides of the A area 51 due to the second chamfer 501, and the obtuse angles on both sides of the A area 51 combine to form the self-lubricating elastic diaphragm 5, which is designed to have a waist shape to prevent interference, and is easy to produce elastic deformation to ensure that the rotating part 4 passes through the stuck point position while ensuring the strength of the overall structure.

[0043] Further, the self-lubricating elastic diaphragm 5 is made of a composite material, which has self-lubricating properties and a certain amount of elastic deformation, that is, it can play a lubricating role for the device under normal working conditions and reduce the wear of parts.

[0044] Reference can be made to Figures 1-3 The sealing form of the rotating part 4 at both ends is realized by the cooperation of the sealing plunger 6 arranged at one end of the self-lubricating elastic diaphragm 5 away from the rotating part 4, the stepped hole 101 in the valve body 1 and the O-ring parts. Figure 1 The valve body 1 away from the rotating part 4 is provided with a first chamfer 401, and one end of the valve body 1 is provided with a stepped hole 101 matched with the rotating part 4, and the rotating part 4 and the valve body 1 are installed in the stepped hole 101 through two O-rings, so as to form the sealing form of the valve body 1 on this side and the rotating part 4, and the O-ring in the stepped hole 101 is arranged at one end of the rear shaft 12 away from the front shaft 11, so as to facilitate the subsequent maintenance of the O-ring, and then the two O-rings are limited in position by abutting against the connecting plate 2 when the connecting plate 2 is installed; and the sealing form of the other end of the rotating part 4 and the valve body 1 is realized by the sealing plunger 6 arranged in the valve body 1, and the sealing plunger 6 is also installed in the inner cavity of the valve body 1 through two O-rings.

[0045] It should be noted that the O-ring is a circular ring-shaped sealing member with a circular cross section, which is a common mature technology and will not be described herein.

[0046] In the utility model, the working steps of the device are as follows:

[0047] 1. First, confirm the integrity and undamaged state of the valve body 1, the valve plate 3, the rotating part 4, the self-lubricating elastic diaphragm 5, the sealing plunger 6, the shaft coupling 7, the angular contact bearing 8 and the O-ring.

[0048] 2、Second, the rotating member 4 is fixedly connected to the valve plate 3 by bolts, the A area 51 of the self-lubricating elastic diaphragm 5 is matched with the short shaft 41 of the rotating member 4, the B area 52 and the C area 53 are kept with the first chamfer 401 on the rotating member with a designed gap, the sealing plunger 6 is matched and installed with the valve body 1 through the O-ring and the stepped hole 101, the O-rings at both ends of the sealing plunger 6 are kept in the correct position to form a seal, one end of the rotating member 4 is connected with the coupling 7 and the angular contact bearing 8, and the tight fit is ensured without looseness;

[0049] 3、Then, after starting work, if the internal part is stuck, the rotating member 4 avoids the stuck state through the elastic deformation of the self-lubricating elastic diaphragm 5;

[0050] 4、Finally, the state of the O-ring and the sealing plunger 6 is checked regularly, the deposits in the valve body are cleaned, and the sealing effect is ensured.

[0051] The basic principle, main features and advantages of the utility model are shown and described. It should be understood by those skilled in the art that the utility model is not limited by the above-mentioned embodiments, and various changes and improvements can be made without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model. The protection scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A vacuum butterfly valve rotary mechanism that prevents seizure, characterized by: It includes a valve body (1) and a connecting plate (2) arranged at one end of the valve body (1) to limit the position. The valve body (1) is provided with a valve plate (3), a rotating part (4), a self-lubricating elastic diaphragm (5) and a sealing plunger (6); the rotating part (4) is fixedly connected with the valve plate (3) through bolts, one end of the rotating part (4) is provided with a first chamfer (401), the middle part of the two ends of the self-lubricating elastic diaphragm (5) is arranged in a tapered shape and is coaxially connected with the one end of the rotating part (4) provided with the first chamfer (401), wherein the first chamfer (401) and the self-lubricating elastic diaphragm (5) have a gap therebetween, and the sealing plunger (6) is arranged at one end of the self-lubricating elastic diaphragm (5) away from the rotating part (4) and is connected with the valve body (1) through two O-rings. Wherein, the valve body (1) is provided with a stepped hole (101) at one end away from the rotating part (4) provided with the first chamfer (401), and the stepped hole (101) is connected with the valve body (1) and the rotating part (4) through two O-rings. The side of the connecting plate (2) away from the valve body (1) is provided with a shaft coupling (7) and a pair of angular contact bearings (8), wherein the one end of the rotating part (4) away from the self-lubricating elastic diaphragm (5) is connected with the shaft coupling (7) and the pair of angular contact bearings (8) and connected with a motor.

2. The anti-stuck vacuum butterfly valve rotary mechanism of claim 1, wherein: The valve body (1) includes a front shaft (11) and a rear shaft (12); the rear shaft (12) is installed on the front shaft (11) on the side of the rotating part (4) away from the sealing plunger (6).

3. The anti-stuck vacuum butterfly valve rotary mechanism of claim 2, wherein: The front shaft (11) is provided with a metal plate (111), and the side of the sealing plunger (6) away from the self-lubricating elastic diaphragm (5) is connected with the metal plate (111).

4. The anti-stuck vacuum butterfly valve rotary mechanism of claim 1, wherein: The O-rings in the stepped hole (101) are arranged at one end of the rear shaft (12) away from the front shaft (11).

5. The anti-stuck vacuum butterfly valve rotary mechanism of claim 1, wherein: The rotating part (4) includes a short shaft (41), a connecting shaft (42), a middle shaft (43) and a mounting shaft (44); The short shaft (41) is adaptively connected with the middle part of the self-lubricating elastic diaphragm (5); The first chamfer (401) is arranged at one end of the connecting shaft (42), and the short shaft (41) is connected with the one end of the connecting shaft (42) provided with the first chamfer (401); The middle shaft (43) is arranged on the side of the connecting shaft (42) away from the short shaft (41), and the surface of the middle shaft (43) is provided with a groove (431) for adaptively mounting the valve plate (3); The mounting shaft (44) is arranged on the side of the middle shaft (43) away from the connecting shaft (42) and is connected with the shaft coupling (7) and the pair of angular contact bearings (8).

6. The anti-stuck vacuum butterfly valve rotary mechanism of claim 1, wherein: The self-lubricating elastic diaphragm (5) is divided into an A area (51), a B area (52) and a C area (53); The B area (52) and the C area (53) are the same size and are symmetrically arranged at the two ends of the A area (51).

7. The anti-stuck vacuum butterfly valve rotary mechanism of claim 6, wherein: The B area (52) and the C area (53) are provided with a second chamfer (501) adaptively matched with the first chamfer (401) at the end connected with the A area (51).

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