Positioning device and electroplating equipment

By employing a transfer mechanism and a positioning drive module in the positioning device to tilt the positioning platform, and utilizing gravity and rolling elements to achieve efficient transfer of the plating plate, the problem of low transfer efficiency in the prior art is solved, production efficiency is improved and costs are reduced.

CN223607411UActive Publication Date: 2025-11-28UNIVERSAL CIRCUIT BOARD EQUIP CO LTD
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Patent Information

Application Number
CN202423179287.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-20
Publication Date
2025-11-28
Estimated Expiration
2034-12-20

AI Technical Summary

Technical Problem

Existing plating plate positioning devices are inefficient during the transfer process, especially since plating plates of different thicknesses require motor-driven position adjustment, resulting in low transfer efficiency.

Method used

A transfer mechanism is used to transfer the plating plate to the positioning platform. The positioning platform is tilted by the positioning drive module, so that the plating plate slides under the action of gravity until it comes into contact with the limiting part. Rolling parts are used to reduce friction and avoid the need for motor-driven position adjustment.

Benefits of technology

This improves the efficiency of transferring the plating plate from the positioning device to the robot, simplifies the positioning process, reduces production costs, and minimizes mechanical damage to the plating plate.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model discloses a positioning device and electroplating equipment, and relates to the technical field of electroplating equipment, the positioning device is applied to the electroplating equipment, and the positioning device comprises a machine table which is provided with a feeding area; the transfer mechanism is arranged on the machine table; the positioning mechanism comprises a positioning driving module and a positioning assembly, the positioning assembly comprises a positioning platform, a limiting piece and a rolling piece, the positioning driving module is arranged on the machine table, and the positioning driving module is in driving connection with the positioning platform; at least part of the limiting piece is located on the edge of the positioning platform to form a positioning area, and the rolling piece is rotatably arranged on the positioning platform; the technical scheme provided by the utility model has the technical effects that the accompanying plating plate on the positioning platform slides to the positioning area on the rolling piece under the action of gravity and is propped against the limiting piece, so that the transfer efficiency of transferring the accompanying plating plate from the positioning device to the manipulator is improved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to electroplating equipment technical field, especially a kind of positioning device and electroplating equipment. BACKGROUND

[0002] VCP electroplating process is to electroplate circuit board in vacuum environment, so that protective layer is formed on the surface of circuit board. Compared with traditional electroplating, VCP electroplating process is environmentally friendly, significantly improves the appearance and durability of circuit board. In the electroplating process of VCP electroplating process, the accompanying plating plate is placed in the electroplating tank before and after the electroplating workpiece to protect the areas of the circuit board that do not need to be electroplated.

[0003] The positioning device of the existing accompanying plating plate adopts a positioning method of motor cooperating with photoelectric sensor. The motor drives the accompanying plating plate to adjust the position, which reduces the transfer efficiency of the accompanying plating plate from the positioning device to the mechanical hand. SUMMARY

[0004] The main purpose of the utility model is to provide a positioning device and electroplating equipment, which aims to facilitate the transfer of the accompanying plating plate from the positioning device to the mechanical hand.

[0005] To achieve the above-mentioned purpose, the positioning device provided by the utility model is applied to electroplating equipment. The positioning device includes a machine table, a feeding area for feeding the accompanying plating plate, a transfer mechanism arranged on the machine table, and a positioning mechanism arranged on one side of the feeding area. The positioning mechanism includes a positioning drive module and a positioning assembly. The positioning assembly includes a positioning platform, a limiting piece, and a rolling piece. The positioning drive module is arranged on the machine table and is drivingly connected to the positioning platform. The transfer mechanism is used to transfer the accompanying plating plate in the feeding area to the positioning platform. The limiting piece is arranged on the positioning platform, and at least part of the limiting piece is located at the edge of the positioning platform to form a positioning area. The rolling piece is rotatably arranged on the positioning platform and is used to carry the accompanying plating plate and allow the accompanying plating plate to slide on the positioning platform. The positioning mechanism has a transfer mode for transferring the accompanying plating plate on the positioning platform by an external device. In the transfer mode, the positioning drive module drives the positioning platform to tilt with respect to the horizontal plane, so that the accompanying plating plate on the positioning platform slides on the rolling piece under the action of gravity and reaches the positioning area and abuts against the limiting piece.

[0006] In an embodiment, the plurality of position limiting members comprises a plurality of first position limiting members and a plurality of second position limiting members, the plurality of first position limiting members are arranged along a length direction of the positioning platform, and the plurality of second position limiting members are arranged along a width direction of the positioning platform.

[0007] In an embodiment, the plurality of rolling members are arranged as rolling balls, and the plurality of rolling members are arranged on the positioning platform in an interval manner or in an interlaced manner.

[0008] In an embodiment, the positioning assembly further comprises a connecting frame, one side of the connecting frame is connected to the positioning platform, and the other side of the connecting frame is movably arranged along a first direction on the machine table. The positioning driving module comprises a first driver, the first driver is arranged on the connecting frame, the first driver drives the positioning platform, and the first driver is used for overturning the positioning platform to be arranged in an inclined manner with a horizontal plane.

[0009] In an embodiment, the connecting frame comprises a first connecting frame and a second connecting frame, the first connecting frame is rotatably arranged on the second connecting frame, the first connecting frame is connected to the positioning platform, one end of the first driver away from the positioning platform is hinged to the second connecting frame, and the second connecting frame is movably arranged along the first direction on the machine table.

[0010] In an embodiment, the second connecting frame has a mounting plane for hinging the first driver, and a driving shaft of the second driver is arranged at an angle with the mounting plane along a second direction, wherein the first direction intersects the second direction.

[0011] In an embodiment, the angle formed between the driving shaft of the second driver and the mounting plane along the second direction is not less than 15 degrees and not more than 60 degrees.

[0012] In an embodiment, the transfer mechanism further comprises a suction disc assembly, the suction disc assembly is located above the positioning assembly, the suction disc assembly is movably arranged along a third direction on the machine table, the suction disc assembly has a suction area for adsorbing a partner plating plate, and the suction disc assembly is used for adsorbing the partner plating plate in the feeding area to the suction area to carry the partner plating plate to the positioning platform, wherein the first direction, the second direction and the third direction intersect with each other.

[0013] In an embodiment, the chuck assembly includes a third driver, a slide rail, a connecting arm and a chuck, the slide rail is arranged along the third direction, the third driver drives the connecting arm, the connecting arm is movably arranged on the slide rail along the third direction, the connecting arm is connected with the chuck, and the chuck has the adsorption area.

[0014] The utility model discloses further provide a kind of electroplating equipment, including the positioning device of above-mentioned embodiment.

[0015] The technical scheme of the utility model discloses by using the transfer mechanism to transfer the plating plate in the loading area to the positioning platform, the positioning driving module drives the positioning platform to overturn to be arranged with the horizontal plane to be inclined, so that the positioning mechanism switches to transfer mode, so that the plating plate on the positioning platform is under the action of gravity and slides on the rolling piece to the positioning area and abuts with the limiting piece, by setting rolling piece to reduce the friction of plating plate sliding, different thickness of plating plate does not need to be adjusted by motor driving plating plate position, and then the transfer efficiency of plating plate from the positioning device to the manipulator is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can be obtained from the structure shown in these drawings without creative labor.

[0017] Figure 1 The structure schematic diagram of an embodiment of the positioning device provided by the utility model is shown in the figure.

[0018] Figure 2 The structure schematic diagram of another angle of an embodiment of the positioning device provided by the utility model is shown in the figure.

[0019] Figure 3 The structure schematic diagram of the positioning mechanism in an embodiment of the positioning device provided by the utility model is shown in the figure.

[0020] Figure 4 The structure schematic diagram of the positioning assembly in an embodiment of the positioning device provided by the utility model is shown in the figure.

[0021] Explanation of reference numerals:

[0022] 1, machine table; 11, loading area; 2, suction cup assembly; 21, third driver; 22, slide rail; 23, connecting arm; 24, suction cup; 3, positioning mechanism; 31, positioning drive module; 311, first driver; 32, positioning assembly; 321, positioning platform; 322, limiting piece; 3221, first limiting piece; 3222, second limiting piece; 323, rolling piece; 324, connecting frame; 3241, first connecting frame; 3242, second connecting frame; 3243, mounting plane.

[0023] The realization, functional features and advantages of the utility model will be further explained in combination with embodiments with reference to the drawings. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0025] It should be noted that if the embodiments of the utility model involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement condition, etc. between components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0026] In addition, if the embodiments of the utility model involve descriptions such as "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one feature. In addition, "and / or" or "and / or" appearing throughout the text means that the three parallel schemes are included, taking "A and / or B" as an example, including A scheme, or B scheme, or A and B simultaneously meet the scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0027] The utility model provides a kind of positioning device.

[0028] Please refer to Figure 1 And Figure 2In an embodiment of the utility model, this positioning device is applied to electroplating equipment, the positioning device includes machine table 1, transfer mechanism, positioning mechanism 3, the machine table 1 has feeding area 11, the feeding area 11 is used for the feeding of accompanying plating plate, the transfer mechanism is located on the machine table 1, the positioning mechanism 3 is located at one side of the feeding area 11, the positioning mechanism 3 includes positioning drive module 31 and positioning assembly 32, the positioning assembly 32 includes positioning platform 321, limiting piece 322 and rolling part 323, the positioning drive module 31 is located on the machine table 1, the positioning drive module 31 is driven to be connected with the positioning platform 321, the transfer mechanism is used to transfer the accompanying plating plate of the feeding area 11 to the positioning platform 321, the limiting piece 322 is located on the positioning platform 321, and at least part limiting piece 322 is located at the edge of the positioning platform 321 to form the positioning area, the rolling part 323 is rotatably located on the positioning platform 321, and the rolling part 323 is used to carry accompanying plating plate and supply accompanying plating plate to slide on the positioning platform 321, the positioning mechanism 3 has transfer mode for the transfer of accompanying plating plate on the positioning platform 321 by external device, in the transfer mode, the positioning drive module 31 drives the positioning platform 321 to overturn to be arranged with the inclination of horizontal plane, to supply accompanying plating plate on the positioning platform 321 to slide to the positioning area on the rolling part 323 under the action of gravity and with limiting piece 322 abutment.

[0029] The technical scheme of the utility model adopts the transfer mechanism to transfer the accompanying plating plate of the feeding area 11 to the positioning platform 321, the positioning drive module 31 drives the positioning platform 321 to overturn to be arranged with the inclination of horizontal plane, to make the positioning mechanism 3 switch to the transfer mode, to supply accompanying plating plate on the positioning platform 321 to slide to the positioning area on the rolling part 323 under the action of gravity and with limiting piece 322 abutment, the rolling part 323 is arranged to reduce the friction of accompanying plating plate sliding, and different thickness accompanying plating plates do not need to be adjusted in position by motor driving accompanying plating plate, thereby improving the transfer efficiency of accompanying plating plate from the positioning device to the mechanical hand.

[0030] In the embodiment, the user can transport the accompanying plated plate to the loading area 11 by the trolley, so that the transfer mechanism transfers the accompanying plated plate on the loading area 11 to the positioning platform 321. The positioning mechanism 3 is arranged on one side of the loading area 11, so that the positioning drive module 31 drives the positioning platform 321 to extend out of the machine table 1, so that the positioning drive module 31 switches the positioning mechanism 3 to the transfer mode, and then the external mechanical hand transfers the accompanying plated plate on the positioning mechanism 3 to the circuit board in the electroplating tank. In order to prevent the accompanying plated plate from falling out of the positioning platform 321 when the positioning platform 321 is in the transfer mode, at least part of the limiting piece 322 is located at the edge of the positioning platform 321 to form a positioning area, and the limiting piece 322 can limit the accompanying plated plate to continue to slide, so that at least two sides of the accompanying plated plate can abut against the limiting piece 322 to complete the positioning of the accompanying plated plate. By arranging the rolling piece 323 rotatably arranged on the positioning platform 321, the accompanying plated plate rotates through the rolling piece 323 to reduce the friction between the accompanying plated plate and the rolling piece 323, so that the accompanying plated plate is more convenient to slide to the positioning area and abut against the limiting piece 322 under the gravity of itself. In the transfer mode, the positioning drive module 31 drives the positioning platform 321 to overturn to be inclined to the horizontal plane, so that the side of the positioning platform 321 away from the machine table 1 can be inclined downward, so that the accompanying plated plate slides along the rolling piece 323 under the action of gravity and abuts against the limiting piece 322, thereby avoiding the additional motor as the power source of the accompanying plated plate, thereby reducing the production cost of the positioning device, and avoiding the motor causing the accompanying plated plate to deform due to excessive stress.

[0031] As shown in Figure 3 and Figure 4 , the limiting piece 322 is arranged in multiple, the multiple limiting pieces 322 include multiple first limiting pieces 3221 and multiple second limiting pieces 3222, the multiple first limiting pieces 3221 are arranged in the length direction of the positioning platform 321, the multiple second limiting pieces 3222 are arranged in the width direction of the positioning platform 321, and the multiple first limiting pieces 3221 and the multiple second limiting pieces 3222 surround the positioning area.

[0032] In the embodiment, the positioning platform 321 can include a first sidewall and a second sidewall connected to each other, the first sidewall extends along a length direction of the positioning platform 321, the second sidewall extends along a width direction of the positioning platform 321, and the length direction of the positioning platform 321 and the width direction of the positioning platform 321 can be arranged to intersect. A plurality of first limiters 3221 are arranged at intervals on the first sidewall, and a plurality of second limiters 3222 are arranged at intervals on the second sidewall, so as to facilitate the positioning of the plurality of first limiters 3221 and the plurality of second limiters 3222 on the plating-assisted plate. By using the plurality of first limiters 3221 and the plurality of second limiters 3222 to position the plating-assisted plate, compared with the prior art of using a motor to position the plating-assisted plate, the present application has the advantages of simple structure and simple positioning mode of the positioning mechanism 3 on the plating-assisted plate, thereby reducing the working intensity of the staff.

[0033] As shown in Figure 1 , the rolling member 323 is arranged as a plurality of balls, and the plurality of rolling members 323 are arranged at intervals on the positioning platform 321, or the plurality of rolling members 323 are arranged staggered on the positioning platform 321.

[0034] In the embodiment, by arranging the rolling member 323 as a ball and arranging a plurality of rolling members 323 at intervals on the positioning platform 321, the contact area between the plating-assisted plate and the rolling member 323 is increased, and the plating-assisted plate is more conveniently slid on the surface of the plurality of rolling members 323 to abut against the limiter 322. The plurality of rolling members 323 can also be arranged staggered on the positioning platform 321, so as to increase the contact area between the plating-assisted plate and the rolling member 323, and the plating-assisted plate is more conveniently slid on the surface of the plurality of rolling members 323 to abut against the limiter 322.

[0035] As shown in Figure 1 and Figure 2 , the positioning assembly 32 further includes a connecting frame 324, one side of the connecting frame 324 is connected to the positioning platform 321, and the other side of the connecting frame 324 is movably arranged in the first direction on the machine table 1. The positioning driving module 31 includes a first driver 311, the first driver 311 is arranged on the connecting frame 324, the first driver 311 drives the positioning platform 321, and the first driver 311 is used for the positioning platform 321 to be flipped to be arranged at an inclination with the horizontal plane.

[0036] In the embodiment, the positioning mechanism 3 has an initial mode for the transfer mechanism to transfer the plated plate in the loading area 11 to the positioning platform 321, and in the initial mode, the positioning platform 321 is arranged in parallel with the horizontal plane. In order to improve the stability of the positioning driving module 31 in driving the positioning mechanism 3 to switch between the initial mode and the transfer mode, the connecting frame 324 is arranged to support the positioning platform 321 and the first driver 311.

[0037] As shown in Figure 2 , the connecting frame 324 includes a first connecting frame 3241 and a second connecting frame 3242, the first connecting frame 3241 is rotatably arranged on the second connecting frame 3242, the first connecting frame 3241 is connected to the positioning platform 321, and the end of the first driver 311 away from the positioning platform 321 is hinged to the second connecting frame 3242. The second connecting frame 3242 is movably arranged on the machine table 1 along the first direction.

[0038] In the embodiment, the connecting frame 324 further includes a transmission shaft, the transmission shaft is arranged on the second connecting frame 3242, and the first connecting frame 3241 is hinged to the transmission shaft, so that the first connecting frame 3241 is rotatably arranged on the second connecting frame 3242, thereby facilitating the first driver 311 to drive the positioning platform 321 to flip. By arranging the second connecting frame 3242 to support the first connecting frame 3241 and the positioning assembly 32, and arranging the first connecting frame 3241 to provide support force when the positioning platform 321 is inclined, the stability of the positioning driving module 31 in driving the positioning mechanism 3 to switch between the initial mode and the transfer mode is improved.

[0039] As shown in Figure 2 and Figure 3 , the second connecting frame 3242 has a mounting plane 3243 for the first driver 311 to be hinged, and the drive shaft of the second driver is arranged at an angle with the mounting plane 3243 along the second direction, wherein the first direction intersects the second direction.

[0040] In the embodiment, the first direction can be consistent with the front-back direction, and the second direction can be consistent with the up-down direction. By arranging the drive shaft of the second driver to be arranged at an angle with the mounting plane 3243 along the second direction, the user can adjust the angle between the drive shaft of the second driver and the mounting plane 3243 to adjust the inclination angle between the positioning platform 321 and the horizontal plane, thereby facilitating the plated plate to slide to abut against the limiting piece 322 by its own gravity, and facilitating the external mechanical hand to load the plated plate on the positioning platform 321.

[0041] As shown in Figure 2 and Figure 3As shown, in the embodiment, the included angle between the driving shaft of the second driver and the mounting plane 3243 along the second direction is not less than 15 degrees and not more than 60 degrees, within the angle range, so that the accompanying plating plate can slide on the positioning platform 321 by itself, and the accompanying plating plate will not fall off from the positioning area due to excessive inclination of the positioning platform 321, thereby facilitating the sliding of the accompanying plating plate to the abutment with the limiting piece 322 under the driving of gravity.

[0042] As shown, Figure 1 The transfer mechanism further includes a suction cup assembly 2 located above the positioning assembly 32, the suction cup assembly 2 being movably arranged along a third direction on the machine table 1, the suction cup assembly 2 having a suction area for suctioning the accompanying plating plate, the suction cup assembly 2 being used to suction the accompanying plating plate of the feeding area 11 to the suction area to carry the accompanying plating plate to the positioning platform 321, wherein the first direction, the second direction and the third direction intersect with each other.

[0043] In the embodiment, the suction cup assembly 2 can suction the accompanying plating plate of the feeding area 11 to the suction area and move to above the positioning platform 321 along the third direction, and the suction force of the suction area is released to carry the accompanying plating plate to the positioning platform 321, thereby improving the efficiency of transporting the accompanying plating plate from the feeding area 11 to the positioning platform 321, and further improving the transfer efficiency of the accompanying plating plate from the positioning device to the mechanical hand.

[0044] As shown, Figure 1 The suction cup assembly 2 includes a third driver 21, a sliding rail 22, a connecting arm 23 and a suction cup 24, the sliding rail 22 being arranged along the third direction, the third driver 21 driving the connecting arm 23, the connecting arm 23 being movably arranged along the third direction on the sliding rail 22, the connecting arm 23 connecting the suction cup 24, and the suction cup 24 having the suction area.

[0045] In the embodiment, the suction cup assembly 2 further includes a fourth driver (not shown in the figure), the fourth driver being arranged on the connecting arm 23, the fourth driver driving the suction cup 24 to move along the second direction, thereby facilitating the placement of the accompanying plating plate on the positioning platform 321. The third driver 21 can drive the connecting arm 23 to move along the third direction, thereby facilitating the movement of the suction cup 24 and the accompanying plating plate from the feeding area 11 to the positioning platform 321. The suction cup 24 can stably suction the accompanying plating plate, thereby avoiding the falling of the accompanying plating plate during the movement from the feeding area 11 to the positioning platform 321.

[0046] The utility model discloses still a kind of electroplating equipment, the electroplating equipment includes positioning device, the specific structure of the positioning device refers to above-mentioned embodiment, since the electroplating equipment has adopted all technical solutions of above-mentioned all embodiments, at least have all beneficial effects brought by the technical scheme of above-mentioned embodiment, here no longer one by one elaboration.

[0047] The above-mentioned is only the exemplary embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structural transformation made by using the utility model specification and the contents of the drawings, or direct / indirect application in other related technical fields are included in the patent protection range of the utility model.

Claims

1. A positioning device applied to an electroplating apparatus, characterized in that, The positioning device comprises: A machine table having a loading area for loading the accompanying plating plates; A transfer mechanism arranged on the machine table; A positioning mechanism arranged on one side of the loading area, the positioning mechanism comprising a positioning drive module and a positioning assembly, the positioning assembly comprising a positioning platform, a limiting piece and a rolling piece, the positioning drive module being arranged on the machine table, the positioning drive module being drivingly connected to the positioning platform, the transfer mechanism being used to transfer the accompanying plating plates in the loading area to the positioning platform; the limiting piece being arranged on the positioning platform, at least part of the limiting piece being located at the edge of the positioning platform to form a positioning area, the rolling piece being rotatably arranged on the positioning platform, the rolling piece being used to carry the accompanying plating plates and allow the accompanying plating plates to slide on the positioning platform, the positioning mechanism having a transfer mode for transferring the accompanying plating plates on the positioning platform by an external device; In the transfer mode, the positioning drive module drives the positioning platform to be tilted with respect to the horizontal plane, so that the accompanying plating plates on the positioning platform slide on the rolling piece to the positioning area and abut against the limiting piece under the action of gravity.

2. The positioning device of claim 1, wherein, The limiting piece is arranged in multiple, the multiple limiting pieces comprising multiple first limiting pieces and multiple second limiting pieces, the multiple first limiting pieces being arranged in intervals along the length direction of the positioning platform, the multiple second limiting pieces being arranged in intervals along the width direction of the positioning platform, the multiple first limiting pieces and the multiple second limiting pieces surrounding the positioning area.

3. The positioning device of claim 1, wherein, The rolling piece is arranged as a ball bearing, and the rolling piece is arranged in multiple; the multiple rolling pieces are arranged in intervals on the positioning platform, or the multiple rolling pieces are arranged in alternation on the positioning platform.

4. The positioning device of claim 1, wherein, The positioning assembly further comprises a connecting frame, one side of the connecting frame being connected to the positioning platform, the other side of the connecting frame being movably arranged on the machine table along a first direction, the positioning drive module comprising a first drive, the first drive being arranged on the connecting frame, the first drive being drivingly connected to the positioning platform, the first drive being used to tilt the positioning platform with respect to the horizontal plane.

5. The positioning device of claim 4, wherein, The connecting frame comprises a first connecting frame and a second connecting frame, the first connecting frame being rotatably arranged on the second connecting frame, the first connecting frame being connected to the positioning platform, one end of the first drive, which is away from the positioning platform, being hinged to the second connecting frame, the second connecting frame being movably arranged on the machine table along the first direction.

6. The positioning device of claim 5, wherein, The second connecting frame has a mounting plane for hinging the first drive, the driving shaft of the second drive being arranged at an angle with respect to the mounting plane along a second direction, wherein the first direction intersects the second direction.

7. The positioning device of claim 6, wherein, The angle formed between the driving shaft of the second drive and the mounting plane along the second direction is not less than 15 degrees and not more than 60 degrees.

8. The positioning device of claim 6, wherein, The transfer mechanism further comprises a suction cup assembly located above the positioning assembly, the suction cup assembly is movably arranged along a third direction on the machine table, the suction cup assembly has a suction area for adsorbing a co-deposition plate, and the suction cup assembly is used for adsorbing the co-deposition plate in the feeding area to the suction area to carry the co-deposition plate to the positioning platform, wherein the first direction, the second direction and the third direction are intersected with each other in pairs.

9. The positioning device of claim 8, wherein, The suction cup assembly comprises a third driver, a sliding rail, a connecting arm and a suction cup, the sliding rail is arranged along the third direction, the third driver drives the connecting arm, the connecting arm is movably arranged along the third direction on the sliding rail, the connecting arm is connected with the suction cup, and the suction cup has the suction area.

10. An electroplating apparatus characterized by comprising: A positioning device comprising any one of claims 1 to 9.