Silica gel rubber-coated steel ring

Abstract

The utility model discloses a silica gel rubber-coated steel ring, which comprises a steel ring body and a silica gel protective layer, the diameter of the steel ring body is 150-300mm, the thickness of the steel ring body is 1.5-4mm, the silica gel protective layer is coated on the outer surface of the steel ring body, and the thickness of the silica gel protective layer is 0.15-0.20 mm. According to the silica gel rubber-coated steel ring, the silica gel protective layer is additionally arranged on the surface of the steel ring, so that when the steel ring touches an external protective ring metal ring, the steel ring is physically isolated due to the wrapping of silica gel, the problem that the steel ring is scratched is solved, and the situation that the side wall of a pressure film is in continuous contact with the fastening steel ring, the side wall of the film is easily scratched, and the service life of the steel ring is prolonged is avoided. And meanwhile, the chip processing quality and efficiency can be improved.

Description

TECHNICAL FIELD

[0001] The utility model discloses chip processing technical field especially relates to a silica gel encapsulated steel ring. BACKGROUND

[0002] Wafer refers to the silicon wafer used for making silicon semiconductor circuit (chip), and it is a thin, circular high-purity silicon wafer. The chip is an integrated circuit made by using photoetching, etching, ion implantation and other semiconductor manufacturing processes on the wafer. The wafer is the carrier and raw material of the chip, and the chip is the finished product with specific functions obtained after a series of processing of the wafer.

[0003] In the production process of the wafer, the wafer needs to be ground and polished. The grinding head is one of the key components for performing this operation. The grinding head rotates and presses the wafer on the grinding pad or polishing pad, and drives the wafer to rotate, removes the excess material on the surface of the wafer or improves the surface quality of the wafer by using mechanical force and chemical action, so that the wafer reaches the required flatness and roughness.

[0004] In the process of chip grinding, the grinding head assembly is connected to the gas to control the adsorption and unloading of the pressure film on the wafer, so that the wafer is rubbed on the grinding pad to achieve the purpose of polishing. The pressure film needs to be matched with the fastening steel ring when working in the grinding head assembly. The fastening steel ring is sleeved outside the inflated pressure film. The function of the fastening steel ring is to enhance the pressure resistance of the side wall of the pressure film, so that the side wall of the pressure film does not deform in the inflated state. In the process of grinding, because the pressure film constantly adsorbs the wafer and releases the wafer after grinding, the side wall of the pressure film is constantly in contact with the fastening steel ring, which is easy to scratch the side wall of the film. It is also easy to cause the outer side of the steel ring to be scratched by colliding with the external guard ring metal ring. This seriously affects the improvement of the quality and efficiency of chip processing. Therefore, a steel ring is needed to avoid scratching the side wall of the film and avoid collision with the external guard ring metal ring, while improving the quality and efficiency of chip processing. CONTENT OF THE UTILITY MODEL

[0005] The utility model discloses a silica gel encapsulated steel ring, solve the problem that the side wall of pressure film is constantly in contact with fastening steel ring in prior art, easy to scratch the side wall of film, also easy to cause the outer side of steel ring to be scratched by colliding with external guard ring metal ring.

[0006] In order to achieve the above-mentioned purpose, the utility model provides a silica gel encapsulated steel ring, which comprises a steel ring body and a silica gel protective layer, wherein the diameter of the steel ring body is 150-300mm, the thickness is 1.5-4mm, the silica gel protective layer is coated on the outer surface of the steel ring body, and the thickness of the silica gel protective layer is 0.15-0.20mm.

[0007] Preferably, the surface of the steel ring body is sandblasted.

[0008] Preferably, the surface of the steel ring after sand blasting treatment is provided with a layer of evenly brushed silica gel adhesive.

[0009] Preferably, the outside of the steel ring with evenly brushed silica gel adhesive is provided with a layer of evenly sprayed silica gel protective layer.

[0010] Preferably, the outer surface of the steel ring body is fully covered by the silica gel protective layer.

[0011] Preferably, the outer surface of the silica gel protective layer is re-vulcanized by ultraviolet light, and the roughness Ra is 0.5-0.8 μm.

[0012] Preferably, the outer surface of the silica gel coated steel ring is smooth and free of burrs, and the silica gel is fully coated without leakage.

[0013] Therefore, the silica gel coated steel ring is used, and a layer of silica gel protective layer is additionally arranged on the surface of the steel ring, so that when the steel ring collides with the external protective ring metal ring, the steel ring is physically isolated due to the wrapping of the silica gel, thereby solving the problem of the steel ring being scratched, avoiding the continuous contact between the side wall of the pressure film and the fastening steel ring, and easily scratching the side wall of the film, and simultaneously improving the quality and efficiency of chip processing.

[0014] The technical scheme of the present application is further described in detail below with reference to the drawings and examples. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a whole structure schematic view of a silica gel coated steel ring of the present application;

[0016] Figure 2 is a longitudinal sectional view of a silica gel coated steel ring of the present application;

[0017] Figure 3 is a longitudinal sectional view of a silica gel coated steel ring and a protective ring metal ring of the present application.

[0018] REFERENCE NUMERALS

[0019] 1, silica gel coated steel ring; 2, silica gel protective layer; 3, steel ring body; 4, protective ring metal ring. DETAILED DESCRIPTION

[0020] The technical scheme of the present application is further described in detail below with reference to the drawings and examples.

[0021] Unless otherwise defined, the technical or scientific terms used in this utility model shall have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0022] Example

[0023] like Figure 1 As shown, a silicone-coated steel ring 1 includes a steel ring body 3 and a silicone protective layer 2. The steel ring body 3 has a diameter of 150-300mm and a thickness of 1.5-4mm. The silicone protective layer 2 covers the outer surface of the steel ring body 3 and has a thickness of 0.15-0.20mm.

[0024] like Figure 2 As shown, the surface of the steel ring body 3 is sandblasted. A layer of evenly applied silicone adhesive is then applied to the sandblasted surface of the steel ring. A layer of evenly sprayed silicone protective layer 2 is then applied to the outside of the steel ring with the evenly applied silicone adhesive. The outer surface of the steel ring body 3 is completely covered by the silicone protective layer 2.

[0025] The outer surface of the silicone protective layer 2 is re-cured under ultraviolet light, resulting in a roughness Ra of 0.5-0.8 μm. The outer surface of the silicone-coated steel ring 1 is smooth and burr-free, and the silicone protective layer 2 completely covers the entire surface without any leaks.

[0026] Preparation for dust removal of the steel ring body 3: Sandblasting removes stains from the surface of the stainless steel ring body 3, then ultrasonically cleans it with pure water for 30 minutes to thoroughly clean the stains on the steel ring. After taking it out, blow it clean and then bake it in an oven at 80 degrees for 10 minutes to remove moisture.

[0027] Surface pretreatment: After the steel ring body 3 has cooled, brush a layer of silicone adhesive evenly and let it stand for 3-5 minutes to dry, then bake it in a 100-degree oven for 20 minutes.

[0028] Silicone vulcanization of steel rims: After the steel rim body 3 is soaked in glue, silicone is evenly sprayed onto the surface of the steel rim body 3 using a high-pressure air gun in a dust-free room, with a thickness of 0.15-0.20mm, and then baked in a 180-degree high-temperature oven for 15 minutes.

[0029] Product surface pretreatment: ultraviolet light resulfurization, so that the surface roughness Ra reaches 0.5-0.8 μm, the surface is smoother, and the friction resistance is reduced.

[0030] Quality detection: observe the smooth surface of the product by visual inspection, the silicone coating is complete without leakage, and the details of the sample are observed by optical magnifying glass. The outer diameter of the product is measured by 2D projector, and the concentricity of the inner and outer diameters of the product and the steel ring in the silicone is detected.

[0031] The prior art adopts a traditional process to prepare a bare steel ring, which is sleeved outside the pressure film. During the grinding process, since the steel ring directly contacts the external protective ring metal ring 4, the outer side of the steel ring is likely to be hit during the grinding process, which may cause metal debris to fall off, resulting in the whole wafer being scrapped and the efficiency being reduced.

[0032] As shown in Figure 3 The utility model discloses a new type of steel ring needed in silicon carbide chemical mechanical polishing (CMP) process, which has the advantages of collision resistance, high strength, corrosion resistance and wear resistance, and is an indispensable important component of CMP grinding process.

[0033] Therefore, the utility model adopts the above-mentioned one kind of silica gel coated steel ring, and adds a layer of silica gel protective layer on the surface of the steel ring, so that when the steel ring hits the external protective ring metal ring, the steel ring is physically isolated due to the wrapping of the silica gel, thereby solving the problem of the steel ring being scratched, avoiding the continuous contact of the pressure film side wall with the fastening steel ring, which is easy to scratch the film side wall, and at the same time, the quality and efficiency of chip processing can be improved.

[0034] Finally, it should be noted that: the above examples are only used to illustrate the technical solutions of the utility model and not to limit them. Although the utility model has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the utility model can still be modified or replaced by equivalents, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the utility model.

Claims

1. A bead of silica gel, characterized in that: The steel ring body has a diameter of 150-300 mm and a thickness of 1.5-4 mm, and the silica gel protective layer is coated on the outer surface of the steel ring body and has a thickness of 0.15-0.20 mm.

2. A bead of silica gel according to claim 1, characterised in that: The surface of the steel ring body is subjected to sand blasting treatment.

3. A bead of silica gel according to claim 2, characterised in that: The surface of the steel ring after sand blasting treatment is provided with a layer of uniformly brushed silica gel adhesive.

4. A bead of silica gel according to claim 3, characterised in that: The outer surface of the steel ring with uniformly brushed silica gel adhesive is provided with a layer of uniformly sprayed silica gel protective layer.

5. The silicone encapsulated bead of claim 1, wherein: The outer surface of the steel ring body is fully coated with the silica gel protective layer.

6. The silicone encapsulated bead of claim 1, wherein: The outer surface of the silica gel protective layer is subjected to ultraviolet light resulfurization, and the roughness Ra is 0.5-0.8 µm.

7. The silicone encapsulated bead of claim 1, wherein: The outer surface of the silica gel coated steel ring is smooth and free of burrs, and the silica gel protective layer is fully coated without leakage points.

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