Passivation equipment

Abstract

The utility model relates to the technical field of solar cell manufacturing equipment, and discloses passivation equipment, which is used for passivating the edge of a sliced solar cell and comprises an equipment main body, a passivation device, a first electrode, a second electrode, a third electrode and a fourth electrode, the furnace door is configured to be closed or opened relative to the equipment main body; the bearing support is movably arranged in the cavity, a plurality of containing cavities are formed in the bearing support, the containing cavities are configured to contain carriers, and the carriers are configured to contain the sliced solar cells; the temperature detector penetrates through the furnace door and is arranged on the bearing support, the detection end of the temperature detector is arranged in the direction of the containing cavity, and the detection end of the temperature detector is configured to be close to or make contact with the carrier located in the containing cavity. By adopting the passivation equipment, the temperature of the carrier in the machining process can be timely and effectively reflected.

Description

Technical Field

[0001] This utility model relates to the field of solar cell manufacturing equipment technology, and in particular to a passivation device. Background Technology

[0002] In the processing of sliced ​​solar cells, the sliced ​​solar cells are placed in a carrier, which is then placed in a passivation device. A passivation layer is then deposited on the cut surfaces of the sliced ​​solar cells to reduce edge recombination and improve the performance of the solar cells. The temperature of the carrier has a significant impact on the deposition quality of the passivation layer; however, current passivation equipment struggles to obtain the carrier temperature in a timely manner during the deposition process, making it difficult to accurately monitor the deposition quality. Utility Model Content

[0003] This utility model discloses a passivation device that can reflect the temperature of the carrier during the processing in a timely and effective manner, thereby improving the deposition quality of the passivation layer.

[0004] This application provides a passivation device for edge passivation of sliced ​​solar cells, the passivation device comprising:

[0005] The main body of the equipment has a cavity inside;

[0006] A furnace door, configured to be closed or open relative to the main body of the equipment;

[0007] A support bracket is movably disposed within the cavity. The support bracket has a plurality of receiving cavities configured to receive carriers, which are configured to hold the sliced ​​solar cells.

[0008] A temperature detector is mounted on the support bracket through the furnace door, with the detection end of the temperature detector facing the receiving cavity and configured to be close to or in contact with the carrier located in the receiving cavity.

[0009] Furthermore, the temperature detector is a thermocouple, and the thermocouple includes:

[0010] The first thermocouple segment passes through the furnace door and is disposed on the support bracket along the length direction of the support bracket;

[0011] A plurality of second thermocouple segments are arranged in parallel, each of the second thermocouple segments being bent from the first thermocouple segment toward the receiving cavity, and the second thermocouple segment having the detection end.

[0012] Furthermore, the number of the receiving cavities corresponds to the number of the second thermocouple segments, and the detection end of any second thermocouple segment is configured to detect the temperature of the carrier in any of the receiving cavities.

[0013] Furthermore, the thermocouple further includes: a plurality of third thermocouple segments and a fourth thermocouple segment connected to the first thermocouple segment, the fourth thermocouple segment having the same height as the first thermocouple segment and being higher than the second thermocouple segment, the third thermocouple segments being connected between the second thermocouple segment and the fourth thermocouple segment, and the detection end of the second thermocouple segment being configured to correspond to the middle of the carrier.

[0014] Furthermore, the thermocouple includes a thermocouple wire, an insulating sleeve fitted on the outer surface of the thermocouple wire, and a thermocouple sheath fitted on the outer surface of the insulating sleeve.

[0015] Furthermore, the passivation device also includes an elastic structure, one end of which abuts against the outer surface of the furnace door away from the support bracket, and the other end of which is elastically connected to the temperature detector located outside the furnace door. The temperature detector is configured to move its detection end closer to or further away from the carrier in the receiving cavity as the elastic structure deforms.

[0016] Furthermore, when the detection end is configured close to the carrier in the receiving cavity, the distance between the detection end and the carrier in the receiving cavity is 4mm to 6mm.

[0017] Furthermore, the passivation device also includes a control unit electrically connected to the temperature detector, the control unit being used to control the temperature of the carrier in any of the receiving cavities.

[0018] Furthermore, the carrier includes a carrier body and a baffle movably connected to the carrier body, the carrier body being configured to hold the sliced ​​solar cell;

[0019] The passivation device further includes a baffle rod, which is disposed on the support bracket. The pressing end of the baffle rod abuts against the baffle, and the pressing end is configured to adjust the distance between the baffle and the sliced ​​solar cell in the carrier body.

[0020] Furthermore, the baffle pressure rod includes:

[0021] The first baffle pressure rod section is arranged on the bearing bracket along the length direction of the bearing bracket;

[0022] A plurality of second baffle pressure rod segments are arranged in parallel. Each second baffle pressure rod segment is bent from the first baffle pressure rod segment toward the baffle. The second baffle pressure rod segment has the extrusion end, which is an elastic body. The baffle pressure rod is configured to move the baffle closer to or away from the sliced ​​solar cell in the carrier body with the elastic deformation of the elastic body.

[0023] Furthermore, the temperature detector includes a first thermocouple segment and several second thermocouple segments connected in parallel;

[0024] The passivation device further includes a connecting plate that connects the first baffle pressure rod section to the first thermocouple section.

[0025] Furthermore, the support bracket includes a support base plate, a support side plate connected to the support base plate, and a plurality of partition plates. The support base plate and the support side plate enclose a cavity with an opening on one side. The plurality of partition plates divide the cavity into a plurality of receiving cavities. The first baffle pressure rod section is disposed on the support side plate.

[0026] The support bracket further includes a locking structure disposed on the side plate of the bracket, the locking structure being configured to fix the position of the first baffle pressure rod segment relative to the side plate of the bracket.

[0027] Furthermore, the vehicle body includes: a vehicle bottom plate, a vehicle top plate, a first side plate and a second side plate disposed opposite to each other, and a third side plate disposed opposite to the baffle; the first side plate and the second side plate are connected between the vehicle bottom plate and the vehicle top plate, and the third side plate and the baffle are respectively separated from the vehicle top plate;

[0028] The cut surface of the sliced ​​solar cell is oriented toward the top plate of the vehicle. The top plate of the vehicle has a plurality of holes that penetrate the thickness direction of the top plate of the vehicle, and the plurality of holes are evenly distributed on the top plate of the vehicle.

[0029] Furthermore, the number of holes is 6 to 20; and / or,

[0030] The diameter of any of the holes is 0.8 mm to 1.2 mm.

[0031] Furthermore, a first gasket is provided on a portion of the area connecting the top plate of the carrier and the first side plate. The first gasket is configured to create a first gap between the top plate of the carrier and the first side plate, and the first gap is configured to allow process gas to pass through.

[0032] A second gasket is provided on the portion of the connection between the top plate of the carrier and the second side plate. The second gasket is configured to create a second gap between the top plate of the carrier and the second side plate, and the second gap is configured to allow process gas to pass through.

[0033] Furthermore, the number of the first gaskets is 3 to 4; and / or,

[0034] The number of the second gasket is 3 to 4; and / or,

[0035] The thickness of the first gasket is 0.05mm to 0.25mm; and / or,

[0036] The thickness of the second gasket is 0.05mm to 0.25mm.

[0037] Furthermore, the passivation equipment also includes a boat support plate, which is disposed below the support bracket and fixedly connected to the furnace door; and / or,

[0038] The passivation equipment also includes a flow equalization plate, which is disposed between the furnace door and the support bracket, and is spaced apart from the furnace door and the support bracket respectively. The flow equalization plate is provided with a slit penetrating the thickness direction of the flow equalization plate, and the slit is configured to allow process gas to pass through.

[0039] Compared with the prior art, this application has at least the following beneficial effects:

[0040] This application provides a passivation apparatus, which includes an apparatus body, a furnace door, a support bracket, and a temperature detector. The support bracket has several cavities for holding a carrier. To monitor the temperature of the carrier within these cavities, the passivation apparatus further includes a temperature detector that passes through the furnace door and is mounted on the support bracket, with its detection end facing the cavity and close to or in contact with the carrier within the cavity. Thus, when the carrier is placed in the cavity of the support bracket, because one end of the temperature detector is outside the furnace door and its detection end is close to or in contact with the carrier, the passivation apparatus can effectively and promptly measure the carrier temperature during the passivation layer deposition process. This facilitates effective monitoring of the passivation layer deposition quality through the carrier temperature. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is a schematic diagram of the structure of a passivation device (excluding a carrier) provided in an embodiment of this application;

[0043] Figure 2 This is an embodiment of the present application. Figure 1 A magnified view of A obtained by rotating it 90° clockwise;

[0044] Figure 3 This is a schematic diagram of the structure of a passivation device (including a carrier) provided in an embodiment of this application;

[0045] Figure 4 This is provided by the embodiments of this application. Figure 3 Top view;

[0046] Figure 5 This is a schematic diagram of a parallel thermocouple provided in an embodiment of this application;

[0047] Figure 6 This is a schematic diagram of another parallel thermocouple provided in an embodiment of this application;

[0048] Figure 7 This is a schematic diagram showing the positional correspondence between the detection end and the vehicle provided in the embodiments of this application;

[0049] Figure 8 This is a schematic diagram of the structure of the thermocouple wire, insulating sleeve, and thermocouple sheath provided in the embodiments of this application;

[0050] Figure 9 This is a schematic diagram of the vehicle provided in the embodiment of this application in the open state;

[0051] Figure 10 This is a schematic diagram of the vehicle in a closed state according to an embodiment of this application;

[0052] Figure 11 This is a schematic diagram of the structure of a baffle pressure rod provided in an embodiment of this application;

[0053] Figure 12 This is a schematic diagram of another baffle pressure rod provided in an embodiment of this application;

[0054] Figure 13 This is a schematic diagram showing the positional correspondence between the extrusion end and the baffle provided in an embodiment of this application;

[0055] Figure 14 This is a schematic diagram of the structure of the first gasket provided in the embodiment of this application.

[0056] Icons: 100, passivation equipment; 11, furnace door; 12, support bracket; 12a, first support bracket; 12b, second support bracket; 121, receiving cavity; 121a, first row of receiving cavities; 121b, second row of receiving cavities; 122, bracket side plate; 123, partition plate; 124, locking structure; 13, temperature detector; 13a, first row of temperature detectors; 13b, second row of temperature detectors; 131, detection end; 132, thermocouple; 1321, the... 1322. Thermocouple section 1; 1323. Thermocouple section 3; 1324. Thermocouple section 4; 132a. Thermocouple wire; 132b. Insulating sleeve; 132c. Thermocouple sheath; 14. Elastic structure; 15. Baffle rod; 151. Extrusion end; 152. First baffle rod section; 153. Second baffle rod section; 154. Third baffle rod section; 155. Fourth baffle rod section; 16. Connecting plate; 17. Boat support plate; 18. Flow equalization plate;

[0057] 200. Vehicle; 21. Vehicle body; 211. Vehicle floor plate; 212. Vehicle top plate; 213. First side plate; 214. Second side plate; 215. First gasket; 216. First gap; 22. Baffle. Detailed Implementation

[0058] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0059] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0060] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.

[0061] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0062] The technical solution provided by this utility model will be further described below with reference to the embodiments and accompanying drawings.

[0063] Edge passivation is a technique used to passivate the cut surfaces of sliced ​​solar cells. By depositing a passivation layer on the cut surfaces, it effectively repairs edge recombination losses and improves the fill factor and photoelectric conversion efficiency of the solar cells. The process typically involves placing the sliced ​​solar cell with the cut surfaces in a carrier, and then placing the carrier in a passivation apparatus for passivation layer deposition. During the passivation process, the carrier temperature affects the thermal velocity of the process gases, thus influencing the deposition quality of the passivation layer. Therefore, to improve the quality of the passivation layer, it is necessary to obtain the carrier temperature more frequently.

[0064] Temperature stickers can be used to measure the temperature of the carrier on the production line. However, since the inside of the passivation equipment is a closed space, the temperature information on the temperature sticker can only be obtained after the carrier is removed from the passivation equipment. Therefore, the temperature detection is delayed and the temperature of the carrier cannot be monitored in real time, making it difficult to effectively monitor the quality of the passivation layer.

[0065] Based on the above problems, this application provides a passivation device. Using this passivation device, temperature measurement becomes more convenient and the detection accuracy is higher. It can reflect the temperature of the carrier during the processing in a timely and effective manner, thereby effectively monitoring the quality of the passivation layer deposition.

[0066] This application provides a passivation device for edge passivation of sliced ​​solar cells. See also... Figures 1 to 4 ,in, Figure 1 and Figure 3 A schematic diagram of the passivation device according to an embodiment of this application is shown. The internal structure of the passivation device is illustrated for clarity. Figure 1 and Figure 3 The main body of the equipment and its chambers were all omitted, and Figure 3 To facilitate the illustration of the temperature detectors in the carrier and passivation equipment, therefore Figure 3 A carrier is placed in the containment cavity. Figure 2 for Figure 1 A magnified view of AA rotated 90° clockwise, to clearly illustrate the relationship between the receiving cavity and the temperature detector. Figure 4 for Figure 3A top view of the provided passivation device. The passivation device 100 according to an embodiment of this application includes:

[0067] The main body of the equipment has internal chambers;

[0068] Furnace door 11, which is configured to be closed or open relative to the main body of the equipment;

[0069] The support bracket 12 is movably disposed within the cavity. The support bracket 12 has a plurality of receiving cavities 121, which are configured to receive the carrier 200, and the carrier 200 is configured to place the sliced ​​solar cell.

[0070] Temperature detector 13 is mounted on support bracket 12 through furnace door 11. The detection end 131 of temperature detector 13 is positioned toward receiving cavity 121 and is configured to be close to or in contact with carrier 200 located in receiving cavity 121.

[0071] The passivation equipment 100 provided in this embodiment includes a main body, a furnace door 11, a support bracket 12, and a temperature detector 13. Since the receiving cavity 121 of the support bracket 12 is used to place a carrier 200, which contains sliced ​​solar cells, when the detection end 131 of the temperature detector 13 is positioned towards the receiving cavity 121 and approaches or contacts the carrier 200 within the receiving cavity 121, real-time monitoring and measurement of the temperature of the carrier 200 are achieved. This temperature measurement method is convenient, accurate, and can promptly and effectively reflect the temperature of the carrier 200 during the processing, thereby effectively monitoring the deposition quality of the passivation layer on the sliced ​​solar cells.

[0072] Along the length direction of the support bracket 12 (see...) Figure 4 In the X direction (as shown in the image), several receiving cavities 121 can be arranged in one, two, three, or even more columns. To more clearly illustrate the scheme of this application, we will take two columns of receiving cavities 121 as an example. Please refer to the previous section. Figure 4 At this time, temperature detectors 13 are installed on both sides of the support bracket 12. The first row of temperature detectors 13a is used to measure the temperature of the carrier in the first row of receiving cavities 121a, and the second row of temperature detectors 13b is used to measure the temperature of the carrier in the second row of receiving cavities 121b. This ensures real-time monitoring of the carrier temperature and further improves production efficiency. In addition, the temperature detection device 3 can be fixedly connected to the support bracket 12 by means of screws, welding, bonding, etc. Furthermore, the temperature detectors 13 include thermocouples 132, infrared thermometers, or resistance temperature detectors.

[0073] As a preferred embodiment, the temperature detector 13 of this application is a thermocouple 132. The thermocouple 132 has a simple structure, is easy to use and is readily available. It can not only reduce the cost of maintenance and replacement, but also improve the measurement effect.

[0074] Among them, as the first parallel implementation method, see the reference... Figure 1 and Figure 5 Thermocouple 132 includes:

[0075] The first thermocouple section 1321 passes through the furnace door 11 and is provided on the support bracket 12 along the length direction of the support bracket 12;

[0076] Several second thermocouple segments 1322 are arranged in parallel. Each second thermocouple segment 1322 is bent from the first thermocouple segment 1321 toward the receiving cavity 121. The second thermocouple segment 1322 has a detection end 131.

[0077] By connecting multiple second thermocouple segments 1322 in parallel to a first thermocouple segment 1321, real-time monitoring of the temperature of the carrier 200 is achieved through the connection of the first thermocouple segment 1321 to external equipment. This device has a simpler structure, reduces the difficulty of using the equipment, and helps improve detection efficiency.

[0078] It is understood that thermocouple 132 may also include several independently configured thermocouples 132, one end of any thermocouple 132 is used to detect the temperature of the carrier 200 located in the containment cavity, and the other end is directly connected to external equipment.

[0079] As a second parallel implementation, the thermocouple 132 has a height difference between the first thermocouple segment 1321 and the second thermocouple segment 1322. The thermocouple also includes a third thermocouple segment 1323 and a fourth thermocouple segment 1324 disposed between the first thermocouple segment 1321 and the second thermocouple segment 1322, such as... Figure 6 and Figure 7 As shown, the thermocouple also includes: several third thermocouple segments 1323, and a fourth thermocouple segment 1324 connected to the first thermocouple segment 1321. The fourth thermocouple segment 1324 has the same height as the first thermocouple segment 1321 and is higher than the second thermocouple segment 1322. The third thermocouple segments 1323 are connected between the second thermocouple segment 1322 and the fourth thermocouple segment 1324. The detection end 131 of the second thermocouple segment 1322 is configured to correspond to the middle part of the carrier 200. When the temperature of the carrier 200 is detected, the temperature of different areas of the carrier 200 varies. When the temperature of the middle part of the carrier 200 is detected, its temperature can better reflect the true temperature of the carrier 200, resulting in higher detection accuracy and smaller error.

[0080] It is understandable that if the detection end 131 is detecting the baffle 22 of the vehicle 200, the middle part of the vehicle 200 refers to the middle position of the baffle 22.

[0081] Furthermore, in this application, the number of receiving cavities 121 corresponds to the number of second thermocouple segments 1322, and the detection end 131 of any second thermocouple segment 1322 is configured to detect the temperature of the carrier 200 in any receiving cavity 121. This one-to-one correspondence allows the temperature of any carrier 200 to be detected and monitored in real time, thereby helping to further improve the accuracy of the detection.

[0082] Furthermore, such as Figure 8 As shown, the thermocouple 132 includes a thermocouple wire 132a, an insulating sleeve 132b fitted over the outer surface of the thermocouple wire 132a, and a thermocouple sheath 132c fitted over the outer surface of the insulating sleeve 132b. The insulating sleeve 132b prevents contact between different thermocouple wires 132a, thus avoiding short circuits. The thermocouple sheath 132c provides protection, preventing damage to the thermocouple wire 132a due to collisions, thereby further improving the service life of the temperature detector 13.

[0083] The insulating sleeve 132b is made of ceramic, which has high temperature resistance, corrosion resistance and wear resistance. Using ceramic as the insulating sleeve material can not only prevent short circuits, but also protect the thermocouple wire 132a and improve its service life. The thermocouple sheath 132c is made of metal, which has high toughness and strength, thus it can better resist external impacts and damage, thereby helping to improve the service life of the thermocouple 132.

[0084] Further, see the return Figure 1 The passivation device 100 also includes an elastic structure 14. One end of the elastic structure 14 abuts against the outer surface of the furnace door 11 away from the support bracket 12, and the other end of the elastic structure 14 is elastically connected to a temperature detector 13 located outside the furnace door 11. The temperature detector 13 is configured to move the detection end 131 closer to or further away from the carrier 200 in the receiving cavity 121 as the elastic structure 14 deforms.

[0085] Before passivating the cut surface of the sliced ​​solar cell, the carrier is placed in the receiving cavity 121. Then, the elastic structure 14 is in a contracted state, so that the detection end 131 is close to the carrier 200 in the receiving cavity 121, thereby ensuring that the detection end 131 can effectively act on the carrier 200 and improving the accuracy of detection. After the passivation layer is prepared, the elastic structure 14 is then in a stretched state, so that the detection end 131 is away from the carrier 200 in the receiving cavity 121. Therefore, when the carrier 200 is removed from the receiving cavity 121, the detection end 131 of the temperature detector 13 can be avoided from being damaged.

[0086] In one optional embodiment, the elastic structure 14 may be a KF spring bellows or a rubber structure. Preferably, when the elastic structure 14 is a KF spring bellows, the structure has higher elasticity, more flexible operation, and higher control precision.

[0087] Furthermore, when the detection end 131 is configured close to the carrier 200 in the receiving cavity 121, the distance between the detection end 131 and the carrier 200 in the receiving cavity 121 is 4mm to 6mm. By controlling the distance between the detection end 131 and the carrier 200, damage to the detection end 131 can be avoided, and its service life can be improved.

[0088] Furthermore, since the existing carrier 200 is heated by temperature radiation, specifically by heating the chamber of the main body of the device, the temperature of the carrier 200 is indirectly affected during the heating of the chamber, thus causing the temperature of the carrier 200 to rise. However, this method of heating takes a long time, and the temperature of the carrier 200 is difficult to control, which affects the quality of the passivation layer. Therefore, the passivation device 100 of this application also includes a control unit, which is electrically connected to the temperature detector 13. By controlling the temperature of the carrier 200 in any of the receiving cavities 121 through the control unit, precise temperature control of the carrier 200 is achieved. This not only helps to increase the heating rate and reduce the heating time, but also ensures the temperature uniformity of the carrier 200 in different areas, thereby further improving the deposition quality of the passivation layer.

[0089] like Figure 2 , Figure 9 ,as well as Figure 10 As shown, in order to clearly illustrate the positional relationship between the vehicle body and the baffle, Figure 9 This is a schematic diagram of the carrier 200 in the open state. When in the open state, it facilitates the insertion and removal of the sliced ​​solar cells from the carrier body 21. Figure 10 This is a schematic diagram of the carrier 200 in a closed state. When in the closed state, it is to send the support bracket 12 into the main body of the equipment so as to deposit a passivation layer on the cut surface of the sliced ​​solar cell.

[0090] The carrier 200 includes a carrier body 21 and a baffle 22 movably connected to the carrier body 21. The carrier body 21 is configured to hold sliced ​​solar cells.

[0091] The passivation device 100 also includes a baffle rod 15, which is disposed on the support bracket 12. The pressing end 151 of the baffle rod 15 abuts against the baffle 22. The pressing end 151 is configured to adjust the distance between the baffle 22 and the sliced ​​solar cell in the carrier body 21.

[0092] This application sets up a baffle pressure rod 15, so that the pressing end 151 of the baffle pressure rod 15 acts on the baffle 22, applying pressure to the baffle 22, thereby making the baffle 22 adhere to the sliced ​​solar cell, thereby preventing process gas from being deposited around the light-receiving or back-light-receiving surface of the sliced ​​solar cell, which would have an adverse effect on the performance of the sliced ​​solar cell.

[0093] It is understood that the movable connection between the vehicle body 21 and the baffle 22 includes: rotational connection and detachable connection. The detachable connection includes: threaded connection, magnetic connection or snap-fit ​​connection. The rotational connection includes: hinge connection or rotating shaft connection.

[0094] In one alternative implementation, such as Figure 11 As shown, the baffle rod 15 includes:

[0095] The first baffle pressure rod section 152 is arranged on the bearing support 12 along the length direction of the bearing support 12.

[0096] Several second baffle pressure rod sections 153 are arranged in parallel. Each second baffle pressure rod section 153 is bent from the first baffle pressure rod section 152 toward the baffle 22. The second baffle pressure rod section 153 has a pressing end 151, which is an elastic body. The baffle pressure rod 15 is configured to move the baffle 22 closer to or away from the sliced ​​solar cell in the carrier body 21 with the elastic deformation of the elastic body.

[0097] When the elastomer is in a contracted state, the baffle rod 15 drives the baffle 22 to move toward the sliced ​​solar cell, so that the baffle 22 is close to the sliced ​​solar cell in the carrier body 21, which helps to reduce the coating. When the elastomer is in an extended state, the baffle rod 15 drives the baffle 22 to move away from the sliced ​​solar cell, so that the baffle 22 is away from the sliced ​​solar cell in the carrier body 21, which helps to remove the sliced ​​solar cell from the carrier body 21.

[0098] In another alternative implementation, such as Figure 12 and Figure 13As shown, the baffle pressure rod 15 also includes several third baffle pressure rod segments 154 and a fourth baffle pressure rod segment 155 connected to the first baffle pressure rod segment 152. Since the height of the fourth baffle pressure rod segment 155 is equal to that of the first baffle pressure rod segment 152 and greater than that of the second baffle pressure rod segment 153, and the third baffle pressure rod segments 154 connect the second baffle pressure rod segment 153 and the fourth baffle pressure rod segment 155 together, the pressing end 151 of the second baffle pressure rod segment 153 acts closer to the middle of the baffle 22. This arrangement results in a higher uniformity of force distribution on the baffle 22, which helps reduce the difficulty of moving the baffle 22.

[0099] The elastomer can be a spring structure or a rubber structure. Preferably, when a spring structure is used, the spring has high sensitivity to deformation, good control precision, and more flexible operation, thereby allowing the baffle to be closer to the sliced ​​solar cell and reducing the need for plating.

[0100] Further, see the return Figure 1 The passivation device 100 also includes a connecting plate 16, which connects the first baffle pressure rod section 152 to the first thermocouple section 1321.

[0101] This application, by setting a connecting plate 16, enables the movement of the first baffle pressure rod section 152 and the first thermocouple section 1321 to be synchronized. With one operation, the detection end 131 can be brought close to the carrier 200 and the second baffle pressure rod section 153 can be abutted against the baffle 22, making the operation more convenient and improving the production efficiency.

[0102] Furthermore, the support bracket 12 includes a bracket base plate, a bracket side plate 122 connected to the bracket base plate, and a plurality of partition plates 123. The bracket base plate and the bracket side plate 122 enclose a cavity with an opening on one side. The plurality of partition plates 123 divide the cavity into a plurality of receiving cavities 121. The first baffle pressure rod section 152 is disposed on the bracket side plate 122.

[0103] The support bracket 12 also includes a locking structure 124 disposed on the bracket side plate 122, the locking structure 124 being configured to fix the position of the first baffle pressure rod section 152 relative to the bracket side plate 122.

[0104] Furthermore, the number of support brackets 12 is greater than or equal to 1. When the number of support brackets 12 is greater than 1, they are along the height direction of the support bracket 12 (see...). Figure 3 The Z-direction stacking arrangement is shown in the image. To more clearly illustrate the scheme of this application, taking two support brackets 12 as an example, please refer to the previous section. Figure 3The support bracket 12 includes a first support bracket 12a and a second support bracket 12b stacked along the height direction of the support bracket 12. In an optional embodiment, the first support bracket 12a and the second support bracket 12b can be connected by a concave-convex joint, that is, one of the first support bracket 12a and the second support bracket 12b is provided with a protruding part and the other is provided with a concave part. Therefore, when they are stacked, the first support bracket 12a and the second support bracket 12b are stacked by inserting the protruding part into the concave part. When the connection is made in this way, the connection method is simple and the connection stability is high.

[0105] When locked, the second baffle pressure rod section 153 can be stably in contact for a long time, which promotes the tightness of the baffle 22 and the sliced ​​solar cell, avoids deflection, helps to improve the performance of the sliced ​​solar cell, and fixes the distance between the detection end 131 and the carrier 200, thereby making the detection more accurate.

[0106] Additionally, see the return Figure 10 The vehicle body 200 includes: a vehicle floor plate 211, a vehicle top plate 212, a first side plate 213 and a second side plate 214 disposed opposite to each other, and a third side plate disposed opposite to the baffle 22; the first side plate 213 and the second side plate 214 are connected between the vehicle floor plate 211 and the vehicle top plate 212, and the third side plate and the baffle 22 have gaps between them and the vehicle top plate 212 respectively;

[0107] The cut surface of the sliced ​​solar cell is positioned facing the top plate 212 of the carrier. The top plate 212 of the carrier has several holes that penetrate through the thickness direction of the top plate 212. The holes are evenly distributed on the top plate 212 of the carrier.

[0108] The presence of gaps in this application allows process gas to enter the carrier 200, which helps to deposit a passivation layer on the cut surface. Furthermore, by further setting holes in the top plate, the gas entry channels are increased, making the gas entry more uniform and ensuring the deposition effect of the passivation layer.

[0109] Furthermore, the number of holes is 6 to 20; and / or, the diameter of any hole is 0.8 mm to 1.2 mm.

[0110] By limiting the above parameters, the uniformity of process gas entry is further ensured, thus guaranteeing the effectiveness of passivation layer deposition.

[0111] Furthermore, such as Figure 14As shown, a first gasket 215 is provided on the part of the connection between the top plate 212 of the carrier and the first side plate 213. The first gasket 215 is configured to create a first gap 216 between the top plate 212 of the carrier and the first side plate 213. The first gap 216 is configured to allow process gas to pass through.

[0112] A second gasket is provided on the portion of the connection between the top plate 212 of the carrier and the second side plate 214. The second gasket is configured to create a second gap between the top plate 212 of the carrier and the second side plate 214, and the second gap is configured to allow process gas to pass through.

[0113] This application further increases the entry channels for process gas by further setting the first gap 216 and the second gap, thus ensuring the deposition effect of the passivation layer.

[0114] Furthermore, the number of first gaskets 215 is 3 to 4; and / or the number of second gaskets is 3 to 4; and / or the thickness of the first gasket 215 is 0.05 mm to 0.25 mm; and / or the thickness of the second gasket is 0.05 mm to 0.25 mm.

[0115] By setting the above parameters, it is easier for process gases to enter, thereby further improving the deposition effect of the passivation layer.

[0116] Further, see the return Figure 1 The passivation equipment 100 also includes a boat support plate 177, which is disposed below the support bracket 12 and fixedly connected to the furnace door 11. By setting the boat support plate 177, this application provides better support for the support bracket 12, making the support bracket 12 more stable and preventing it from flipping during the transport process, which could lead to the breakage of the sliced ​​solar cells.

[0117] Furthermore, the passivation equipment 100 also includes a flow equalization plate 18, which is disposed between the furnace door 11 and the support bracket 12, and is spaced apart from both the furnace door 11 and the support bracket 12. The flow equalization plate 18 has slits penetrating its thickness direction, and these slits are configured to allow process gas to pass through. By providing slits in the flow equalization plate 18, the direction and content of the process gas entering are controlled, thereby helping to further improve the deposition effect of the passivation layer.

[0118] The working process of the passivation device according to the embodiments of this application is described below:

[0119] Step 1: Pull the temperature detector and the baffle plate away from the furnace door (for example, about 20mm away) so that the elastomer and elastic structure are in a stretched state, the locking structure is in an unlocked state, and the distance between the detection end of the temperature detector and the pressing end of the baffle plate and the carrier is increased, so that the carrier is taken out from the receiving cavity.

[0120] Step 2: Open the baffle of the carrier, put the sliced ​​solar cell into the carrier body, and make the cut surface of the sliced ​​solar cell face the top plate of the carrier.

[0121] Step 3: After placing the sliced ​​solar cell, use the baffle to cover the opening of the vehicle body;

[0122] Step 4: Place the vehicle into the receiving cavity;

[0123] Step 5: Pull the temperature detector and the baffle plate toward the direction of the furnace door, so that the elastomer and elastic structure are in a contracted state and the locking structure is in a locked state, and the distance between the detection end of the temperature detector and the carrier is reduced, and the baffle rod abuts against the baffle so that the detection end can accurately detect the temperature of the carrier. The baffle is attached to the sliced ​​solar cell.

[0124] Step 6: Insert the support bracket into the interior of the equipment body, so that the furnace door 11 is closed relative to the equipment body, and deposit a passivation layer on the cut surface of the sliced ​​solar cell.

[0125] The passivation device disclosed in the embodiments of this application has been described in detail above. Specific examples have been used to illustrate the principle and implementation of this application. The description of the above embodiments is only for the purpose of helping to understand the passivation device. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A passivation apparatus for edge passivation of sliced ​​solar cells, characterized in that, The passivation device includes: The main body of the equipment has a cavity inside; A furnace door, configured to be closed or open relative to the main body of the equipment; A support bracket is movably disposed within the cavity. The support bracket has a plurality of receiving cavities configured to receive carriers, which are configured to hold the sliced ​​solar cells. A temperature detector is mounted on the support bracket through the furnace door, with the detection end of the temperature detector facing the receiving cavity and configured to be close to or in contact with the carrier located in the receiving cavity.

2. The passivation apparatus according to claim 1, characterized in that, The temperature detector is a thermocouple, and the thermocouple includes: The first thermocouple segment passes through the furnace door and is disposed on the support bracket along the length direction of the support bracket; A plurality of second thermocouple segments are arranged in parallel, each of the second thermocouple segments being bent from the first thermocouple segment toward the receiving cavity, and the second thermocouple segment having the detection end.

3. The passivation apparatus according to claim 2, characterized in that, The number of the receiving cavities corresponds to the number of the second thermocouple segments, and the detection end of any second thermocouple segment is configured to detect the temperature of the carrier in any of the receiving cavities.

4. The passivation apparatus according to claim 2, characterized in that, The thermocouple further includes: a plurality of third thermocouple segments and a fourth thermocouple segment connected to the first thermocouple segment, the fourth thermocouple segment having the same height as the first thermocouple segment and being higher than the second thermocouple segment, the third thermocouple segments being connected between the second thermocouple segment and the fourth thermocouple segment, and the detection end of the second thermocouple segment being configured to correspond to the middle of the vehicle.

5. The passivation apparatus according to claim 2, characterized in that, The thermocouple includes a thermocouple wire, an insulating sleeve fitted on the outer surface of the thermocouple wire, and a thermocouple sheath fitted on the outer surface of the insulating sleeve.

6. The passivation apparatus according to claim 1, characterized in that, The passivation device further includes an elastic structure, one end of which abuts against the outer surface of the furnace door away from the support bracket, and the other end of which is elastically connected to the temperature detector located outside the furnace door. The temperature detector is configured to move the detection end closer to or further away from the carrier in the receiving cavity as the elastic structure deforms. And / or, When the detection end is configured close to the carrier in the receiving cavity, the distance between the detection end and the carrier in the receiving cavity is 4mm to 6mm; and / or, The passivation device further includes a control unit electrically connected to the temperature detector, the control unit being used to control the temperature of the carrier in any of the receiving cavities.

7. The passivation apparatus according to claim 1, characterized in that, The vehicle includes a vehicle body and a baffle movably connected to the vehicle body, the vehicle body being configured to hold the sliced ​​solar cell; The passivation device further includes a baffle rod, which is disposed on the support bracket. The pressing end of the baffle rod abuts against the baffle, and the pressing end is configured to adjust the distance between the baffle and the sliced ​​solar cell in the carrier body.

8. The passivation apparatus according to claim 7, characterized in that, The baffle pressure rod includes: The first baffle pressure rod section is disposed on the bearing bracket along the length direction of the bearing bracket; A plurality of second baffle pressure rod segments are arranged in parallel. Each second baffle pressure rod segment is bent from the first baffle pressure rod segment toward the baffle. The second baffle pressure rod segment has the extrusion end, which is an elastic body. The baffle pressure rod is configured to move the baffle closer to or away from the sliced ​​solar cell in the carrier body with the elastic deformation of the elastic body.

9. The passivation apparatus according to claim 8, characterized in that, The temperature detector includes a first thermocouple segment and several second thermocouple segments connected in parallel; The passivation device further includes a connecting plate that connects the first baffle pressure rod section to the first thermocouple section.

10. The passivation apparatus according to claim 9, characterized in that, The support bracket includes a support base plate, a support side plate connected to the support base plate, and a plurality of partition plates. The support base plate and the support side plate enclose a cavity with an opening on one side. The plurality of partition plates divide the cavity into a plurality of receiving cavities. The first baffle pressure rod section is disposed on the support side plate. The support bracket further includes a locking structure disposed on the side plate of the bracket, the locking structure being configured to fix the position of the first baffle pressure rod section relative to the side plate of the bracket.

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