Epitaxial graphite base

Abstract

The utility model relates to the technical field of epitaxial growth, in particular to an epitaxial graphite base which comprises a base body, a carrying table main body and a taking and placing assembly, the base body is connected with the carrying platform main body, the carrying platform main body is provided with a bottom surface and is connected with a step, and the carrying platform main body is connected with the temperature control boss; the temperature control boss and the carrying table body are different in height, so that the temperature control boss and the carrying table body are spaced to form a concave part, the concave part is connected with a filling piece, the filling piece is connected to the carrying table body and provided with a through hole, and the temperature control boss penetrates through the through hole; the taking and placing assembly is connected to the periphery of the base body. According to the utility model, the filling sheet is arranged on the carrying platform main body, the filling sheet is provided with the plurality of through holes, and the plurality of through holes are connected with the plurality of temperature control bosses, so that the plurality of temperature control bosses and the concave part of the carrying platform main body are filled with the filling sheet, the wavelength of the epitaxial wafer in a certain area is prevented from being abnormal in use, the uniformity of the wavelength of the whole epitaxial wafer is prevented from being influenced, and the service life of the epitaxial wafer is prolonged. And the practicability of the epitaxial graphite base is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of epitaxial growth, especially to an epitaxial graphite pedestal. BACKGROUND

[0002] The epitaxial graphite pedestal is a pedestal capable of providing a high-quality crystal growth platform, which is prepared by a chemical vapor deposition method under thermodynamic equilibrium of graphite sheets. Due to its high crystallinity, low defect degree, and relatively flat surface, the epitaxial graphite pedestal is widely used in the fields of semiconductors, optoelectronics, nanotechnology, etc.

[0003] A Chinese patent with publication number CN217418861U discloses an epitaxial graphite pedestal, which includes a pedestal body and multiple stages. The stage includes multiple temperature control bosses arranged in the stage and multiple stage steps arranged at the edge of the stage. The stage has a bottom surface. The multiple stage steps are used to place a substrate. The space between the surface of the substrate facing the stage and the bottom surface is a temperature insulation cavity. In the vertical direction, the heights of the multiple temperature control bosses arranged in the stage are different, so that the temperature insulation cavity between the surface of the substrate facing the stage and the bottom surface becomes an irregular temperature insulation cavity. The epitaxial graphite pedestal provided by the present application has multiple temperature control bosses arranged in the stage. The heights of the multiple temperature control bosses arranged in the stage are different, so that the irregular temperature insulation cavity of different shapes is formed between the substrate and the bottom surface to affect the temperature between the corresponding area substrate and the graphite pedestal. The wavelength abnormality of the epitaxial wafer in a certain area is avoided, and the uniformity of the entire epitaxial wafer wavelength is improved.

[0004] The existing epitaxial graphite pedestal has multiple temperature control bosses arranged on the stage, and the multiple temperature control bosses and the stage form a recess. When the substrate is taken out or placed down, the temperature control bosses are not stable, which causes the wavelength of the epitaxial wafer in a certain area to be abnormal during use, affects the uniformity of the entire epitaxial wafer wavelength, and reduces the practicality of the epitaxial graphite pedestal. UTILITY MODEL CONTENTS

[0005] In view of the problems in the background art, an epitaxial graphite pedestal is proposed.

[0006] The utility model discloses an epitaxial graphite pedestal, which includes a pedestal body, a stage body, and a taking and placing assembly.

[0007] The pedestal body is provided with a stage exhaust hole, and the upper end of the stage exhaust hole extends below the stage body.

[0008] The base body is connected with the base body, and the base body has a bottom surface and is connected with a step, and the base body is connected with the temperature control boss; the temperature control boss and the base body are different in height, so that the space between the temperature control boss and the base body forms a recess, and the recess is connected with the filling piece; the filling piece is connected with the base body and is provided with a through hole, and the through hole is used for penetrating the temperature control boss;

[0009] The taking and placing assembly is connected to the periphery of the base body.

[0010] Preferably, the temperature control boss and the through hole are provided in the same number, so that the inner edge of the through hole is wrapped around the outer edge of the temperature control boss; and the filling piece is smaller than the height of the base body and the temperature control boss.

[0011] Preferably, the base body is connected with two edge covering bodies at the periphery, and the connecting ends of the two edge covering bodies are provided with grooves.

[0012] Preferably, the taking and placing assembly comprises L-shaped frames a and b connected to the periphery of the base body.

[0013] The L-shaped frame a is connected with a plug rod a and a connecting rod.

[0014] The L-shaped frame b is hollow inside, one end of which is provided with an opening and is connected with a plug rod b.

[0015] The connecting rod is connected inside the L-shaped frame b through the opening, and is used for adjusting the space between the L-shaped frame a and the L-shaped frame b.

[0016] Preferably, the plug rod a and the plug rod b are adjustably connected in the grooves and are detachably connected.

[0017] Preferably, the L-shaped frame b is provided with a mounting hole, and a bolt is threadedly connected with the mounting hole; the bolt is rotated to penetrate the mounting hole and is connected with the connecting rod, and is used for adjusting the length of the connecting rod.

[0018] Compared with the prior art, the present application has the following beneficial technical effects:

[0019] The filling piece is arranged on the base body, and the filling piece is provided with a plurality of through holes, the through holes are connected with the plurality of temperature control bosses, the filling piece fills the plurality of temperature control bosses and the recess of the base body, the recess part in the base body is conveniently filled, the connection structure of the temperature control boss and the base body is increased, the connection stability of the temperature control boss and the base body is conveniently improved, the abnormal wavelength of the epitaxial wafer in a certain area during use is avoided, the uniformity of the wavelength of the entire epitaxial wafer is avoided from being affected, the practicality of the epitaxial graphite base is improved, and then the taking and placing assembly is arranged, so that the epitaxial graphite base is conveniently taken and placed, the structure is simple, and the operation is convenient; and then the base exhaust hole is arranged, so that the residual heat of the epitaxial graphite base is conveniently discharged, and the use of the epitaxial graphite base is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1The whole structure schematic view of the utility model;

[0021] Figure 2 The base body structure schematic view of the utility model;

[0022] Figure 3 The epitaxial assembly structure schematic view of the utility model;

[0023] Figure 4 The taking and placing assembly structure schematic view of the utility model.

[0024] The figure mark: 1, base body; 101, platform exhaust hole; 102, edge covering body; 2, platform main body; 201, bottom surface; 202, step; 203, temperature control boss; 204, filling piece; 3, taking and placing assembly; 301, L bracket a; 302, L bracket b; 303, insertion rod a; 304, connecting rod; 305, insertion rod b. Specific implementation

[0025] The specific implementation of the present disclosure is described in detail below in conjunction with the drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0026] Example one

[0027] As Figure 1 - Figure 4As shown, the utility model provides an epitaxial graphite base, include: base body 1, stage main part 2 and take and put subassembly 3, stage main part 2 is connected on base body 1, and stage main part 2 has a bottom surface 201 and is connected with step 202, stage main part 2 connects temperature control boss 203, temperature control boss 203 and stage main part 2 height are different, make temperature control boss 203 and stage main part 2 spacing constitute recessed part, recessed part connects filling piece 204, filling piece 204 is connected on stage main part 2, and is provided with through -hole, and through -hole is used for temperature control boss 203 to penetrate, take and put subassembly 3, connect in the periphery of base body 1. Temperature control boss 203 sets up multiple even and stage main part 2 connection, stage main part 2 sets up multiple connection on base body 1, make base body 1 according to stage main part 2 number setting contains groove, facilitate epitaxial graphite base component cooperation use, conveniently improve epitaxial graphite base practicality, the space between stage main part 2 and bottom surface 201 is set as temperature insulation cavity, and the bottom surface 201 in stage main part 2 is passed through setting multiple temperature control boss 203, the height of multiple temperature control boss 203 is all less than stage main part 2 height, and the height of multiple temperature control boss 203 on bottom surface 201 is all different, so that the temperature insulation cavity formed between substrate and bottom surface 201 becomes irregular temperature insulation cavity, when the heat on the substrate conducted by the stage step 202 enters the cavity, the heat imported by different areas inside the cavity is not the same, so that the irregular temperature insulation cavity can have the effect of adjusting the temperature of different areas of the cavity. By changing the height of the multiple temperature control boss 203 arranged on the bottom surface 201, irregular temperature insulation cavities of different shapes can be formed to affect the temperature between the corresponding area substrate and the epitaxial graphite base.

[0028] Further, the number of temperature control bosses 203 and through holes is the same, so that the inner edge of the through hole wraps around the outer edge of the temperature control boss 203; the filling piece 204 is smaller than the height of the stage main part 2 and the temperature control boss 203. By uniformly arranging multiple temperature control bosses 203, the temperature control boss 203 and the stage main part 2 are uniformly spaced to form a recessed part, and the height of the stage main part 2 is greater than that of the temperature control boss 203, so that the connection between the temperature control boss 203 and the stage main part 2 is unstable, and then the filling piece 204 is filled. The filling piece 204 is made of the same material as the stage main part 2, which facilitates stable connection of the temperature control boss 203 and the stage main part 2, avoids abnormal wavelength of epitaxial wafer in some areas during use, and improves the uniformity of the entire epitaxial wafer wavelength, improving the use of epitaxial graphite base.

[0029] Further illustrate, the base body 1 is provided with a loading table exhaust hole 101, the upper end of the loading table exhaust hole 101 extends to the lower of the loading table body 2, the base body 1 is connected with two edge cover bodies 102, and the connecting end of the two edge cover bodies 102 is provided with a groove. After the epitaxial graphite base works, the epitaxial graphite base is taken and placed by the taking and placing assembly 3, a plurality of loading table exhaust holes 101 are arranged, two are a group and are connected with the loading table body 2, so that the loading table exhaust hole 101 assists the residual temperature discharge of the loading table body 2, improves the secondary use efficiency, and improves the use performance of the epitaxial graphite base.

[0030] Example two

[0031] As Figure 1 and Figure 4 indicated, the epitaxial graphite base discloses a kind of epitaxial graphite base, on the basis of above-mentioned embodiment, the specific component of the taking and placing assembly 3 is also detailedly recorded in this embodiment, and cooperation mode.

[0032] Further illustrate, the taking and placing assembly 3 includes L bracket a 301 and L bracket b 302 connected in the periphery of base body 1, L bracket a 301 is connected with inserting rod a 303 and connecting connecting rod 304, L bracket b 302 is hollow inside, one end is provided with open mouth and is connected with inserting rod b 305, connecting rod 304 is connected in the inside of L bracket b 302 through open mouth, for adjusting the interval between L bracket a 301 and L bracket b 302. Through the taking and placing assembly 3, it is convenient to assist operator to operate epitaxial graphite base working state;L bracket a 301 and L bracket b 302 are connected by connecting rod 304 and the interval is adjusted by connecting rod 304, and the interval is adjusted to be connected with the groove of edge cover body 102, so as to be connected with base body 1, and then by adjusting, it is convenient to disassemble with base body 1, and it is convenient to increase the use effect of epitaxial graphite base.

[0033] Further illustrate, inserting rod a 303 and inserting rod b 305 are connected in the groove by adjusting and can be detachably connected. According to the use demand of epitaxial graphite base, inserting rod a 303 and inserting rod b 305 are inserted into the groove, then cooperate with L bracket a 301, L bracket b 302 and connecting rod 304, so as to operate to take or put down epitaxial graphite base, simple operation, convenient to use.

[0034] Further illustrate, L bracket b 302 is provided with mounting hole, and the mounting hole is screw-threaded connected with bolt;Bolt is rotated and penetrates mounting hole and is connected with connecting rod 304, for adjusting the applicable length of connecting rod 304. After adjusting the applicable length of connecting rod 304, bolt is penetrated in mounting hole, so that one end is connected with connecting rod 304 and is tightened, so as to be connected in the inside of L bracket b 302 through open mouth.

[0035] The working principle of the utility model is as follows: through connecting the filling piece 204 on the carrier main body 2, the filling piece 204 is provided with through holes, the number of through holes is consistent with the number of temperature control bosses 203, the through holes penetrate the temperature control bosses 203, the filling piece 204 is connected with the recessed part, the carrier main body 2 and the temperature control boss 203 are connected and filled, the inner edge of the through hole is wrapped around the lower outer wall of the temperature control boss 203, the connection stability of the temperature control boss 203 and the bottom surface 201 of the carrier main body 2 is improved, the normality of the epitaxial wafer wavelength is improved, and the uniformity of the epitaxial wafer wavelength is improved; after the epitaxial graphite base is used, first, the connecting rod 304 is telescoped into the L frame b 302, the connecting rod 304 drives the L frame a 301, then the L frame a 301 and the L frame b 302 are connected with the groove of the edge covering body 102 through the inserting rod a 303 and the inserting rod b 305, the edge covering body 102 is arranged on the periphery of the base body 1, the inserting rod a 303 and the inserting rod b 305 are inserted into the recessed penetration, the L frame a 301 and the L frame b 302 are adjusted in length through the connecting rod 304, after adjustment, the bolt is penetrated into the mounting hole and is screwed on the connecting rod 304, the holding and placing assembly 3 is connected on the periphery of the base body 1, and the epitaxial graphite base is conveniently held or placed by the auxiliary worker; through connecting the carrier exhaust hole 101 on the base body 1, after the epitaxial graphite base is used, the whole epitaxial graphite base can be placed on the support, so that it is suspended, and then the excess temperature is discharged through the carrier exhaust hole 101, in the secondary use state, the epitaxial graphite base is conveniently heated as a whole, the temperature difference between the graphite base regions is avoided, the epitaxial wafer wavelength use of the region is further improved, and the uniformity of the epitaxial wafer wavelength is improved.

[0036] The embodiments of the utility model are described in detail above in combination with the drawings, but the utility model is not limited to this, various changes can be made within the knowledge range of the person skilled in the art without departing from the purpose of the utility model.

Claims

1. An epitaxial graphite base, characterized by, The utility model relates to a temperature control platform, including: Base body (1), base body (1) is provided with the stage exhaust hole (101), and the stage exhaust hole (101) upper end extends to the stage body (2) below; The stage body (2) is connected on base body (1), and the stage body (2) has a bottom surface (201) and is connected with the step (202), and the stage body (2) is connected with temperature control boss (203), temperature control boss (203) and the stage body (2) height are different, make temperature control boss (203) and the stage body (2) spacing constitute recess, and the recess is connected with filling sheet (204), and the filling sheet (204) is connected on the stage body (2), and is provided with through -hole, and the through -hole is used for temperature control boss (203) to penetrate; And take and put subassembly (3) is connected on the periphery of base body (1).

2. An epitaxial graphite base according to claim 1, wherein Temperature control boss (203) and the through -hole set same number, make the through -hole inner edge to be wrapped in temperature control boss (203) outer edge, and filling sheet (204) is less than the stage body (2) and temperature control boss (203) height.

3. An epitaxial graphite base according to claim 2, wherein The periphery of base body (1) is connected with two edge cover bodies (102), and the connecting end of two edge cover bodies (102) is provided with recess.

4. An epitaxial graphite base according to claim 1 or 3, wherein Take and put subassembly (3) includes L frame a (301) and L frame b (302) connected on the periphery of base body (1); L frame a (301) is connected with plug rod a (303) and is connected with connecting rod (304); L frame b (302) is hollow inside, and one end is provided with open mouth and is connected with plug rod b (305); Connecting rod (304) is connected in the inside of L frame b (302) through open mouth and is used for adjusting the spacing between L frame a (301) and L frame b (302).

5. An epitaxial graphite base according to claim 4, wherein Plug rod a (303) and plug rod b (305) are connected in recess through adjustment and can be detachably connected.

6. An epitaxial graphite base according to claim 5, wherein L frame b (302) is provided with mounting hole, and the mounting hole is screw -threaded connection bolt;Bolt rotation penetrates mounting hole and is connected with connecting rod (304), and is used for adjusting the length of connecting rod (304) suitable.

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