Temperature control equipment

Abstract

The embodiment of the utility model provides temperature control equipment, which relates to the technical field of temperature control and comprises a refrigerating system. The refrigerating system comprises a waste heat flow path and at least one refrigerating flow path, and the waste heat flow path and the at least one refrigerating flow path are both connected with a refrigerant source. On the basis, each refrigerating flow path comprises a heat exchange branch and a bypass branch, and each heat exchange branch is provided with a first flow valve and a first heat exchanger which are sequentially connected. One end of the bypass branch is connected between the first flow valve and the first heat exchanger, and the other end of the bypass branch is connected with the waste heat flow path and connected to the upstream of the second heat exchanger. On the basis of the bypass branch, the refrigerant in the heat exchange branch is partially shunted into the waste heat flow path, so that the flow of the refrigerant, used for heat exchange, of the heat exchange branch is accurately controlled, and the effect of recycling the flow of the redundant refrigerant through the waste heat flow path is achieved; therefore, the beneficial effects of fully utilizing the energy, accurately controlling the temperature and improving the overall efficiency are achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to temperature control technical field, specifically, a kind of temperature control equipment. BACKGROUND

[0002] In prior art, semiconductor temperature control equipment is used to provide stable temperature output for semiconductor integrated circuit etching process equipment, to ensure the accurate manufacturing of integrated circuit, is one of important equipment in semiconductor industry upstream support link.

[0003] However, the present temperature control equipment faces the challenge of temperature zone control diversification and large temperature fluctuation, resulting in low energy utilization rate, unstable temperature control precision and low overall efficiency, etc. SUMMARY

[0004] The utility model embodiment provides a kind of temperature control equipment, including refrigeration system. Among them, refrigeration system includes waste heat flow path and at least one refrigeration flow path, and waste heat flow path and at least one refrigeration flow path are connected with refrigerant source. On the basis described above, each refrigeration flow path includes heat exchange branch and bypass branch, and heat exchange branch is equipped with the first flow valve and the first heat exchanger connected in sequence. One end of bypass branch is connected with heat exchange branch and is connected between the first flow valve and the first heat exchanger, and the other end of bypass branch is connected with waste heat flow path and is connected to the upstream of second heat exchanger.

[0005] According to the temperature control equipment of the utility model embodiment, based on the above bypass branch, part of refrigerant in heat exchange branch is shunted into waste heat flow path, so that both the refrigerant flow rate of heat exchange branch for heat exchange is accurately controlled, and the effect of recycling excess refrigerant flow rate by waste heat flow path is realized, so that the beneficial effects of fully utilizing energy, accurately controlling temperature and improving overall efficiency are achieved. BRIEF DESCRIPTION OF DRAWINGS

[0006] In order to more clearly illustrate the technical scheme of the utility model embodiment, the following will be briefly introduced to the drawings needed to be used in the embodiment, it should be understood that the following drawings only show some embodiments of the utility model, therefore should not be regarded as the limitation to the scope, for ordinary skilled person in the art, under the premise of not paying creative labor, other related drawings can also be obtained according to these drawings.

[0007] Figure 1 The structure diagram of the temperature control equipment provided in the embodiment is shown in the figure;

[0008] Figure 2 The structure diagram of the temperature control equipment provided in the embodiment is shown in the figure;

[0009] Figure 3A structure schematic view of the temperature control device provided with the circulation system is provided for the embodiment;

[0010] Figure 4 A structure schematic view of the temperature control device provided with the circulation system is provided for the embodiment;

[0011] Icon: 10-temperature control device;100-refrigeration system;110-waste heat flow path;111-second flow valve;113-second heat exchanger;1131-second heat release path;1133-second heat absorption path;120-mixing pipeline;121-second temperature sensor;130-refrigeration flow path;131-heat exchange branch;1311-first flow valve;1313-first heat exchanger;13131-first heat release path;13133-first heat absorption path;13135-first temperature sensor;133-bypass branch;1331-first expansion valve;300-circulation system;310-circulation flow path;311-load;312-fourth temperature sensor;313-circulation water tank;314-circulation pump;315-heat exchange device;316-third temperature sensor;317-second expansion valve. DETAILED DESCRIPTION

[0012] In the related art, the temperature control device faces the challenges of diversified temperature zone control and large temperature fluctuation, and has the problems of low energy utilization rate, inaccurate temperature control and low overall efficiency.

[0013] To solve the above problems, the utility model provides a kind of temperature control equipment 10, refrigeration flow path 130 in it can be made into bypass branch 133, so that the refrigerant in heat exchange branch 131 part diversion is made into waste heat flow path 110, to realize both accurate control heat exchange branch 131 for the refrigerant flow used for heat exchange, it is also realized to utilize waste heat flow path 110 recycling excess refrigerant flow effect, to reach the beneficial effects of full use of energy, accurate temperature control and improve overall efficiency.

[0014] To make the purpose, technical scheme and advantage of the embodiment of the utility model more clear, the technical scheme in the embodiment of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiment of the utility model, obviously, the described embodiment is a part of the embodiment of the utility model, instead of all the embodiments. The components of the embodiment of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0015] Therefore, the following detailed description of the embodiments of the application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the application.

[0016] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0017] In the description of the application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the product of the application when it is usually placed, only for the convenience of describing the application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the application.

[0018] In addition, if the terms "first", "second" and the like appear, they are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0019] It should be noted that the features in the embodiments of the application can be combined with each other without conflict.

[0020] The overall structure, working principle and technical effects of the temperature control equipment 10 provided by the application will be described in detail below through embodiments and in conjunction with the drawings. Please refer to Figure 1 The embodiment of the application provides the temperature control equipment 10, which is applied to the temperature control technical field and comprises a refrigeration system 100.

[0021] Among them, the refrigeration system 100 comprises a waste heat flow path 110 and at least one refrigeration flow path 130, and the waste heat flow path 110 and the at least one refrigeration flow path 130 are connected with a refrigerant source. That is to say, the inlets of the waste heat flow path 110 and the at least one refrigeration flow path 130 are in communication with the outlet of the refrigerant source, and the refrigerant can flow to the waste heat flow path 110 and the refrigeration flow path 130 at the same time. The waste heat flow path 110 and the at least one refrigeration flow path 130 are arranged in parallel, and can independently perform refrigeration or heating work.

[0022] On the basis of the above, each refrigeration flow path 130 includes a heat exchange branch 131 and a bypass branch 133, and the heat exchange branch 131 is provided with a first flow valve 1311 and a first heat exchanger 1313 connected in sequence. Correspondingly, the waste heat flow path 110 is provided with a second heat exchanger 113. It should be noted that the first heat exchanger 1313 and the second heat exchanger 113 are both used for heat exchange, and the refrigerant flow through the first heat exchanger 1313 or the second heat exchanger 113 is the heat exchange amount corresponding to the first heat exchanger 1313 or the second heat exchanger 113. The refrigerant flowing through the first heat exchanger 1313 and the second heat exchanger 113 can exchange heat with other media to achieve refrigeration or heating effect. By controlling the refrigerant flow through the first heat exchanger 1313 and the second heat exchanger 113, the heat exchange effect can be controlled to meet different temperature control requirements.

[0023] One end of the bypass branch 133 is connected to the heat exchange branch 131 and connected between the first flow valve 1311 and the first heat exchanger 1313, and the other end of the bypass branch 133 is connected to the waste heat flow path 110 and connected to the upstream of the second heat exchanger 113. Based on the above bypass branch 133, the refrigerant in the heat exchange branch 131 is partially diverted into the waste heat flow path 110, thereby achieving both precise control of the refrigerant flow in the heat exchange branch 131 for heat exchange and recycling of excess refrigerant flow using the waste heat flow path 110, thereby achieving the beneficial effects of fully utilizing energy, precise temperature control, and improving overall efficiency.

[0024] In addition, it should also be noted that the above-mentioned refrigerant source can be PCW (process cooling water). That is, in actual application scenarios, the temperature control device 10 can be directly communicated with a plant water device. Therefore, when the temperature control device 10 provided in the present application is used to control the temperature in the medium temperature zone, the beneficial effects of saving complex refrigeration components and reducing energy consumption are achieved; when used to control the temperature in the low temperature zone, the beneficial effect of pre-cooling is achieved. Of course, it can be understood that the above-mentioned refrigerant source can also be other refrigerant sources as long as heat exchange temperature control can be achieved.

[0025] In some embodiments, as shown in Figure 2 As shown in some embodiments, the refrigeration flow path 130 is multiple, and the multiple refrigeration flow paths 130 are arranged in parallel with each other and also in parallel with the waste heat flow path 110. It is easy to understand that by arranging multiple refrigeration flow paths 130, multi-stage heat exchange can be achieved. Specifically, the opening degree of the first flow valve 1311 in each refrigeration flow path 130 can be adjusted according to actual needs, so that the refrigerant flow into the refrigeration flow path 130 can be adjusted, thereby adapting to different temperature control requirements and improving the overall heat exchange efficiency of the temperature control device 10. Moreover, the other end of the bypass branch 133 of each refrigeration flow path 130 is connected to the upstream of the second heat exchanger 113, so that the waste heat flow path 110 can recycle all the diverted refrigerant.

[0026] As shown in Figure 3 and Figure 4 The temperature control device 10 further comprises a circulation system 300, which comprises at least one circulation flow path 310. The circulation flow path 310 is connected to the at least one first heat exchanger 1313 to exchange heat with the refrigerant in the refrigeration flow path 130. Based on the above arrangement, the refrigerant in the heat exchange branch 131 and the circulating medium in the circulation flow path 310 exchange heat indirectly, so as to transfer heat more efficiently and achieve temperature control of the circulation flow path 310.

[0027] Specifically, in some examples, each circulation flow path 310 can be connected to one or more first heat exchangers 1313 to exchange heat with the refrigerant. When each circulation flow path 310 is connected to multiple first heat exchangers 1313, different temperature control of the circulation flow path 310 can be achieved by connecting different first heat exchangers 1313 to meet different temperature control requirements. It should be noted that the plurality of here refers to two or more, for example, each circulation flow path 310 can be connected to two, three or more first heat exchangers 1313 to achieve heat exchange refrigeration with different refrigeration flow paths 130.

[0028] In the case of multiple refrigeration flow paths 130, multiple circulation flow paths 310 are respectively connected to the first heat exchangers 1313 of the multiple refrigeration flow paths 130 in one-to-one correspondence. In this way, the multiple circulation flow paths 310 can be individually temperature controlled by the multiple refrigeration flow paths 130 to meet the temperature control requirements of the multiple circulation flow paths 310.

[0029] Further, the first heat exchanger 1313 comprises a first heat release passage 13131 and a first heat absorption passage 13133. It should be noted that the first heat release passage 13131 and the first heat absorption passage 13133 are arranged opposite to each other to exchange heat with each other. Moreover, the first heat release passage 13131 is in communication with the circulation flow path 310 and is responsible for releasing the heat of the circulating medium in the circulation flow path 310; the first heat absorption passage 13133 is in communication with the heat exchange branch 131 and is responsible for absorbing heat through the refrigerant in the heat exchange branch 131. Based on this, the heat exchange branch 131 and the circulation flow path 310 exchange heat.

[0030] On this basis, in order to accurately control the heat exchange amount in the heat exchange branch 131, the bypass branch 133 is provided with a first expansion valve 1331. It is easy to understand that by adjusting the opening degree of the first expansion valve 1331, the refrigerant flow in the first heat exchanger 1313 and the bypass branch 133 can be adjusted. Exemplarily, in the state that the first expansion valve 1331 is closed, the refrigerant from the refrigerant source flows entirely to the first heat exchanger 1313. In the state that the first expansion valve 1331 is half open, half of the refrigerant from the refrigerant source flows to the first heat exchanger 1313, and the other half flows through the bypass branch 133 to the waste heat flow path 110, and is used as the heat exchange amount of the second heat exchanger 113 together with the refrigerant from the refrigerant source entering the waste heat flow path 110.

[0031] Further, the first temperature sensor 13135 is arranged between the first heat release passage 13131 and the circulating flow path 310, and the first temperature sensor 13135 is in communication connection with the first expansion valve 1331. Based on the above arrangement, the first temperature sensor 13135 can monitor the temperature of the circulating medium in real time, and transmit the temperature data to the first expansion valve 1331 or to the control system. Then, according to the detected temperature data, the opening degree of the first expansion valve 1331 can be adjusted, so as to adjust the flow of refrigerant entering the first heat absorption passage 13133.

[0032] Based on the cooperation of the first temperature sensor 13135 and the first expansion valve 1331, the temperature control device provided by the present application can timely respond to the temperature change of the circulating medium and timely adjust the flow of refrigerant. Taking the first expansion valve 1331 provided by the present application as an electronic expansion valve, and forming a PID control according to the temperature value of the circulating medium obtained by the first temperature sensor 13135, the adjustment principle of the above cooperation is as follows:

[0033] The first temperature sensor 13135 obtains the current temperature measurement value PV1, reads the set value SV1, and calculates the net difference between the temperature measurement value PV1 and the set value SV1. Then, taking the net difference as the input value of the PID, the output value UK1 is obtained. Limit the PID output value Uk1 in the range of 0 to 100, if Uk1 is between 0 and 50, control the first expansion valve 1331 to increase the opening degree by k% every 5 milliseconds, if Uk1 is between 0 and 50, control the first expansion valve 1331 to increase the opening degree by k% every 5 milliseconds. Repeat the above steps to form a closed loop control system.

[0034] As Figure 3As shown, the circulation flow path 310 is provided with a load 311. Moreover, the inlet of the load 311 is in communication with the outlet of the first heat release passage 13131, and the outlet of the load 311 is in communication with the inlet of the first heat release passage 13131. It can be easily understood that the circulation medium can absorb heat to cool the load 311 when passing through the load 311, and then the circulation medium releases heat in the first heat release passage 13131, the temperature is lowered, and the circulation medium flows to the load 311 again to cool the load 311. Through the above-mentioned circulation process, the temperature of the load 311 can be effectively controlled to ensure that it is within a constant range, meeting various process requirements.

[0035] Optionally, the circulation flow path 310 is further provided with a second expansion valve 317 located between the first heat release passage 13131 and the inlet of the load 311, which can be an electronic expansion valve, for adjusting the circulation medium flow entering the inlet of the load 311 to further realize precise temperature control.

[0036] In order to facilitate the smooth operation of the above-mentioned circulation process, the circulation flow path 310 is further provided with a circulation pump 314, a circulation water tank 313 and a fourth temperature sensor 312. Among them, the circulation pump 314 can provide power for the circulation of the circulation medium, keep the circulation medium in the circulation flow path 310 stable circulation, maintain the parameters constant, thereby ensuring the stability and efficiency of production; the circulation water tank 313 as a storage and buffer device of the circulation medium can ensure that the flow and temperature of the circulation medium are more stable, and improve the heat exchange efficiency; the fourth temperature sensor 312 can display the temperature of the circulation medium at the outlet of the load 311, so as to facilitate observation and maintenance.

[0037] In order to further ensure that the temperature of the load 311 can be effectively controlled, the circulation flow path 310 is further provided with a heat exchange device 315 and a third temperature sensor 316. The heat exchange device 315 and the third temperature sensor 316 are arranged between the first heat release passage 13131 and the inlet of the load 311 to fine-tune the circulation medium entering the load 311. Moreover, the third temperature sensor 316 and the heat exchange device 315 are in communication connection.

[0038] Specifically, the third temperature sensor 316 can monitor the temperature of the circulation medium entering the load 311 in real time, and transmit the temperature data to the heat exchange device 315. And the heat exchange device 315 is used for heating or refrigerating the circulation medium, and accurately adjusts the heating power according to the feedback of the third temperature sensor 316, so as to ensure that the circulation medium entering the load 311 is always within the set range. It can be easily understood that the third temperature sensor 316 and the heat exchange device 315 also form a PID control. In some examples, the heat exchange device 315 can be a heater, which can realize heating of the circulation medium, and can meet the temperature control requirements of the load 311.

[0039] To fully recycle the branched refrigerant, in some embodiments, at least one circulation flow path 310 is connected to the second heat exchanger 113 to exchange heat with the second heat exchanger 113 for pre-cooling. That is, at least one or more circulation flow paths 310 are connected to the second heat exchanger 113, so that the circulation flow path 310 connected to the second heat exchanger 113 is connected to both the first heat exchanger 1313 and the second heat exchanger 113. In practice, the second heat exchanger 113 can be used to pre-cool the circulating medium, thereby reducing the temperature of the circulating medium before entering the load 311, thereby achieving pre-cooling; and the first heat exchanger 1313 is used to further adjust the temperature of the circulating medium to ensure that it meets the specific temperature requirements of the load 311.

[0040] In other embodiments, the circulation system 300 further includes a circulation waste heat flow path connected to the second heat exchanger 113 for heat exchange. It should be noted that the second heat exchanger 113 can transfer heat from the waste heat flow path 110 to the working medium in the circulation waste heat flow path by heat conduction, achieving the purposes of energy saving and environmental protection. For example, the circulation waste heat flow path can be connected to other devices that need temperature control to achieve refrigeration for other devices, thereby achieving waste heat reuse. In addition, it should be noted that the circulation waste heat flow path can also be provided as the circulation flow path 310 as described above, for temperature control of the load 311.

[0041] Please refer again to Figure 1 Similar to the first heat exchanger 1313 described above, the second heat exchanger 113 includes a second heat release passage 1131 and a second heat absorption passage 1133. Moreover, the waste heat flow path 110 is in communication with the second heat release passage 1131 or the second heat absorption passage 1133. Specifically, when the temperature of the waste heat flow path 110 is relatively high, the waste heat flow path 110 is in communication with the second heat release passage 1131, so that the heat of the refrigerant in the second heat release passage 1131 is released. In practical scenarios, the waste heat flow path 110 can be used to heat devices that freeze in winter. When the temperature of the waste heat flow path 110 is relatively low, the waste heat flow path 110 is in communication with the second heat absorption passage 1133, so that the refrigerant in the waste heat flow path 110 absorbs external heat to achieve refrigeration. In practical scenarios, the waste heat flow path 110 can be used to absorb heat from the circulation waste heat flow path with a relatively high temperature of the load 311.

[0042] To facilitate the staff to clearly understand the specific application scenarios of the waste heat flow path 110, the temperature control device 10 further includes a mixing pipeline 120, and the temperature control device 10 further includes a mixing pipeline 120. The mixing pipeline 120 is used to mix the refrigerant of at least one bypass branch 133 with the refrigerant of the waste heat flow path 110 and then flow to the second heat exchanger 113. In the case where the number of bypass branches 133 is one, as shown in Figure 1As shown, one bypass branch 133 mixes with the refrigerant in the waste heat flow path 110 and then flows to the second heat exchanger 113. In the case where the number of bypass branches 133 is multiple, as shown, multiple bypass branches 133 mix with the refrigerant in the waste heat flow path 110 and then flow to the second heat exchanger 113. Figure 3 As shown, one bypass branch 133 mixes with the refrigerant in the waste heat flow path 110 and then flows to the second heat exchanger 113. In the case where the number of bypass branches 133 is multiple, as shown, multiple bypass branches 133 mix with the refrigerant in the waste heat flow path 110 and then flow to the second heat exchanger 113.

[0043] Since the temperature of the mixed refrigerant changes, a second temperature sensor 121 is provided between the mixing pipeline 120 and the second heat exchanger 113. It is easy to understand that the second temperature sensor 121 can detect the exact temperature of the mixed refrigerant flowing into the second heat exchanger 113, so as to provide temperature control basis for the devices connected to the waste heat flow path 110, such as the circulating flow path 310 and the waste heat circulating flow path, to achieve accurate temperature control; in some examples, the detection temperature of the second temperature sensor 121 can also be used as a reference for use, for example, to clearly indicate whether the waste heat flow path 110 is used for pre-cooling in the aforementioned circulating flow path 310 or for other waste heat utilization.

[0044] Similar to the first flow valve 1311 in the heat exchange branch 131, the waste heat flow path 110 is also provided with a second flow valve 111. It should be noted that the first flow valve 1311 and the second flow valve 111 are respectively used to adjust the amount of refrigerant delivered by the refrigerant source to the refrigeration flow path 130 and the waste heat flow path 110, both of which are a large flow range control, which is applied in actual production. After the required temperature of the corresponding load 311 is determined, the opening of the first flow valve 1311 and the second flow valve 111 generally does not need to be changed, and the adjustment of the amount of refrigerant is further realized by adjusting the first expansion valve 1331 of the bypass branch 133.

[0045] In summary, the utility model embodiment provides a temperature control device 10, comprising a refrigeration system 100. Among them, the refrigeration system 100 includes waste heat flow path 110 and at least one refrigeration flow path 130, and waste heat flow path 110 and at least one refrigeration flow path 130 are connected with refrigerant source. On the basis of the above, each refrigeration flow path 130 includes heat exchange branch 131 and bypass branch 133, and heat exchange branch 131 is provided with first flow valve 1311 and first heat exchanger 1313 connected in sequence. One end of bypass branch 133 is connected with heat exchange branch 131 and connected between first flow valve 1311 and first heat exchanger 1313, and the other end of bypass branch 133 is connected with waste heat flow path 110 and connected to the upstream of second heat exchanger 113. Based on the above bypass branch 133, the refrigerant in the heat exchange branch 131 is partially branched to the waste heat flow path 110, so as to realize accurate control of the refrigerant flow of the heat exchange branch 131 for heat exchange, and realize the role of recycling the excess refrigerant flow by using the waste heat flow path 110, thereby achieving the beneficial effects of fully utilizing energy, accurately controlling temperature and improving overall efficiency.

[0046] The above merely illustrates the specific implementation of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art can easily think of the changes or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A temperature control device, characterized by, The application relates to a refrigeration system (100) comprising a waste heat flow path (110) and at least one refrigeration flow path (130), wherein the waste heat flow path (110) and the at least one refrigeration flow path (130) are connected to a refrigerant source, each refrigeration flow path (130) comprises a heat exchange branch (131) and a bypass branch (133), the heat exchange branch (131) is provided with a first flow valve (1311) and a first heat exchanger (1313) connected in sequence, the waste heat flow path (110) is provided with a second heat exchanger (113), one end of the bypass branch (133) is connected to the heat exchange branch (131) and connected to the first flow valve (1311) and the first heat exchanger (1313) between the first flow valve (1311) and the first heat exchanger (1313), and the other end of the bypass branch (133) is connected to the waste heat flow path (110) and connected to the upstream of the second heat exchanger (113). The refrigeration flow path (130) is multiple, and the other end of the bypass branch (133) of each refrigeration flow path (130) is connected to the upstream of the second heat exchanger (113).

2. The temperature-controlled device of claim 1, wherein, The temperature control equipment (10) further comprises a circulating system (300), and the circulating system (300) comprises at least one circulating flow path (310), wherein the circulating flow path (310) is connected to at least one first heat exchanger (1313) to exchange heat with the refrigerant of the refrigeration flow path (130).

3. The temperature-controlled device of claim 1, wherein, A plurality of circulating flow paths (310) are connected to the first heat exchangers (1313) of a plurality of refrigeration flow paths (130) in one-to-one correspondence.

4. Temperature control device according to claim 3, characterized in that At least one circulating flow path (310) is connected to the second heat exchanger (113) to exchange heat.

5. The temperature-controlled device of claim 3, wherein, The circulating system (300) further comprises a circulating waste heat flow path connected to the second heat exchanger (113) to exchange heat.

6. The temperature-controlled device of claim 3, wherein, The first heat exchanger (1313) comprises a first heat release passage (13131) and a first heat absorption passage (13133), the first heat release passage (13131) is communicated with the circulating flow path (310), the first heat absorption passage (13133) is communicated with the heat exchange branch (131), a first temperature sensor (13135) is arranged between the first heat release passage (13131) and the circulating flow path (310), a first expansion valve (1331) is arranged on the bypass branch (133), and the first temperature sensor (13135) is in communication connection with the first expansion valve (1331).

7. The temperature-controlled device of claim 3, wherein, ​ 8. The temperature-controlled device of claim 7, wherein, The circulating flow path (310) is provided with a load (311), an inlet of the load (311) is communicated with an outlet of the first heat releasing path (13131), an outlet of the load (311) is communicated with an inlet of the first heat releasing path (13131); the circulating flow path (310) is further provided with a heat exchange device (315) and a third temperature sensor (316), the heat exchange device (315) and the third temperature sensor (316) are arranged between the first heat releasing path (13131) and the inlet of the load (311), and the third temperature sensor (316) and the heat exchange device (315) are communicatively connected, and the heat exchange device (315) is used for heating the circulating medium.

9. Temperature control device according to any one of claims 1 to 6, characterized in that The second heat exchanger (113) comprises a second heat releasing path (1131) and a second heat absorbing path (1133), and the waste heat flow path (110) is communicated with the second heat releasing path (1131) or the second heat absorbing path (1133).

10. Temperature control device according to any one of claims 1 to 6, characterized in that The temperature control equipment (10) further comprises a mixing pipeline (120), the mixing pipeline (120) is connected with at least one bypass branch (133), so that the refrigerant of the bypass branch (133) is mixed with the refrigerant of the waste heat flow path (110) and then flows to the second heat exchanger (113); a second temperature sensor (121) is arranged between the mixing pipeline (120) and the second heat exchanger (113).

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