Vacuum manipulator

Abstract

The utility model discloses a vacuum manipulator, and relates to the technical field of semiconductor manufacturing. A driving gear; a first driven gear and a second driven gear; the first driven gear and the second driven gear are each provided with a pair of notches. A positioning part is arranged on one side of the notch, a tension spring is fixed to the positioning part, one end of the tension spring is connected to the positioning part of the first driven gear, and the other end of the tension spring is connected to the positioning part of the second driven gear; the tension spring tensions the first driven gear and the second driven gear inwards, the first driven gear and the second driven gear are installed in an overlapped mode, staggered notches are formed in the first driven gear and the second driven gear, the tension spring exerts pre-tightening force to enable the first driven gear and the second driven gear to abut against the two sides of the tooth space of the driving gear respectively, and therefore the tooth space is effectively eliminated; transmission errors and vibration are reduced, the problem that the tail end of the vacuum manipulator is prone to shaking during use is solved, and the tail end of the vacuum manipulator can be kept stable during use.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a vacuum manipulator. Background Technology

[0002] With the continuous advancement of semiconductor manufacturing technology, precision operation equipment in vacuum environments has gradually become a key technology. Among them, CVD (chemical vapor deposition) vacuum robots are widely used in semiconductor manufacturing processes because they can perform complex handling and operation tasks in vacuum chambers. In order to meet the requirements of vacuum environment for equipment precision and compactness, and at the same time achieve a long working range, the design of existing vacuum robots generally adopts gear transmission and parallelogram linkage mechanism.

[0003] Existing CVD vacuum manipulators typically utilize a parallelogram linkage principle combined with gear transmission to achieve their telescopic function. This design allows for a relatively long telescopic distance while maintaining a compact structure, thus meeting the special requirements within the vacuum chamber. In traditional solutions, the manipulator uses gear meshing to drive the driven end to perform operations, which already satisfies certain usage requirements. However, as... Figure 1 and Figure 2 As shown, the first driven gear 31 and the second driven gear 32 engage with the driving gear 2 in a simple manner. The inherent backlash problem in the gear mechanism is unavoidable, which will cause the end of the robot to wobble during operation, thus affecting the operating accuracy and reliability.

[0004] Therefore, we need a vacuum manipulator to solve the problem of the end effector wobbling during use, so that the end effector can remain stable during use. Utility Model Content

[0005] The purpose of this application is to solve the problem of easy shaking at the end of a vacuum manipulator during use. In order to solve the above problem, this application provides a vacuum manipulator that can keep the end of the vacuum manipulator stable during use.

[0006] To achieve the above objectives, the embodiments of this application adopt the following technical solution: a bracket; a driving gear, which is mounted on the bracket; a first driven gear and a second driven gear, which are overlapped and meshed with the driving gear; a pair of slots are respectively provided on the first driven gear and the second driven gear; a positioning part is provided on one side of the slot, and a tension spring is fixed on the positioning part, one end of the tension spring is connected to the positioning part of the first driven gear, and the other end is connected to the positioning part of the second driven gear; the tension spring pulls the first driven gear and the second driven gear inward, so that the first driven gear abuts against the right side of the tooth gap of the driving gear, and the second driven gear abuts against the left side of the tooth gap of the driving gear.

[0007] In the above technical solution, the embodiment of this application achieves this by: overlapping and installing the first driven gear and the second driven gear, and setting staggered slots on them; applying preload through a tension spring to make the first driven gear and the second driven gear abut against both sides of the tooth gap of the driving gear, thereby effectively eliminating tooth gap, reducing transmission error and vibration, solving the problem of easy shaking at the end of the vacuum manipulator during use, and keeping the end of the vacuum manipulator stable during use.

[0008] Furthermore, according to an embodiment of this application, the width of the slot is greater than the diameter of the tension spring.

[0009] Furthermore, according to an embodiment of this application, the first driven gear and the second driven gear are mounted on the bracket via the same mounting shaft.

[0010] Furthermore, according to an embodiment of this application, a limit structure is provided on the second driven gear.

[0011] Furthermore, according to an embodiment of this application, the first driven gear and the second driven gear have the same tooth thickness.

[0012] Furthermore, according to the embodiments of this application, both the first driven gear and the second driven gear are sector gears.

[0013] Furthermore, according to an embodiment of this application, the second driven gear is fixed to the bracket via a flange.

[0014] Furthermore, according to the embodiments of this application, the bracket is a one-piece molded structure.

[0015] Furthermore, according to an embodiment of this application, the gear ratio between the first driven gear and the driving gear is 1:1.

[0016] Furthermore, according to an embodiment of this application, the tension spring is made of a highly elastic steel material.

[0017] Compared with the prior art, this application has the following beneficial effects: By overlapping and installing the first driven gear and the second driven gear, and setting staggered slots on them, the first driven gear and the second driven gear abut against the two sides of the tooth gap of the driving gear by applying a preload force through a tension spring, the tooth gap is effectively eliminated, the transmission error and vibration are reduced, and the problem of easy shaking of the end effector during the use of the vacuum manipulator is solved, so that the end effector of the vacuum manipulator can remain stable during use. Attached Figure Description

[0018] The present application will be further described below with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This is a schematic diagram of the structure of a vacuum manipulator in the prior art.

[0020] Figure 2 This is a schematic diagram of gear meshing in the prior art.

[0021] Figure 3 This is an isometric drawing of a vacuum manipulator.

[0022] Figure 4 This is a front view of a vacuum manipulator.

[0023] Figure 5 yes Figure 3 A magnified view of a portion of the image.

[0024] Figure 6 yes Figure 4 A magnified view of a portion of the image.

[0025] In the attached diagram

[0026] 1. Bracket; 2. Drive gear; 3. First driven gear

[0027] 32. Second driven gear 4, slot 41, positioning part

[0028] 411, Positioning hole 5, Tension spring 6, Mounting shaft

[0029] 7. Limiting structure Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this utility model clear and complete, the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of this utility model, and are merely used to explain the embodiments of this utility model. They are not intended to limit the embodiments of this utility model. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0031] In the description of this utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," and "horizontal," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "a," "first," "second," "third," "fourth," "fifth," and "sixth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] For purposes of simplicity and illustration, the principles of the embodiments are described primarily by way of example. In the following description, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and apparatus have not been described in detail to avoid unnecessarily obscuring these embodiments. Furthermore, all embodiments can be used in combination with each other.

[0034] Example 1: As Figure 3-6 As shown, a vacuum manipulator includes:

[0035] Support 1; Support 1 is a one-piece molded structure. The one-piece molding improves the overall strength of support 1, reduces assembly errors caused by structural splicing, and improves the overall stability of the robot.

[0036] The driving gear 2 is mounted on the bracket 1; the first driven gear 31 and the second driven gear 33 are overlapped and mesh with the driving gear 2. The overlapped structure allows the first driven gear 31 and the second driven gear 33 to act on the tooth surface of the driving gear 2 simultaneously during transmission, which disperses the load, reduces the impact and vibration during gear meshing, and improves the stability of transmission.

[0037] A pair of slots 4 are respectively provided on the first driven gear 31 and the second driven gear 33; a positioning part 41 is provided on one side of the slot 4, and a tension spring 5 is fixed on the positioning part 41. One end of the tension spring 5 is connected to the positioning part 41 of the first driven gear, and the other end is connected to the positioning part 41 of the second driven gear 33. Through the tension of the tension spring 5, the two driven gears are pulled inward to ensure that the two driven gears abut against the two sides of the tooth backlash of the driving gear 2, thereby eliminating the transmission error and loosening problem caused by the tooth backlash.

[0038] like Figures 1 to 2 As shown, the gear meshing in the prior art has backlash, which may cause unnecessary wobbling at the end of the robotic arm;

[0039] The tension spring 5 pulls the first driven gear 31 and the second driven gear 33 inward, so that the first driven gear 31 abuts against the right side of the tooth gap of the driving gear 2, and the second driven gear 33 abuts against the left side of the tooth gap of the driving gear 2. This ensures that the first driven gear 31 and the second driven gear 33 always maintain a good meshing state with the driving gear 2, avoiding vibration and impact caused by tooth gap in mechanical transmission, and effectively improving the operational stability of the vacuum manipulator end effector.

[0040] The width of the slot 4 is greater than the diameter of the tension spring 5, ensuring that the tension spring 5 can move smoothly within the slot 4, while preventing friction or jamming between the tension spring 5 and the slot 4, thus ensuring the normal operation of the tension spring 5. The tension spring 5 is made of high-elasticity steel.

[0041] The first driven gear 31 and the second driven gear 33 are mounted on the bracket 1 via the same mounting shaft 6. The second driven gear 33 is provided with a limiting structure 7 to restrict the rotation angle. The first driven gear 31 and the second driven gear 33 have the same tooth thickness. The consistency of tooth thickness ensures that the two driven gears are subjected to uniform force during meshing, avoiding uneven load and impact caused by differences in tooth thickness, and improving the smoothness of transmission.

[0042] Both the first driven gear 31 and the second driven gear 33 are sector gears, which reduces unnecessary volume and weight while ensuring transmission performance, enabling the vacuum manipulator to be designed in a lightweight manner.

[0043] The second driven gear 33 is fixed to the bracket 1 via a flange. The gear ratio of the first driven gear 31 and the driving gear 2 is 1:1. The same gear ratio ensures that the rotation of the driving gear 2, the first driven gear 31, and the second driven gear 33 is synchronized, thereby ensuring the smoothness of the transmission process and reducing vibration and transmission errors.

[0044] By overlapping and installing the first driven gear 31 and the second driven gear 33, and setting staggered slots 4 on them, the tension spring 5 applies a preload force so that the first driven gear 31 and the second driven gear 33 abut against the two sides of the tooth gap of the driving gear 2, thereby effectively eliminating tooth gap, reducing transmission error and vibration, solving the problem of easy shaking at the end of the vacuum manipulator during use, and keeping the end of the vacuum manipulator stable during use.

[0045] Example 2: Figure 3-6 As shown, a vacuum manipulator includes:

[0046] The slot 4 and the tension spring 5 are symmetrically arranged on the first driven gear 31 and the second driven gear 33, respectively. The positioning part 41 on the slot 4 is provided with a number of positioning holes 411. The tension spring 5 can be inserted into the positioning holes 411 at different distances as needed. The preload applied by the tension spring 5 pulls the first driven gear 31 and the second driven gear 33 toward the backlash of the driving gear 2, thereby realizing dynamic compensation of the backlash. The installation position of the tension spring 5 is adjustable to avoid the problem of the tension spring 5 being too tight or too loose. When the tension spring 5 is too tight, it can be adjusted to a closer positioning hole 411 to reduce the tension and avoid wear of the gear or reduction of transmission efficiency due to excessive compression. When the tension spring 5 is insufficient, it can be adjusted to a farther positioning hole 411 to increase the preload of the tension spring 5, thereby ensuring that the backlash is completely eliminated.

[0047] Example 4: Figure 3-6 As shown, based on Examples 1-2, this embodiment also provides a method for using a vacuum manipulator, including:

[0048] Insert one end of the tension spring 5 into the positioning hole 411 of the positioning part 41 on the groove 4 of the first driven gear 31, and insert the other end into the positioning hole 411 of the positioning part 4 on the groove 4 of the second driven gear 33, to ensure that both ends of the tension spring 5 are in the correct fixed position.

[0049] If the tooth gap is large, the tension spring 5 can be installed in the farthest positioning hole 411 to increase the preload of the tension spring 5, so that the first driven gear 31 and the second driven gear 33 are respectively in close contact with the tooth gap of the driving gear 2.

[0050] If the tooth backlash is small, the tension spring 5 can be installed in the nearest positioning hole 411, and the tension of the tension spring 5 can be appropriately reduced to avoid excessive tension causing gear wear or increased running resistance.

[0051] Rotate the drive gear 2 to ensure that the first driven gear 31 and the second driven gear 33 can mesh smoothly without slippage, deviation or abnormal shaking.

[0052] Although the illustrative specific embodiments of this application have been described above to enable those skilled in the art to understand this application, this application is not limited to the scope of the specific embodiments. For those skilled in the art, all applications utilizing the concept of this application are protected as long as various variations are within the spirit and scope of this application as defined and determined by the appended claims.

Claims

1. A vacuum manipulator, comprising: support; A drive gear, which is mounted on the bracket; A first driven gear and a second driven gear are mounted overlapping each other and both mesh with the driving gear. The characteristic feature is that a pair of slots are respectively provided on the first driven gear and the second driven gear; A positioning part is provided on one side of the slot, and a tension spring is fixed on the positioning part. One end of the tension spring is connected to the positioning part of the first driven gear, and the other end is connected to the positioning part of the second driven gear. The tension spring pulls the first driven gear and the second driven gear inward, so that the first driven gear abuts against the right side of the tooth gap of the driving gear, and the second driven gear abuts against the left side of the tooth gap of the driving gear.

2. A vacuum manipulator according to claim 1, characterized in that, The width of the slot is greater than the diameter of the tension spring.

3. A vacuum manipulator according to claim 1, characterized in that, The first driven gear and the second driven gear are mounted on the bracket via the same mounting shaft.

4. A vacuum manipulator according to claim 1, characterized in that, The second driven gear is provided with a limit structure.

5. A vacuum manipulator according to claim 1, characterized in that, The first driven gear and the second driven gear have the same tooth thickness.

6. A vacuum manipulator according to claim 1, characterized in that, Both the first driven gear and the second driven gear are sector gears.

7. A vacuum manipulator according to claim 1, characterized in that, The second driven gear is fixed to the bracket by a flange.

8. A vacuum manipulator according to claim 1, characterized in that, The bracket is a one-piece molded structure.

9. A vacuum manipulator according to claim 1, characterized in that, The gear ratio between the first driven gear and the driving gear is 1:

1.

10. A vacuum manipulator according to claim 1, characterized in that, The tension spring is made of high-elasticity steel.

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