Hot standby system for chemical supply

Abstract

The utility model discloses a hot standby system for chemical supply, relates to the technical field of chemical supply, and solves the problem that in the prior art, a chemical supply system is only provided with one supply source, and once a supply source control system or a part breaks down, product loss of a process machine can be caused. The buffer tank is connected with an inert gas source through a first gas pipe, the first gas pipe is provided with a first electromagnetic valve, the buffer tank is provided with a liquid level sensor, the bottom of the buffer tank is connected with an output pipe, the output pipe is connected with a supply main pipeline of an original supply system, and the output pipe is provided with a pneumatic diaphragm pump and a second electromagnetic valve. And if yes, the chemical supply hot standby system is immediately started, and the controller can receive the liquid supply signal of the liquid supply equipment, so that liquid is supplied to the liquid supply equipment according to the liquid supply signal, and seamless connection of the chemical supply hot standby system is realized.

Description

Technical Field

[0001] This application relates to the field of chemical supply technology, and in particular to a chemical supply hot standby system. Background Technology

[0002] In the industrial production of semiconductors, the chemical supply system is mainly a centralized supply system, while manual supply is used for smaller quantities of chemical solutions. The chemical supply system is a system that supplies chemical solutions to the production line 24 hours a day without interruption.

[0003] Current chemical supply systems are generally designed with a single supply source. When the supply source control system fails or the supply source becomes unavailable due to power supply issues, misoperation, or component damage, it is difficult to restore the supply in a timely manner. The system takes a long time to restore the supply, which can lead to product loss from process equipment. This is especially true for equipment in semiconductor CMP (Chemical Mechanical Polishing) areas, where even a short downtime is unacceptable. Utility Model Content

[0004] The purpose of this application is to overcome the problem that existing chemical supply systems have only one supply source, and that failure of the supply source control system or components will lead to the loss of products from the process equipment, and to provide a chemical supply hot standby system.

[0005] Specifically, the aforementioned chemical supply hot standby system includes a buffer tank, which is connected to an inert gas source via a first gas pipe. A first solenoid valve is installed on the first gas pipe. A liquid level sensor is installed on the buffer tank. An output pipe is connected to the bottom of the buffer tank and is connected to the main supply pipeline of the original supply system. A pneumatic diaphragm pump and a second solenoid valve are installed on the output pipe. The liquid level sensor, the pneumatic diaphragm pump, the first solenoid valve, and the second solenoid valve are all electrically connected to a controller. The controller is electrically connected to the control system and the liquid-requiring equipment of the original supply system.

[0006] In some possible implementations, the main supply line is equipped with a T-BOX, which includes a T-connector. The first port of the T-connector is connected to the main supply line of the original supply system via a third solenoid valve. The second port of the T-connector is connected to the liquid receiving device. The third port of the T-connector is connected to the output pipe. The third solenoid valve is electrically connected to the controller.

[0007] In some possible implementations, the upper end of the buffer tank is connected to an input pipe, the input pipe is equipped with a fourth solenoid valve, the input pipe is connected to the third port of a three-way valve, and the fourth solenoid valve is electrically connected to the controller.

[0008] In some possible implementations, the end of the first air pipe away from the inert gas source is connected to a second three-way pipe. One port of the second three-way pipe is connected to a buffer tank via a second air pipe, and the other port of the second three-way pipe is connected to an exhaust system via a third air pipe. A fifth solenoid valve is installed on the third air pipe, and the fifth solenoid valve is electrically connected to a controller.

[0009] In some possible implementations, the end of the output pipe furthest from the buffer tank is connected to a three-way pipe, one port of the three-way pipe is connected to the input pipe, the other port of the three-way pipe is connected to a composite pipe, and the third port of the three-way pipe is connected to the composite pipe through a fifth solenoid valve.

[0010] In some possible implementations, the composite pipe is equipped with a hydraulic sensor, and the upper end of the buffer tank is equipped with a pneumatic sensor, both of which are electrically connected to the controller.

[0011] In some possible implementations, the liquid level sensor is a float-type liquid level sensor.

[0012] In some possible implementations, the inert gas is nitrogen.

[0013] This application has the following beneficial effects: by setting up a buffer tank containing chemicals, the controller receives the supply source standby signal from the control system of the original supply system. Once the supply source standby signal is not received, the chemical supply hot standby standby system of this application is immediately activated. The controller can receive the liquid demand signal from the liquid demand equipment, and thus supply liquid to the liquid demand equipment according to the liquid demand signal, realizing the seamless connection of the chemical supply hot standby standby system, so as to prevent the products processed by the liquid equipment from being damaged due to long-term shutdown. Attached Figure Description

[0014] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the chemical supply hot standby system according to an embodiment of this application;

[0017] Figure 2This is a schematic diagram of the structure of the T-BOX in the chemical supply hot standby system according to an embodiment of this application;

[0018] Figure 3 This is a circuit block diagram of a chemical supply hot standby system according to an embodiment of this application.

[0019] Figure label:

[0020] 1. Buffer tank; 2. First air pipe; 3. Inert gas source; 4. First solenoid valve; 5. Liquid level sensor; 6. Output pipe; 7. Original supply system; 8. Main supply pipeline; 9. Pneumatic diaphragm pump; 10. Second solenoid valve; 11. T-BOX; 12. T-connector one; 13. Third solenoid valve; 14. Input pipe; 15. Fourth solenoid valve; 16. T-connector two; 17. Second air pipe; 18. Third air pipe; 19. Exhaust system; 20. Fifth solenoid valve; 21. T-connector three; 22. Composite pipe; 23. Hydraulic sensor; 24. Air pressure sensor; 25. Control system; 26. Liquid supply equipment; 27. Controller. Detailed Implementation

[0021] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0022] Please see Figure 1 and Figure 3In a preferred embodiment of this application, a chemical supply hot standby system includes a buffer tank 1. The buffer tank 1 is connected to an inert gas source 3 via a first gas pipe 2, wherein the inert gas is nitrogen. A first solenoid valve 4 is installed on the first gas pipe 2. By controlling the opening and closing of the first solenoid valve 4, nitrogen can be added to the buffer tank 1. A liquid level sensor 5 is installed on the buffer tank 1. The liquid level sensor 5 is a float-type liquid level sensor. The liquid level sensor 5 can detect the liquid level in the buffer tank 1 in real time. An output pipe 6 is connected to the bottom of the buffer tank 1. The output pipe 6 is connected to the main supply line 8 of the original supply system 7. A pneumatic diaphragm pump 9 and a second solenoid valve 10 are installed on the output pipe 6. The liquid level sensor 5, gas... The diaphragm pump 9, the first solenoid valve 4, and the second solenoid valve 10 are all electrically connected to the controller 27. The controller 27 is electrically connected to the control system 25 of the original supply system 7 and the liquid-requiring device 26. It is used to obtain the standby signal of the liquid supply source of the original liquid supply system, thereby determining whether the liquid supply source of the original liquid supply system is in standby mode. If the standby signal of the liquid supply source of the original liquid supply system can be received, it means that the liquid supply source of the original liquid supply system is in standby mode, which means that the liquid supply source of the original liquid supply system can supply liquid normally. The liquid supply source of the original liquid supply system continues to supply liquid according to the liquid-requiring signal of the liquid-requiring device 26. If the standby signal of the liquid supply source of the original liquid supply system cannot be received, it means that the liquid supply source of the original liquid supply system cannot supply liquid normally.

[0023] like Figures 1-3As shown, in a further embodiment, the main supply line 8 is equipped with a T-BOX 11, which includes a three-way pipe 12. The first port of the three-way pipe 12 is connected to the main supply line 8 of the original supply system 7 via a third solenoid valve 13. The second port of the three-way pipe 12 is connected to the liquid receiving device 26, and the third port of the three-way pipe 12 is connected to the output pipe 6. The third solenoid valve 13 is electrically connected to the controller 27. An input pipe 14 is connected to the upper end of the buffer tank 1. A fourth solenoid valve 15 is installed on the input pipe 14. The input pipe 14 is connected to the third port of the three-way pipe 12, and the fourth solenoid valve 15 is connected to the controller 27. Electrically connected, the end of the first air pipe 2 furthest from the inert gas source 3 is connected to a two-way pipe 16. One port of the two-way pipe 16 is connected to the buffer tank 1 via a second air pipe 17, and the other port of the three-way pipe 16 is connected to the exhaust system 19 via a third air pipe 18. A fifth solenoid valve 20 is installed on the third air pipe 18, and the fifth solenoid valve 20 is electrically connected to the controller 27. The end of the output pipe 6 furthest from the buffer tank 1 is connected to a three-way pipe 21. One port of the three-way pipe 21 is connected to the input pipe 14, and the other port of the three-way pipe 21 is connected to a composite pipe 22. The third port of the three-way pipe 12... The composite pipe 22 is connected via the fifth solenoid valve 20. A hydraulic sensor 23 is installed on the composite pipe 22, and a pressure sensor 24 is installed on the upper end of the buffer tank 1. Both the hydraulic sensor 23 and the pressure sensor 24 are electrically connected to the controller 27. If the liquid level in the buffer tank 1 is lower than a specified level when the original liquid supply system's supply source is functioning normally, chemicals need to be added to the buffer tank 1. Specifically, when the controller 27 receives the standby signal from the original liquid supply system's supply source, the fourth solenoid valve 15 is opened, allowing chemicals to be introduced from the main supply pipe 8 of the original supply system 7 and added through the input pipe 14. The gas is introduced into buffer tank 1, and the fifth solenoid valve 20 is opened to depressurize buffer tank 1 to prevent the gas pressure in buffer tank 1 from being too high and preventing the addition of chemicals to buffer tank 1. When the liquid level sensor 5 detects that the liquid level in buffer tank 1 is higher than the specified liquid level, the fourth solenoid valve 15 and the fifth solenoid valve 20 are closed to stop the addition of chemicals to buffer tank 1, and the first solenoid valve 4 is opened to add nitrogen to buffer tank 1 until the gas pressure sensor 24 detects that the gas pressure reaches the specified gas pressure. Then the first solenoid valve 4 is closed to maintain sufficient gas pressure in buffer tank 1 so that the chemicals can be discharged from buffer tank 1 by gas pressure.

[0024] In this embodiment, if the standby signal from the original liquid supply system is not received, or if the hydraulic pressure detected by the hydraulic sensor 23 is lower than a preset threshold and the duration reaches a preset time, the chemical supply hot standby system of this embodiment is activated. At this time, the controller 27 receives the liquid request signal from the liquid requesting device 26. When the liquid request signal is received, the second solenoid valve 10 and the pneumatic diaphragm pump 9 are opened, and the third solenoid valve 13 of the T-BOX 11 is closed to cut off the liquid supply source of the original supply system 7. The buffer tank 1 is used as a new liquid supply source to supply liquid to the liquid requesting device 26, thereby enabling the chemical supply hot standby system of this embodiment to operate normally. The chemical supply hot standby system shares the liquid demand signal and the standby signal of the liquid supply source of the original supply system 7 with the original supply system 7. Once the standby signal of the liquid supply source of the original supply equipment disappears, the chemical supply hot standby system of this embodiment will automatically take over the supply, thereby achieving seamless connection of chemical supply and avoiding damage to the products processed by the liquid demand equipment 26 due to liquid supply interruption. When the original supply system 7 returns to normal, the third solenoid valve 13 is opened and the pneumatic diaphragm pump 9 and the second solenoid valve 10 are closed. The liquid supply source of the original supply system 7 continues to supply liquid and slowly replenishes the chemicals in the buffer tank 1.

[0025] The above are merely preferred embodiments of this application; however, the scope of protection of this application is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this application, based on the technical solution and its improved concept, should be covered within the scope of protection of this application.

Claims

1. A chemical supply hot standby system, characterized in that, The system includes a buffer tank connected to an inert gas source via a first gas pipe, a first solenoid valve installed in the first gas pipe, a liquid level sensor installed in the buffer tank, an output pipe connected to the bottom of the buffer tank, the output pipe connected to the main supply pipeline of the original supply system, a pneumatic diaphragm pump and a second solenoid valve installed in the output pipe, and the liquid level sensor, the pneumatic diaphragm pump, the first solenoid valve and the second solenoid valve all electrically connected to a controller, which is electrically connected to the control system and the liquid-requiring equipment of the original supply system.

2. The chemical supply hot standby system according to claim 1, characterized in that, The main supply line is equipped with a T-BOX, which includes a three-way pipe. The first port of the three-way pipe is connected to the main supply line of the original supply system through a third solenoid valve. The second port of the three-way pipe is connected to the liquid receiving device. The third port of the three-way pipe is connected to the output pipe. The third solenoid valve is electrically connected to the controller.

3. The chemical supply hot standby system according to claim 2, characterized in that, The upper end of the buffer tank is connected to an input pipe, the input pipe is equipped with a fourth solenoid valve, the input pipe is connected to the third port of a three-way pipe, and the fourth solenoid valve is electrically connected to the controller.

4. The chemical supply hot standby system according to claim 3, characterized in that, The end of the first air pipe away from the inert gas source is connected to a two-way pipe. One port of the two-way pipe is connected to a buffer tank through a second air pipe, and the other port of the three-way pipe is connected to the exhaust system through a third air pipe. A fifth solenoid valve is installed on the third air pipe, and the fifth solenoid valve is electrically connected to the controller.

5. The chemical supply hot standby system according to claim 3, characterized in that, The end of the output pipe furthest from the buffer tank is connected to a three-way pipe. One port of the three-way pipe is connected to the input pipe, and the other port of the three-way pipe is connected to a composite pipe. The third port of the three-way pipe is connected to the composite pipe through a fifth solenoid valve.

6. The chemical supply hot standby system according to claim 5, characterized in that, The composite pipe is equipped with a hydraulic sensor, and the upper end of the buffer tank is equipped with a pneumatic sensor. Both the hydraulic sensor and the pneumatic sensor are electrically connected to the controller.

7. The chemical supply hot standby system according to claim 1, characterized in that, The liquid level sensor is a float-type liquid level sensor.

8. The chemical supply hot standby system according to claim 1, characterized in that, The inert gas is nitrogen.

Images