Photoresist refrigeration device

Abstract

The utility model relates to the field of photoresist refrigeration, in particular to a photoresist refrigeration device which comprises a refrigeration box, a partition plate arranged on the inner side of the refrigeration box, a lifting mechanism, a storage mechanism, a moving rod and a storage table. The storage mechanism is arranged at the top of the lifting mechanism; a sliding block is arranged at the bottom of the moving rod, a fixing frame is slidably arranged on the outer side of the sliding block, the bottom of the fixing frame is fixedly connected with the bottom of the inner side of the refrigerating box, and a lifting plate is arranged at the top of the moving rod; the storage table is arranged on the top inside the refrigerating box. According to a schematic diagram of the lifting mechanism, the holding rod is rotated to drive the third circular gear to rotate, the third circular gear drives the rack to move, the rack drives the lifting plate to move through the moving rod when moving, so that photoresist is driven to ascend and descend, and when moving to a proper position, the clamping block is clamped on the rotating wheel to fix the lifting plate; therefore, the photoresist container can be directly pushed out of the refrigerating box, so that the photoresist container can be taken out and stored more conveniently.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of photoresist refrigeration, especially to a photoresist refrigeration device. BACKGROUND

[0002] The photoresist refrigeration device is mainly used for storing photoresist, ensuring its preservation at appropriate temperature, thereby maintaining its photosensitivity and other key performances. This is crucial for the semiconductor production, integrated circuit manufacturing, display panel manufacturing and other industries.

[0003] The Chinese patent with publication number CN221122738U discloses a photoresist refrigeration device, which comprises a heat preservation box, a refrigeration bottom plate and refrigeration side plates. The heat preservation box is provided with a heat preservation cavity. The refrigeration bottom plate is arranged at the bottom of the heat preservation cavity and is provided with a sliding groove. The refrigeration side plates are provided with sliding blocks and are connected to the inner side of the sliding groove through the sliding blocks. Adjacent refrigeration side plates are connected through clamping grooves and protrusions. The inner part of the refrigeration bottom plate and the refrigeration side plates is provided with an inner cavity for containing refrigeration liquid. The refrigeration space is formed by the refrigeration bottom plate and the refrigeration side plates. The refrigeration space is used for placing photoresist containers. The containers are limited by the refrigeration bottom plate and the refrigeration side plates. The photoresist refrigeration device of the utility model forms a refrigeration space through the refrigeration bottom plate and the refrigeration side plates. The photoresist containers are limited by the refrigeration bottom plate and the refrigeration side plates, which can reduce the gap and shaking of the containers and the heat preservation box. The inner cavity of the refrigeration bottom plate and the refrigeration side plates contains refrigeration liquid, which can further improve the refrigeration effect of the photoresist through the refrigeration liquid.

[0004] However, the above-mentioned disclosed scheme has the following disadvantages: the existing photoresist refrigeration device is not convenient to take out, which leads to low efficiency of storing and taking out photoresist. At the same time, it is necessary to prevent the bottles storing photoresist from being damaged and deformed due to shaking during transportation. UTILITY MODEL CONTENTS

[0005] The utility model aims at the problem of inconvenient storage and taking out of photoresist and easy damage of storage screen during transportation in the background art, and provides a photoresist refrigeration device.

[0006] The technical scheme of the utility model is a photoresist refrigeration device, which comprises a refrigeration box and a partition plate arranged on the inner side of the refrigeration box. It further comprises:

[0007] A lifting mechanism is arranged on the top of the partition plate and is used for driving the photoresist to be lifted at a fixed point.

[0008] A storage mechanism is arranged on the top of the lifting mechanism and is used for clamping and storing photoresist containers of different sizes.

[0009] The mobile rod is provided with a sliding block at the bottom, and a fixed frame is slidably arranged outside the sliding block. The bottom of the fixed frame is fixedly connected with the bottom of the inner side of the refrigerator. The top of the mobile rod is provided with a lifting plate, and the bottom of the lifting plate is fixedly connected with the storage mechanism. The mobile rod moves in the fixed frame through the sliding block.

[0010] The storage platform is arranged at the top of the inner side of the refrigerator. A plurality of through grooves are arranged on the storage platform. Each through groove is slidably connected with the storage mechanism. The photoresist container is installed on the storage mechanism, and there is a gap between the through groove of the storage platform and the photoresist container. The gap is used to pass the refrigerating liquid to wrap the outer side of the container.

[0011] Preferably, the lifting mechanism comprises a lifting assembly and a locking assembly.

[0012] The lifting assembly is arranged on the refrigerator and is used to drive the storage mechanism to move up and down.

[0013] The locking assembly is arranged on the outer side of the refrigerator and is used to lock the position of the lifting assembly after the lifting assembly moves to the appropriate position.

[0014] Preferably, the lifting assembly comprises a rotating shaft one, a rotating rod, a handle rod and a circular gear one.

[0015] The rotating shaft one is rotatably arranged on the refrigerator. The rotating rod is arranged at the end of the rotating shaft one. The handle rod is arranged at the end of the rotating rod away from the rotating shaft one. The circular gear one is arranged on the outer side of the rotating shaft one. The bottom of the circular gear one is provided with a circular gear two. The axis of the circular gear two is provided with a rotating shaft two. The end of the rotating shaft two away from the circular gear two is provided with a circular gear three. The outer side of the rotating shaft two is rotatably provided with a connecting piece. The side surface of the circular gear three is engaged with a rack.

[0016] Preferably, the locking assembly comprises a rotating wheel, a fixed shaft, a limiting rod and a spring one.

[0017] The rotating wheel is arranged on the outer side of the rotating shaft one. The fixed shaft is arranged on the outer side of the refrigerator. The limiting rod is rotatably arranged on the outer side of the fixed shaft. The spring one is arranged at the end of the limiting rod. Two spring ones are symmetrically arranged about the limiting rod. The end of the spring one away from the limiting rod is provided with a fixed block.

[0018] Preferably, the storage mechanism comprises a placing pipe, a placing groove, a through hole and an installation assembly.

[0019] The placing pipe is arranged on the top of the lifting plate. The placing groove is arranged on the placing pipe. The through hole is arranged on the bottom of the placing groove.

[0020] The installation assembly is arranged on the inner side of the placing groove and is used to clamp the photoresist container.

[0021] Preferably, the installation assembly comprises an installation groove, a clamping plate, an extension pipe and a spring two.

[0022] The mounting groove is arranged on the placing pipe, the telescopic pipe is arranged inside the mounting groove, spring two is arranged outside the telescopic pipe, and the clamping plate is arranged at one end of the telescopic pipe away from the mounting groove.

[0023] Compared with the prior art, the utility model has the following beneficial technical effects:

[0024] 1. Through the schematic diagram of the lifting mechanism, rotating the handle rod drives the circular gear three to rotate, the circular gear three drives the rack to move, and the rack moves the lifting plate through the moving rod to move, thereby driving the photoresist to move up and down, and when moving to the appropriate position, the clamping block is clamped on the rotating wheel to fix the lifting plate, so that the photoresist container can be directly pushed out of the refrigerator, thereby being more convenient to take out and store, and meanwhile, the stable storage of the photoresist container in the refrigerator can be ensured, temperature fluctuation or humidity change caused by position change is avoided, thereby ensuring the quality and stability of the photoresist, and the photoresist container can be quickly and accurately placed at the specified position in the refrigerator, manual carrying or searching for a suitable storage space is not needed, thereby saving time and effort.

[0025] 2. Through the arrangement of the storage mechanism, the clamping plate moves under the action of spring two, thereby clamping and fixing photoresist containers of different sizes, the applicability of the storage mechanism is increased, the device does not need to be replaced due to the size of the photoresist container, and meanwhile, the three annular clamping plates can stably clamp the photoresist container in all directions, thereby avoiding collision and extrusion of the photoresist during transportation of the refrigerator, and photoresist deformation or damage is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a structural schematic view of an embodiment of the utility model;

[0027] Figure 2 It is Figure 1 It is an internal structure schematic view;

[0028] Figure 3 It is a structural schematic view of the lifting mechanism;

[0029] Figure 4 It is Figure 3 It is an enlarged schematic view of A in the utility model;

[0030] Figure 5 It is a structural schematic view of the storage mechanism.

[0031] : 1, refrigerator; 2, connecting pipe; 301, handle; 302, rotating rod; 303, rotating shaft one; 304, fixed block; 305, spring one; 306, fixed shaft; 307, limiting rod; 308, rotating wheel; 309, circular gear one; 310, circular gear two; 311, rotating shaft two; 312, circular gear three; 313, rack; 314, moving rod; 315, sliding block; 316, fixed frame; 317, lifting plate; 318, connecting piece; 401, placing pipe; 402, placing groove; 403, mounting groove; 404, clamping plate; 405, telescopic pipe; 406, spring two; 407, through hole; 5, box door; 6, pull ring; 7, storage table; 8, partition. DETAILED DESCRIPTION

[0032] Example one

[0033] As Figures 1-4 shown, the utility model provides a photoresist refrigeration device, including refrigerator 1, setting in the partition 8 of refrigerator 1 inside, setting the connecting pipe 2 of refrigerator 1 outside, rotating setting the box door 5 of the top of refrigerator 1, setting the pull ring 6 of the top of box door 5, lifting mechanism, storage mechanism, moving rod 314 and storage table 7, the connecting pipe 2 is used for and refrigerator liquid supply box connects to provide the refrigeration liquid for refrigerator 1 in, the end of connecting pipe 2 is provided with end cap, end cap is in sealed state normally, when refrigeration liquid is needed to open:

[0034] Lifting mechanism sets up at the top of partition 8, is used to drive photoresist to carry out fixed point lifting;

[0035] Storage mechanism sets up at the top of lifting mechanism, is used to hold the photoresist container of different sizes and store;

[0036] The bottom of moving rod 314 is provided with sliding block 315, the outside of sliding block 315 is slidably provided with fixed frame 316, the bottom of fixed frame 316 and the bottom of the inside of refrigerator 1 fixed connection, the top of moving rod 314 is provided with lifting plate 317, the top of lifting plate 317 and the bottom of storage mechanism fixed connection, moving rod 314 moves in fixed frame 316 through sliding block 315;

[0037] Storage table 7 sets up in the inside top of refrigerator 1, and a plurality of through slots are provided on storage table 7, each through slot and storage mechanism are slidably connected, the photoresist container is installed on the storage mechanism and the through slot of storage table 7 exists gap, and the gap is used to pass through refrigeration liquid, so that the outside of the container is wrapped.

[0038] The lifting mechanism comprises a lifting assembly and a locking assembly; the lifting assembly is arranged on the refrigerator 1 and used to drive the storage mechanism to move up and down; the locking assembly is arranged outside the refrigerator 1 and used to lock the position of the lifting assembly after the lifting assembly moves to a proper position. The lifting assembly comprises a rotating shaft 303, a rotating rod 302, a handle 301 and a circular gear 309; the rotating shaft 303 is rotatably arranged on the refrigerator 1; the rotating rod 302 is arranged at the end of the rotating shaft 303; the handle 301 is arranged at the end of the rotating rod 302 away from the rotating shaft 303; the circular gear 309 is arranged outside the rotating shaft 303; the bottom of the circular gear 309 is provided with a circular gear 310; the axis of the circular gear 310 is provided with a rotating shaft 311; the end of the rotating shaft 311 away from the circular gear 310 is provided with a circular gear 312; the outside of the rotating shaft 311 is rotatably provided with a connecting piece 318; the side of the circular gear 312 is engaged with a rack 313. The handle 301 is held and rotated, the handle 301 drives the circular gear 312 to rotate, the circular gear 312 drives the rack 313 to move, the rack 313 drives the moving rod 314 to move in the fixed frame 316 through the sliding block 315, and the moving rod 314 drives the storage platform 7 to rise through the lifting plate 317. The locking assembly comprises a rotating wheel 308, a fixed shaft 306, a limiting rod 307 and a spring 305; the rotating wheel 308 is arranged outside the rotating shaft 303; the outside of the rotating wheel 308 is provided with a plurality of notches; the fixed shaft 306 is arranged outside the refrigerator 1; the limiting rod 307 is rotatably arranged outside the fixed shaft 306; the spring 305 is arranged at the end of the limiting rod 307; the spring 305 is symmetrically arranged at two ends of the limiting rod 307; the end of the limiting rod 307 away from the spring 305 and the notch on the rotating wheel 308 can be connected together; the end of the spring 305 away from the limiting rod 307 is provided with a fixed block 304; when the storage platform 7 needs to be moved, the limiting rod 307 is pulled up to be separated from the rotating wheel 308; when the storage platform 7 moves to a proper position, the limiting rod 307 is released, and the limiting rod 307 is restored to the original position under the elastic action of the spring 305 to lock the rotating wheel 308, so that the position of the storage platform 7 is fixed.

[0039] Embodiment two

[0040] As Figure 5 shown, the utility model discloses a photoresist refrigeration device, compared with embodiment one, this embodiment introduces the structure of storage mechanism in detail.

[0041] The storage mechanism comprises a placing pipe 401, a placing groove 402, a through hole 407 and a mounting assembly; the placing pipe 401 is arranged on the top of the lifting plate 317, a plurality of placing pipes 401 are arranged, the placing groove 402 is arranged on the placing pipe 401, the through hole 407 is arranged on the bottom of the placing groove 402, the through hole 407 penetrates the placing pipe 401 and the lifting plate 317, and is used for passing the refrigerating liquid so that the refrigerating liquid surrounds the photoresist container; the mounting assembly is arranged on the inner side of the placing groove 402 and is used for clamping the photoresist container. The mounting assembly comprises a mounting groove 403, a clamping plate 404, an extension pipe 405 and a spring 406; the mounting groove 403 is arranged on the placing pipe 401, three mounting grooves 403 are annularly arranged around the placing pipe 401, the extension pipe 405 is arranged on the inner side of the mounting groove 403, the spring 406 is arranged on the outer side of the extension pipe 405, the clamping plate 404 is arranged on the end of the extension pipe 405 away from the mounting groove 403, and the top of the clamping plate 404 is an arc surface, so that the photoresist container is conveniently pressed into the side of the clamping plate 404; when installation is needed, the photoresist container is aligned with the center of the three clamping plates 404, and then is pressed downward, the photoresist container is pressed downward to between the three clamping plates 404 along the arc surface of the clamping plate 404, at this time, the spring 406 and the extension pipe 405 are compressed to generate a reaction force, and then the photoresist container is clamped in the center of the placing pipe 401, so that shaking and collision during transportation are avoided.

[0042] In summary, when the utility model is used, the refrigerator box 1 is opened by rotating the box door 5 through the pull ring 6, and then the handle 301 is held and rotated, the handle 301 drives the rotating rod 302 to rotate, the rotating rod 302 drives the rotating shaft one 303 to rotate, the rotating shaft one 303 drives the circular gear two 310 to rotate through the circular gear one 309, the circular gear two 310 drives the circular gear three 312 to rotate through the rotating shaft two 311, the circular gear three 312 drives the rack 313 to move, the rack 313 drives the moving rod 314 to move in the fixed frame 316 through the sliding block 315, the moving rod 314 drives the storage table 7 to rise through the lifting plate 317 until the storage table 7 extends out of the refrigerator box 1, at this time, the limiting rod 307 is loosened, the limiting rod 307 is restored to the original position to block the rotating wheel 308 under the elastic action of the spring one 305, then the photoresist container is aligned with the center of the three clamping plates 404 and pressed downward, the photoresist container is pressed downward to between the three clamping plates 404 along the arc surface of the clamping plate 404, at this time, the spring two 406 and the extension pipe 405 are compressed to generate a reaction force, and then the photoresist container is clamped in the center of the placing pipe 401, after installation is completed, the handle 301 is reversely rotated, the placing pipe 401 is moved to the inner side of the refrigerator box 1 through the lifting plate 317 and the box door 5 is closed, the connecting pipe 2 and the refrigerating liquid supply box are connected, then the refrigerating liquid is poured, the refrigerating liquid is located above the partition plate 8 and can flow into the gap between the placing pipe 401 and the storage table 7 through the through hole 407, and then the refrigerating liquid wraps the photoresist container, when the photoresist container is taken out, the placing pipe 401 is lifted to the outer side of the refrigerator box 1 to be directly taken out.

[0043] The embodiments of the present application are described in detail above with reference to the drawings, but the present application is not limited thereto, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present application.

Claims

1. A photoresist refrigeration device, comprising a refrigerator (1) and a partition (8) disposed inside the refrigerator (1); characterized in that, Also includes: The lifting mechanism is located on the top of the partition (8) and is used to drive the photoresist to move up and down at a fixed point. The storage mechanism is located on top of the lifting mechanism and is used to clamp and store photoresist containers of different sizes. A movable rod (314) is provided with a slider (315) at the bottom of the movable rod (314). A fixed frame (316) is slidably provided on the outside of the slider (315). The bottom of the fixed frame (316) is fixedly connected to the bottom of the inner side of the refrigerator (1). A lifting plate (317) is provided on the top of the movable rod (314). The top of the lifting plate (317) is fixedly connected to the bottom of the storage mechanism. The movable rod (314) moves within the fixed frame (316) through the slider (315). And a storage platform (7), which is located on the top inside the refrigerator (1). The storage platform (7) has multiple through slots, each of which is slidably connected to the storage mechanism. The photoresist container is installed on the storage mechanism and there is a gap between it and the through slot of the storage platform (7). The gap is used to allow the refrigeration liquid to pass through, thereby covering the outside of the container.

2. The photoresist refrigeration device according to claim 1, characterized in that, The lifting mechanism includes a lifting component and a locking component; The lifting assembly is installed on the refrigerator (1) and is used to drive the storage mechanism to move up and down; The locking component is located on the outside of the refrigerator (1) and is used to lock the position of the lifting component after it has been moved to the appropriate position.

3. The photoresist refrigeration device according to claim 2, characterized in that, The lifting assembly includes a pivot (303), a rotating rod (302), a handle (301), and a spur gear (309); A rotating shaft (303) is rotatably mounted on a refrigerator (1). A rotating rod (302) is mounted at the end of the rotating shaft (303). A handle (301) is mounted at the end of the rotating rod (302) away from the rotating shaft (303). A spur gear (309) is mounted on the outside of the rotating shaft (303). A spur gear (310) is mounted at the bottom of the spur gear (309). A rotating shaft (311) is mounted at the center of the spur gear (310). A spur gear (312) is mounted at the end of the rotating shaft (311) away from the spur gear (310). A connecting piece (318) is rotatably mounted on the outside of the rotating shaft (311). A rack (313) meshes with the side of the spur gear (312).

4. The photoresist refrigeration device according to claim 3, characterized in that, The locking assembly includes a rotating wheel (308), a fixed shaft (306), a limit rod (307), and a spring (305); The rotating wheel (308) is located on the outside of the rotating shaft (303), the fixed shaft (306) is located on the outside of the refrigerator (1), the limiting rod (307) is rotatably located on the outside of the fixed shaft (306), the spring (305) is located at the end of the limiting rod (307), there are two springs (305) symmetrically arranged about the limiting rod (307), and a fixing block (304) is provided at the end of the spring (305) away from the limiting rod (307).

5. The photoresist refrigeration device according to claim 1, characterized in that, The storage mechanism includes a placement tube (401), a placement slot (402), a through hole (407), and mounting components; The placement tube (401) is located on the top of the lifting plate (317), the placement groove (402) is located on the placement tube (401), and the through hole (407) is located on the bottom of the placement groove (402). The mounting component is located inside the placement slot (402) and is used to hold the photoresist container.

6. The photoresist refrigeration device according to claim 1, characterized in that, The mounting components include a mounting slot (403), a clamp (404), a telescopic tube (405), and a second spring (406); The mounting groove (403) is set on the placement tube (401), the telescopic tube (405) is set on the inner side of the mounting groove (403), the second spring (406) is set on the outer side of the telescopic tube (405), and the clamp (404) is set on the end of the telescopic tube (405) away from the mounting groove (403).

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