Quick release structure of external filter for semiconductor cleaning agent

Abstract

The utility model discloses a semiconductor cleaning agent external filter quick release structure which comprises a filter body, a fixing plate is arranged on the right side of the filter body, two transverse plates are fixedly connected to the left side face of the fixing plate, and two lapping plates are fixedly connected to the outer surface of the filter body. The two lapping plates are located between the two transverse plates, two connecting plates are fixedly connected to the outer surface of the filter body, and an inserting hole is formed in the upper surface of each connecting plate. According to the device, the filter body and the fixing plate can be preliminarily connected through the cooperation of the transverse plate and the lapping plate, and the inserting rod can be conveniently pulled by the pulling plate through the cooperation of the fixing cylinder, the spring, the inserting rod, the connecting plate, the inserting hole, the pulling groove and the pulling plate, so that the inserting rod and the connecting plate can be rapidly separated; the filter body can be quickly disassembled, and meanwhile, the insertion rod can be jacked by utilizing the elasticity of the spring, so that the filter body can be quickly fixed.

Description

TECHNICAL FIELD

[0001] The utility model relates to filter technical field especially a semiconductor cleaning agent external filter quick release structure. BACKGROUND

[0002] The semiconductor cleaning agent is often doped with tiny impurities after carrying out the cleaning work because of contacting with various material surfaces, these impurities can include dust, particulate matter, grease and tiny residual released in the cleaning process, all these can have negative influence on the subsequent semiconductor manufacturing process, therefore, must use the filter to filter the cleaning agent after use to ensure its purity and quality.

[0003] The semiconductor cleaning agent is filtered and recovered to the original state through the regenerator after use, but the filter usually installs by using bolt during use, leads to the more cumbersome of the disassembly and fixation of the filter, for this, we propose a semiconductor cleaning agent external filter quick release structure to solve the above problems. SUMMARY

[0004] The utility model discloses a semiconductor cleaning agent external filter quick release structure to solve the problem in the background art.

[0005] To achieve the above object, the utility model provides the following technical scheme:

[0006] A semiconductor cleaning agent external filter quick release structure, including the filter body, the right side of filter body is provided with the fixed plate, the left side surface of fixed plate is fixedly connected with two horizontal boards, the outer surface of filter body is fixedly connected with two battens, two the batten is located between two horizontal boards, the outer surface of filter body is fixedly connected with two connecting plates, the upper surface of each connecting plate is all set up with the plug hole, the left side surface of fixed plate is fixedly connected with the fixed cylinder, the inside of fixed cylinder is provided with the spring, both ends of spring are all fixedly connected with the plug rod, two the plug rod is away from each other's one end all penetrates plug hole and extends to the other side of connecting plate, the outer surface of fixed cylinder is set up with the pull groove, the outer surface of each plug rod is all fixedly connected with the pull plate, and the other end of each pull plate all penetrates pull groove and extends to the outside of fixed cylinder.

[0007] In further embodiments, the side of each of the two horizontal plates that is closer to the other is provided with a positioning slot, and the inner wall of each of the positioning slots is slidably connected with a positioning block. The side of each of the two positioning blocks that is closer to the other is connected to the side of each of the two battens that is farther away from the other.

[0008] In further embodiments, the front surface of the fixed plate and the back surface of the fixed plate are both fixedly connected with a mounting plate, and the right side surface of each of the mounting plates is provided with a group of mounting holes.

[0009] In further embodiments, the top end of the filter body is provided with a connecting flange, and the bottom end of the filter body is provided with a connecting flange.

[0010] In further embodiments, the outer surface of each pull plate is in sliding connection with the pull slot.

[0011] Compared with the prior art, the utility model has the beneficial effects that:

[0012] The preliminary connection between the filter body and the fixed plate can be formed through the cooperation of the transverse plate and the clamping plate, the cooperation of the fixed cylinder, the spring, the insertion rod, the connecting plate, the insertion hole, the pull slot and the pull plate, the insertion rod can be conveniently pulled by the pull plate, the insertion rod and the connecting plate can be quickly separated, the filter body can be quickly disassembled, and the insertion rod can be pushed by the elasticity of the spring, and the filter body can be quickly fixed. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 It is a three-dimensional structure schematic view of the quick disassembly structure of the external filter of the semiconductor cleaning agent.

[0014] Fig. 2 It is a three-dimensional structure schematic view of the fixed cylinder of the quick disassembly structure of the external filter of the semiconductor cleaning agent.

[0015] Fig. 3 It is a three-dimensional structure schematic view of the clamping plate of the quick disassembly structure of the external filter of the semiconductor cleaning agent.

[0016] In the figure: 1, filter body; 2, connecting flange; 3, transverse plate; 4, connecting plate; 5, fixed cylinder; 6, fixed plate; 7, clamping plate; 8, mounting hole; 9, insertion hole; 10, insertion rod; 11, spring; 12, pull slot; 13, pull plate; 14, positioning groove; 15, positioning block; 16, mounting plate. DETAILED DESCRIPTION

[0017] In the description of the utility model, it should be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connection" and "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication between two elements. For ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to specific circumstances.

[0018] Clearly, the described embodiments are merely a part of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0019] Please refer to Figs. 1-3 In the present application, a kind of semiconductor cleaning agent external filter quick release structure, including filter body 1, the top end of filter body 1 and the bottom end of filter body 1 are provided with connecting flange 2, connecting flange 2 is used to facilitate staff to connect between filter body 1 and pipeline.

[0020] The right side of filter body 1 is provided with fixed plate 6, the front surface of fixed plate 6 and the back surface of fixed plate 6 are fixedly connected with mounting plate 16, a group of mounting holes 8 are formed in the right side surface of each mounting plate 16, mounting plate 16 and mounting hole 8 are used to facilitate staff to reinforce fixed plate 6.

[0021] The left side surface of fixed plate 6 is fixedly connected with two horizontal plates 3, the outer surface of filter body 1 is fixedly connected with two battens 7, two battens 7 are located between two horizontal plates 3, by placing batten 7 between horizontal plate 3, preliminary support can be formed to filter body 1.

[0022] The side surface of two horizontal plates 3 close to each other is provided with positioning groove 14, the inner wall of each positioning groove 14 is slidably connected with positioning block 15, the side surface of two positioning blocks 15 close to each other is connected with the side surface of two battens 7 away from each other, positioning groove 14 and positioning block 15 are used to form the effect of pulling batten 7, so that filter body 1 can be stabilized on horizontal plate 3.

[0023] The outer surface of filter body 1 is fixedly connected with two connecting plates 4, the upper surface of each connecting plate 4 is provided with insertion hole 9, the left side surface of fixed plate 6 is fixedly connected with fixed cylinder 5, spring 11 is arranged in fixed cylinder 5, the both ends of spring 11 are fixedly connected with insertion rod 10, the end of two insertion rods 10 away from each other is penetrated through insertion hole 9 and extends to the other side of connecting plate 4, the elasticity of spring 11 can drive insertion rod 10, insertion rod 10 will pass through insertion hole 9 to form the stability of connecting plate 4, so as to ensure the stability of filter body 1.

[0024] The outer surface of the fixed cylinder 5 is provided with a pull slot 12, the outer surface of each insertion rod 10 is fixedly connected with a pull plate 13, the other end of each pull plate 13 penetrates through the pull slot 12 and extends to the outside of the fixed cylinder 5, the insertion rod 10 can be pulled by the pull plate 13, then the filter body 1 is pulled to separate the positioning block 15 from the positioning groove 14, and the filter body 1 can be quickly disassembled.

[0025] The outer surface of each pull plate 13 is slidably connected with the pull slot 12, so that the stability of the insertion rod 10 during movement can be ensured.

[0026] The working principle of the utility model is: when the filter body 1 needs to be disassembled, the connecting flange 2 is first disassembled from the pipeline, then the two pull plates 13 are pulled to be close to each other, the pull plate 13 drives the insertion rod 10 to be close to each other, the insertion rod 10 is gradually separated from the insertion hole 9, then the filter body 1 is pulled until the positioning block 15 is separated from the positioning groove 14, and the filter body 1 can be conveniently disassembled, when installing, the two pull plates 13 are pulled to make the insertion rod 10 close to each other to compress the spring 11, then the positioning block 15 is inserted into the positioning groove 14, the filter body 1 is pushed until the insertion rod 10 is aligned with the insertion hole 9, the pull plate 13 is loosened, the spring 11 drives the insertion rod 10 to enter the insertion hole 9, so that the filter body 1 is quickly installed.

[0027] For those skilled in the art, it is obvious that the utility model is not limited to the details of the above-mentioned exemplary embodiments, and can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the utility model is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any reference signs in the claims should not be regarded as limiting the claims involved.

[0028] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that those skilled in the art can understand.

Claims

1. A quick-release structure for an external filter of a semiconductor cleaning agent, characterized in that: The utility model relates to a filter, including filter body (1), the right side of filter body (1) is provided with fixed plate (6), the left side surface fixed connection of fixed plate (6) has two cross plates (3), the outer surface of filter body (1) is fixedly connected with two battens (7), two battens (7) are located between two cross plates (3), the outer surface of filter body (1) is fixedly connected with two connecting plates (4), the upper surface of each connecting plate (4) is all set up with plug hole (9), the left side surface fixed connection of fixed plate (6) has fixed cylinder (5), the inside of fixed cylinder (5) is provided with spring (11), both ends of spring (11) are all fixedly connected with plug rod (10), and the end of mutual faraway of two plug rods (10) all penetrates plug hole (9) and extends to the other side of connecting plate (4), and the outer surface of fixed cylinder (5) is set up with pull slot (12), and the outer surface of each plug rod (10) is all fixedly connected with pull plate (13), and the other end of each pull plate (13) all penetrates pull slot (12) and extends to the outside of fixed cylinder (5).

2. The quick release structure of a semiconductor cleaning agent external filter according to claim 1, characterized in that: The side of two cross plates (3) is all set up with locating groove (14), the inner wall of each locating groove (14) is all slidably connected with locating block (15), and the side of two locating blocks (15) is connected with the side of two battens (7) away from each other respectively.

3. The quick release structure of a semiconductor cleaning agent external filter according to claim 1, characterized in that: The front of fixed plate (6) and the back of fixed plate (6) are all fixedly connected with mounting plate (16), and the right side of each mounting plate (16) is all set up with a group of mounting holes (8).

4. The quick release structure of a semiconductor cleaning agent external filter according to claim 1, characterized in that: The top end of filter body (1) and the bottom end of filter body (1) are all provided with connecting flange (2).

5. The quick release structure of a semiconductor cleaning agent external filter according to claim 1, characterized in that: The outer surface of each pull plate (13) is slidably connected with pull slot (12).

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