MEMS pressure sensing probe
By introducing a cooling system with a thermal pad and a sealing cap, as well as a buffer and spring design, into the MEMS pressure sensing probe, the problems of poor cooling and vibration effects of traditional probes are solved, achieving stable temperature and efficient data acquisition, extending the probe's service life and reducing maintenance costs.
Patent Information
- Application Number
- CN202423043818.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-10
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2034-12-10
AI Technical Summary
Traditional pressure sensor probes have poor internal cooling systems, leading to high controller temperatures, performance degradation of electronic components, large output data errors, and reduced lifespan and accuracy due to external vibrations and impacts, as well as high replacement costs.
A MEMS pressure sensing probe was designed, which uses a thermal pad and a sealing cap to form a closed space for injecting coolant, combined with a damper and spring to absorb vibration, ensuring that the controller operates at a suitable temperature and preventing component damage.
It effectively avoids coolant leakage, maintains a stable internal temperature of the probe, improves detection accuracy and service life, reduces the frequency of failures, and lowers replacement costs.
Smart Images
Figure CN223727301U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to sensor technical field, concretely is a MEMS pressure sensor probe. BACKGROUND
[0002] In industrial production, scientific research and many engineering fields, the pressure sensor probe plays an important role, and it undertakes the heavy responsibility of accurately collecting pressure data, and provides key basis for monitoring and control of system operation state, however, the traditional pressure sensor probe is poor in the internal cooling system in the actual use process, which forces the controller to be in a high temperature environment, resulting in rapid performance degradation of electronic components, ultimately causing the error of pressure data output by the probe to soar, and frequent faults, at the same time, external vibration and impact force have always been the reason that troubles the service life and precision of the pressure sensor probe, and long-term impact will also accelerate the wear of components, greatly shorten the service life of the probe, frequent replacement of the probe not only has high cost, but also will affect the production continuity.
[0003] Therefore, we propose a MEMS pressure sensor probe. CONTENT OF THE UTILITY MODEL
[0004] The utility model discloses a MEMS pressure sensor probe.
[0005] In order to achieve the above-mentioned purpose, the utility model provides the following technical scheme: a MEMS pressure sensor probe, including shell and controller, the upper and lower sides of the shell are equipped with upper sealing cover and lower sealing cover respectively, the controller is connected with the top of lower sealing cover through heat conduction pad, the inside of lower sealing cover is installed with heat conduction pipe and filling port, the bottom of shell is installed with buffer and spring, the other side of buffer is connected with installer through screw, the both sides of installer are equipped with fixer.
[0006] As a further scheme of the utility model: the controller is installed above the heat conduction pad, the lower sealing cover is connected with the bottom of shell through screw thread, the top of lower sealing cover and the bottom of shell are all installed with sealing pad, the lower sealing cover and the bottom of shell are connected to form airtight space, the inside of airtight space is filled with coolant through filling port, the filling port is installed with sealer through screw thread.
[0007] As a further scheme of the utility model: one side of buffer is connected with the bottom of shell, the periphery of buffer is equipped with spring, the upper of fixer is equipped with fixed hole.
[0008] As a further scheme of the utility model: the upper of upper sealing cover is equipped with limiter, the conductive ball is installed in the inside of upper sealing cover through the limiter.
[0009] As a further scheme of the utility model: the middle position of the conductive ball is equipped with a sealing ring and is connected with the inner wall of the shell, the bottom of the conductive ball is connected with the pressure sensor, and the sensor is installed above the controller.
[0010] As a further scheme of the utility model: the bottom of the lower sealing cover and the heat-conducting pad is equipped with a hole, a wire is passed through the hole, and the wire is connected with the controller.
[0011] Compared with the prior art, the utility model has the beneficial effects that:
[0012] 1. The lower sealing cover is connected with the bottom of the shell in the form of screw thread, a sealing pad is used to effectively form a closed space, the coolant is filled through the filling port, the filling port is sealed by the sealing device in the form of screw thread, the leakage of the coolant is effectively avoided, the stability of the cooling system inside the probe is ensured, the controller can work in a suitable temperature environment, and the performance loss or failure caused by excessively high temperature is reduced.
[0013] 2. The spring is sleeved around the buffer, one side of the buffer is connected with the bottom of the shell, and the other side is connected with the mounting device through a screw, the direct action of external vibration and impact force on the probe is effectively avoided, the buffer and the spring cooperate to greatly absorb and disperse vibration energy, the internal precision components of the probe are prevented from being physically damaged, and the detection precision and service life of the pressure sensing probe are improved.
[0014] Other advantages, objects and features of the utility model will be described in the subsequent description, and to some extent, it will be obvious to those skilled in the art based on the study of the following text or can be taught from the practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 It is the overall schematic diagram in the embodiment of the utility model;
[0016] Figure 2 It is the wire schematic diagram in the embodiment of the utility model;
[0017] Figure 3 It is the cross-sectional schematic diagram in the embodiment of the utility model;
[0018] Figure 4 It is the A schematic diagram of Figure 3 ; It is the B schematic diagram of
[0019] Figure 5 It is the A schematic diagram of Figure 3 ; It is the B schematic diagram of
[0020] In the figure: 1, the shell; 1001, the sealing gasket; 2, the upper sealing cover; 3, the lower sealing cover; 3001, the sealer; 4, the controller; 41, the heat-conducting pad; 5, the heat-conducting pipe; 6, the buffer; 6001, the spring; 61, the installer; 7, the limiter; 71, the conductive ball; 8, the inductor; 9, the wire. DETAILED DESCRIPTION
[0021] The specific embodiments of the present application will be further described below with reference to the drawings, and it should be noted that the description of these embodiments is used to help understand the present application, but does not constitute a limitation on the present application.
[0022] In addition, the technical features involved in each embodiment of the present application described below can be combined with each other as long as there is no conflict between them.
[0023] Please refer to the accompanying Figure 1 - the accompanying Figure 5 The present application discloses a MEMS pressure sensing probe, which comprises a shell 1 and a controller 4, the upper and lower sides of the shell 1 are respectively provided with an upper sealing cover 2 and a lower sealing cover 3, the controller 4 is stably connected with the top end of the lower sealing cover 3 through a heat-conducting pad 41, the heat-conducting pad 41 can efficiently conduct the heat generated by the controller 4 during operation to the lower sealing cover 3, so as to maintain the temperature of the controller 4 within a reasonable range and ensure its stable and accurate operation, the heat-conducting pipe 5 and the filling port are ingeniously installed in the lower sealing cover 3, the filling port provides a channel for the injection of coolant, the bottom of the shell 1 is provided with a buffer 6 and a spring 6001, the other side of the buffer 6 is stably connected with an installer 61 through a screw, the installer 61 is symmetrically provided with a fixer on both sides, a fixing hole is accurately formed above the fixer, which facilitates the stable fixation of the probe at a specified position by means of connecting members such as bolts, and ensures that the probe can accurately and reliably collect pressure data under complex working conditions.
[0024] In embodiment one, the controller 4 is installed above the heat-conducting pad 41, the lower sealing cover 3 is connected with the bottom of the shell 1 through threads, the top of the lower sealing cover 3 and the bottom of the shell 1 are both provided with a sealing gasket 1001, a closed space is formed by connecting the lower sealing cover 3 with the bottom of the shell 1, the closed space is filled with coolant through the filling port, the filling port is provided with a sealer 3001 through threads, one side of the buffer 6 is connected with the bottom of the shell 1, the spring 6001 is sleeved on the periphery of the buffer 6, and a fixing hole is formed above the fixer;
[0025] Specifically, the controller 4 is arranged above the heat-conducting pad 41, which quickly conducts the heat generated by the controller 4 during continuous high-intensity work, and at the same time, the lower sealing cover 3 is tightly connected to the bottom of the shell 1 through threads, and the top of the lower sealing cover 3 and the bottom of the shell 1 are respectively provided with sealing pads 1001, when the lower sealing cover 3 and the bottom of the shell 1 are tightly screwed, a closed space is formed, and the coolant is injected into the closed space through the filling port, in order to prevent the leakage of the coolant, the sealing device 3001 is installed at the filling port through threads, one side of the buffer 6 is installed on the bottom of the shell 1, the spring 6001 is sleeved on the periphery of the buffer 6, and the installers 61 are symmetrically arranged on both sides of the buffer 6. The fixing hole above the fixers provides an embedding point for connecting members such as bolts.
[0026] In the second embodiment, the upper sealing cover 2 is provided with limiters 7 around the top, the conductive ball 71 is installed in the upper sealing cover 2 through the limiters 7, the middle position of the conductive ball 71 is provided with a sealing ring and connected to the inner wall of the shell 1, the bottom of the conductive ball 71 is connected to the pressure sensor 8, the sensor 8 is installed above the controller 4, the lower sealing cover 3 and the bottom of the heat-conducting pad 41 are both provided with holes, the wires 9 are passed through the holes and connected to the controller 4.
[0027] Specifically, the upper sealing cover 2 is provided with limiters 7 around the top, the limiters 7 control the installation position of the conductive ball 71, the middle position of the conductive ball 71 is carefully provided with a sealing ring, the bottom of the conductive ball 71 is in contact with the pressure sensor 8, the pressure sensor 8 is installed above the controller 4, the lower sealing cover 3 and the bottom of the heat-conducting pad 41 are both provided with holes, and the wires 9 are passed through the holes and tightly connected to the controller 4.
[0028] Working principle:
[0029] First, when the MEMS pressure sensing probe is put into use, it is fixed through the fixing hole. When in the working environment, external pressure acts on the probe. The pressure is first conducted to the conductive ball 71, and then to the pressure sensor 8 connected at the bottom. The pressure sensor 8 senses the pressure change in real time, quickly converts it into an electrical signal, and then transmits it to the controller 4 located above. At the same time, the controller 4 will continuously generate heat when processing these electrical signals under continuous high-intensity operation. A heat-conducting pad 41 is tightly attached to the bottom of the controller 4, and the heat-conducting pad 41 quickly conducts the heat to the lower sealing cover 3 connected to it. The lower sealing cover 3 also has a heat-conducting pipe 5 inside. The coolant is stored in the lower sealing cover 3 and the bottom of the outer shell 1 are connected by threads and with the help of a sealing gasket 1001. Within the enclosed space, coolant is precisely injected through the filling port, which is then securely sealed by a threaded sealer 3001 to prevent leakage. This ensures the stable operation of the probe's internal cooling system, keeping the controller 4 in a suitable temperature environment and maintaining efficient operation. When the probe encounters external vibration or impact, the buffer 6 installed at the bottom of the housing 1 and the spring 6001 surrounding the buffer 6 can disperse the vibration energy, ensuring stable operation of all components and accurate acquisition and processing of pressure data. Furthermore, the bottom of the lower sealing cover 3 and the thermal pad 41 has holes through which the wire 9 passes and is tightly connected to the controller 4, allowing for data transmission. This concludes the entire workflow.
[0030] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on the perspective of the observer, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.
[0031] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.
[0032] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.
[0033] For those skilled in the art, various changes, modifications, substitutions, and alterations to these embodiments without departing from the principles and spirit of this utility model will still fall within the protection scope of this utility model.
Claims
1. A MEMS pressure sensing probe comprising a housing (1) and a controller (4), the housing (1) is provided with an upper sealing cover (2) and a lower sealing cover (3) on the upper and lower sides respectively, characterized in that: The controller (4) is connected with the top end of the lower sealing cover (3) through the heat conduction pad (41), the heat conduction pipe (5) and the filling port are arranged in the lower sealing cover (3), the buffer (6) and the spring (6001) are arranged at the bottom of the shell (1), the other side of the buffer (6) is connected with the mount (61) through a screw, and the mount (61) is provided with the fixer on both sides.
2. The MEMS pressure sensing probe of claim 1, wherein: The controller (4) is arranged above the heat conduction pad (41), the lower sealing cover (3) is connected with the bottom of the shell (1) through a thread, the top of the lower sealing cover (3) and the bottom of the shell (1) are provided with the sealing pad (1001), the closed space is formed by connecting the lower sealing cover (3) with the bottom of the shell (1), the coolant is filled into the closed space through the filling port, and the sealing device (3001) is arranged on the filling port through a thread.
3. The MEMS pressure sensing probe of claim 1, wherein: One side of the buffer (6) is connected with the bottom of the shell (1), the spring (6001) is arranged on the periphery of the buffer (6), and the fixer is provided with the fixing hole.
4. The MEMS pressure sensing probe of claim 1, wherein: The upper sealing cover (2) is provided with the limiters (7) around the top, and the conductive ball (71) is arranged in the upper sealing cover (2) through the limiters (7).
5. The MEMS pressure sensing probe of claim 4, wherein: The middle position of the conductive ball (71) is provided with the sealing ring and is connected with the inner wall of the shell (1), the bottom of the conductive ball (71) is connected with the pressure sensor (8), and the sensor (8) is arranged above the controller (4).
6. The MEMS pressure sensing probe of claim 1, wherein: The bottom of the lower sealing cover (3) and the heat conduction pad (41) is provided with the hole, the lead wire (9) is arranged in the hole, and the lead wire (9) is connected with the controller (4).