Silicon wafer basket carrying device

Abstract

The utility model discloses a silicon wafer flower basket carrying device which comprises the following components: two first beam bodies which extend along a first direction, are cylindrical and are arranged side by side along a second direction; the second beam body extends in the second direction, and the second beam body is arranged on the first beam body; the second beam body is arranged on the first beam body through the first driving assembly, the first driving assembly comprises a driving wheel, a groove is formed in the driving wheel in the perimeter direction of the driving wheel, and the driving wheel is connected with the first beam body in a clamped mode through the groove; the driving wheel of the first driving assembly moves along the first beam body so as to drive the silicon wafer basket to move in the first direction, meanwhile, the silicon wafer basket moves along the second beam body in the second direction through the second beam body, all-directional transportation of the silicon wafer basket is achieved on the plane, manual carrying of the silicon wafer basket is not needed, and therefore manpower is saved, and meanwhile the efficiency is improved. And the carrying efficiency of the silicon wafer flower basket is improved, so that the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of multi-axis drive device technology, and in particular to a silicon wafer basket handling device. Background Technology

[0002] In the silicon wafer production process, after the silicon wafers are debonded, cleaned, and installed, they need to be transferred to the next process along with the silicon wafer basket. After the silicon wafer basket is loaded with silicon wafers, its overall weight is relatively heavy, making it quite troublesome to transfer the silicon wafer basket. Therefore, a silicon wafer basket handling device is provided. Utility Model Content

[0003] To overcome the above-mentioned shortcomings, the purpose of this utility model is to provide a silicon wafer basket transport device. This device utilizes the drive wheel of a first drive assembly to move along a first beam, thereby driving the silicon wafer basket to move in a first direction. A second drive assembly drives a third beam to move along the length of a second beam, causing the silicon wafer basket to move along the second beam in a second direction. A third drive assembly drives the basket connecting assembly to move along the length of the third beam, thus driving the silicon wafer basket to move in a third direction. This achieves omnidirectional transport of the silicon wafer basket on a plane, eliminating the need for manual handling and saving manpower. Simultaneously, it increases the transport efficiency of the silicon wafer basket, thereby improving production efficiency.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is: a silicon wafer basket handling device, comprising:

[0005] The first beam extends along a first direction and is columnar; two first beams are arranged side by side along a second direction.

[0006] The second beam extends along a second direction and is disposed on the first beam;

[0007] A first drive assembly is provided, and the second beam is disposed on the first beam via the first drive assembly. The first drive assembly includes a drive wheel, and the drive wheel is provided with a groove along its circumference. The drive wheel is engaged with the first beam via the groove.

[0008] In this technical solution, the first crossbeam supports the second crossbeam and guides its movement, causing the second beam to move along a first direction, thereby driving the silicon wafer basket to move and completing the transportation of the silicon wafer basket. The first drive assembly drives the second beam to move along the length of the first beam by driving the drive wheel on the first beam. By utilizing the drive wheel of the first drive assembly to move along the first beam, the silicon wafer basket is driven to move along the first direction. At the same time, through the second beam, the silicon wafer basket moves along the second beam in a second direction, achieving omnidirectional transportation of the silicon wafer basket on a plane. This eliminates the need for manual handling of the silicon wafer basket, saving manpower and increasing the handling efficiency of the silicon wafer basket, thereby improving production efficiency.

[0009] In some embodiments, the silicon wafer basket transport device further includes a third beam extending in a third direction and connected to the second beam.

[0010] In this technical solution, the third beam is used to guide the silicon wafer basket to move in a third direction, thereby facilitating the lifting and placement of the silicon wafer basket and thus transporting the silicon wafer basket.

[0011] In some embodiments, the silicon wafer basket transport device further includes a second drive assembly, wherein the third beam is mounted on the second beam via the second drive assembly.

[0012] In this technical solution, the second driving component is used to drive the third beam to move along the length direction of the second beam.

[0013] In some embodiments, the second drive assembly includes a drive gear and a drive shaft extending in a second direction and having one side serrated, the drive shaft being fixed to the second beam, and the drive gear being engaged with the drive shaft.

[0014] In this technical solution, the drive shaft is used to engage with the drive wheel, thereby driving the drive wheel to move when the drive wheel rotates, and in turn driving the second drive assembly to move.

[0015] In some embodiments, the second beam has a snap-fit ​​protrusion on the side near the second drive assembly, the snap-fit ​​protrusion extends along a second direction, and snap-fit ​​grooves are provided on the upper and lower sides of the snap-fit ​​protrusion along its length direction. The third beam includes a sliding snap-fit ​​assembly, and the sliding snap-fit ​​assembly is snapped into the snap-fit ​​protrusion through the snap-fit ​​grooves.

[0016] In this technical solution, the snap-fit ​​protrusion snaps into the sliding snap-fit ​​component through the snap-fit ​​groove, which is beneficial for installing the third beam and preventing the third beam from falling off the second beam. At the same time, it is also beneficial for the second drive component to move in the opposite direction along the length of the second beam.

[0017] In some embodiments, the silicon wafer basket transport device further includes a third drive assembly, the third drive assembly including a track, one end of which is fixed to the sliding engagement assembly of the third beam.

[0018] In this technical solution, the third driving component is used to drive the silicon wafer basket to move along the length of the third beam.

[0019] In some embodiments, the silicon wafer basket handling device further includes a basket connecting assembly disposed on the third beam, and one end of the track is connected to the basket connecting assembly.

[0020] In this technical solution, the basket connector is used to dock with the silicon wafer basket.

[0021] In some embodiments, the third beam is provided with a sliding groove along its length, and the basket connecting assembly is connected to the third beam through the sliding groove.

[0022] In this technical solution, the sliding groove is used to engage with the flower basket connecting component to prevent the flower basket connecting component from falling off, and at the same time guides the movement of the flower basket connecting component.

[0023] In some embodiments, the silicon wafer basket transport device further includes a support assembly comprising a plurality of support beams extending in a third direction, with the first beam disposed at the upper end of the support beams.

[0024] In this technical solution, the support component is used to support the first beam, thereby raising the height of the working area of ​​the silicon wafer basket transport device.

[0025] The beneficial effects of this utility model are that by utilizing the drive wheel of the first drive assembly to move along the first beam, the silicon wafer basket is driven to move along the first direction. By utilizing the second drive assembly to drive the third beam to move along the length direction of the second beam, the silicon wafer basket moves along the second beam in the second direction. By utilizing the third drive assembly to drive the basket connecting assembly to move along the length direction of the third beam, the silicon wafer basket is driven to move in the third direction. This achieves all-round transportation of the silicon wafer basket on a plane, and eliminates the need for manual handling of the silicon wafer basket, thereby saving manpower. At the same time, it increases the handling efficiency of the silicon wafer basket, thereby improving production efficiency. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the silicon wafer basket handling device according to an embodiment of the present invention;

[0027] Figure 2 This is a top view schematic diagram of a silicon wafer basket transport device according to an embodiment of the present invention;

[0028] Figure 3This is a schematic diagram showing the connection of the first beam, the second beam, and the third beam of a silicon wafer basket transport device according to an embodiment of the present invention.

[0029] In the diagram: 1. First beam; 2. Second beam; 21. Snap-fit ​​protrusion; 31. Drive wheel; 32. Groove; 4. Third beam; 41. Sliding snap-fit ​​assembly; 42. Sliding groove; 51. Drive gear; 52. Drive shaft; 61. Track; 7. Basket connection assembly; 8. Support assembly; x, First direction; y, Second direction; z, Third direction. Detailed Implementation

[0030] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0031] Combined with appendix Figure 1 To be continued Figure 3 As shown, this utility model provides a silicon wafer basket handling device, comprising:

[0032] The first beam 1 extends along the first direction x and is columnar. Two first beams 1 are arranged side by side along the second direction y, which helps to balance the second beam 2.

[0033] The second beam 2 extends along the second direction y, and the two second beams 2 are disposed on the first beam 1;

[0034] The first drive assembly is used to mount the second beam 2 onto the first beam 1. The first drive assembly includes a drive wheel 31 with a groove 32 along its circumference. The drive wheel 31 is engaged with the first beam 1 through the groove 32.

[0035] The first crossbeam supports the second crossbeam and guides its movement, causing the second beam 2 to move along the first direction x, thereby driving the silicon wafer basket to move and completing the transportation of the silicon wafer basket. The first drive assembly moves on the first beam 1 via the drive wheel 31, thereby driving the second beam 2 to move along the length direction of the first beam 1. By utilizing the drive wheel 31 of the first drive assembly to move along the first beam 1, the silicon wafer basket is driven to move along the first direction x. At the same time, through the second beam 2, the silicon wafer basket moves along the second beam 2 along the second direction y, achieving all-round transportation of the silicon wafer basket on a plane without the need for manual handling, thus saving manpower and increasing the handling efficiency of the silicon wafer basket, thereby improving production efficiency.

[0036] Continue to combine with the appendix Figure 1As shown, in some embodiments, the silicon wafer basket handling device further includes a third beam 4, which extends along a third direction z and is connected to the second beam 2. The third beam 4 is used to guide the movement of the silicon wafer basket along the third direction z, thereby facilitating the lifting and placement of the silicon wafer basket and thus handling the silicon wafer basket.

[0037] Continue to combine with the appendix Figure 3 As shown, in some embodiments, the silicon wafer basket transport device further includes a second drive assembly, wherein the third beam 4 is disposed on the second beam 2 via the second drive assembly, and the second drive assembly is used to drive the third beam 4 to move along the length direction of the second beam 2.

[0038] Continue to combine with the appendix Figure 3 As shown, in some embodiments, the second drive assembly includes a drive gear 51 and a drive shaft 52 extending along the second direction y and having one side serrated. The drive shaft 52 is fixed to the second beam 2. The drive gear 51 is engaged with the drive shaft 52. The drive shaft 52 is used to engage with the drive wheel 31, so that when the drive wheel 31 rotates, it drives the drive wheel 31 to move, thereby driving the second drive assembly to move.

[0039] Continue to combine with the appendix Figure 3 As shown, in some embodiments, the second beam 2 is provided with a snap-fit ​​protrusion 21 on the side near the second drive assembly. The snap-fit ​​protrusion 21 extends along the second direction y. Snap-fit ​​grooves are provided on the upper and lower sides of the snap-fit ​​protrusion 21 along its length. The third beam 4 includes a sliding snap-fit ​​assembly 41. The sliding snap-fit ​​assembly 41 and the snap-fit ​​protrusion 21 are snapped together through the snap-fit ​​grooves. The snap-fit ​​protrusion 21 is snapped together with the sliding snap-fit ​​assembly 41 through the snap-fit ​​grooves, which facilitates the installation of the third beam 4, prevents the third beam 4 from falling off the second beam 2, and also facilitates the second drive assembly to move in the opposite direction along the length of the second beam 2.

[0040] Continue to combine with the appendix Figure 3 As shown, in some embodiments, the silicon wafer basket transport device further includes a third drive assembly, which includes a track 61. One end of the track 61 is fixed to the sliding engagement assembly 41 of the third beam 4. The third drive assembly is used to drive the silicon wafer basket to move along the length direction of the third beam 4.

[0041] Continue to combine with the appendix Figure 3 As shown, in some embodiments, the silicon wafer basket handling device further includes a basket connecting assembly 7, which is disposed on the third beam 4. One end of the track 61 is connected to the basket connecting assembly 7, and the basket connecting assembly 7 is used to dock with the silicon wafer basket.

[0042] Continue to combine with the appendix Figure 3 As shown, in some embodiments, the third beam 4 is provided with a sliding groove 42 along its length direction, and the flower basket connecting assembly 7 is connected to the third beam 4 through the sliding groove 42. The sliding groove 42 is used to engage with the flower basket connecting assembly 7 to prevent the flower basket connecting assembly 7 from falling off, and at the same time to guide the movement of the flower basket connecting assembly 7.

[0043] Continue to combine with the appendix Figure 1 As shown, in some embodiments, the silicon wafer basket handling device further includes a support assembly 8, which includes a plurality of support beams extending along a third direction z. The first beam 1 is disposed at the upper end of the support beams, and the support assembly 8 is used to support the first beam 1, thereby raising the height of the working area of ​​the silicon wafer basket handling device.

[0044] In summary, this utility model provides a silicon wafer basket transport device. By utilizing the drive wheel of the first drive assembly to move along the first beam, the silicon wafer basket moves along a first direction. By utilizing the second drive assembly to drive the third beam to move along the length direction of the second beam, the silicon wafer basket moves along the second beam in a second direction. By utilizing the third drive assembly to drive the basket connecting assembly to move along the length direction of the third beam, the silicon wafer basket moves in a third direction. This achieves omnidirectional transport of the silicon wafer basket on a plane, eliminating the need for manual handling of the basket, thus saving manpower and increasing the transport efficiency of the silicon wafer basket, thereby improving production efficiency.

[0045] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A silicon wafer boat handling device, comprising: The application relates to a flower basket conveying device. The first beam body extends along a first direction and is column-shaped, and two first beam bodies are arranged side by side along a second direction; The second beam body extends along the second direction and is arranged on the first beam body; The second beam body is arranged on the first beam body through a first driving assembly, the first driving assembly comprises a driving wheel, the driving wheel is provided with a groove along the circumferential direction of the driving wheel, and the driving wheel is arranged in the groove and is clamped with the first beam body.

2. The silicon wafer basket handling apparatus of claim 1, wherein, The third beam body extends along a third direction and is connected with the second beam body.

3. The silicon wafer basket handling apparatus of claim 2, wherein, The third beam body is arranged on the second beam body through a second driving assembly.

4. The silicon wafer basket handling apparatus of claim 3, wherein, The second driving assembly comprises a driving gear and a driving shaft extending along the second direction and provided with a sawtooth on one side, the driving shaft is fixed on the second beam body, and the driving gear is arranged in the groove and is clamped with the driving shaft.

5. The silicon wafer basket handling apparatus of claim 3, wherein, The second beam body is provided with a clamping protrusion on one side close to the second driving assembly, the clamping protrusion extends along the second direction, upper and lower sides of the clamping protrusion are provided with clamping grooves along the length direction of the clamping protrusion, the third beam body comprises a sliding clamping assembly, and the sliding clamping assembly is arranged in the clamping groove and is clamped with the clamping protrusion.

6. The silicon wafer basket handling apparatus of claim 5, wherein, The third driving assembly comprises a track, and one end of the track is fixed on the sliding clamping assembly of the third beam body.

7. The silicon wafer basket handling apparatus of claim 6, wherein, The flower basket conveying device further comprises a flower basket connecting assembly arranged on the third beam body, and one end of the track is connected with the flower basket connecting assembly.

8. The silicon wafer basket handling apparatus of claim 7, wherein, The third beam body is provided with a sliding groove along the length direction of the third beam body, and the flower basket connecting assembly is connected with the third beam body through the sliding groove.

9. The silicon wafer basket handling apparatus of claim 1, wherein, The flower basket conveying device further comprises a supporting assembly, the supporting assembly comprises a plurality of supporting beams extending along the third direction, and the first beam body is arranged on the upper end of the supporting beams.

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