Vacuum oven capable of realizing uniform evaporation

Abstract

The utility model provides a vacuum oven capable of achieving even evaporation. The vacuum oven comprises a bin body, a bin door is rotationally connected to the top of the bin body, a perforated plate is fixedly connected to the top in the bin door, and a vacuumizing opening communicated with the interior of the bin door is formed in the top of the bin door. A heating plate is arranged in the bin body, a partition plate enabling an oil way to flow is arranged in the heating plate, a substrate is placed on the heating plate, an oil inlet / outlet is formed in the bottom or the side portion of the bin body, and the oil inlet / outlet is connected with oil bath heating equipment. According to the utility model, the surface temperature uniformity of the heating plate is ensured by replacing the conventional electric heating with oil bath heating, and meanwhile, the perforated plate is arranged at the lower part of the vacuumizing opening, so that the excessive organic coating on the surface of the substrate is uniformly extracted and volatilized through the perforated plate, and the uniform evaporation and drying of the OLED substrate are ensured.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum oven technology, and in particular relates to a vacuum oven that can uniformly evaporate. Background Technology

[0002] A vacuum oven is a box-type drying device that dries materials under negative pressure. Its working principle involves using a vacuum pump to remove air and moisture while heating, creating a vacuum within the chamber, lowering the boiling point of water, and accelerating the drying process.

[0003] Currently available vacuum ovens are round or rectangular in shape, and most of them use electric heating. However, electric heating causes uneven surface temperature of the heating plate, which makes it difficult to meet the problem of uniform evaporation and drying of OLED substrates printed by inkjet printing. Utility Model Content

[0004] To address the aforementioned issues, this invention provides a vacuum oven capable of uniform evaporation. It employs oil bath heating instead of traditional electric heating to ensure uniform surface temperature of the heating plate. Simultaneously, a perforated plate is placed at the vacuum port to ensure that excess organic coating on the substrate surface is uniformly extracted and volatilized.

[0005] A vacuum oven capable of uniform evaporation includes a chamber body, a chamber door rotatably connected to the top of the chamber body, a perforated plate fixedly connected to the top of the chamber door, a vacuum port communicating with the interior of the chamber door at the top of the chamber door; a heating plate is provided inside the chamber body, a baffle for oil flow is provided inside the heating plate, a substrate is placed on the heating plate, and an inlet / outlet / oil port is provided at the bottom or side of the chamber body, the inlet / outlet / oil port being connected to an oil bath heating device.

[0006] In a preferred embodiment, an adjusting screw is fixedly installed at the top inside the compartment door, and the perforated plate is fixedly connected to the adjusting screw.

[0007] As a preferred embodiment, power-assisted pneumatic springs are provided on both sides of the chamber body and the chamber door, and the two ends of the power-assisted pneumatic springs are respectively connected to the sides of the chamber body and the chamber door.

[0008] In a preferred embodiment, the heating plate is screwed to the bottom of the chamber, and a sealing ring is installed at the bottom center of the heating plate. The upper part of the sealing ring is welded to the heating plate, and the lower part of the sealing ring is sealed to the bottom of the chamber through a sealing ring.

[0009] In a preferred embodiment, the area sealed by the sealing ring is connected to the outside, and an inlet / outlet port and a thermal resistance probe are connected within the sealed area.

[0010] As a preferred embodiment, a pressure detection port connected to a pressure gauge is provided on the side of the chamber.

[0011] As a preferred embodiment, an outer shell is fitted onto the outer surface of the chamber, and thermal insulation cotton is filled between the chamber and the outer shell.

[0012] Compared with the prior art, the present invention has at least the following beneficial effects:

[0013] The vacuum oven with uniform evaporation described in this utility model uses oil bath heating instead of the previous electric heating to ensure the surface temperature uniformity of the heating plate. At the same time, a perforated plate is set at the bottom of the vacuum port to ensure that excess organic coating on the substrate surface is uniformly extracted and volatilized, thus ensuring the uniform evaporation and drying of the OLED substrate. Attached Figure Description

[0014] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0015] Figure 1 This is a schematic diagram of the internal structure of the vacuum oven capable of uniform evaporation according to this utility model;

[0016] Figure 2 This is a side view of the vacuum oven for uniform evaporation of this utility model after it has been opened;

[0017] Figure 3 This is a schematic diagram of the rear of the vacuum oven for uniform evaporation of this utility model after it has been opened;

[0018] Figure 4 This is a schematic diagram of the substrate placement structure in the vacuum oven for uniform evaporation according to this utility model;

[0019] Figure 5 This is a schematic diagram of the heating plate structure in the vacuum oven for uniform evaporation of this utility model. Detailed Implementation

[0020] The following description, in conjunction with embodiments, provides a clear and complete explanation of the technical solution of this utility model, enabling those skilled in the art to fully understand it. Obviously, the described embodiments are merely some preferred embodiments of this utility model, and not all embodiments. Any equivalent modifications or substitutions made by those skilled in the art to the following embodiments without creative effort are within the protection scope of this utility model.

[0021] Please see Figures 1 to 5As shown, this embodiment of the invention provides a vacuum oven capable of uniform evaporation, comprising a chamber body 1, a chamber door 3 rotatably connected to the top of the chamber body 1, the chamber door 3 and the chamber body 1 being sealed with an O-ring, a perforated plate 4 fixedly connected to the top of the chamber door 3, and a vacuum port 8 communicating with the interior of the chamber door 3 at the top of the chamber door 3. A heating plate 2 is disposed inside the chamber body 1, and a baffle 2.1 for oil flow is disposed inside the heating plate 2. A substrate 9 is placed on the heating plate 2, and an inlet / outlet / oil port 5 is disposed at the bottom or side of the chamber body 1, which is connected to an oil bath heating device (not shown in the figure). In this embodiment, oil bath heating is used instead of the conventional electric heating to ensure the uniformity of the surface temperature of the heating plate 2. At the same time, a perforated plate 4 is disposed below the vacuum port 8, which ensures that excess organic coating on the surface of the substrate 9 is uniformly extracted and volatilized, thus ensuring uniform evaporation and drying of the OLED substrate.

[0022] Please see Figure 1 and Figure 2 As shown, an adjusting screw 6 is fixedly installed at the top inside the chamber door 3, and a perforated plate 4 is fixedly connected to the adjusting screw 6. The vacuum port 8 is located in the central area above the heating plate 2, and the perforated plate 4 is placed inside the chamber door 3 to evenly disperse the airflow, allowing the coating on the substrate surface to evaporate evenly. By installing the adjusting screw 6 on the perforated plate 4, the distance between it and the substrate 9 can be adjusted according to the actual finished product effect. Assisted pneumatic springs 7 are provided on both sides of the chamber body 1 and the chamber door 3, with both ends of the assisted pneumatic springs 7 connected to the sides of the chamber body 1 and the chamber door 3, respectively. The assisted pneumatic springs 7 automatically open the chamber door 3 when manually opened to a certain angle, and gently close the chamber door 3 when manually closed to a certain angle, making the opening of the chamber door 3 easier and more convenient. The perforated plate 4 at the vacuum port 8 can evenly disperse the airflow, allowing the coating on the substrate 9 to evaporate evenly.

[0023] Please see Figure 1 and Figure 5 As shown, the heating plate 2 is a hollow welded structure. An internal baffle 2.1, which allows for S-shaped oil flow, replaces the oil pipe. The high-temperature oil flowing from the oil bath heating equipment carries its own pressure and can evenly fill the bottom of the heating plate 2, thus uniformly heating its surface. The heating plate 2 is screwed to the bottom of the chamber 1. A sealing ring 2.2 is installed at the bottom center of the heating plate 2. The upper part of the sealing ring 2.2 is welded to the heating plate 2, and the lower part is sealed to the bottom of the chamber 1 via a sealing ring. The area sealed by the sealing ring 2.2 is open to the outside. An inlet / outlet port 5 and a thermal resistance probe 10 are connected within the sealed area. By placing the thermal resistance probe 10 at the bottom of the heating plate 2, the oil bath heating equipment can monitor and control the temperature of the heating plate 2 in real time. The oil bath heating provides high temperature uniformity, achieving a surface temperature uniformity of ±0.5 degrees Celsius for the heating plate 1.

[0024] Please see Figure 1 and Figure 2 As shown, a pressure detection port 11 connected to a pressure gauge is provided on the side of the chamber 1. The pressure gauge can be mechanical or electronic. An outer shell 12 is fitted onto the outer surface of the chamber 1, and insulation cotton 13 is filled between the chamber 1 and the outer shell 12.

[0025] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any way. Those skilled in the art can readily implement this utility model based on the accompanying drawings and the above description. However, any modifications, alterations, or variations made by those skilled in the art without departing from the scope of the utility model's technical solution, utilizing the disclosed technical content, are equivalent embodiments of this utility model. Furthermore, any equivalent changes, alterations, or variations made to the above embodiments based on the essential technology of this utility model are still within the protection scope of this utility model's technical solution.

Claims

1. A uniform evaporation vacuum oven, comprising a warehouse body (1), a warehouse door (3) is rotatably connected at the top of the warehouse body (1), characterized in that: A plurality of perforated plates (4) are fixedly connected to the top of the door (3), and a vacuum extraction port (8) is arranged on the top of the door (3) and communicates with the inside of the door (3); a heating plate (2) is arranged in the tank body (1), a partition plate (2.1) for oil flow is arranged in the heating plate (2), a substrate (9) is placed on the heating plate (2), and an inlet / outlet / oil port (5) is arranged on the bottom or side of the tank body (1) and is connected with an oil bath heating device.

2. The uniform evaporable vacuum oven according to claim 1, characterized in that: An adjusting screw (6) is fixedly installed on the top of the door (3), and the perforated plate (4) is fixedly connected to the adjusting screw (6).

3. The uniform evaporable vacuum oven of claim 1, wherein: A power-assisted pneumatic spring (7) is arranged on the two sides of the tank body (1) and the door (3), and the two ends of the power-assisted pneumatic spring (7) are respectively connected with the side surfaces of the tank body (1) and the door (3).

4. The uniform evaporable vacuum oven of claim 1, wherein: The heating plate (2) is screwed to the bottom of the tank body (1), a sealing ring (2.2) is arranged at the middle bottom position of the heating plate (2), the upper part of the sealing ring (2.2) is sealingly welded with the heating plate (2), and the lower part of the sealing ring (2.2) is sealingly connected with the bottom of the tank body (1) through a sealing ring.

5. The uniform evaporable vacuum oven according to claim 4, characterized in that: The inside of the area sealed by the sealing ring (2.2) communicates with the outside, and the inlet / outlet / oil port (5) and a thermal resistance probe (10) are arranged in the sealing area.

6. The uniform evaporable vacuum oven of claim 1, wherein: A pressure detection port (11) connected with a pressure gauge is arranged on the side of the tank body (1).

7. The uniform evaporable vacuum oven of claim 1, wherein: An outer shell (12) is sleeved on the outer surface of the tank body (1), and heat insulation cotton (13) is filled between the tank body (1) and the outer shell (12).

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