Semiconductor-grade electronic chemical sampling device

Abstract

The utility model discloses a semiconductor-grade electronic chemical sampling device, which is characterized in that a cabinet body is divided into three spaces, namely an acidic cabinet, an alkaline cabinet and a bottom cabinet, which respectively bear different tasks, so that personnel are prevented from being contacted with chemical liquid during sampling through a physical separation mode, and casualties caused by liquid splashing are also avoided; in addition, under the condition that the sampling operation safety of personnel is ensured, liquid in a sampling pipeline cannot be conflicted and polluted due to the fact that the acid cabinet and the alkaline cabinet are separated independently, the fan filter unit can ensure the cleanliness of air in the acid cabinet or the alkaline cabinet, the influence of the outside on a sample is reduced, the acid sampling tank and the alkaline sampling tank are PTFE tank bodies, and the sampling efficiency is improved. And the tank body design can avoid accidental splashing of the liquid during sampling, the acidic waste discharge pipeline and the alkaline waste discharge pipeline are connected with the corresponding sampling tanks, and the liquid dropped during sampling can be collected and discharged uniformly, so that the pollution is further reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of chemical sampling, in particular to a semiconductor grade electronic chemical sampling device. BACKGROUND

[0002] Electronic chemicals in semiconductors have extremely high requirements on product quality, and quality fluctuations in any process will have a great impact on the final product, so the designed raw material detection requirements and frequency are higher, and frequent sampling analysis is required, and protective articles such as clean clothes are often worn during manual sampling to reduce the impact on sample quality.

[0003] For example, a chemical sampling machine table for acid and alkali chemicals is disclosed in Chinese Patent No. CN207623057U, which includes a sampling box, a pipeline inlet joint, a sampling pipeline, a valve, a pipeline outlet joint, an exhaust pipe, an airlock, and a drainage pipeline. The front of the sampling box is provided with a sampling area. The pipeline inlet joint is fixed to the back of the sampling box, and the pipeline outlet joint is fixed in the sampling area. The two ends of the sampling pipeline are connected to the pipeline inlet joint and the pipeline outlet joint, respectively, and the valve is connected to the sampling pipeline. The bottom of the sampling area is fixed with a mesh plate, and the mesh plate is fixed below the collection funnel. The airlock is fixed to the top of the sampling box, one end of the exhaust pipe is connected to the side of the collection funnel, and the other end is connected to the airlock. The drainage pipeline is connected to the bottom of the collection funnel. By the above-mentioned mode, the utility model adopts a sealing design, and has leakage detection protection, and the operation is safe. The high-efficiency filtering device is arranged to ensure that there is no acid gas accumulation in the sampling box, thereby avoiding corrosion and pollution of the pipeline or wall surface and injury to personnel.

[0004] In summary, the existing sampling device and environment have many drawbacks. Due to the difference in sampling methods of different personnel, the detection results fluctuate, affecting the analysis of monitoring data. Sampling personnel will directly face high-risk chemicals, even if they wear face screens or gas masks, they cannot guarantee the essential safety of personnel, and acid and alkali liquids are not separated for sampling, which easily leads to sample contamination. UTILITY MODEL CONTENT

[0005] In view of the deficiencies of the prior art, the utility model provides a semiconductor grade electronic chemical sampling device to solve the above problems.

[0006] To achieve the above purpose, the utility model realizes the following technical solutions.

[0007] The utility model provides a kind of semiconductor grade electronic chemical sampling device, including cabinet, fan filter unit, sampling tank, sampling pipeline, waste pipeline, the cabinet includes acidic cabinet, alkaline cabinet, bottom cabinet, the acidic cabinet, alkaline cabinet both parallelly arranged in bottom cabinet top, the fan filter unit is respectively arranged in acidic cabinet, alkaline cabinet, the sampling tank includes acidic sampling tank, alkaline sampling tank, the acidic sampling tank is arranged in acidic cabinet, the alkaline sampling tank is arranged in alkaline cabinet, the sampling pipeline includes acidic sampling pipeline, alkaline sampling pipeline, the acidic sampling pipeline one end corresponds the top of acidic sampling tank and is arranged in acidic cabinet, the other end extends and is connected in the cabinet face of bottom cabinet, the alkaline sampling pipeline one end corresponds the top of alkaline sampling tank and is arranged in alkaline cabinet, the other end extends and is connected in the cabinet face of bottom cabinet, the waste pipeline is connected sampling tank, cabinet is divided into acidic cabinet, alkaline cabinet, bottom cabinet three spaces, and the task that each bears is different, avoid personnel to contact with chemical liquid when sampling by the form of physical separation, also avoid liquid splash and cause personnel casualty, in addition, under the condition that personnel sampling operation is safe, the separation independent of acidic cabinet and alkaline cabinet can make the liquid in sampling pipeline not conflict pollution, fan filter unit can ensure the cleanliness of air in acidic cabinet or alkaline cabinet, reduce the influence of outside to sample, acidic sampling tank, alkaline sampling tank are PTFE tank body, and tank body design can avoid the accidental spill of liquid when sampling, acidic waste pipeline, alkaline waste pipeline connect respective corresponding sampling tank, can collect liquid that sampling drops and is uniformly discharged, further reduce pollution.

[0008] Preferably, the waste pipeline includes acidic waste pipeline and alkaline waste pipeline.

[0009] Preferably, one end of the acidic waste pipeline is connected to the bottom of the acidic sampling tank, and the other end is correspondingly arranged in the bottom cabinet.

[0010] Preferably, one end of the alkaline waste pipeline is connected to the bottom of the alkaline sampling tank, and the other end is correspondingly arranged in the bottom cabinet.

[0011] Preferably, the fan filter unit is provided with an exhaust valve at the top of the cabinet.

[0012] Preferably, the acidic sampling tank is a PTFE tank body.

[0013] Preferably, the alkaline sampling tank is a PTFE tank body.

[0014] Preferably, the bottom cabinet is provided with a collection tank and a ball valve at the bottom, the collection tank corresponds to the opening positions of the acidic waste pipeline and the alkaline waste pipeline facing the bottom cabinet, and the ball valve is connected to the collection tank.

[0015] Preferably, a valve is provided on the acidic sampling pipeline.

[0016] Preferably, a valve is arranged on the alkali sampling pipeline.

[0017] Compared with the prior art, the utility model discloses a semiconductor grade electronic chemical sampling device, including cabinet, fan filter unit, sampling groove, sampling pipeline, waste pipeline, five mutual combination uses play a role,

[0018] ①Cabinet divides into acid cabinet, alkali cabinet, bottom cabinet three spaces, and the task that bears each is different, avoids personnel with chemical liquid contact when sampling through the form of physical separation, also avoided liquid splash and lead to personnel casualty, in addition under the condition of ensuring personnel sampling operation safety, the separation independent of acid cabinet and alkali cabinet can make the liquid in sampling pipeline not conflict pollution;

[0019] ②Fan filter unit can ensure the cleanliness of the air in acid cabinet or alkali cabinet, reduces the influence of outside to sample;

[0020] ③Acid sampling groove, alkali sampling groove are PTFE groove body, and groove body design can avoid liquid accidental splash when sampling;

[0021] ④Acid waste pipeline, alkali waste pipeline connects respective corresponding sampling groove, can collect the liquid that sampling drops and carries out waste uniformly, further reduces pollution. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is internal structure schematic view of semiconductor grade electronic chemical sampling device of the utility model;

[0023] Figure 2 It is internal structure schematic view of semiconductor grade electronic chemical sampling device of the utility model;

[0024] Figure 3 It is internal structure schematic view of semiconductor grade electronic chemical sampling device of the utility model;

[0025] Figure 4 It is internal structure schematic view of semiconductor grade electronic chemical sampling device of the utility model. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model.

[0027] The utility model provides a semiconductor grade electronic chemical sampling device, including cabinet 1, fan filter unit 2, sampling groove 3, sampling pipeline 4, waste pipeline 5, the cabinet 1 includes acidic cabinet 11, basic cabinet 12, bottom cabinet 13, the acidic cabinet 11, basic cabinet 12 both parallelly arranged above bottom cabinet 13, fan filter unit 2 is arranged in acidic cabinet 11, basic cabinet 12 respectively, sampling groove 3 includes acidic sampling groove 31, basic sampling groove 32, the acidic sampling groove 31 is arranged in acidic cabinet 11, the basic sampling groove 32 is arranged in basic cabinet 12, sampling pipeline 4 includes acidic sampling pipeline 41, basic sampling pipeline 42, the one end of acidic sampling pipeline 41 corresponds the setting in acidic cabinet 11 above acidic sampling groove 31, and the other end extends and is connected in the cabinet face of bottom cabinet 13, the one end of basic sampling pipeline 42 corresponds the setting in basic cabinet 12 above basic sampling groove 32, and the other end extends and is connected in the cabinet face of bottom cabinet 13, and waste pipeline 5 connects sampling groove 3.

[0028] The waste pipeline 5 includes acidic waste pipeline 51, basic waste pipeline 52, one end of the acidic waste pipeline 51 is connected with the bottom of the acidic sampling groove 31, and the other end is correspondingly arranged in the bottom cabinet 13, one end of the basic waste pipeline 52 is connected with the bottom of the basic sampling groove 32, and the other end is correspondingly arranged in the bottom cabinet 13, the fan filter unit 2 is provided with an exhaust valve 21 at the top of the cabinet 1, the acidic sampling groove 31 is a PTFE tank body, the basic sampling groove 32 is a PTFE tank body, the bottom of the bottom cabinet 13 is provided with a collecting tank 131 and a ball valve 132, the collecting tank 131 corresponds to the opening position of the acidic waste pipeline 51 and the basic waste pipeline 52 facing the bottom cabinet 13, the ball valve 132 is connected to the collecting tank 131, the acidic sampling pipeline 41 is provided with a valve, and the basic sampling pipeline 42 is provided with a valve.

[0029] Working mode: the operator wears clean protective measures such as dust-free gloves, masks, dust-free shoes, etc. Put the bottled liquid to be sampled into the acidic sampling groove 31 if it is an acidic liquid, and extend one end of the acidic sampling pipeline 41 into the bottled liquid to be sampled. The valve of the acidic sampling pipeline 41 starts to activate, and a certain amount of acidic liquid is sucked and falls into the outlet below. The sampling container is placed in the outlet of the acidic sampling pipeline 41 extending from the cabinet face of the bottom cabinet 13 in advance to wait for the falling liquid. If it is a basic liquid, it is put into the basic sampling groove 32, and one end of the basic sampling pipeline 42 is extended into the bottled liquid to be sampled. The valve of the basic sampling pipeline 42 starts to activate, and a certain amount of basic liquid is sucked and falls into the outlet below. The sampling container is placed in the outlet of the basic sampling pipeline 42 extending from the cabinet face of the bottom cabinet 13 in advance to wait for the falling liquid.

[0030] Since the acid tank 11 and the alkali tank 12 are relatively independent, when the acid tank 11 is opened, the corresponding fan filter unit 2 above continues to work until a period of time after the sampling is completed, and when the alkali tank 12 is opened, the corresponding fan filter unit 2 above continues to work until a period of time after the sampling is completed, The opening time of the fan filter unit 2 in the acid tank 11 and the alkali tank 12 can be determined according to the actual sampling liquid.

[0031] After the sampling is completed, the bottled liquid is taken out, and if there is liquid residue in the acid sampling tank 31 and the alkali sampling tank 32, it will fall into the collection tank 131 through the acid waste pipe 51 or the alkali waste pipe 52, and then the ball valve 132 can be opened to discharge the wastewater from the collection tank 131.

[0032] It should be noted that the terms used herein are only intended to describe specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and it should be understood that when the terms "comprise" and / or "include" are used in the specification, they refer to the presence of a feature, step, work, device, component and / or combination thereof.

[0033] It should be noted that the terms "first", "second" and the like in the specification and claims of the present application and the above-described drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0034] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A semiconductor grade electronic chemical sampling device, characterized by: The utility model provides a kind of acid and alkali sampling device, including cabinet (1), fan filter unit (2), sampling tank (3), sampling pipeline (4), waste pipeline (5), the cabinet (1) includes acidic cabinet (11), alkaline cabinet (12), bottom cabinet (13), the acidic cabinet (11), alkaline cabinet (12) are arranged side by side above bottom cabinet (13), the fan filter unit (2) is respectively arranged in acidic cabinet (11), alkaline cabinet (12), the sampling tank (3) includes acidic sampling tank (31), alkaline sampling tank (32), the acidic sampling tank (31) is arranged in acidic cabinet (11), the alkaline sampling tank (32) is arranged in alkaline cabinet (12), the sampling pipeline (4) includes acidic sampling pipeline (41), alkaline sampling pipeline (42), one end of the acidic sampling pipeline (41) corresponds the top of acidic sampling tank (31) and is arranged in acidic cabinet (11), the other end extends and is connected in the cabinet face of bottom cabinet (13), one end of the alkaline sampling pipeline (42) corresponds the top of alkaline sampling tank (32) and is arranged in alkaline cabinet (12), the other end extends and is connected in the cabinet face of bottom cabinet (13), the waste pipeline (5) is connected sampling tank (3).

2. The semiconductor grade electrochemicals sampling apparatus of claim 1, wherein: The waste pipeline (5) includes acidic waste pipeline (51), alkaline waste pipeline (52).

3. The semiconductor grade electrochemicals sampling apparatus of claim 2, wherein: One end of the acidic waste pipeline (51) is connected with the bottom of acidic sampling tank (31), and the other end is correspondingly arranged in the bottom cabinet (13).

4. The semiconductor grade electrochemicals sampling apparatus of claim 3, wherein: One end of the alkaline waste pipeline (52) is connected with the bottom of alkaline sampling tank (32), and the other end is correspondingly arranged in the bottom cabinet (13).

5. The semiconductor grade electrochemicals sampling apparatus of claim 1, wherein: The fan filter unit (2) is provided with an exhaust valve (21) at the top of the cabinet (1).

6. The semiconductor grade electrochemicals sampling apparatus of claim 1, wherein: The acidic sampling tank (31) is a PTFE tank body.

7. The semiconductor grade electrochemicals sampling apparatus of claim 1, wherein: The alkaline sampling tank (32) is a PTFE tank body.

8. The semiconductor grade electrochemicals sampling apparatus of claim 4, wherein: The bottom of the bottom cabinet (13) is provided with a collecting tank (131) and a ball valve (132), the collecting tank (131) corresponds to the opening position of the acidic waste pipeline (51) and the alkaline waste pipeline (52) facing the bottom cabinet (13), and the ball valve (132) is connected to the collecting tank (131).

9. The semiconductor grade electrochemicals sampling apparatus of claim 1, wherein: The acidic sampling pipeline (41) is provided with a valve.

10. The semiconductor grade electrochemicals sampling apparatus of claim 1, wherein: The alkaline sampling pipeline (42) is provided with a valve.

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