Tail gas treatment equipment for semiconductor chip welding

Abstract

The utility model discloses tail gas treatment equipment for semiconductor chip welding, which comprises a body, a detection device is arranged at the top of the body, a gas inlet is arranged at the bottom of the body, the output end of the gas inlet is connected to a cooling water tank, the output end of the cooling water tank is connected to a preliminary filtering device, and the preliminary filtering device is connected to a secondary filtering device. The output end of the preliminary filtering device is connected to the fine filtering device, the output end of the fine filtering device is connected to the outlet filtering water tank, and the output end of the outlet filtering water tank is provided with an air outlet in the top of the body. The device is simple in structure, simple treatment operation of processing tail gas can be achieved, the multiple filtering devices are good in filtering effect, meanwhile, the detection device on the top detects the content of harmful substances in gas in real time, and it is guaranteed that the filtered gas meets the emission standard.

Description

Technical Field

[0001] This utility model relates to the field of waste gas treatment technology, specifically to a tail gas treatment device for semiconductor chip welding. Background Technology

[0002] A semiconductor is a material whose conductivity at room temperature falls between that of a conductor and an insulator. Common semiconductor materials include silicon, germanium, and gallium arsenide. Semiconductors can be broadly classified into elemental semiconductors and compound semiconductors based on their chemical composition. They can also be classified into N-type and P-type semiconductors based on the presence of impurities. The properties of semiconductors include optical and transport properties. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, and high-power power conversion, among other fields. For example, diodes are devices made using semiconductors.

[0003] Semiconductors require multiple soldering operations during processing, which generate waste gases that cannot be directly discharged and therefore require equipment for treatment. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a tail gas treatment device for semiconductor chip welding. It has a simple structure and can realize simple treatment operation of processing tail gas. The multi-stage filtration device has a good filtration effect, and the detection device at the top can detect the content of harmful substances in the gas in real time to ensure that the filtered gas meets the emission standards.

[0005] To solve the above-mentioned technical problems, this utility model provides a tail gas treatment device for semiconductor chip welding, including a main body, a detection device on the top of the main body, an air inlet on the bottom of the main body, an output end of the air inlet connected to a cooling water tank, an output end of the cooling water tank connected to a preliminary filtration device, an output end of the preliminary filtration device connected to a fine filtration device, an output end of the fine filtration device connected to an outlet filtration water tank, and an air outlet on the top of the outlet filtration water tank.

[0006] Furthermore, a connecting pipe is provided between adjacent devices such as the cooling water tank, the preliminary filtration device, the fine filtration device, and the filter water tank, and an on / off valve and a flow meter are provided on the connecting pipe.

[0007] Furthermore, a collection bucket is connected to the bottom of the filtered water tank.

[0008] Furthermore, the testing equipment is connected to the cooling water tank, the preliminary filtration device, the fine filtration device, and the filtration water tank, respectively.

[0009] Furthermore, a heat dissipation plate is provided on the top side of the body near the detection device.

[0010] Furthermore, a lifting ring is provided at the top of the main body.

[0011] Furthermore, a pressure pump is installed on one side of the cooling water tank.

[0012] The beneficial effects of this utility model are as follows: When using this device, welding exhaust gas is introduced into the entire equipment through the air inlet. First, the gas is cooled by a cooling water tank to facilitate the next operation. After cooling, the gas enters the preliminary filtration device, which can use simple filter materials such as activated carbon to adsorb large particles in the exhaust gas. After the preliminary filtration is completed, the gas enters the fine filtration device, which can use ceramic filter equipment to adsorb and filter small particles in the exhaust gas. Finally, the gas enters the outlet filter water tank, which removes harmful chemical gases such as sulfides from the exhaust gas. Finally, the gas is discharged through the air outlet. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model (part of the outer shell has been removed to make the internal structure easier to see).

[0014] Figure 2 This is a schematic diagram of the testing equipment of this utility model.

[0015] The following are the labels in the diagram: 1. Main body; 2. Detection equipment; 3. Air inlet; 4. Cooling water tank; 5. Preliminary filtration device; 6. Fine filtration device; 7. Outlet filter tank; 8. Air outlet; 9. Connecting pipe; 10. On / off valve; 11. Flow meter; 12. Collection bucket; 13. Heat sink; 14. Lifting ring; 15. Pressure pump. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0017] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0019] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0020] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0021] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0022] Reference Figures 1 to 2 As shown, an embodiment of the exhaust gas treatment equipment for semiconductor chip welding of this utility model includes a body 1, a detection device 2 is provided on the top of the body 1, an air inlet 3 is provided on the bottom of the body 1, the output end of the air inlet 3 is connected to a cooling water tank 4, the output end of the cooling water tank 4 is connected to a preliminary filter device 5, the output end of the preliminary filter device 5 is connected to a fine filter device 6, the output end of the fine filter device 6 is connected to an outlet filter water tank 7, and the output end of the outlet filter water tank 7 is provided with an air outlet 8 on the top of the body 1.

[0023] During use, welding exhaust gas is introduced into the entire equipment through the air inlet 3. First, the gas is cooled by the cooling water tank 4 to facilitate the next operation. After cooling, the gas enters the preliminary filtration device 5, which can use simple filter materials such as activated carbon to adsorb large particles in the exhaust gas. After the preliminary filtration, the gas enters the fine filtration device 6, which can use ceramic filter equipment to adsorb and filter small particles in the exhaust gas. Finally, the gas enters the outlet filtration water tank 7, which removes harmful chemical gases such as sulfides from the exhaust gas. Finally, the gas is discharged through the air outlet 8. At the same time, the detection device 2 monitors in real time the content of harmful substances in the gas filtered by each component and whether it meets the emission standards.

[0024] The cooling water tank 4, the preliminary filtration device 5, the fine filtration device 6, and the filter water tank are connected by a connecting pipe 9. The connecting pipe 9 is equipped with an on / off valve 10 and a flow meter 11. The on / off valve 10 controls the flow between the pipes, and the flow meter 11 monitors the gas flow rate. A collection bucket 12 is connected to the bottom of the filter water tank, allowing the filtered liquid to be discharged when not in use. A detection device 2 is connected to the cooling water tank 4, the preliminary filtration device 5, the fine filtration device 6, and the filter water tank, respectively, to monitor the content of harmful substances in the filtered gas in real time, facilitating the adjustment of the on / off valve 10 and the filtration time. A heat dissipation plate 13 is located on the top side of the main body 1 near the detection device 2. A lifting ring 14 is located on the top of the main body 1 for easy hoisting and relocation. A pressure pump 15 is located on one side of the cooling water tank 4 for replacing the cooling water.

[0025] The above-described embodiments are merely preferred embodiments provided to fully illustrate the present invention, and the scope of protection of the present invention is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present invention are all within the scope of protection of the present invention. The scope of protection of the present invention is defined by the claims.

Claims

1. A tail gas treatment device for semiconductor chip welding, characterized in that, The device includes a main body (1), a detection device (2) is provided on the top of the main body (1), an air inlet (3) is provided on the bottom of the main body (1), the output end of the air inlet (3) is connected to a cooling water tank (4), the output end of the cooling water tank (4) is connected to a preliminary filter device (5), the output end of the preliminary filter device (5) is connected to a fine filter device (6), the output end of the fine filter device (6) is connected to an outlet filter water tank (7), and the output end of the outlet filter water tank (7) has an air outlet (8) provided on the top of the main body (1).

2. The exhaust gas treatment equipment for semiconductor chip welding as described in claim 1, characterized in that, The cooling water tank (4), the preliminary filtration device (5), the fine filtration device (6), and the adjacent equipment of the filter water tank are connected by a connecting pipe (9), and the connecting pipe (9) is equipped with an on / off valve (10) and a flow meter (11).

3. The exhaust gas treatment equipment for semiconductor chip welding as described in claim 1, characterized in that, A collection bucket (12) is connected to the bottom of the filter water tank.

4. The exhaust gas treatment equipment for semiconductor chip welding as described in claim 1, characterized in that, The detection device (2) is connected to the cooling water tank (4), the preliminary filtration device (5), the fine filtration device (6), and the filter water tank, respectively.

5. The exhaust gas treatment equipment for semiconductor chip welding as described in claim 1, characterized in that, A heat sink (13) is provided on the top side of the main body (1) near the detection device (2).

6. The exhaust gas treatment equipment for semiconductor chip welding as described in claim 1, characterized in that, A lifting ring (14) is provided at the top of the main body (1).

7. The exhaust gas treatment equipment for semiconductor chip welding as described in claim 1, characterized in that, A pressure pump (15) is installed on one side of the cooling water tank (4).

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