Evaporation coating device

Abstract

The utility model relates to the field of evaporation coating, in particular to an evaporation coating device, which comprises an evaporation coating unit, a vacuum chamber and an evaporation coating unit, the evaporation coating unit enables evaporation substances evaporated from an evaporation coating source to be subjected to evaporation coating on a base film, and the vacuum chamber is used for setting a space for arranging the evaporation coating source and the base film and can keep the space in a vacuum state. And the laser evaporation unit is positioned in the vacuum chamber and is used for emitting high-power laser to evaporate the evaporation coating source. According to the device, a high-power laser beam is emitted through a laser emitter and is aligned with the surface of an evaporation coating source on a tray to perform scanning type irradiation, the surface layer of the evaporation coating source is evaporated through the laser beam, and an evaporation substance is deposited on the surface of a base film to form a thin film. According to the evaporation mode, resistance heating is not needed, splashing generated by corrosion of a resistance material and mixing of molten aluminum is reduced, poor products generated by resistance fluctuation in long-time production are reduced, and the yield of the products is greatly increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of evaporation coating, especially a kind of evaporation coating device. BACKGROUND

[0002] At present, when preparing thin film material on organic material (substrate), usually adopt winding PVD (physical vapor deposition) technology. PVD technology is under vacuum condition, through physical method to make material deposition on the surface of the plated workpiece, form thin film. PVD technology is mainly divided into the following three types: vacuum evaporation coating, vacuum sputtering coating, vacuum ion coating. Corresponding vacuum coating equipment includes: vacuum evaporation coating machine, vacuum sputtering coating machine, vacuum ion coating machine. In order to improve the coating efficiency, the existing process equipment mostly uses evaporation boat resistance evaporation method to coat substrate, to meet the process requirements of thin film preparation.

[0003] Conventional vacuum evaporation equipment is provided with a plurality of resistance heating evaporation boats, which continuously convey aluminum wire in the evaporation boat and make it heat and melt evaporation to form an evaporation source. However, this evaporation method has the following problems: the evaporation resistance (evaporation boat) is often corroded with the production time, the evaporation power changes, the aluminum splashes cause product defects, the evaporation boat consumption is large, and the production cost is high. UTILITY MODEL CONTENTS

[0004] Therefore, the technical problem to be solved by the utility model is the problems of aluminum splashing, large evaporation boat consumption and high production cost existing in the existing evaporation boat resistance evaporation method.

[0005] The above technical problem is solved by the following technical scheme: the utility model provides an evaporation coating device, which comprises,

[0006] An evaporation coating unit, which evaporates the evaporation material evaporated from the evaporation coating source on the base film;

[0007] A vacuum chamber, which defines a space for arranging the evaporation coating source and the base film and can maintain the space as vacuum;

[0008] A laser evaporation unit, comprising a laser emitter arranged in the vacuum chamber and inclined, so that the laser emitted by the laser emitter is inclined to irradiate the top of the evaporation coating source, the laser emitter is used to emit high-power laser to evaporate the evaporation coating source, and the laser emitter is scanned to irradiate the evaporation coating source by adjusting mechanism.

[0009] In a preferred embodiment of the evaporation coating device, the adjusting mechanism comprises a vertical electric slide rail arranged in the vacuum chamber, a vertical slide block arranged on the vertical electric slide rail, a horizontal electric slide rail arranged on the vertical slide block, and a horizontal slide block arranged on the horizontal electric slide rail, and the laser emitter is fixedly arranged on the horizontal slide block.

[0010] In a preferred embodiment of the evaporation coating device, the vertical electric slide rail is arranged on both sides of the inner cavity of the vacuum chamber.

[0011] In a preferred embodiment of the evaporation coating device, the moving direction of the vertical slide block is the same as the normal direction of the bottom of the vacuum chamber, the moving direction of the horizontal slide block is the same as the normal direction of the front of the vacuum chamber, and the horizontal slide block is arranged with a plurality of horizontal slide blocks and is equidistantly distributed on the horizontal electric slide rail.

[0012] In a preferred embodiment of the evaporation coating device, the evaporation coating unit comprises a telescopic rod arranged at the bottom of the vacuum chamber, a tray arranged on the telescopic rod, and an evaporation coating source arranged in the tray.

[0013] In a preferred embodiment of the evaporation coating device, the telescopic rod is located at the center of the bottom of the vacuum chamber, and the telescopic direction of the telescopic rod is the same as the normal direction of the bottom of the vacuum chamber.

[0014] In a preferred embodiment of the evaporation coating device, the evaporation coating source is located below the laser emitter.

[0015] In a preferred embodiment of the evaporation coating device, the evaporation coating unit further comprises a conveying roller arranged in the vacuum chamber, a winding roller arranged in the vacuum chamber, and a cooling roller arranged in the vacuum chamber.

[0016] In a preferred embodiment of the evaporation coating device, the cooling roller is located between the conveying roller and the winding roller, the cooling roller is located below the conveying roller and the winding roller, and the cooling roller is located above the evaporation coating source.

[0017] In a preferred embodiment of the evaporation coating device, the adjusting mechanism comprises a horizontal electric slide rail arranged on both sides of the inner cavity of the vacuum chamber, a horizontal slide block arranged on the horizontal electric slide rail, a rotating support arranged on the horizontal slide block, and a rotating shaft arranged on the rotating support, the laser emitter is fixedly arranged on the rotating shaft, and the rotating shaft is driven by a servo motor.

[0018] The device has the advantages that the laser emitter emits a high-power laser beam, the evaporation-coating source surface on the tray is irradiated in a scanning mode, the laser beam evaporates the surface layer of the evaporation-coating source, the evaporated substance is deposited on the surface of the base film to form a film, the evaporation mode does not need resistance heating, splashing caused by mixing of resistance material corrosion and aluminum liquid is reduced, product defects caused by resistance fluctuation during long-time production are reduced, and the yield of products is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings of the embodiments of the present application will be briefly introduced below. Obviously, the drawings described below only relate to some embodiments of the present application, and are not a limitation on the present application. Among them:

[0020] Figure 1 The overall structure of the evaporation-coating device is shown in the schematic diagram.

[0021] Figure 2 The structure of the evaporation-coating unit is shown in the schematic diagram.

[0022] Figure 3 The top view of the vacuum chamber is shown in the schematic diagram.

[0023] Figure 4 The structure of the laser evaporation unit is shown in the schematic diagram.

[0024] Figure 5 The schematic diagram of the laser emitter irradiating the edge of the evaporation-coating source is shown.

[0025] Figure 6 The schematic diagram of the laser emitter irradiating the middle part of the evaporation-coating source is shown.

[0026] Figure 7 The spacing diagram of the laser emitter is shown.

[0027] Figure 8 Another adjustment mode of the laser emitter is shown. DETAILED DESCRIPTION

[0028] In order to make those skilled in the art better understand the present application, the present application will be further described in detail below in combination with specific embodiments and drawings.

[0029] The terms used in the present utility model are those general terms currently widely used in the art in consideration of the functions regarding the present utility model, but the terms can be changed according to the intention, precedent or new technology of the person skilled in the art. In addition, specific terms can be selected by the applicant, and in this case, the detailed meaning thereof will be described in the detailed description of the present utility model. Therefore, the terms used in the specification should not be understood as mere names, but based on the meaning of the terms and the overall description of the present utility model.

[0030] Referring to Figure 1 The present embodiment provides an evaporation coating device, comprising,

[0031] The evaporation coating unit 100 evaporates the evaporation material 101a evaporated from the evaporation coating source 101 on the base film 102. The vacuum chamber 200 defines a space for arranging the above-mentioned evaporation coating source 101 and the above-mentioned base film 102 and can maintain the space as vacuum. The laser evaporation unit 300 includes a laser emitter 305 arranged inside the vacuum chamber 200 and arranged obliquely, so that the laser emitted by the laser emitter 305 is obliquely irradiated on the top of the evaporation coating source 101, the laser emitter 305 is used to emit high-power laser to evaporate the evaporation coating source 101, and the laser emitter 305 is scannedly irradiated on the evaporation coating source 101 by the adjusting mechanism 306.

[0032] In the Figure 1 In the evaporation coating device, the vacuum chamber 200 is composed of metal materials such as aluminum, stainless steel or steel materials.

[0033] In the vacuum chamber 200, the inner wall part defines a vacuum space in the inside of the vacuum chamber 200, and the evaporation coating source 101, the base film 102 and the laser evaporation unit 300 are arranged in the vacuum space. Moreover, part of the side part of the vacuum chamber 200 is connected with the exhaust system (not shown in the figure), and the vacuum chamber 200 can be maintained as vacuum by exhausting the gas in the vacuum chamber 200 to the outside of the vacuum chamber 200. Moreover, the exhaust system is a vacuum exhaust system including a rotary pump as a sub-exhaust device (for example, rough exhaust) and a turbo molecular pump as a main exhaust device (for example, main exhaust).

[0034] The evaporation coating source 101 is a metal block, generally an aluminum block, and is placed at the bottom of the vacuum chamber 200.

[0035] In the use process, the evaporation coating source 101 is placed in the vacuum chamber 200, and the high-power laser emitted by the laser evaporation unit 300 is irradiated on the evaporation coating source 101 to evaporate it, and the evaporation material 101a is deposited on the surface of the base film 102 to form a thin film.

[0036] Reference Figure 4 The adjustment mechanism 306 includes a vertical electric slide rail 301 disposed in the vacuum chamber 200, a vertical slider 302 disposed on the vertical electric slide rail 301, a horizontal electric slide rail 303 disposed on the vertical slider 302, a horizontal slider 304 disposed on the horizontal electric slide rail 303, and the laser emitter 305 is obliquely fixedly disposed on the horizontal slider 304.

[0037] The vertical electric slide rail 301 is used to adjust the height of the horizontal electric slide rail 303, thereby adjusting the height of the laser emitter 305. When the height of the laser emitter 305 changes, it allows the laser emitter 305 to irradiate different positions of the evaporation coating source 101. The horizontal electric slide rail 303 allows the laser emitter 305 to move along the front normal direction (i.e., Figure 3 The laser emitter 305 moves in the direction indicated by the arrow Z, so that it can irradiate different positions of the evaporation coating source 101.

[0038] Reference Figure 2 and Figure 4 The vertical electric slide rail 301 is arranged on both sides of the inner cavity of the vacuum chamber 200.

[0039] The vertical electric slide rails 301 are installed on both sides of the inner wall of the vacuum chamber 200, with two on one side, to ensure the stability of the horizontal electric slide rails 303. The vertical electric slide rails 301 are used not only to adjust the height of the laser emitter 305 so that the height of the laser emitter 305 from the evaporation coating source 101 is constant, ensuring that the laser emitter 305 can irradiate the evaporation coating source 101, but also to enable the laser emitter 305 to perform scanning operations during the evaporation operation.

[0040] Two horizontal electric slide rails 303 are provided and positioned on both sides of the vacuum chamber 200. This ensures that the laser emitter 305 is located on both sides of the inner cavity of the vacuum chamber 200, preventing the evaporated material 101a from being deposited onto the laser emitter 305. The horizontal electric slide rails 303 are used for the horizontal movement of the laser emitter 305, allowing the laser emitter 305 to perform scanning operations during evaporation. The horizontal electric slide rails 303 enable the laser emitter 305 to emit laser light from a point to a line, and in conjunction with the vertical electric slide rails 301, to emit laser light from a line to a surface, thus enabling the laser emitter 305 to scan and irradiate the surface of the evaporation coating source 101.

[0041] The direction of movement of the vertical slider 302 is parallel to the normal direction of the bottom of the vacuum chamber 200 (i.e., Figure 2The direction of movement of the transverse slider 304 is the same as that indicated by the middle arrow line Y, and the direction of movement of the transverse slider 304 is the normal direction of the front of the vacuum chamber 200 (i.e., Figure 3 The direction indicated by the arrow Z is the same, and several horizontal sliders 304 are provided and are equidistantly distributed on the horizontal electric slide rail 303.

[0042] Each vertical electric slide rail 301 is equipped with a vertical slider 302 for mounting a horizontal electric slide rail 303. The vertical slider 302 drives the horizontal electric slide rail 303 to move the laser emitter 305 along the normal direction of the bottom (i.e., Figure 2 The laser emitter 305 can be moved (in the direction indicated by the middle arrow Y) so that the top of the evaporation coating source 101 can be aligned with the normal direction of the sidewall surface (i.e., Figure 5 The laser emitter 305 is scanned and evaporated in the direction indicated by the arrow N. The horizontal slider 304 drives the laser emitter 305 along the normal direction of the front of the vacuum chamber 200 (i.e., Figure 3 The laser emitter 305 is moved (in the direction indicated by the middle arrow Z) so that the top of the evaporation coating source 101 can be aligned with the normal direction of the front surface of the vacuum chamber 200 (i.e., ...). Figure 3 The evaporation is scanned in the direction indicated by the middle arrow (Z).

[0043] Several horizontal sliders 304 are equidistantly distributed on the horizontal electric slide rail 303. Similarly, several laser emitters 305 are fixedly mounted on the horizontal sliders 304. The multiple laser emitters 305 improve the evaporation efficiency of the device. The equidistant arrangement of the laser emitters 305 on the horizontal electric slide rail 303 via the horizontal sliders 304 ensures that the evaporation coating source 101 is heated evenly when the laser emitters 305 move laterally. If they were not equidistantly arranged, repeated irradiation would occur during the lateral movement of the laser emitters 305, affecting the evaporation effect of the evaporation coating source 101.

[0044] Reference Figure 7 Multiple laser emitters 305 are formed with a spacing n of, for example, about 3 to 5 cm.

[0045] Among them, the laser emitter 305 at the far end is on the same vertical plane as the edge of the evaporation coating source 101. After the laser emitter 305 moves a distance of n, the laser emitter 305 at the other end is on the same vertical plane as the edge of the evaporation coating source 101, so that the laser emitter 305 can evaporate the evaporation coating source 101 more comprehensively.

[0046] Reference Figure 2The evaporation coating unit 100 includes a telescopic rod 103 disposed at the bottom of the vacuum chamber 200, a tray 104 disposed on the telescopic rod 103, and an evaporation coating source 101 disposed in the tray 104.

[0047] The height of the tray 104 can be adjusted via the telescopic rod 103, thereby regulating the evaporation distance between the evaporation coating source 101 and the base film 102 to ensure evaporation uniformity. The stability and consistency of the evaporation coating are controlled by regulating the migration distance of the evaporating material 101a. Because the temperature of the molten aluminum after laser melting and evaporation of the coating source 101 (which can be an aluminum ingot in this embodiment) is difficult to maintain at a constant value, laser power control would have a lag, while directly controlling the aluminum vapor migration distance is more timely and controllable. When the migration distance of the evaporating material 101a is controlled via the telescopic rod 103, the vertical electric slide rail 301 moves with the telescopic rod 103, ensuring that the laser emitter 305 and the evaporation coating source 101 remain relatively stationary when the telescopic rod 103 moves, thus ensuring normal operation of the device.

[0048] During use, the evaporation coating source 101 is placed on the tray 104. The telescopic rod 103 is activated to adjust the distance between the evaporation coating source 101 and the base film 102. The vertical electric slide rail 301 is activated to adjust the vertical distance between the laser emitter 305 and the evaporation coating source 101, so that the laser emitter 305 irradiates both sides of the evaporation coating source 101. The laser emitter 305 is then activated to perform the evaporation operation. The horizontal electric slide rail 303 is activated to move the laser emitter 305 from the dotted line. When the horizontal electric slide rail 303 moves the laser emitter 305 a distance n (e.g., ... Figure 7 After (as shown), the vertical electric slide rail 301 drives the laser emitter 305 to move upward by the distance of one laser unit, so that the laser emitter 305 moves from line to surface, thereby enabling the laser emitter 305 to scan and irradiate the surface of the evaporation coating source 101.

[0049] Reference Figure 2 The telescopic rod 103 is located at the center of the bottom of the vacuum chamber 200, and the telescopic direction of the telescopic rod 103 is perpendicular to the normal direction of the bottom of the vacuum chamber 200 (i.e., Figure 2 (The direction indicated by the middle arrow line Y) is the same.

[0050] The extension and retraction direction of the telescopic rod 103 is parallel to the normal direction of the bottom of the vacuum chamber 200 (i.e., Figure 2 (The direction indicated by the middle arrow line Y) is the same, which can adjust the distance between the evaporation coating source 101 and the base film 102.

[0051] The telescopic rod 103 is located at the center of the bottom of the vacuum chamber 200, so that the distance between the evaporation coating source 101 and the laser emitters 305 on both sides is equal. When the evaporation coating source 101 evaporates, it can ensure that the vertical movement parameters of the laser emitters 305 on both sides are the same, which facilitates the operation of the device.

[0052] Reference Figure 5 The evaporation coating source 101 is located below the laser emitter 305. The laser emitter 305 is disposed inside the vacuum chamber 200 and is tilted so that the laser emitted by the laser emitter 305 is tilted to irradiate the top of the evaporation coating source 101.

[0053] like Figure 5 As shown, the laser emitter 305 is obliquely fixedly mounted on the transverse slider 304 by a fixed bracket, and the laser emitter 305 is along the normal direction relative to the side wall of the vacuum chamber 200 (i.e., Figure 5 The direction indicated by the middle arrow N) is offset downwards by only an angle α (i.e., Figure 5 The laser beam is emitted in the direction indicated by arrow F in the image. (Refer to...) Figure 6 The laser emitted by the laser emitter 305 maintains a constant angle. The height of the laser emitter 305 is adjusted via the vertical electric slide rail 301, causing the laser emitted by the laser emitter 305 to move from the edge of the evaporation coating source 101 to the center of the evaporation coating source 101. This achieves the laser beam tracing along the normal direction of the side wall of the vacuum chamber 200 (i.e., ...). Figure 6 The top of the evaporation coating source 101 is scanned in the direction indicated by the middle arrow line N.

[0054] Angle α is set to the direction of the normal to the side wall of vacuum chamber 200 (i.e., Figure 5 The direction indicated by the middle arrow N) and the angle formed by the direction from the laser emitter 305 toward the evaporation coating source 101. In this embodiment, angle α is set to the direction of the normal to the side wall of the vacuum chamber 200 (i.e., Figure 5 The angle α is the direction indicated by the arrow N and the angle formed by the direction of the light source point emitted from the laser emitter 305 toward the evaporation coating source 101. The angle α is set the same for multiple laser emitters 305.

[0055] The evaporation coating unit 100 further includes a conveying roller 105 disposed in the vacuum chamber 200, a take-up roller 106 disposed in the vacuum chamber 200, and a cooling roller 107 disposed in the vacuum chamber 200.

[0056] Among them, the conveying roller 105 is used to convey the base film 102, the winding roller 106 is used to wind up the coated base film 102, and the cooling roller 107 is used to increase the adhesion speed of the evaporated substance 101a on the base film 102.

[0057] The cooling roller 107 is located between the conveying roller 105 and the take-up roller 106, below the conveying roller 105 and the take-up roller 106, and above the evaporation coating source 101.

[0058] The cooling roller 107 is located below the conveying roller 105 and the winding roller 106, increasing the contact area and contact pressure between the base film 102 and the cooling roller 107, so that the cooling roller 107 can better cool the evaporated material 101a. The cooling roller 107 is located above the evaporation coating source 101, so that the evaporated material 101a can be better deposited on the surface of the base film 102.

[0059] Laser emitter 305 uses ultraviolet laser or green laser.

[0060] In this process, the evaporation coating source 101 is typically made of aluminum, whose evaporation temperature is approximately 2519℃. During laser evaporation, the temperature needs to be raised to near or above this level. The absorption rate of aluminum to laser light depends on the wavelength of the laser. For infrared lasers, aluminum has a lower absorption rate, thus requiring higher power to achieve the same evaporation effect. For ultraviolet or green lasers, aluminum has a higher absorption rate; therefore, using an ultraviolet or green laser as the laser emitter 3 allows for the use of relatively lower power, reducing coating costs.

[0061] Below, based on Figure 8 Different implementations of the adjustment mechanism 306 are described.

[0062] The adjustment mechanism 306 includes a transverse electric slide rail 303 disposed on both sides of the inner cavity of the vacuum chamber 200, a transverse slider 304 disposed on the transverse electric slide rail 303, a rotating bracket 307 disposed on the transverse slider 304, a rotating shaft 308 disposed on the rotating bracket 307, and the laser emitter 305 is obliquely fixedly disposed on the rotating shaft 308, which is driven by a servo motor.

[0063] Among them, the servo motor drives the rotating shaft 308 to make the laser emitter 305 downward (i.e., Figure 8 (in the direction indicated by the middle arrow M) so that the laser emitter 305 can rotate along the normal direction of the sidewall surface of the top of the evaporation coating source 101 (i.e., Figure 8 The laser emitter 305 is scanned and evaporated in the direction indicated by the arrow N. The horizontal slider 304 drives the laser emitter 305 along the normal direction of the front of the vacuum chamber 200 (i.e., Figure 3 The laser emitter 305 is moved (in the direction indicated by the middle arrow Z) so that the top of the evaporation coating source 101 can be aligned with the normal direction of the front surface of the vacuum chamber 200 (i.e., ...). Figure 3The laser emitter 305 scans the top of the evaporation coating source 101 in the direction indicated by the arrow Z. By cooperating with the rotating shaft 308 and the transverse electric slide rail 303, the laser emitter 305 can scan the top of the evaporation coating source 101, making the evaporation coating source 101 more uniform and comprehensive.

[0064] During use, the servo motor is started to drive the rotating shaft 308, causing the laser emitter 305 to rotate, thereby irradiating both sides of the evaporation coating source 101 with the laser emitter 305. The laser emitter 305 is then started to perform the evaporation operation. The transverse electric slide rail 303 is activated to move the laser emitter 305 from the dotted line. When the transverse electric slide rail 303 moves the laser emitter 305 a distance n (e.g., ... Figure 7 After (as shown), the servo motor drives the rotating shaft 308 to rotate the laser emitter 305, causing the laser emitted by the laser emitter 305 to move a distance of one laser unit, so that the laser emitter 305 moves from line to surface, thereby enabling the laser emitter 305 to scan and irradiate the surface of the evaporation coating source 101.

[0065] This utility model also provides a method for evaporation coating, specifically:

[0066] The laser emitter 305 is mounted in the vacuum chamber 200 using a fixed bracket, ensuring that its relative position to the evaporation coating source 101 is correct.

[0067] Load the evaporation coating source 101 onto the tray 104, ensuring that the surface of the evaporation coating source 101 is flat and clean.

[0068] The base film 102 is placed on the conveyor roller 105 so that it can be smoothly conveyed through the conveyor roller 105.

[0069] The laser emitter 305 is activated to emit a high-power laser beam, which is then scanned and irradiated onto the surface of the evaporation coating source 101 on the tray 104.

[0070] The laser beam causes the surface layer of the evaporation coating source 101 to evaporate, and the evaporated material 101a is deposited on the surface of the base film 102 to form a thin film.

[0071] During the evaporation process, the position of the tray 104 is controlled by the telescopic rod 103 to ensure that the distance between the evaporation coating source 101 and the base film 102 remains consistent, thereby ensuring evaporation uniformity.

[0072] While conveying the base film 102, the conveying roller 105 cools the evaporated material 101a on the base film 102.

[0073] As the base film 102 is continuously transported, the entire film preparation process is completed.

[0074] According to process requirements, adjust the power and scanning speed of the laser emitter 305 and the distance between the evaporation coating source 101 and the base film 102 to achieve the best evaporation effect and product quality.

[0075] Finally, it should be noted that the methods and devices described in detail above are merely embodiments, and those skilled in the art can modify these embodiments in different ways as long as they do not depart from the scope of this utility model.

Claims

1. An evaporation coating apparatus, characterized in that: include, An evaporation coating unit (100) is used to evaporate and coat an evaporation material (101a) evaporated from an evaporation coating source (101) onto a base film (102). A vacuum chamber (200) is defined as a space for arranging the above-mentioned evaporation coating source (101) and the above-mentioned base film (102) and is capable of maintaining the space as a vacuum; The laser evaporation unit (300) includes a laser emitter (305), which is disposed in a vacuum chamber (200) and is tilted so that the laser emitted by the laser emitter (305) is tilted to irradiate the top of the evaporation coating source (101). The laser emitter (305) is used to emit a high-power laser to evaporate the evaporation coating source (101). The laser emitter (305) performs scanning irradiation on the evaporation coating source (101) through an adjustment mechanism (306).

2. The evaporation coating apparatus according to claim 1, characterized in that: The adjustment mechanism (306) includes a vertical electric slide rail (301) disposed in the vacuum chamber (200), a vertical slider (302) disposed on the vertical electric slide rail (301), a horizontal electric slide rail (303) disposed on the vertical slider (302), a horizontal slider (304) disposed on the horizontal electric slide rail (303), and the laser emitter (305) is obliquely fixedly disposed on the horizontal slider (304).

3. The evaporation coating apparatus according to claim 2, characterized in that: The vertical electric slide rail (301) is located on both sides of the inner cavity of the vacuum chamber (200).

4. The evaporation coating apparatus according to claim 2 or 3, characterized in that: The vertical slider (302) moves in the same direction as the normal to the bottom of the vacuum chamber (200), and the horizontal slider (304) moves in the same direction as the normal to the front of the vacuum chamber (200). Several horizontal sliders (304) are provided and are equidistantly distributed on the horizontal electric slide rail (303).

5. The evaporation coating apparatus according to any one of claims 1 to 3, characterized in that: The evaporation coating unit (100) includes a telescopic rod (103) disposed at the bottom of the vacuum chamber (200), a tray (104) disposed on the telescopic rod (103), and an evaporation coating source (101) disposed in the tray (104).

6. The evaporation coating apparatus according to claim 5, characterized in that: The telescopic rod (103) is located at the center of the bottom of the vacuum chamber (200), and the telescopic direction of the telescopic rod (103) is the same as the normal direction of the bottom of the vacuum chamber (200).

7. The evaporation coating apparatus according to claim 2 or 6, characterized in that: The evaporation coating source (101) is located below the laser emitter (305).

8. The evaporation coating apparatus according to claim 5, characterized in that: The evaporation coating unit (100) further includes a conveying roller (105) disposed in the vacuum chamber (200), a take-up roller (106) disposed in the vacuum chamber (200), and a cooling roller (107) disposed in the vacuum chamber (200).

9. The evaporation coating apparatus according to claim 8, characterized in that: The cooling roller (107) is located between the conveying roller (105) and the take-up roller (106), the cooling roller (107) is located below the conveying roller (105) and the take-up roller (106), and the cooling roller (107) is located above the evaporation coating source (101).

10. The evaporation coating apparatus according to claim 1, characterized in that: The adjustment mechanism (306) includes a transverse electric slide rail (303) disposed on both sides of the inner cavity of the vacuum chamber (200), a transverse slider (304) disposed on the transverse electric slide rail (303), a rotating bracket (307) disposed on the transverse slider (304), and a rotating shaft (308) disposed on the rotating bracket (307). The laser emitter (305) is tilted and fixedly disposed on the rotating shaft (308), and the rotating shaft (308) is driven by a servo motor.

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